EfemHomeRoutine.cs 8.6 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using Venus_RT.Devices.EFEM;
  15. namespace Venus_RT.Modules.EFEM
  16. {
  17. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  18. {
  19. private enum HomeStep
  20. {
  21. ClearError,
  22. InitRobot,
  23. HomeAllAxes,
  24. CheckWaferPresence,
  25. End,
  26. }
  27. private enum HomeModuleStep
  28. {
  29. Home,
  30. HomeAxes,
  31. End,
  32. }
  33. private int _homeTimeout = 30 * 1000;
  34. ModuleName _targetModule;
  35. EfemBase _efem;
  36. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  37. {
  38. _efem = efem;
  39. }
  40. public RState Start(params object[] objs)
  41. {
  42. _targetModule = (ModuleName)objs[0];
  43. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  44. return Runner.Start(Module, $"Home {_targetModule}");
  45. }
  46. public RState Monitor()
  47. {
  48. if(_targetModule == ModuleName.EFEM)
  49. {
  50. Runner.Run((int)HomeStep.ClearError, ClearError, IsStepComplete, _homeTimeout)
  51. .Run((int)HomeStep.InitRobot, HomeAll, IsStepComplete, _homeTimeout)
  52. .Run((int)HomeStep.HomeAllAxes, HomeAllAxes, IsStepComplete, _homeTimeout)
  53. .Run((int)HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _homeTimeout)
  54. .End((int)HomeStep.End, NullFun, _delay_50ms);
  55. }
  56. else
  57. {
  58. Runner.Run((int)HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  59. .Run((int)HomeModuleStep.HomeAxes, HomeModuleAxes, IsStepComplete, _homeTimeout)
  60. .End((int)HomeModuleStep.End, NullFun, _delay_50ms);
  61. }
  62. return Runner.Status;
  63. }
  64. public void Abort()
  65. {
  66. }
  67. private bool IsStepComplete()
  68. {
  69. if (_efem.Status == RState.End)
  70. {
  71. return true;
  72. }
  73. else if (_efem.Status == RState.Failed || _efem.Status == RState.Timeout)
  74. {
  75. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem home failed: {_efem.Status}");
  76. return true;
  77. }
  78. else
  79. return false;
  80. }
  81. private bool ClearError()
  82. {
  83. return _efem.ClearError();
  84. }
  85. private bool HomeAll()
  86. {
  87. return _efem.HomeAll();
  88. }
  89. private bool HomeModule()
  90. {
  91. return _efem.Home(_targetModule);
  92. }
  93. private bool HomeAllAxes()
  94. {
  95. return _efem.OriginalSearch(ModuleName.EFEM);
  96. }
  97. private bool HomeModuleAxes()
  98. {
  99. return _efem.OriginalSearch(_targetModule);
  100. }
  101. private bool CheckWaferPresence()
  102. {
  103. return _efem.CheckWaferPresence();
  104. }
  105. private bool VerifyWaferPresence()
  106. {
  107. if (_efem.Status == RState.End)
  108. {
  109. var waferPresence = _efem.GetWaferPresence();
  110. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1, alignerWafer2, coolingwafer1,coolingwafer2
  111. if (waferPresence.Length != 3)
  112. {
  113. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, {waferPresence}, should be 6 characters");
  114. return false;
  115. }
  116. //upper arm
  117. if (waferPresence[0] == '1')
  118. {
  119. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  120. {
  121. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  122. }
  123. }
  124. else
  125. {
  126. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  127. {
  128. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  129. }
  130. }
  131. //lower arm
  132. if (waferPresence[1] == '1')
  133. {
  134. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  135. {
  136. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  137. }
  138. }
  139. else
  140. {
  141. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  142. {
  143. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  144. }
  145. }
  146. //aligner1
  147. if (waferPresence[2] == '1')
  148. {
  149. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  150. {
  151. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  152. }
  153. }
  154. else
  155. {
  156. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  157. {
  158. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  159. }
  160. }
  161. //aligner2
  162. //if (waferPresence[3] == '1')
  163. //{
  164. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  165. // {
  166. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  167. // }
  168. //}
  169. //else
  170. //{
  171. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  172. // {
  173. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  174. // }
  175. //}
  176. //cooling1
  177. //if (waferPresence[4] == '1')
  178. //{
  179. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  180. // {
  181. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  182. // }
  183. //}
  184. //else
  185. //{
  186. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  187. // {
  188. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  189. // }
  190. //}
  191. //cooling2
  192. //if (waferPresence[5] == '1')
  193. //{
  194. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  195. // {
  196. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  197. // }
  198. //}
  199. //else
  200. //{
  201. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  202. // {
  203. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  204. // }
  205. //}
  206. return true;
  207. }
  208. else if (_efem.Status != RState.Running)
  209. {
  210. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  211. return true;
  212. }
  213. else
  214. return false;
  215. }
  216. }
  217. }