| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Venus_RT.Devices;using MECF.Framework.Common.Routine;using Venus_Core;namespace Venus_RT.Modules.PMs{    class StartTurboPumpRoutine : PMRoutineBase, IRoutine    {        private enum TurboPumpStep        {            kStart,            kEnd,        }        private readonly int FORELINE_PRESSURE_THRESHOLD = 500;        private readonly int START_TURBO_PUMP_TIMEOUT = 30000;        public StartTurboPumpRoutine(JetPMBase chamber) : base(chamber)        {            Name = "Start TurboPump";        }        public RState Start(params object[] objs)        {            if (_chamber.IsTurboPumpRunning)            {                Stop("Turbo Pump 已经运行");                return RState.Failed;            }            if(!_chamber.IsPumpRunning)            {                Stop("干泵没有启动, 请先启动干泵");                return RState.Failed;            }            if(_chamber.ForelinePressure >= FORELINE_PRESSURE_THRESHOLD)            {                Stop($"Foreline:{_chamber.ForelinePressure} 压力太高, 不能启动 Turbo Pump");                return RState.Failed;            }            Reset();            _chamber.OpenValve(ValveType.FastPump, false);            if (_chamber.ChamberType != JetChamber.VenusDE)            {                _chamber.OpenValve(ValveType.SoftPump, false);            }                       _chamber.TurnTurboPump(true);            return Runner.Start(Module, Name);        }        public RState Monitor()        {            Runner.Wait(TurboPumpStep.kStart, () => { return _chamber.IsTurboPumpRunning; }, START_TURBO_PUMP_TIMEOUT)                .End(TurboPumpStep.kEnd, NullFun, _delay_50ms);            return Runner.Status;        }        public void Abort()        {            _chamber.CloseValves();            _chamber.TurnTurboPump(false);        }    }}
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