JetTM.cs 35 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.RT.Log;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.Device.Bases;
  9. using MECF.Framework.Common.Equipment;
  10. using System;
  11. using System.Collections.Generic;
  12. using Venus_Core;
  13. using Venus_RT.Modules;
  14. using Venus_RT.Modules.PMs;
  15. using Venus_RT.Devices.IODevices;
  16. using Venus_RT.Devices.EPD;
  17. using Aitex.Core.RT.DataCenter;
  18. using Aitex.Core.RT.OperationCenter;
  19. using MECF.Framework.Common.SubstrateTrackings;
  20. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  21. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
  22. using IoMfc = Venus_RT.Devices.IODevices.IoMfc;
  23. using System.Windows.Media;
  24. namespace Venus_RT.Devices
  25. {
  26. class JetTM : TM
  27. {
  28. private readonly IoLid _TMLid;
  29. private readonly IoLid _LLALid;
  30. private readonly IoLid _LLBLid;
  31. private readonly IoCylinder _LLATSlitDoor;
  32. private readonly IoCylinder _LLBTSlitDoor;
  33. private readonly IoCylinder _LLAESlitDoor;
  34. private readonly IoCylinder _LLBESlitDoor;
  35. private readonly IoValve _TMN2Valve;
  36. private readonly IoValve _TMSoftPumpValve;
  37. private readonly IoValve _TMFastPumpValve;
  38. private readonly IoValve _TMPurgeValve;
  39. private readonly IoValve _TMVentValve;
  40. //private readonly IoValve _TMSoftVentValve;
  41. //private readonly IoValve _TMFastVentValve;
  42. private readonly IoValve _LLASoftPumpValve;
  43. private readonly IoValve _LLAFastPumpValve;
  44. private readonly IoValve _LLAPurgeValve;
  45. private readonly IoValve _LLAVentValve;
  46. private readonly IoValve _LLASoftVentValve;
  47. private readonly IoValve _LLAFastVentValve;
  48. private readonly IoValve _LLBSoftVentValve;
  49. private readonly IoValve _LLBFastVentValve;
  50. private readonly IoValve _LLBSoftPumpValve;
  51. private readonly IoValve _LLBFastPumpValve;
  52. private readonly IoValve _LLBPurgeValve;
  53. private readonly IoValve _LLBVentValve;
  54. private readonly IoValve _WaferRelayValve;
  55. private readonly IoValve _TMVacAtmMode;
  56. private readonly IoSensor _TMPowerOn;
  57. private readonly IoSensor _TMInSafty;
  58. private readonly IoSensor _WaferLeakSensor;
  59. private readonly IoSensor _EFEMSideDoorClosed;
  60. private readonly IoSensor _TMPCWFlowSwitch;
  61. private readonly IoSensor _LLAPCWFlowSwitch;
  62. private readonly IoSensor _LLBPCWFlowSwitch;
  63. private readonly IoSensor _TMLidClosed;
  64. private readonly IoSensor _CDAPressureSwitch;
  65. private readonly IoSensor _VaccumPressureSwitch;
  66. private readonly IoSensor _N2PressureSwitch;
  67. private readonly IoSensor _TMRobotNotExtendPMA;
  68. private readonly IoSensor _TMRobotNotExtendPMB;
  69. private readonly IoSensor _TMRobotNotExtendPMC;
  70. private readonly IoSensor _TMRobotNotExtendPMD;
  71. private readonly IoSensor _TMRobotNotExtendLLA;
  72. private readonly IoSensor _TMRobotNotExtendLLB;
  73. private readonly IoSensor _EfemRobotNotExtendLLA;
  74. private readonly IoSensor _EfemRobotNotExtendLLB;
  75. private readonly IoSensor _TMVacSwitch;
  76. private readonly IoSensor _LLAVacSwitch;
  77. private readonly IoSensor _LLBVacSwitch;
  78. private readonly IoSensor _TMATMSwitch;
  79. private readonly IoSensor _LLAATMSwitch;
  80. private readonly IoSensor _LLBATMSwitch;
  81. private readonly IoSwitch _LLAWaferSizeCheck;
  82. private readonly IoSwitch _LLBWaferSizeCheck;
  83. private readonly IoSwitch _PMAWaferSizeCheck;
  84. private readonly IoSwitch _PMBWaferSizeCheck;
  85. private readonly IoSwitch _PMCWaferSizeCheck;
  86. private readonly IoSwitch _PMDWaferSizeCheck;
  87. private readonly IoSwitch _PressureMode_Switch;
  88. private readonly IoMfc _TMMfc;
  89. private readonly PumpBase _TMPump;
  90. private readonly PumpBase _LLPump;
  91. private readonly IoTMPressureCtrl _presureCtrl;
  92. public bool TMLidClosed => _TMLid.OFFFeedback;
  93. public bool LLALidClosed => _LLALid.OFFFeedback;
  94. public bool LLBLidClosed => _LLBLid.OFFFeedback;
  95. public bool IsLLASlitDoorClosed => _LLATSlitDoor.State == CylinderState.Close;
  96. public bool IsLLASlitDoorOpen => _LLATSlitDoor.State == CylinderState.Open;
  97. public bool IsLLAESlitDoorClosed => _LLAESlitDoor.State == CylinderState.Close;
  98. public bool IsLLAESlitDoorOpen => _LLAESlitDoor.State == CylinderState.Open;
  99. public bool IsLLBSlitDoorClosed => _LLBTSlitDoor.State == CylinderState.Close;
  100. public bool IsLLBSlitDoorOpen => _LLBTSlitDoor.State == CylinderState.Open;
  101. public bool IsLLBESlitDoorClosed => _LLBESlitDoor.State == CylinderState.Close;
  102. public bool IsLLBESlitDoorOpen => _LLBESlitDoor.State == CylinderState.Open;
  103. public bool IsTMVac => _TMVacSwitch.Value;
  104. public bool IsLLAVac => _LLAVacSwitch.Value;
  105. public bool IsLLBVac => _LLBVacSwitch.Value;
  106. public bool IsTMATM => _TMATMSwitch.Value;
  107. public bool IsLLAATM => _LLAATMSwitch.Value;
  108. public bool IsLLBATM => _LLBATMSwitch.Value;
  109. public bool IsTMPowerOn => _TMPowerOn.Value;
  110. public bool IsTMInSafty => _TMInSafty.Value;
  111. public bool IsLLAFastPumpOpen => _LLAFastPumpValve.Status;
  112. public bool IsLLASoftPumpOpen => _LLASoftPumpValve.Status;
  113. public bool IsLLBFastPumpOpen => _LLBFastPumpValve.Status;
  114. public bool IsLLBSoftPumpOpen => _LLBSoftPumpValve.Status;
  115. public bool IsLLAVentValveOpen => _LLAVentValve.Status;
  116. public bool IsLLAPurgeValveOpen => _LLAPurgeValve.Status;
  117. public bool IsLLBVentValveOpen => _LLBVentValve.Status;
  118. public bool IsLLBPurgeValveOpen => _LLBPurgeValve.Status;
  119. public bool IsTMVentValveOpen => _TMVentValve.Status;
  120. // public bool IsTMFastVentValveOpen => _TMFastVentValve.Status;
  121. public bool IsTMPurgeValveOpen => _TMPurgeValve.Status;
  122. public bool IsTMFastPumpOpen => _TMFastPumpValve.Status;
  123. public bool IsTMSoftPumpOpen => _TMSoftPumpValve.Status;
  124. public bool TMRobotNotExtendToPMA => _TMRobotNotExtendPMA.Value;
  125. public bool TMRobotNotExtendToPMB => _TMRobotNotExtendPMB.Value;
  126. public bool TMRobotNotExtendToPMC => _TMRobotNotExtendPMC.Value;
  127. public bool TMRobotNotExtendToPMD => _TMRobotNotExtendPMD.Value;
  128. public bool TMRobotNotExtendToLLA => _TMRobotNotExtendLLA.Value;
  129. public bool TMRobotNotExtendToLLB => _TMRobotNotExtendLLB.Value;
  130. public bool EfemRobotNotExtendToLLA => _EfemRobotNotExtendLLA.Value;
  131. public bool EfemRobotNotExtendToLLB => _EfemRobotNotExtendLLB.Value;
  132. public double TMPressure => _presureCtrl.TMPressureGauge.Value;
  133. public double LLAPressure => _presureCtrl.LLAPressureGauge.Value;
  134. public double LLBPressure => _presureCtrl.LLBPressureGauge.Value;
  135. public double TMForelinePressure => _presureCtrl.MFForelineGauge.Value;
  136. public double LoadlockForelinePressure => _presureCtrl.LLForelineGauge.Value;
  137. public bool? TMPumpIsRunning => _TMPump?.IsRunning;
  138. public bool? LLPumpIsRunning => _LLPump?.IsRunning;
  139. public enum LLPumpState
  140. {
  141. Idle,
  142. LLAUsing,
  143. LLBUsing,
  144. }
  145. LLPumpState _llPumpingState = LLPumpState.Idle;
  146. public LLPumpState LLPumpStatus { get { return _llPumpingState; } }
  147. private string _allInstalledModules { get { return SC.GetStringValue("System.InstalledModules").ToString(); } }
  148. public bool PMASlitDoorClosed
  149. {
  150. get
  151. {
  152. if (_allInstalledModules.Contains("PMA"))
  153. {
  154. return DATA.Poll<bool>("PMA", "IsSlitDoorClosed");
  155. }
  156. else
  157. {
  158. return true;
  159. }
  160. }
  161. }
  162. public bool PMBSlitDoorClosed
  163. {
  164. get
  165. {
  166. if (_allInstalledModules.Contains("PMB"))
  167. {
  168. return DATA.Poll<bool>("PMB", "IsSlitDoorClosed");
  169. }
  170. else
  171. {
  172. return true;
  173. }
  174. }
  175. }
  176. public bool PMCSlitDoorClosed
  177. {
  178. get
  179. {
  180. if (_allInstalledModules.Contains("PMC"))
  181. {
  182. return DATA.Poll<bool>("PMC", "IsSlitDoorClosed");
  183. }
  184. else
  185. {
  186. return true;
  187. }
  188. }
  189. }
  190. public bool PMDSlitDoorClosed
  191. {
  192. get
  193. {
  194. if (_allInstalledModules.Contains("PMD"))
  195. {
  196. return DATA.Poll<bool>("PMD", "IsSlitDoorClosed");
  197. }
  198. else
  199. {
  200. return true;
  201. }
  202. }
  203. }
  204. public bool AllPMSlitDoorClosed
  205. {
  206. get
  207. {
  208. if (PMASlitDoorClosed == true && PMBSlitDoorClosed == true && PMCSlitDoorClosed == true && PMDSlitDoorClosed == true)
  209. {
  210. return true;
  211. }
  212. else
  213. {
  214. return false;
  215. }
  216. }
  217. }
  218. public Dictionary<ModuleName, ModuleName> PreRotateModules { get; private set; }
  219. public JetTM() : base("TM")
  220. {
  221. _TMLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.TMLid}");
  222. _LLALid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLALid}");
  223. _LLBLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLBLid}");
  224. _LLATSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLATSlitDoor}");
  225. _LLBTSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBTSlitDoor}");
  226. _LLAESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLAESlitDoor}");
  227. _LLBESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBESlitDoor}");
  228. _TMN2Valve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMValveN2}");
  229. _TMSoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftPumpValve}");
  230. _TMFastPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastPumpValve}");
  231. _TMPurgeValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMPurgeValve}");
  232. _TMVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVentValve}");
  233. //_TMSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftVentValve}");
  234. //_TMFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastVentValve}");
  235. _LLASoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLASoftPumpValve}");
  236. _LLAFastPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAFastPumpValve}");
  237. _LLAPurgeValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAPurgeValve}");
  238. _LLAVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAVentValve}");
  239. _LLASoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLASoftVentValve}");
  240. _LLAFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAFastVentValve}");
  241. _LLBSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftVentValve}");
  242. _LLBFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastVentValve}");
  243. _TMVacAtmMode = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVacAtmMode}");
  244. _LLBSoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftPumpValve}");
  245. _LLBFastPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastPumpValve}");
  246. _LLBPurgeValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBPurgeValve}");
  247. _LLBVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBVentValve}");
  248. _WaferRelayValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveWaterRelay}");
  249. _TMPowerOn = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPowerOn}");
  250. _TMInSafty = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMInSafty}");
  251. _WaferLeakSensor = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.WaferLeakSensor}");
  252. _EFEMSideDoorClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EFEMSideDoorClosed}");
  253. _TMPCWFlowSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPCWFlowSwitch}");
  254. _LLAPCWFlowSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAPCWFlowSwitch}");
  255. _LLBPCWFlowSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBPCWFlowSwitch}");
  256. _TMLidClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMLidClosed}");
  257. _CDAPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.CDAPressureSwitch}");
  258. _VaccumPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.VaccumPressureSwitch}");
  259. _N2PressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.N2PressureSwitch}");
  260. _TMRobotNotExtendPMA = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMA}");
  261. _TMRobotNotExtendPMB = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMB}");
  262. _TMRobotNotExtendPMC = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMC}");
  263. _TMRobotNotExtendPMD = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMD}");
  264. _TMRobotNotExtendLLA = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLA}");
  265. _TMRobotNotExtendLLB = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLB}");
  266. _EfemRobotNotExtendLLA = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLA}");
  267. _EfemRobotNotExtendLLB = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLB}");
  268. _TMVacSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMVacSwitch}");
  269. _LLAVacSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAVacSwitch}");
  270. _LLBVacSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBVacSwitch}");
  271. _TMATMSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMATMSwitch}");
  272. _LLAATMSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAATMSwitch}");
  273. _LLBATMSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBATMSwitch}");
  274. _LLAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLAWaferSizeCheckSwitch}");
  275. _LLBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLBWaferSizeCheckSwitch}");
  276. _PMAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMAWaferSizeCheckSwitch}");
  277. _PMBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMBWaferSizeCheckSwitch}");
  278. _PMCWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMCWaferSizeCheckSwitch}");
  279. _PMDWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMDWaferSizeCheckSwitch}");
  280. _PressureMode_Switch = DEVICE.GetDevice<IoSwitch>("TM.PressureModeSwitch");
  281. _TMMfc = DEVICE.GetDevice<IoMfc>($"{Module}.TM_MFC1");
  282. _presureCtrl = DEVICE.GetDevice<IoTMPressureCtrl>($"TM.{VenusDevice.TMPressureCtrl}");
  283. if (SC.GetValue<int>($"TM.DryPump.CommunicationType") == (int)CommunicationType.RS232)
  284. {
  285. if (SC.GetValue<int>($"TM.DryPump.MFG") == (int)DryPumpMFG.SKY)
  286. {
  287. _TMPump = DEVICE.GetDevice<SkyPump>($"TM.{VenusDevice.MainPump}");
  288. }
  289. else if (SC.GetValue<int>($"TM.DryPump.MFG") == (int)DryPumpMFG.Edwards)
  290. {
  291. _TMPump = DEVICE.GetDevice<EdwardsPump>($"TM.{VenusDevice.MainPump}");
  292. }
  293. }
  294. if (SC.GetValue<int>($"LLA.DryPump.CommunicationType") == (int)CommunicationType.RS232)
  295. {
  296. if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.SKY)
  297. {
  298. _LLPump = DEVICE.GetDevice<SkyPump>($"LLA.{VenusDevice.MainPump}");
  299. }
  300. else if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.Edwards)
  301. {
  302. _LLPump = DEVICE.GetDevice<EdwardsPump>($"LLA.{VenusDevice.MainPump}");
  303. }
  304. }
  305. PreRotateModules = new Dictionary<ModuleName, ModuleName>();
  306. foreach (var mod in new List<ModuleName> { ModuleName.LLA, ModuleName.LLB, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD })
  307. {
  308. string rotateModule = SC.GetStringValue($"TM.PreRotation.{mod}");
  309. if (rotateModule.Length == 3)
  310. {
  311. ModuleName rotModule = ModuleHelper.Converter(rotateModule);
  312. if (ModuleHelper.IsPm(rotModule) || ModuleHelper.IsLoadLock(rotModule))
  313. {
  314. PreRotateModules.Add(mod, rotModule);
  315. }
  316. }
  317. }
  318. DATA.Subscribe("TM.PumpIsRunning", () => TMPumpIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  319. OP.Subscribe("TM.ControlPump", (cmd, args) =>
  320. {
  321. _TMPump.SetPumpOnOff((bool)args[0]);
  322. return true;
  323. });
  324. DATA.Subscribe("LL.PumpIsRunning", () => LLPumpIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  325. OP.Subscribe("LL.ControlPump", (cmd, args) =>
  326. {
  327. _LLPump.SetPumpOnOff((bool)args[0]);
  328. return true;
  329. });
  330. OP.Subscribe("TM.SetChamberPressure", (cmd, args) =>
  331. {
  332. _presureCtrl.SetTMPressure((int)(args[0]));
  333. return true;
  334. });
  335. OP.Subscribe("TM.SetChamberFlow", (cmd, args) =>
  336. {
  337. _TMMfc.SetPoint = (int)(args[0]);
  338. return true;
  339. });
  340. OP.Subscribe($"TM.SetMFSlitDoor", (cmd, args) =>
  341. {
  342. var module = (ModuleName)Enum.Parse(typeof(ModuleName), args[0].ToString());
  343. TurnMFSlitDoor(module, (bool)args[1], out _);
  344. return true;
  345. });
  346. OP.Subscribe($"TM.SetEFEMSlitDoor", (cmd, args) =>
  347. {
  348. var module = (ModuleName)Enum.Parse(typeof(ModuleName), args[0].ToString());
  349. TurnEFEMSlitDoor(module, (bool)args[1], out _);
  350. return true;
  351. });
  352. _TMVacAtmMode.TurnValve(RouteManager.IsATMMode, out string _);
  353. }
  354. public override void Monitor()
  355. {
  356. _WaferRelayValve.TurnValve(_WaferLeakSensor.Value, out string _);
  357. }
  358. public void TurnSoftPumpValve(ModuleName mod, bool bOn)
  359. {
  360. switch(mod)
  361. {
  362. case ModuleName.TM:
  363. _TMSoftPumpValve.TurnValve(bOn, out string _);
  364. break;
  365. case ModuleName.LLA:
  366. _LLASoftPumpValve.TurnValve(bOn, out string _);
  367. break;
  368. case ModuleName.LLB:
  369. _LLBSoftPumpValve.TurnValve(bOn, out string _);
  370. break;
  371. }
  372. }
  373. public void TurnFastPumpValve(ModuleName mod, bool bOn)
  374. {
  375. switch(mod)
  376. {
  377. case ModuleName.TM:
  378. _TMFastPumpValve.TurnValve(bOn, out string _);
  379. break;
  380. case ModuleName.LLA:
  381. _LLAFastPumpValve.TurnValve(bOn, out string _);
  382. break;
  383. case ModuleName.LLB:
  384. _LLBFastPumpValve.TurnValve(bOn, out string _);
  385. break;
  386. }
  387. }
  388. public void TurnVentValve(ModuleName mod, bool bOn)
  389. {
  390. switch (mod)
  391. {
  392. case ModuleName.TM:
  393. _TMVentValve.TurnValve(bOn, out string _);
  394. break;
  395. case ModuleName.LLA:
  396. _LLAVentValve.TurnValve(bOn, out string _);
  397. break;
  398. case ModuleName.LLB:
  399. _LLBVentValve.TurnValve(bOn, out string _);
  400. break;
  401. }
  402. }
  403. public void TurnPurgeValve(ModuleName mod, bool bOn)
  404. {
  405. switch(mod)
  406. {
  407. case ModuleName.TM:
  408. _TMPurgeValve.TurnValve(bOn, out string _);
  409. break;
  410. case ModuleName.LLA:
  411. _LLAPurgeValve.TurnValve(bOn, out string _);
  412. break;
  413. case ModuleName.LLB:
  414. _LLBPurgeValve.TurnValve(bOn, out string _);
  415. break;
  416. }
  417. }
  418. public void TurnN2Valve(bool bOn)
  419. {
  420. _TMN2Valve.TurnValve(bOn, out string _);
  421. }
  422. public void CloseModuleAllValves(ModuleName mod)
  423. {
  424. TurnFastPumpValve(mod, false);
  425. TurnSoftPumpValve(mod, false);
  426. TurnVentValve(mod, false);
  427. TurnPurgeValve(mod, false);
  428. if (mod == ModuleName.TM)
  429. TurnN2Valve(false);
  430. }
  431. public double GetModulePressure(ModuleName mod)
  432. {
  433. switch (mod)
  434. {
  435. case ModuleName.TM:
  436. return TMPressure;
  437. case ModuleName.LLA:
  438. return LLAPressure;
  439. case ModuleName.LLB:
  440. return LLBPressure;
  441. }
  442. return 0;
  443. }
  444. public bool IsModuleATM(ModuleName mod)
  445. {
  446. switch (mod)
  447. {
  448. case ModuleName.TM:
  449. return IsTMATM;
  450. case ModuleName.LLA:
  451. return IsLLAATM;
  452. case ModuleName.LLB:
  453. return IsLLBATM;
  454. }
  455. return false;
  456. }
  457. public bool IsModuleVaccum(ModuleName mod)
  458. {
  459. switch (mod)
  460. {
  461. case ModuleName.TM:
  462. return IsTMVac;
  463. case ModuleName.LLA:
  464. return IsLLAVac;
  465. case ModuleName.LLB:
  466. return IsLLBVac;
  467. }
  468. return false;
  469. }
  470. public bool CheckLidClosed(ModuleName mod)
  471. {
  472. switch (mod)
  473. {
  474. case ModuleName.TM:
  475. if(!TMLidClosed)
  476. {
  477. LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Lid not closed");
  478. return false;
  479. }
  480. break;
  481. case ModuleName.LLA:
  482. if(!LLALidClosed)
  483. {
  484. LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Lid not closed");
  485. return false;
  486. }
  487. break;
  488. case ModuleName.LLB:
  489. if (!LLBLidClosed)
  490. {
  491. LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Lid not closed");
  492. return false;
  493. }
  494. break;
  495. }
  496. return true;
  497. }
  498. public bool CheckVentValveClosed(ModuleName mod)
  499. {
  500. switch (mod)
  501. {
  502. case ModuleName.TM:
  503. if (IsTMVentValveOpen)
  504. {
  505. LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Vent Valve not closed");
  506. return false;
  507. }
  508. break;
  509. case ModuleName.LLA:
  510. if (IsLLAVentValveOpen)
  511. {
  512. LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Vent Valve not closed");
  513. return false;
  514. }
  515. break;
  516. case ModuleName.LLB:
  517. if (IsLLBVentValveOpen)
  518. {
  519. LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Vent Valve not closed");
  520. return false;
  521. }
  522. break;
  523. }
  524. return true;
  525. }
  526. public bool CheckPurgeValveClosed(ModuleName mod)
  527. {
  528. switch (mod)
  529. {
  530. case ModuleName.TM:
  531. if (IsTMPurgeValveOpen)
  532. {
  533. LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Purge Valve not closed");
  534. return false;
  535. }
  536. break;
  537. case ModuleName.LLA:
  538. if (IsLLAPurgeValveOpen)
  539. {
  540. LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Purge Valve not closed");
  541. return false;
  542. }
  543. break;
  544. case ModuleName.LLB:
  545. if (IsLLBPurgeValveOpen)
  546. {
  547. LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Purge Valve not closed");
  548. return false;
  549. }
  550. break;
  551. }
  552. return true;
  553. }
  554. public bool CheckPumpValveClosed(ModuleName mod)
  555. {
  556. switch (mod)
  557. {
  558. case ModuleName.TM:
  559. if (IsTMFastPumpOpen)
  560. {
  561. LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Fast Pump Valve not closed");
  562. return false;
  563. }
  564. else if(IsTMSoftPumpOpen)
  565. {
  566. LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Soft Pump Valve not closed");
  567. return false;
  568. }
  569. break;
  570. case ModuleName.LLA:
  571. if (IsLLAFastPumpOpen)
  572. {
  573. LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Fast Pump Valve not closed");
  574. return false;
  575. }
  576. else if(IsLLASoftPumpOpen)
  577. {
  578. LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Soft Pump Valve not closed");
  579. return false;
  580. }
  581. break;
  582. case ModuleName.LLB:
  583. if (IsLLBFastPumpOpen)
  584. {
  585. LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Fast Pump Valve not closed");
  586. return false;
  587. }
  588. else if(IsLLBSoftPumpOpen)
  589. {
  590. LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Soft Pump Valve not closed");
  591. return false;
  592. }
  593. break;
  594. }
  595. return true;
  596. }
  597. private bool CheckRobotNotExtendSensor(ModuleName ll, bool open, bool bTMDoor, out string reason)
  598. {
  599. string action = open ? "Open" : "Close";
  600. string doorName = bTMDoor ? "TM" : "EFEM";
  601. if (ll == ModuleName.LLA)
  602. {
  603. if (!_TMRobotNotExtendLLA.Value)
  604. {
  605. reason = $"TM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
  606. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  607. return false;
  608. }
  609. if (!_EfemRobotNotExtendLLA.Value)
  610. {
  611. reason = $"EFEM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
  612. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  613. return false;
  614. }
  615. }
  616. else
  617. {
  618. if (!_TMRobotNotExtendLLB.Value)
  619. {
  620. reason = $"TM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
  621. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  622. return false;
  623. }
  624. if (!_EfemRobotNotExtendLLB.Value)
  625. {
  626. reason = $"EFEM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
  627. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  628. return false;
  629. }
  630. }
  631. reason = "";
  632. return true;
  633. }
  634. public bool TurnMFSlitDoor(ModuleName loadlock, bool open, out string reason)
  635. {
  636. if (!CheckRobotNotExtendSensor(loadlock, open, true, out reason))
  637. return false;
  638. if (open)
  639. {
  640. if (RouteManager.IsATMMode)
  641. {
  642. if (!IsTMATM)
  643. {
  644. reason = $"TM is not ATM, can not open slit door";
  645. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  646. return false;
  647. }
  648. if (!IsModuleATM(loadlock))
  649. {
  650. reason = $"{loadlock} is not ATM, can not open slit door";
  651. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  652. return false;
  653. }
  654. }
  655. else
  656. {
  657. if(!IsModuleVaccum(loadlock))
  658. {
  659. reason = $"{loadlock} is notVacuum, can not open slit door";
  660. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  661. return false;
  662. }
  663. double maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");
  664. if (Math.Abs(GetModulePressure(loadlock) - GetModulePressure(ModuleName.TM)) > maxPressureDifference)
  665. {
  666. reason = $"{loadlock}:{GetModulePressure(loadlock)} and TM : {GetModulePressure(ModuleName.TM)} pressure difference exceeds the max limit {maxPressureDifference}";
  667. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  668. return false;
  669. }
  670. }
  671. }
  672. switch(loadlock)
  673. {
  674. case ModuleName.LLA:
  675. return _LLATSlitDoor.SetCylinder(open, out reason);
  676. case ModuleName.LLB:
  677. return _LLBTSlitDoor.SetCylinder(open, out reason);
  678. }
  679. reason = $"Invalid module {loadlock}";
  680. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  681. return false;
  682. }
  683. public bool TurnEFEMSlitDoor(ModuleName loadlock, bool open, out string reason)
  684. {
  685. if (!CheckRobotNotExtendSensor(loadlock, open, false, out reason))
  686. return false;
  687. if (open && !IsModuleATM(loadlock))
  688. {
  689. reason = $"{loadlock} is not ATM, can not open EFEM side slit door";
  690. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  691. return false;
  692. }
  693. switch (loadlock)
  694. {
  695. case ModuleName.LLA:
  696. return _LLAESlitDoor.SetCylinder(open, out reason);
  697. case ModuleName.LLB:
  698. return _LLBESlitDoor.SetCylinder(open, out reason);
  699. }
  700. reason = $"Invalid module {loadlock}";
  701. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  702. return false;
  703. }
  704. //public bool ControlTMPump(bool ison)
  705. //{
  706. // _TMPump.SetPumpOnOff(ison);
  707. // return true;
  708. //}
  709. public void SwitchTMPressureMode(bool isPressureMode)
  710. {
  711. if (isPressureMode==true)
  712. {
  713. _PressureMode_Switch.TurnOn();
  714. }
  715. else
  716. {
  717. _PressureMode_Switch.TurnOff();
  718. }
  719. }
  720. public void SetTMPressure(int pressureValue)
  721. {
  722. _presureCtrl.SetTMPressure(pressureValue);
  723. }
  724. public void SetTMFlow(int flowValue)
  725. {
  726. _TMMfc.SetPoint = (flowValue);
  727. }
  728. public bool CloseAllSlitDoor()
  729. {
  730. _LLATSlitDoor.SetCylinder(false, out _);
  731. _LLBTSlitDoor.SetCylinder(false, out _);
  732. if (_allInstalledModules.Contains("PMA"))
  733. {
  734. OP.DoOperation("PMA.SetSlitDoor", false);
  735. }
  736. if (_allInstalledModules.Contains("PMB"))
  737. {
  738. OP.DoOperation("PMB.SetSlitDoor", false);
  739. }
  740. if (_allInstalledModules.Contains("PMC"))
  741. {
  742. OP.DoOperation("PMC.SetSlitDoor", false);
  743. }
  744. if (_allInstalledModules.Contains("PMD"))
  745. {
  746. OP.DoOperation("PMD.SetSlitDoor", false);
  747. }
  748. return true;
  749. }
  750. public bool TurnTMPump(bool ison)
  751. {
  752. _TMPump.SetPumpOnOff(ison);
  753. return true;
  754. }
  755. public bool TryGetLLPump(ModuleName LLname)
  756. {
  757. //Self
  758. if ((LLname == ModuleName.LLA && _llPumpingState == LLPumpState.LLAUsing) || (LLname == ModuleName.LLB && _llPumpingState == LLPumpState.LLBUsing))
  759. return true;
  760. //Idle
  761. if (LLname == ModuleName.LLA && !IsLLBFastPumpOpen && !IsLLBSoftPumpOpen && _llPumpingState == LLPumpState.Idle)
  762. {
  763. _llPumpingState = LLPumpState.LLAUsing;
  764. return true;
  765. }
  766. if (LLname == ModuleName.LLB && !IsLLAFastPumpOpen && !IsLLASoftPumpOpen && _llPumpingState == LLPumpState.Idle)
  767. {
  768. _llPumpingState = LLPumpState.LLBUsing;
  769. return true;
  770. }
  771. //LOG.Write(eEvent.WARN_DEFAULT_WARN, LLname, "无法打开,另一个泵正在用!");
  772. //locked
  773. return false;
  774. }
  775. public void ReleasePump(ModuleName Module)
  776. {
  777. //release pump (must do it by user)
  778. if ((Module == ModuleName.LLA && _llPumpingState == LLPumpState.LLAUsing) || (Module == ModuleName.LLB && _llPumpingState == LLPumpState.LLBUsing))
  779. _llPumpingState = LLPumpState.Idle;
  780. }
  781. public void HomeSlitDoor()
  782. {
  783. if (IsLLASlitDoorClosed == true)
  784. {
  785. _LLATSlitDoor.SetCylinder(false, out _);
  786. }
  787. else if(IsLLASlitDoorOpen == true)
  788. {
  789. _LLATSlitDoor.SetCylinder(true, out _);
  790. }
  791. if (IsLLBSlitDoorClosed == true)
  792. {
  793. _LLBTSlitDoor.SetCylinder(false, out _);
  794. }
  795. else if (IsLLBSlitDoorOpen == true)
  796. {
  797. _LLBTSlitDoor.SetCylinder(true, out _);
  798. }
  799. if (IsLLAESlitDoorClosed == true)
  800. {
  801. _LLAESlitDoor.SetCylinder(false, out _);
  802. }
  803. else if (IsLLAESlitDoorOpen == true)
  804. {
  805. _LLAESlitDoor.SetCylinder(true, out _);
  806. }
  807. if (IsLLBESlitDoorClosed == true)
  808. {
  809. _LLBESlitDoor.SetCylinder(false, out _);
  810. }
  811. else if (IsLLBESlitDoorOpen == true)
  812. {
  813. _LLBESlitDoor.SetCylinder(true, out _);
  814. }
  815. }
  816. }
  817. }