LLEntity.cs 15 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. namespace Venus_RT.Modules
  15. {
  16. class LLEntity : Entity, IEntity, IModuleEntity
  17. {
  18. public enum LLStatus
  19. {
  20. Not_Ready,
  21. Ready_For_TM,
  22. Ready_For_EFEM,
  23. }
  24. public enum STATE
  25. {
  26. Unknown,
  27. Init,
  28. Initializing,
  29. Idle,
  30. Error,
  31. Pumping,
  32. Venting,
  33. Purging,
  34. LeakCheck,
  35. Prepare_For_TM,
  36. Prepare_For_EFEM,
  37. Ready_For_TM,
  38. Ready_For_EFEM,
  39. }
  40. public enum MSG
  41. {
  42. Home,
  43. Online,
  44. Offline,
  45. Pump,
  46. Vent,
  47. Purge,
  48. CyclePurge,
  49. LeakCheck,
  50. Prepare_TM,
  51. Prepare_EFEM,
  52. TM_Exchange_Ready,
  53. EFEM_Exchange_Ready,
  54. Error,
  55. Abort,
  56. }
  57. public ModuleName Module { get; private set; }
  58. public LLStatus Status { get; private set; }
  59. public bool Check(int msg, out string reason, params object[] args)
  60. {
  61. throw new NotImplementedException();
  62. }
  63. public bool IsIdle
  64. {
  65. get { return fsm.State == (int)STATE.Idle; }
  66. }
  67. public bool IsError
  68. {
  69. get { return fsm.State == (int)STATE.Error; }
  70. }
  71. public bool IsInit
  72. {
  73. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  74. }
  75. public bool IsBusy
  76. {
  77. get { return !IsInit && !IsError && !IsIdle; }
  78. }
  79. public bool IsOnline { get; internal set; }
  80. private readonly JetTM _JetTM;
  81. private readonly MFPumpRoutine _pumpingRoutine;
  82. private readonly MFVentRoutine _ventingRoutine;
  83. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  84. private readonly MFPurgeRoutine _purgeRoutine;
  85. private bool _isATMMode;
  86. public LLEntity(ModuleName module)
  87. {
  88. Module = module;
  89. //_JetTM = Singleton<JetTM>.Instance;
  90. _JetTM= DEVICE.GetDevice<JetTM>("TM");
  91. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  92. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  93. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  94. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  95. _isATMMode = SC.GetValue<bool>("System.IsATMMode");
  96. var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  97. WaferManager.Instance.SubscribeLocation(Module, soltCount);
  98. InitFsmMap();
  99. }
  100. protected override bool Init()
  101. {
  102. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  103. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  104. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  105. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  106. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  107. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  108. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()));
  109. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));
  110. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));
  111. return true;
  112. }
  113. private void InitFsmMap()
  114. {
  115. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  116. fsm.EnableRepeatedMsg(true);
  117. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  118. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  119. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  120. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  121. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  122. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  123. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  124. // Home
  125. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  126. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  127. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  128. //vent sequence
  129. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  130. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  131. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  132. //Pump sequence
  133. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  134. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  135. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  136. // Purge sequence
  137. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  138. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  139. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  140. // Leak check sequence
  141. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  142. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  143. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  144. // Prepare TM Transfer
  145. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  146. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  147. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  148. // Prepare EFEM Transfer
  149. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  150. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  151. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  152. Running = true;
  153. }
  154. public int Invoke(string function, params object[] args)
  155. {
  156. switch (function)
  157. {
  158. case "Home":
  159. CheckToPostMessage((int)MSG.Home);
  160. return (int)MSG.Home;
  161. }
  162. return (int)FSM_MSG.NONE;
  163. }
  164. public bool CheckAcked(int msg)
  165. {
  166. return fsm.CheckExecuted(msg);
  167. }
  168. public bool CheckToPostMessage(int msg, params object[] args)
  169. {
  170. if (!fsm.FindTransition(fsm.State, msg))
  171. {
  172. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  173. return false;
  174. }
  175. Running = true;
  176. fsm.PostMsg(msg, args);
  177. return true;
  178. }
  179. private bool fnEnterTMReady(object[] param)
  180. {
  181. Status = LLStatus.Ready_For_TM;
  182. return true;
  183. }
  184. private bool fnExitTMReady(object[] param)
  185. {
  186. Status = LLStatus.Not_Ready;
  187. return true;
  188. }
  189. private bool fnEnterEFEMReady(object[] param)
  190. {
  191. Status = LLStatus.Ready_For_EFEM;
  192. return true;
  193. }
  194. private bool fnExitEFEMReady(object[] param)
  195. {
  196. Status = LLStatus.Not_Ready;
  197. return true;
  198. }
  199. private bool fnMonitor(object[] param)
  200. {
  201. _debugRoutine();
  202. return true;
  203. }
  204. private bool fnError(object[] param)
  205. {
  206. IsOnline = false;
  207. return true;
  208. }
  209. private bool fnOnline(object[] param)
  210. {
  211. IsOnline = true;
  212. return true;
  213. }
  214. private bool fnOffline(object[] param)
  215. {
  216. IsOnline = false;
  217. return true;
  218. }
  219. private bool fnAbort(object[] param)
  220. {
  221. return true;
  222. }
  223. private bool fnHome(object[] param)
  224. {
  225. return true;
  226. }
  227. private bool fnHoming(object[] param)
  228. {
  229. return true;
  230. }
  231. private bool FnStartVent(object[] param)
  232. {
  233. return _ventingRoutine.Start() == RState.Running;
  234. }
  235. private bool FnVentTimeout(object[] param)
  236. {
  237. RState ret = _ventingRoutine.Monitor();
  238. if (ret == RState.Failed || ret == RState.Timeout)
  239. {
  240. PostMsg(MSG.Error);
  241. return false;
  242. }
  243. return ret == RState.End;
  244. }
  245. private bool FnAbortVent(object[] param)
  246. {
  247. _ventingRoutine.Abort();
  248. return true;
  249. }
  250. private bool FnStartPump(object[] param)
  251. {
  252. return _pumpingRoutine.Start() == RState.Running;
  253. }
  254. private bool FnPumpTimeout(object[] param)
  255. {
  256. RState ret = _pumpingRoutine.Monitor();
  257. if (ret == RState.Failed || ret == RState.Timeout)
  258. {
  259. PostMsg(MSG.Error);
  260. return false;
  261. }
  262. return ret == RState.End;
  263. }
  264. private bool FnAbortPump(object[] param)
  265. {
  266. _pumpingRoutine.Abort();
  267. return true;
  268. }
  269. private bool FnStartPurge(object[] param)
  270. {
  271. return _purgeRoutine.Start() == RState.Running;
  272. }
  273. private bool FnPurgeTimeout(object[] param)
  274. {
  275. RState ret = _purgeRoutine.Monitor();
  276. if (ret == RState.Failed || ret == RState.Timeout)
  277. {
  278. PostMsg(MSG.Error);
  279. return false;
  280. }
  281. return ret == RState.End;
  282. }
  283. private bool FnAbortPurge(object[] param)
  284. {
  285. _purgeRoutine.Abort();
  286. return true;
  287. }
  288. private bool FnStartLeakCheck(object[] param)
  289. {
  290. return _leakCheckRoutine.Start() == RState.Running;
  291. }
  292. private bool FnLeakCheckTimeout(object[] param)
  293. {
  294. RState ret = _leakCheckRoutine.Monitor();
  295. if (ret == RState.Failed || ret == RState.Timeout)
  296. {
  297. PostMsg(MSG.Error);
  298. return false;
  299. }
  300. return ret == RState.End;
  301. }
  302. private bool FnAbortLeakCheck(object[] param)
  303. {
  304. _leakCheckRoutine.Abort();
  305. return true;
  306. }
  307. private bool FnStartPrepareTM(object[] param)
  308. {
  309. if (_isATMMode)
  310. return true;
  311. return _pumpingRoutine.Start() == RState.Running;
  312. }
  313. private bool FnPreparaTMTimeout(object[] param)
  314. {
  315. if(_isATMMode)
  316. {
  317. if (fsm.ElapsedTime > 10000)
  318. {
  319. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  320. PostMsg(MSG.Error);
  321. return true;
  322. }
  323. return _JetTM.IsModuleATM(Module);
  324. }
  325. RState ret = _pumpingRoutine.Monitor();
  326. if (ret == RState.Failed || ret == RState.Timeout)
  327. {
  328. PostMsg(MSG.Error);
  329. return false;
  330. }
  331. return ret == RState.End;
  332. }
  333. private bool FnStartPrepareEFEM(object[] param)
  334. {
  335. if (_isATMMode)
  336. return true;
  337. return _ventingRoutine.Start() == RState.Running;
  338. }
  339. private bool FnPrepareEFEMTimeout(object[] param)
  340. {
  341. if (_isATMMode)
  342. {
  343. if (fsm.ElapsedTime > 10000)
  344. {
  345. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  346. PostMsg(MSG.Error);
  347. return true;
  348. }
  349. return _JetTM.IsModuleATM(Module);
  350. }
  351. RState ret = _ventingRoutine.Monitor();
  352. if (ret == RState.Failed || ret == RState.Timeout)
  353. {
  354. PostMsg(MSG.Error);
  355. return false;
  356. }
  357. return ret == RState.End;
  358. }
  359. private void _debugRoutine()
  360. {
  361. int flag = 0;
  362. // Test Home routine
  363. if (flag == 1)
  364. {
  365. PostMsg(MSG.Home);
  366. }
  367. else if (flag == 2)
  368. {
  369. PostMsg(MSG.Vent);
  370. }
  371. else if (flag == 3)
  372. {
  373. PostMsg(MSG.Pump);
  374. }
  375. //else if (flag == 4)
  376. //{
  377. // PostMsg(MSG.PumpLoadLock);
  378. //}
  379. //else if (flag == 5)
  380. //{
  381. // PostMsg(MSG.VentLoadLock);
  382. //}
  383. //else if (flag == 6)
  384. //{
  385. // PostMsg(MSG.PurgeLoadLock);
  386. //}
  387. //else if (flag == 7)
  388. //{
  389. // PostMsg(MSG.LaunchPump);
  390. //}
  391. //else if (flag == 8)
  392. //{
  393. // PostMsg(MSG.LaunchTurboPump);
  394. //}
  395. //else if (flag == 9)
  396. //{
  397. // PostMsg(MSG.LoadLockLeakCheck);
  398. //}
  399. else if (flag == 10)
  400. {
  401. PostMsg(MSG.CyclePurge);
  402. }
  403. //else if (flag == 11)
  404. //{
  405. // PostMsg(MSG.GasLinePurge);
  406. //}
  407. //else if (flag == 12)
  408. //{
  409. // PostMsg(MSG.LeakCheck);
  410. //}
  411. //else if (flag == 13)
  412. //{
  413. // PostMsg(MSG.GasLeakCheck);
  414. //}
  415. //else if (flag == 14)
  416. //{
  417. // PostMsg(MSG.LLPlace);
  418. //}
  419. //else if (flag == 15)
  420. //{
  421. // PostMsg(MSG.LLPick);
  422. //}
  423. //else if (flag == 16)
  424. //{
  425. // PostMsg(MSG.RunRecipe, "7777");
  426. //}
  427. //else if (flag == 17)
  428. //{
  429. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  430. //}
  431. }
  432. }
  433. }