Kepler-Release/Venus/Venus_RT/Devices/TM/JetTM.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.Util;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Log;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using Venus_Core;
using Venus_RT.Modules;
using Venus_RT.Devices.IODevices;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.OperationCenter;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
using IoMfc = Venus_RT.Devices.IODevices.IoMfc;

namespace Venus_RT.Devices
{
    class JetTM : TM
    {
        private readonly IoLid _TMLid;
        private readonly IoLid _LLALid;
        private readonly IoLid _LLBLid;

        private readonly IoCylinder _LLATSlitDoor;
        private readonly IoCylinder _LLBTSlitDoor;

        private readonly IoCylinder _LLAESlitDoor;
        private readonly IoCylinder _LLBESlitDoor;

        private readonly IoValve _TMN2Valve;
        private readonly IoValve _TMSoftPumpValve;
        private readonly IoValve _TMFastPumpValve;
        private readonly IoValve _TMPurgeValve;
        private readonly IoValve _TMVentValve;
        //private readonly IoValve _TMSoftVentValve;
        //private readonly IoValve _TMFastVentValve;

        private readonly IoValve _LLASoftPumpValve;
        private readonly IoValve _LLAFastPumpValve;
        private readonly IoValve _LLAPurgeValve;
        private readonly IoValve _LLAVentValve;

        private readonly IoValve _LLASoftVentValve;
        private readonly IoValve _LLAFastVentValve;
        private readonly IoValve _LLBSoftVentValve;
        private readonly IoValve _LLBFastVentValve;

        private readonly IoValve _LLBSoftPumpValve;
        private readonly IoValve _LLBFastPumpValve;
        private readonly IoValve _LLBPurgeValve;
        private readonly IoValve _LLBVentValve;
        private readonly IoValve _WaferRelayValve;

        private readonly IoValve _TMVacAtmMode;

        private readonly IoSensor _TMPowerOn;
        private readonly IoSensor _TMInSafty;
        private readonly IoSensor _WaferLeakSensor;
        private readonly IoSensor _EFEMSideDoorClosed;
        private readonly IoSensor _TMPCWFlowSwitch;
        private readonly IoSensor _LLAPCWFlowSwitch;
        private readonly IoSensor _LLBPCWFlowSwitch;
        private readonly IoSensor _TMLidClosed;

        private readonly IoSensor _CDAPressureSwitch;
        private readonly IoSensor _VaccumPressureSwitch;
        private readonly IoSensor _N2PressureSwitch;

        private readonly IoSensor _TMRobotNotExtendPMA;
        private readonly IoSensor _TMRobotNotExtendPMB;
        private readonly IoSensor _TMRobotNotExtendPMC;
        private readonly IoSensor _TMRobotNotExtendPMD;
        private readonly IoSensor _TMRobotNotExtendLLA;
        private readonly IoSensor _TMRobotNotExtendLLB;
        private readonly IoSensor _EfemRobotNotExtendLLA;
        private readonly IoSensor _EfemRobotNotExtendLLB;
        private readonly IoSensor _TMVacSwitch;
        private readonly IoSensor _LLAVacSwitch;
        private readonly IoSensor _LLBVacSwitch;
        private readonly IoSensor _TMATMSwitch;
        private readonly IoSensor _LLAATMSwitch;
        private readonly IoSensor _LLBATMSwitch;

        private readonly IoSwitch _LLAWaferSizeCheck;
        private readonly IoSwitch _LLBWaferSizeCheck;
        private readonly IoSwitch _PMAWaferSizeCheck;
        private readonly IoSwitch _PMBWaferSizeCheck;
        private readonly IoSwitch _PMCWaferSizeCheck;
        private readonly IoSwitch _PMDWaferSizeCheck;
        private readonly IoSwitch _PressureMode_Switch;


        private readonly IoMfc _TMMfc;


        private readonly PumpBase _TMPump;
        private readonly PumpBase _LLPump;

        private readonly IoTMPressureCtrl _presureCtrl;

        public bool TMLidClosed => _TMLid.OFFFeedback;
        public bool LLALidClosed => _LLALid.OFFFeedback;
        public bool LLBLidClosed => _LLBLid.OFFFeedback;
        public bool IsLLASlitDoorClosed => _LLATSlitDoor.State == CylinderState.Close;
        public bool IsLLASlitDoorOpen => _LLATSlitDoor.State == CylinderState.Open;
        public bool IsLLAESlitDoorClosed => _LLAESlitDoor.State == CylinderState.Close;
        public bool IsLLAESlitDoorOpen => _LLAESlitDoor.State == CylinderState.Open;
        public bool IsLLBSlitDoorClosed => _LLBTSlitDoor.State == CylinderState.Close;
        public bool IsLLBSlitDoorOpen => _LLBTSlitDoor.State == CylinderState.Open;
        public bool IsLLBESlitDoorClosed => _LLBESlitDoor.State == CylinderState.Close;
        public bool IsLLBESlitDoorOpen => _LLBESlitDoor.State == CylinderState.Open;
        public bool IsTMVac => _TMVacSwitch.Value;
        public bool IsLLAVac => _LLAVacSwitch.Value;
        public bool IsLLBVac => _LLBVacSwitch.Value;
        public bool IsTMATM => _TMATMSwitch.Value;
        public bool IsLLAATM => _LLAATMSwitch.Value;
        public bool IsLLBATM => _LLBATMSwitch.Value;
        public bool IsTMPowerOn => _TMPowerOn.Value;
        public bool IsTMInSafty => _TMInSafty.Value;
        public bool IsLLAFastPumpOpen => _LLAFastPumpValve.Status;
        public bool IsLLASoftPumpOpen => _LLASoftPumpValve.Status;
        public bool IsLLBFastPumpOpen => _LLBFastPumpValve.Status;
        public bool IsLLBSoftPumpOpen => _LLBSoftPumpValve.Status;
        public bool IsLLAVentValveOpen => _LLAVentValve.Status;
        public bool IsLLAPurgeValveOpen => _LLAPurgeValve.Status;
        public bool IsLLBVentValveOpen => _LLBVentValve.Status;
        public bool IsLLBPurgeValveOpen => _LLBPurgeValve.Status;

        public bool IsTMVentValveOpen => _TMVentValve.Status;

       // public bool IsTMFastVentValveOpen => _TMFastVentValve.Status;

        public bool IsTMPurgeValveOpen => _TMPurgeValve.Status;
        public bool IsTMFastPumpOpen => _TMFastPumpValve.Status;
        public bool IsTMSoftPumpOpen => _TMSoftPumpValve.Status;
        public bool TMRobotNotExtendToPMA => _TMRobotNotExtendPMA.Value;
        public bool TMRobotNotExtendToPMB => _TMRobotNotExtendPMB.Value;
        public bool TMRobotNotExtendToPMC => _TMRobotNotExtendPMC.Value;
        public bool TMRobotNotExtendToPMD => _TMRobotNotExtendPMD.Value;
        public bool TMRobotNotExtendToLLA => _TMRobotNotExtendLLA.Value;
        public bool TMRobotNotExtendToLLB => _TMRobotNotExtendLLB.Value;
        public bool EfemRobotNotExtendToLLA => _EfemRobotNotExtendLLA.Value;
        public bool EfemRobotNotExtendToLLB => _EfemRobotNotExtendLLB.Value;

        public override double ChamberPressure => _presureCtrl.TMPressureGauge.Value;
        public double LLAPressure => _presureCtrl.LLAPressureGauge.Value;
        public double LLBPressure => _presureCtrl.LLBPressureGauge.Value;
        public override double ForelinePressure => _presureCtrl.MFForelineGauge.Value;
        public double LoadlockForelinePressure => _presureCtrl.LLForelineGauge.Value;

        public  bool? TMPumpIsRunning => _TMPump?.IsRunning;
        public  bool? LLPumpIsRunning => _LLPump?.IsRunning;

        public enum LLPumpState
        {
            Idle,
            LLAUsing,
            LLBUsing,
        }

        LLPumpState _llPumpingState = LLPumpState.Idle;

        public LLPumpState LLPumpStatus { get { return _llPumpingState; } }

        private string _allInstalledModules { get { return SC.GetStringValue("System.InstalledModules").ToString(); } }
        public bool PMASlitDoorClosed
        {
            get
            {
                if (_allInstalledModules.Contains("PMA"))
                {
                    return DATA.Poll<bool>("PMA", "IsSlitDoorClosed");
                }
                else
                {
                    return true;
                }
            }
        }
        public bool PMBSlitDoorClosed
        {
            get
            {
                if (_allInstalledModules.Contains("PMB"))
                {
                    return DATA.Poll<bool>("PMB", "IsSlitDoorClosed");
                }
                else
                {
                    return true;
                }
            }
        }
        public bool PMCSlitDoorClosed
        {
            get
            {
                if (_allInstalledModules.Contains("PMC"))
                {
                    return DATA.Poll<bool>("PMC", "IsSlitDoorClosed");
                }
                else
                {
                    return true;
                }
            }
        }
        public bool PMDSlitDoorClosed
        {
            get
            {
                if (_allInstalledModules.Contains("PMD"))
                {
                    return DATA.Poll<bool>("PMD", "IsSlitDoorClosed");
                }
                else
                {
                    return true;
                }
            }
        }
        public bool AllPMSlitDoorClosed
        {
            get 
            {
                if (PMASlitDoorClosed == true && PMBSlitDoorClosed == true && PMCSlitDoorClosed == true && PMDSlitDoorClosed == true)
                {
                    return true;
                }
                else
                {
                    return false;
                }
            }
        }

        public  Dictionary<ModuleName, ModuleName> PreRotateModules { get; private set; }

        public JetTM() : base("TM")
        {
            _TMLid  = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.TMLid}");
            _LLALid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLALid}");
            _LLBLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLBLid}");

            _LLATSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLATSlitDoor}");
            _LLBTSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBTSlitDoor}");
            _LLAESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLAESlitDoor}");
            _LLBESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBESlitDoor}");

            _TMN2Valve          = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMValveN2}");
            _TMSoftPumpValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftPumpValve}");
            _TMFastPumpValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastPumpValve}");
            _TMPurgeValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMPurgeValve}");
            _TMVentValve        = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVentValve}");
            //_TMSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftVentValve}");
            //_TMFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastVentValve}");

            _LLASoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLASoftPumpValve}");
            _LLAFastPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAFastPumpValve}");
            _LLAPurgeValve      = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAPurgeValve}");
            _LLAVentValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAVentValve}");

            _LLASoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLASoftVentValve}");
            _LLAFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAFastVentValve}");
            _LLBSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftVentValve}");
            _LLBFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastVentValve}");

            _TMVacAtmMode = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVacAtmMode}");


            _LLBSoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftPumpValve}");
            _LLBFastPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastPumpValve}");
            _LLBPurgeValve      = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBPurgeValve}");
            _LLBVentValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBVentValve}");
            _WaferRelayValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveWaterRelay}");

            _TMPowerOn          = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPowerOn}");
            _TMInSafty          = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMInSafty}");
            _WaferLeakSensor    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.WaferLeakSensor}");
            _EFEMSideDoorClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EFEMSideDoorClosed}");
            _TMPCWFlowSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPCWFlowSwitch}");
            _LLAPCWFlowSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAPCWFlowSwitch}");
            _LLBPCWFlowSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBPCWFlowSwitch}");
            _TMLidClosed        = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMLidClosed}");

            _CDAPressureSwitch      = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.CDAPressureSwitch}");
            _VaccumPressureSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.VaccumPressureSwitch}");
            _N2PressureSwitch       = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.N2PressureSwitch}");

            _TMRobotNotExtendPMA    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMA}");
            _TMRobotNotExtendPMB    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMB}");
            _TMRobotNotExtendPMC    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMC}");
            _TMRobotNotExtendPMD    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMD}");
            _TMRobotNotExtendLLA    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLA}");
            _TMRobotNotExtendLLB    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLB}");
            _EfemRobotNotExtendLLA  = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLA}");
            _EfemRobotNotExtendLLB  = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLB}");

            _TMVacSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMVacSwitch}");
            _LLAVacSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAVacSwitch}");
            _LLBVacSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBVacSwitch}");
            _TMATMSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMATMSwitch}");
            _LLAATMSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAATMSwitch}");
            _LLBATMSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBATMSwitch}");

            _LLAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLAWaferSizeCheckSwitch}");
            _LLBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLBWaferSizeCheckSwitch}");
            _PMAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMAWaferSizeCheckSwitch}");
            _PMBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMBWaferSizeCheckSwitch}");
            _PMCWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMCWaferSizeCheckSwitch}");
            _PMDWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMDWaferSizeCheckSwitch}");
            _PressureMode_Switch = DEVICE.GetDevice<IoSwitch>("TM.PressureModeSwitch");

            _TMMfc = DEVICE.GetDevice<IoMfc>($"{Module}.TM_MFC1");

            _presureCtrl = DEVICE.GetDevice<IoTMPressureCtrl>($"TM.{VenusDevice.TMPressureCtrl}");

            if (SC.GetValue<int>($"TM.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"TM.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _TMPump = DEVICE.GetDevice<SkyPump>($"TM.{VenusDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"TM.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _TMPump = DEVICE.GetDevice<EdwardsPump>($"TM.{VenusDevice.MainPump}");
                }
            }
            if (SC.GetValue<int>($"LLA.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _LLPump = DEVICE.GetDevice<SkyPump>($"LLA.{VenusDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _LLPump = DEVICE.GetDevice<EdwardsPump>($"LLA.{VenusDevice.MainPump}");
                }
            }

            PreRotateModules = new Dictionary<ModuleName, ModuleName>();
            foreach (var mod in new List<ModuleName> { ModuleName.LLA, ModuleName.LLB, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD })
            {
                string rotateModule = SC.GetStringValue($"TM.PreRotation.{mod}");
                if (rotateModule.Length == 3)
                {
                    ModuleName rotModule = ModuleHelper.Converter(rotateModule);
                    if (ModuleHelper.IsPm(rotModule) || ModuleHelper.IsLoadLock(rotModule))
                    {
                        PreRotateModules.Add(mod, rotModule);
                    }
                }
            }

            DATA.Subscribe("TM.PumpIsRunning", () => TMPumpIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("TM.TMLidClosed", () => TMLidClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("TM.LLALidClosed", () => LLALidClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("TM.LLBLidClosed", () => LLBLidClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB);

            OP.Subscribe("TM.ControlPump", (cmd, args) =>
            {
                _TMPump.SetPumpOnOff((bool)args[0]);
                return true;
            });
            DATA.Subscribe("LL.PumpIsRunning", () => LLPumpIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            OP.Subscribe("LL.ControlPump", (cmd, args) =>
            {
                _LLPump.SetPumpOnOff((bool)args[0]);
                return true;
            });

            OP.Subscribe("TM.SetChamberPressure", (cmd, args) =>
            {
                _presureCtrl.SetTMPressure((int)(args[0]));
                return true;
            });
            OP.Subscribe("TM.SetChamberFlow", (cmd, args) =>
            {
                _TMMfc.SetPoint = (int)(args[0]);
                return true;
            });
            OP.Subscribe($"TM.SetMFSlitDoor", (cmd, args) => 
            {
                var module = (ModuleName)Enum.Parse(typeof(ModuleName), args[0].ToString());
                TurnMFSlitDoor(module, (bool)args[1], out _);
                return true;
            });
            OP.Subscribe($"TM.SetEFEMSlitDoor", (cmd, args) =>
            {
                var module = (ModuleName)Enum.Parse(typeof(ModuleName), args[0].ToString());
                TurnEFEMSlitDoor(module, (bool)args[1], out _);
                return true;
            });
            _TMVacAtmMode.TurnValve(RouteManager.IsATMMode, out string _);

        }

        public override void Monitor()
        {
            if (_WaferLeakSensor.Value && _WaferRelayValve.Status == false)
            {
                _WaferRelayValve.TurnValve(true, out string _);

            }
            else if (_WaferLeakSensor.Value == false && _WaferRelayValve.Status == true)
            { 
                _WaferRelayValve.TurnValve(false, out string _);

            }
        }

        
        public void TurnSoftPumpValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMSoftPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLASoftPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBSoftPumpValve.TurnValve(bOn, out string _);
                    break;

            }
        }

        public void TurnFastPumpValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMFastPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAFastPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBFastPumpValve.TurnValve(bOn, out string _);
                    break;
            }
        }

        public void TurnVentValve(ModuleName mod, bool bOn)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    _TMVentValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAVentValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBVentValve.TurnValve(bOn, out string _);
                    break;
            }
        }

      



        public void TurnPurgeValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMPurgeValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAPurgeValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBPurgeValve.TurnValve(bOn, out string _);
                    break;
            }
        }

        public void TurnN2Valve(bool bOn)
        {
            _TMN2Valve.TurnValve(bOn, out string _);
        }

        public void CloseModuleAllValves(ModuleName mod)
        {
            TurnFastPumpValve(mod, false);
            TurnSoftPumpValve(mod, false);
            TurnVentValve(mod, false);
            TurnPurgeValve(mod, false);

            if (mod == ModuleName.TM)
                TurnN2Valve(false);
        }


        public double GetModulePressure(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return ChamberPressure;
                case ModuleName.LLA:
                    return LLAPressure;
                case ModuleName.LLB:
                    return LLBPressure;
            }

            return 0;
        }

        public bool IsModuleATM(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return IsTMATM;
                case ModuleName.LLA:
                    return IsLLAATM;
                case ModuleName.LLB:
                    return IsLLBATM;
            }

            return false;
        }

        public bool IsModuleVaccum(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return IsTMVac;
                case ModuleName.LLA:
                    return IsLLAVac;
                case ModuleName.LLB:
                    return IsLLBVac;
            }

            return false;
        }

        public bool CheckLidClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if(!TMLidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Lid not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if(!LLALidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Lid not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (!LLBLidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Lid not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckVentValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Vent Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Vent Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Vent Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckPurgeValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Purge Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Purge Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Purge Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckPumpValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsTMSoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Soft Pump Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsLLASoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Soft Pump Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsLLBSoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Soft Pump Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }
        private bool CheckRobotNotExtendSensor(ModuleName ll, bool open, bool bTMDoor, out string reason)
        {
            string action = open ? "Open" : "Close";
            string doorName = bTMDoor ? "TM" : "EFEM";
            if (ll == ModuleName.LLA)
            {
                if (!_TMRobotNotExtendLLA.Value)
                {
                    reason = $"TM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
                    LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                    return false;
                }

                if (!_EfemRobotNotExtendLLA.Value)
                {
                    reason = $"EFEM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
                    LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                    return false;
                }
            }
            else
            {
                if (!_TMRobotNotExtendLLB.Value)
                {
                    reason = $"TM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
                    LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                    return false;
                }

                if (!_EfemRobotNotExtendLLB.Value)
                {
                    reason = $"EFEM Robot Not Extend to {ll} is false, can not {action} {doorName} slit door";
                    LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                    return false;
                }
            }

            reason = "";
            return true;
        }
        public bool TurnMFSlitDoor(ModuleName loadlock, bool open, out string reason)
        {
            if (!CheckRobotNotExtendSensor(loadlock, open, true, out reason))

                return false;

            if (open)
            {
                if (RouteManager.IsATMMode)
                {
                    if (!IsTMATM)
                    {
                        reason = $"TM is not ATM, can not open slit door";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }

                    if (!IsModuleATM(loadlock))
                    {
                        reason = $"{loadlock} is not ATM, can not open slit door";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }
                }
                else
                {
                    if(!IsModuleVaccum(loadlock))
                    {
                        reason = $"{loadlock} is notVacuum, can not open slit door";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }

                    double maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");
                    if (Math.Abs(GetModulePressure(loadlock) - GetModulePressure(ModuleName.TM)) > maxPressureDifference)
                    {
                        reason = $"{loadlock}:{GetModulePressure(loadlock)} and TM : {GetModulePressure(ModuleName.TM)} pressure difference exceeds the max limit {maxPressureDifference}";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }
                }

            }

            switch(loadlock)
            {
                case ModuleName.LLA:
                    return _LLATSlitDoor.SetCylinder(open, out reason);
                case ModuleName.LLB:
                    return _LLBTSlitDoor.SetCylinder(open, out reason);

            }

            reason = $"Invalid module {loadlock}";
            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            return false;
        }

        public bool TurnEFEMSlitDoor(ModuleName loadlock, bool open, out string reason)
        {
            if (!CheckRobotNotExtendSensor(loadlock, open, false, out reason))

                return false;

            if (open && !IsModuleATM(loadlock))
            {
                reason = $"{loadlock} is not ATM, can not open EFEM side slit door";
                LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                return false;
            }

            switch (loadlock)
            {
                case ModuleName.LLA:
                    return _LLAESlitDoor.SetCylinder(open, out reason);
                case ModuleName.LLB:
                    return _LLBESlitDoor.SetCylinder(open, out reason);

            }

            reason = $"Invalid module {loadlock}";
            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            return false;
        }
        //public bool ControlTMPump(bool ison)
        //{
        //    _TMPump.SetPumpOnOff(ison);
        //    return true;
        //}
        public void SwitchTMPressureMode(bool isPressureMode)
        {
            if (isPressureMode==true)
            {
                _PressureMode_Switch.TurnOn();

            }
            else
            { 
                _PressureMode_Switch.TurnOff();

            }
        }
        public void SetTMPressure(int pressureValue)
        {
            _presureCtrl.SetTMPressure(pressureValue);
        }
        public void SetTMFlow(int flowValue)
        {
            _TMMfc.SetPoint = (flowValue);
        }

        public bool CloseAllSlitDoor()
        {
            _LLATSlitDoor.SetCylinder(false, out _);
            _LLBTSlitDoor.SetCylinder(false, out _);
            if (_allInstalledModules.Contains("PMA"))
            {
                OP.DoOperation("PMA.SetSlitDoor", false);
            }
            if (_allInstalledModules.Contains("PMB"))
            {
                OP.DoOperation("PMB.SetSlitDoor", false);
            }
            if (_allInstalledModules.Contains("PMC"))
            {
                OP.DoOperation("PMC.SetSlitDoor", false);
            }
            if (_allInstalledModules.Contains("PMD"))
            {
                OP.DoOperation("PMD.SetSlitDoor", false);
            }
            return true;
        }
        public bool TurnTMPump(bool ison)
        {
            _TMPump.SetPumpOnOff(ison);
            return true;
        }

        public bool TryGetLLPump(ModuleName LLname)
        {
            //Self
            if ((LLname == ModuleName.LLA && _llPumpingState == LLPumpState.LLAUsing) || (LLname == ModuleName.LLB && _llPumpingState == LLPumpState.LLBUsing))
                return true;

            //Idle
            if (LLname == ModuleName.LLA && !IsLLBFastPumpOpen && !IsLLBSoftPumpOpen && _llPumpingState == LLPumpState.Idle)
            {
                _llPumpingState = LLPumpState.LLAUsing;
                return true;
            }

            if (LLname == ModuleName.LLB && !IsLLAFastPumpOpen && !IsLLASoftPumpOpen && _llPumpingState == LLPumpState.Idle)
            {
                _llPumpingState = LLPumpState.LLBUsing;
                return true;
            }

            //LOG.Write(eEvent.WARN_DEFAULT_WARN, LLname, "无法打开，另一个泵正在用！");
            //locked
            return false;
        }

        public void ReleasePump(ModuleName Module)
        {
            //release pump (must do it by user)
            if ((Module == ModuleName.LLA && _llPumpingState == LLPumpState.LLAUsing) || (Module == ModuleName.LLB && _llPumpingState == LLPumpState.LLBUsing))
                _llPumpingState = LLPumpState.Idle;
        }
        public void HomeSlitDoor()
        {
            if (IsLLASlitDoorClosed == true)
            {
                _LLATSlitDoor.SetCylinder(false, out _);
            }
            else if(IsLLASlitDoorOpen == true)
            { 
                _LLATSlitDoor.SetCylinder(true, out _);
            }

            if (IsLLBSlitDoorClosed == true)
            {
                _LLBTSlitDoor.SetCylinder(false, out _);
            }
            else if (IsLLBSlitDoorOpen == true)
            {
                _LLBTSlitDoor.SetCylinder(true, out _);
            }

            if (IsLLAESlitDoorClosed == true)
            {
                _LLAESlitDoor.SetCylinder(false, out _);
            }
            else if (IsLLAESlitDoorOpen == true)
            {
                _LLAESlitDoor.SetCylinder(true, out _);
            }

            if (IsLLBESlitDoorClosed == true)
            {
                _LLBESlitDoor.SetCylinder(false, out _);
            }
            else if (IsLLBESlitDoorOpen == true)
            {
                _LLBESlitDoor.SetCylinder(true, out _);
            }
        }

    }
}