AutoCycle.cs 46 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. enum ModulePriority
  25. {
  26. High,
  27. Middle,
  28. Low,
  29. Stop,
  30. }
  31. enum MovingStatus
  32. {
  33. Staying,
  34. Waiting,
  35. Moving,
  36. }
  37. class ModuleFlag
  38. {
  39. public ModulePriority Priority { get; set; }
  40. public MovingStatus MovingStatus { get; set; }
  41. public ModuleFlag(ModulePriority _priority)
  42. {
  43. Priority = _priority;
  44. MovingStatus = MovingStatus.Staying;
  45. }
  46. }
  47. class AutoCycle : IRoutine
  48. {
  49. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  50. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  51. private RState _cycleState = RState.Init;
  52. Dictionary<ModuleName, SchedulerModule> _atmSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  53. Dictionary<ModuleName, ModuleFlag> _atmModules = new Dictionary<ModuleName, ModuleFlag>();
  54. Dictionary<ModuleName, SchedulerModule> _vacSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  55. Dictionary<ModuleName, ModuleFlag> _vacModules = new Dictionary<ModuleName, ModuleFlag>();
  56. SchedulerTMRobot _tmRobot = new SchedulerTMRobot();
  57. SchedulerEfemRobot _efemRobot = new SchedulerEfemRobot();
  58. List<SlotItem> _vacReadyOutSlots = new List<SlotItem>();
  59. List<SlotItem> _vacReadyInSlots = new List<SlotItem>();
  60. List<SlotItem> _atmReadyOutSlots = new List<SlotItem>();
  61. List<SlotItem> _atmReadyInSlots = new List<SlotItem>();
  62. List<int> _LLAInSlot = new List<int> { 0, 1, 2, 3 };
  63. List<int> _LLAOutSlot = new List<int> { 0, 1, 2, 3 };
  64. List<int> _LLBInSlot = new List<int> { 0, 1, 2, 3 };
  65. List<int> _LLBOutSlot = new List<int> { 0, 1, 2, 3 };
  66. List<MoveItem> _movingItems = new List<MoveItem>();
  67. List<MoveItem> _efemMovingItems = new List<MoveItem>();
  68. Dictionary<SlotItem, Guid> _vacWaferTargets = new Dictionary<SlotItem, Guid>();
  69. Dictionary<SlotItem, Guid> _atmWaferTargets = new Dictionary<SlotItem, Guid>();
  70. private SchedulerFACallback _faCallback;
  71. private SchedulerDBCallback _dbCallback;
  72. private bool _isCycleMode;
  73. private int _cycleSetPoint = 0;
  74. private int _cycledCount = 0;
  75. private int _cycledWafer = 0;
  76. public bool HasJobRunning => _lstControlJobs.Count > 0;
  77. #region public interface
  78. public AutoCycle()
  79. {
  80. _faCallback = new SchedulerFACallback();
  81. _dbCallback = new SchedulerDBCallback();
  82. InitModules();
  83. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  84. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  85. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  86. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  87. }
  88. public RState Start(params object[] objs)
  89. {
  90. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  91. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  92. _cycledWafer = 0;
  93. _cycledCount = 0;
  94. return RState.Running;
  95. }
  96. public RState Monitor()
  97. {
  98. prelude();
  99. driveAtmSystem();
  100. driveVacSystem();
  101. epilogue();
  102. return _cycleState;
  103. }
  104. public void Abort()
  105. {
  106. }
  107. public void CreateJob(Dictionary<string, object> param)
  108. {
  109. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  110. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  111. string[] slotSequence = (string[])param["SlotSequence"];
  112. string jobId = (string)param["JobId"];
  113. string module = (string)param["Module"];
  114. //bool autoStart = (bool)param["AutoStart"];
  115. string lotId = jobId;
  116. if (param.ContainsKey("LotId"))
  117. lotId = (string)param["LotId"];
  118. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  119. {
  120. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}");
  121. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  122. return;
  123. }
  124. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  125. {
  126. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} should be LoadPort");
  127. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  128. return;
  129. }
  130. if (string.IsNullOrEmpty(jobId))
  131. {
  132. jobId = "CJ_Local_" + module;
  133. }
  134. if (_lstControlJobs.Exists(x => x.Name == jobId))
  135. {
  136. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{jobId} already created");
  137. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  138. return;
  139. }
  140. SchedulerLoadPort lp = _atmSchedulers[ModuleHelper.Converter(module)] as SchedulerLoadPort;
  141. if (!lp.CheckReadyRunJob())
  142. {
  143. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} not ready");
  144. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  145. return;
  146. }
  147. ControlJobInfo cj = new ControlJobInfo();
  148. cj.Name = jobId;
  149. cj.Module = module;
  150. cj.LotName = lotId;
  151. cj.LotInnerId = Guid.NewGuid();
  152. cj.LotWafers = new List<WaferInfo>();
  153. cj.SetState(EnumControlJobState.WaitingForStart);
  154. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  155. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  156. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  157. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  158. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  159. {
  160. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  161. continue;
  162. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  163. indexSequence[groupName] = slotSequence[i];
  164. if (!seqSlot.ContainsKey(groupName))
  165. {
  166. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  167. }
  168. if (!seqSlotWafers.ContainsKey(groupName))
  169. {
  170. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  171. }
  172. seqSlot[groupName][i] = true;
  173. if (!WaferManager.Instance.CheckHasWafer(module, i))
  174. {
  175. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  176. return;
  177. }
  178. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  179. {
  180. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}");
  181. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  182. return;
  183. }
  184. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  185. {
  186. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}");
  187. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  188. return;
  189. }
  190. cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
  191. WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).SequenceName = slotSequence[i];
  192. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  193. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  194. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  195. }
  196. if (seqSlotWafers.Count == 0)
  197. {
  198. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job has not assign wafer");
  199. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  200. return;
  201. }
  202. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  203. string[] seqs = seqSlot.Keys.ToArray();
  204. for (int i = 0; i < seqs.Length; i++)
  205. {
  206. ProcessJobInfo pj = new ProcessJobInfo();
  207. pj.Name = jobId + "_" + (i + 1);
  208. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  209. pj.ControlJobName = cj.Name;
  210. pj.LotName = lotId;
  211. pj.SlotWafers = seqSlotWafers[seqs[i]];
  212. pj.SetState(EnumProcessJobState.Queued);
  213. if (!CheckSequencePmReady(pj.Sequence, null, out _, out string reason))
  214. {
  215. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  216. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  217. return;
  218. }
  219. if (!SC.GetValue<bool>("System.IsATMMode") && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  220. {
  221. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  222. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  223. return;
  224. }
  225. pjs.Add(pj);
  226. }
  227. _dbCallback.LotUpdate(cj);
  228. foreach (var pj in pjs)
  229. {
  230. cj.ProcessJobNameList.Add(pj.Name);
  231. _lstProcessJobs.Add(pj);
  232. }
  233. _lstControlJobs.Add(cj);
  234. //AssociatedPMWithLP(cj);
  235. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  236. }
  237. public bool CheckAllJobDone()
  238. {
  239. foreach (var cj in _lstControlJobs)
  240. {
  241. if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
  242. return false;
  243. }
  244. return true;
  245. }
  246. public bool CheckJobJustDone(out string sJobName)
  247. {
  248. foreach (var cj in _lstControlJobs)
  249. {
  250. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  251. {
  252. //LP;WaferSize;Lot;Number;Start;End;
  253. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  254. cj.BeenPosted = true;
  255. return true;
  256. }
  257. }
  258. sJobName = "NULL";
  259. return false;
  260. }
  261. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  262. {
  263. foreach (var pj in _lstProcessJobs)
  264. {
  265. if (pj.ControlJobName == cj.Name)
  266. return pj;
  267. }
  268. return null;
  269. }
  270. public void AbortJob(string jobName)
  271. {
  272. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  273. if (cj == null)
  274. {
  275. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"abort job rejected, not found job with id {jobName}");
  276. return;
  277. }
  278. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  279. foreach (var pj in _lstProcessJobs)
  280. {
  281. if (pj.ControlJobName == cj.Name)
  282. {
  283. pj.SetState(EnumProcessJobState.Aborting);
  284. pjAbortList.Add(pj);
  285. int unprocessed = 0;
  286. int aborted = 0;
  287. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  288. foreach (var waferInfo in wafers)
  289. {
  290. waferInfo.ProcessJob = null;
  291. waferInfo.NextSequenceStep = 0;
  292. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  293. unprocessed++;
  294. }
  295. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  296. }
  297. }
  298. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  299. _dbCallback.LotFinished(cj);
  300. foreach (var pj in pjAbortList)
  301. {
  302. _lstProcessJobs.Remove(pj);
  303. }
  304. _lstControlJobs.Remove(cj);
  305. }
  306. public void StopJob(string jobName)
  307. {
  308. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  309. if (cj == null)
  310. {
  311. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"stop job rejected, not found job with id {jobName}");
  312. return;
  313. }
  314. foreach (var pj in _lstProcessJobs)
  315. {
  316. if (pj.ControlJobName == cj.Name)
  317. {
  318. pj.SetState(EnumProcessJobState.Stopping);
  319. }
  320. }
  321. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  322. _dbCallback.LotFinished(cj);
  323. }
  324. public void ResumeJob(string jobName)
  325. {
  326. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  327. if (cj == null)
  328. {
  329. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  330. return;
  331. }
  332. if (cj.State == EnumControlJobState.Paused)
  333. {
  334. cj.SetState(EnumControlJobState.Executing);
  335. }
  336. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  337. }
  338. public void PauseJob(string jobName)
  339. {
  340. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  341. if (cj == null)
  342. {
  343. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  344. return;
  345. }
  346. if (cj.State == EnumControlJobState.Executing)
  347. {
  348. cj.SetState(EnumControlJobState.Paused);
  349. }
  350. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  351. }
  352. public void StartJob(string jobName)
  353. {
  354. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  355. if (cj == null)
  356. {
  357. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"start job rejected, not found job with id {jobName}");
  358. return;
  359. }
  360. if (cj.State == EnumControlJobState.WaitingForStart)
  361. {
  362. cj.SetState(EnumControlJobState.Executing);
  363. //PreJobClean(cj);
  364. (_atmSchedulers[ModuleHelper.Converter(cj.Module)] as SchedulerLoadPort).NoteJobStart();
  365. cj.StartTime = DateTime.Now;
  366. _dbCallback.LotCreated(cj);
  367. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  368. //if (!_blockingWatcher.IsRunning)
  369. // _blockingWatcher.Restart();
  370. //ResetTraceFlag();
  371. }
  372. }
  373. public void Clear()
  374. {
  375. _efemRobot.ResetTask();
  376. foreach (var module in _vacSchedulers)
  377. {
  378. module.Value.ResetTask();
  379. }
  380. foreach (var module in _atmSchedulers)
  381. {
  382. module.Value.ResetTask();
  383. }
  384. _lstControlJobs.Clear();
  385. _lstProcessJobs.Clear();
  386. //_mapTarget.Clear();
  387. //queMoveAction.Clear();
  388. //_curAction.state = ActionState.Done;
  389. }
  390. #endregion
  391. private void InitModules()
  392. {
  393. foreach(var module in new ModuleName[]{ ModuleName.LP1, ModuleName.LP2, ModuleName.LP3,
  394. ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2})
  395. {
  396. if(ModuleHelper.IsInstalled(module))
  397. {
  398. if(ModuleHelper.IsLoadPort(module))
  399. {
  400. _atmSchedulers[module] = new SchedulerLoadPort(module);
  401. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  402. }
  403. else if(ModuleHelper.IsAligner(module) || ModuleHelper.IsCooling(module))
  404. {
  405. _atmSchedulers[module] = new SchedulerAligner(module);
  406. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  407. }
  408. }
  409. }
  410. foreach (var module in new ModuleName[] { ModuleName.PMA, ModuleName.PMB, ModuleName.PMC,
  411. ModuleName.PMD, ModuleName.PME, ModuleName.PMF})
  412. {
  413. if (ModuleHelper.IsInstalled(module))
  414. {
  415. _vacSchedulers[module] = new SchedulerPM(module);
  416. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  417. }
  418. }
  419. foreach (var module in new ModuleName[] { ModuleName.LLA, ModuleName.LLB })
  420. {
  421. if (ModuleHelper.IsInstalled(module))
  422. {
  423. var llScheduler = new SchedulerLoadLock(module);
  424. _vacSchedulers[module] = llScheduler;
  425. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  426. _atmSchedulers[module] = llScheduler;
  427. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  428. }
  429. }
  430. }
  431. private void prelude()
  432. {
  433. }
  434. private void epilogue()
  435. {
  436. foreach(var mod in _vacSchedulers)
  437. {
  438. if(mod.Value.IsAvailable)
  439. {
  440. var tars = _vacWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  441. foreach(var tar in tars)
  442. {
  443. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  444. if (wafer.IsEmpty)
  445. continue;
  446. if(wafer.InnerId == tar.Value)
  447. {
  448. // wafer arrive
  449. _vacWaferTargets.Remove(tar.Key);
  450. wafer.NextSequenceStep++;
  451. }
  452. }
  453. }
  454. }
  455. foreach(var mod in _atmSchedulers)
  456. {
  457. if (mod.Value.IsAvailable)
  458. {
  459. var tars = _atmWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  460. foreach (var tar in tars)
  461. {
  462. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  463. if (wafer.IsEmpty)
  464. continue;
  465. if (wafer.InnerId == tar.Value)
  466. {
  467. // wafer arrive
  468. _atmWaferTargets.Remove(tar.Key);
  469. if (!ModuleHelper.IsLoadPort(tar.Key.Module))
  470. wafer.NextSequenceStep++;
  471. }
  472. }
  473. }
  474. }
  475. }
  476. private void driveVacSystem()
  477. {
  478. PumpingTMRobotTask();
  479. ProcessTMRobotTask();
  480. RuningTMRobotTask();
  481. }
  482. #region Vacuum System
  483. private void PumpingTMRobotTask()
  484. {
  485. foreach(var mod in _vacSchedulers)
  486. {
  487. if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Staying)
  488. {
  489. if(ModuleHelper.IsLoadLock(mod.Key))
  490. {
  491. var inSlots = mod.Key == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  492. foreach(var slot in inSlots)
  493. {
  494. if(WaferManager.Instance.CheckHasWafer(mod.Key, slot) && IsVacWaferReadyOut(mod.Key, slot))
  495. {
  496. _vacReadyOutSlots.Add(new SlotItem(mod.Key, slot));
  497. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  498. }
  499. }
  500. var outSlots = mod.Key == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  501. foreach(var slot in outSlots)
  502. {
  503. if(WaferManager.Instance.CheckNoWafer(mod.Key, slot))
  504. {
  505. _vacReadyInSlots.Add(new SlotItem(mod.Key, slot));
  506. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  507. }
  508. }
  509. }
  510. else
  511. {
  512. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0) && IsVacWaferReadyOut(mod.Key, 0)) // processed?
  513. {
  514. _vacReadyOutSlots.Add(new SlotItem(mod.Key, 0));
  515. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  516. }
  517. else
  518. {
  519. _vacReadyInSlots.Add(new SlotItem(mod.Key, 0));
  520. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  521. }
  522. }
  523. }
  524. }
  525. }
  526. bool SearchWaferDestination(SlotItem outSlot, out SlotItem destSlot)
  527. {
  528. destSlot = new SlotItem(ModuleName.System, -1);
  529. var wafer = WaferManager.Instance.GetWafer(outSlot.Module, outSlot.Slot);
  530. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  531. {
  532. var validSlots = GetModuleValidSlots(next_module);
  533. foreach (var nSlot in validSlots)
  534. {
  535. if (_movingItems.Exists(mItem => mItem.DestinationModule == next_module && mItem.DestinationSlot == nSlot))
  536. continue;
  537. var ready_in = _vacReadyInSlots.Find(item => item.Module == next_module && item.Slot == nSlot);
  538. if (ready_in != null)
  539. {
  540. destSlot.Module = ready_in.Module;
  541. destSlot.Slot = nSlot;
  542. return true;
  543. }
  544. }
  545. }
  546. return false;
  547. }
  548. List<int> GetModuleValidSlots(ModuleName mod)
  549. {
  550. var validSlot = new List<int>();
  551. if(ModuleHelper.IsLoadLock(mod))
  552. {
  553. var inSlots = mod == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  554. foreach (var slot in inSlots)
  555. {
  556. if (WaferManager.Instance.CheckNoWafer(mod, slot) && !_movingItems.Exists(item => item.DestinationModule == mod && item.DestinationSlot == slot))
  557. validSlot.Add(slot);
  558. if (WaferManager.Instance.CheckHasWafer(mod, slot) && _movingItems.Exists(item => item.SourceModule == mod && item.SourceSlot == slot))
  559. validSlot.Add(slot);
  560. }
  561. }
  562. else if(ModuleHelper.IsPm(mod))
  563. {
  564. if (WaferManager.Instance.CheckNoWafer(mod, 0) && !_movingItems.Exists(item => item.DestinationModule == mod))
  565. validSlot.Add(0);
  566. if (WaferManager.Instance.CheckHasWafer(mod, 0) && _movingItems.Exists(item => item.SourceModule == mod))
  567. validSlot.Add(0);
  568. }
  569. return validSlot.Distinct().ToList();
  570. }
  571. List<MoveItem> SearchWaitInSlots(ModuleName inModule)
  572. {
  573. List<MoveItem> inSlots = new List<MoveItem>();
  574. var validSlots = GetModuleValidSlots(inModule);
  575. foreach(var slot in _vacReadyOutSlots)
  576. {
  577. if (slot.Module == inModule)
  578. continue;
  579. var wafer = WaferManager.Instance.GetWafer(slot.Module, slot.Slot);
  580. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  581. {
  582. if(next_module == inModule && validSlots.Count > 0)
  583. {
  584. inSlots.Add(new MoveItem(slot.Module, slot.Slot, inModule, validSlots.First(), Hand.None) );
  585. validSlots.RemoveAt(0);
  586. }
  587. }
  588. }
  589. return inSlots;
  590. }
  591. private void ProcessTMRobotTask()
  592. {
  593. if(_tmRobot.IsAvailable)
  594. {
  595. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1))
  596. {
  597. return;
  598. }
  599. foreach(var slot in _vacReadyOutSlots)
  600. {
  601. if(ModuleHelper.IsLoadLock(slot.Module))
  602. {
  603. if(SearchWaferDestination(slot, out SlotItem destSlot))
  604. {
  605. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  606. // check whether match double pick pattern
  607. var out_slot_2 = _vacReadyOutSlots.Find(item => item.Module == slot.Module && item.Slot != slot.Slot);
  608. if (out_slot_2 != null)
  609. {
  610. if(SearchWaferDestination(out_slot_2, out SlotItem destSlot_2))
  611. {
  612. _movingItems.Add(new MoveItem(out_slot_2.Module, out_slot_2.Slot, destSlot_2.Module, destSlot_2.Slot, Hand.None));
  613. }
  614. }
  615. // check whether match swap pattern
  616. var in_slots = SearchWaitInSlots(slot.Module);
  617. foreach(var in_slot in in_slots)
  618. {
  619. _movingItems.Add(in_slot);
  620. }
  621. return;
  622. }
  623. }
  624. else // PM
  625. {
  626. if(SearchWaferDestination(slot, out SlotItem destSlot))
  627. {
  628. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  629. // check whether match swap pattern
  630. var in_slots = SearchWaitInSlots(slot.Module);
  631. if(in_slots.Count >= 1)
  632. {
  633. _movingItems.Add(in_slots.First());
  634. }
  635. else
  636. {
  637. // check whether match double move pattern
  638. var same_dest = SearchWaitInSlots(destSlot.Module);
  639. foreach (var item in same_dest)
  640. {
  641. _movingItems.Add(item);
  642. }
  643. }
  644. return;
  645. }
  646. }
  647. }
  648. }
  649. }
  650. private void RuningTMRobotTask()
  651. {
  652. if(_tmRobot.IsAvailable)
  653. {
  654. if(_tmRobot.PostMoveItems(_movingItems.ToArray()))
  655. {
  656. foreach(var item in _movingItems)
  657. {
  658. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  659. if (wafer.IsEmpty)
  660. {
  661. // post alarm
  662. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run TM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  663. return;
  664. }
  665. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  666. _vacWaferTargets[slot] = wafer.InnerId;
  667. }
  668. _movingItems.Clear();
  669. }
  670. }
  671. }
  672. private Hand GetTMRobotFreeHand()
  673. {
  674. var blade1HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
  675. var blade2HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
  676. if (blade1HasWafer && blade2HasWafer)
  677. return Hand.None;
  678. else if (!blade1HasWafer && !blade2HasWafer)
  679. return Hand.Both;
  680. else if (blade1HasWafer)
  681. return Hand.Blade2;
  682. else
  683. return Hand.Blade1;
  684. }
  685. private bool IsVacWaferReadyOut(ModuleName mod, int slot)
  686. {
  687. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  688. if (wafer.IsEmpty)
  689. return false;
  690. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  691. return false;
  692. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  693. {
  694. // should not go here
  695. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  696. return false;
  697. }
  698. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  699. return false;
  700. foreach(var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  701. {
  702. if (ModuleHelper.IsLoadLock(module) || ModuleHelper.IsPm(module))
  703. return true;
  704. }
  705. return false;
  706. }
  707. #endregion Vacuum System
  708. #region Atm System
  709. private void driveAtmSystem()
  710. {
  711. PumpingEFEMRobotTask();
  712. RuningEFEMRobotTask();
  713. }
  714. private void PumpingEFEMRobotTask()
  715. {
  716. if (!_efemRobot.IsAvailable)
  717. return;
  718. foreach(var scheduler in _atmSchedulers)
  719. {
  720. if (!scheduler.Value.IsAvailable)
  721. continue;
  722. if(ModuleHelper.IsLoadLock(scheduler.Key))
  723. {
  724. if (ProcessLLEFEMRobotTask(scheduler.Key))
  725. return;
  726. }
  727. else if(ModuleHelper.IsLoadPort(scheduler.Key))
  728. {
  729. if (ProcessLPEFEMRobotTask(scheduler.Key))
  730. return;
  731. }
  732. else if(ModuleHelper.IsAligner(scheduler.Key))
  733. {
  734. if (ProcessAlignerEFEMRobotTask(scheduler.Key))
  735. return;
  736. }
  737. else if(ModuleHelper.IsCooling(scheduler.Key))
  738. {
  739. if (ProcessCoolingEFEMRobotTask(scheduler.Key))
  740. return;
  741. }
  742. else
  743. {
  744. // should not go here
  745. LOG.Write(eEvent.ERR_ROUTER, $"Wrong Module: {scheduler.Key} in ATM System");
  746. }
  747. }
  748. }
  749. List<int> GetEfemRobotWaferReadyInHands(ModuleName mod)
  750. {
  751. var slots = new List<int>();
  752. for(int i = 0; i < 2; i++)
  753. {
  754. var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  755. if (wafer.IsEmpty)
  756. continue;
  757. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  758. continue;
  759. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  760. {
  761. // should not go here
  762. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  763. continue;
  764. }
  765. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  766. {
  767. slots.Add(i);
  768. }
  769. }
  770. return slots;
  771. }
  772. bool IsAtmWaferReadyOut(ModuleName mod, int slot)
  773. {
  774. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  775. if (wafer.IsEmpty)
  776. return false;
  777. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  778. return false;
  779. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  780. {
  781. // should not go here
  782. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  783. return false;
  784. }
  785. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  786. return false;
  787. if(ModuleHelper.IsLoadLock(mod))
  788. {
  789. foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  790. {
  791. if (ModuleHelper.IsPm(module))
  792. return false;
  793. }
  794. }
  795. return true;
  796. }
  797. private bool ProcessLLEFEMRobotTask(ModuleName ll)
  798. {
  799. var robotSlots = GetEfemRobotWaferReadyInHands(ll);
  800. var inSlots = ll == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  801. foreach(var slot in inSlots)
  802. {
  803. if(robotSlots.Count >= 1)
  804. {
  805. if(WaferManager.Instance.CheckNoWafer(ll, slot))
  806. {
  807. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), ll, slot, (Hand)robotSlots.First()));
  808. robotSlots.RemoveAt(0);
  809. }
  810. }
  811. }
  812. var outSlots = ll == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  813. foreach(var slot in outSlots)
  814. {
  815. if(IsAtmWaferReadyOut(ll, slot))
  816. {
  817. var robotHand = GetEFEMRobotFreeHand();
  818. if(robotHand != Hand.None)
  819. {
  820. _efemMovingItems.Add(new MoveItem(ll, slot, ModuleName.EfemRobot, (int)robotHand, robotHand));
  821. }
  822. }
  823. }
  824. return _efemMovingItems.Count > 0;
  825. }
  826. private bool ProcessLPEFEMRobotTask(ModuleName lp)
  827. {
  828. // check return
  829. for(int i = 0; i < 2; i++)
  830. {
  831. if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i))
  832. {
  833. var returnWafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  834. if (returnWafer.IsEmpty)
  835. continue;
  836. if (returnWafer.ProcessJob == null || returnWafer.ProcessJob.Sequence == null)
  837. continue;
  838. if (returnWafer.NextSequenceStep >= returnWafer.ProcessJob.Sequence.Steps.Count && lp == (ModuleName)returnWafer.OriginStation) // need return
  839. {
  840. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, i, lp, returnWafer.OriginSlot, (Hand)i));
  841. }
  842. }
  843. }
  844. if (_efemMovingItems.Count > 0)
  845. return true;
  846. var outSlots = GetNextWaferInJobQueue(lp);
  847. foreach(var slot in outSlots)
  848. {
  849. var hand = GetEFEMRobotFreeHand();
  850. if(hand != Hand.None)
  851. {
  852. _efemMovingItems.Add(new MoveItem(lp, slot, ModuleName.EfemRobot, (int)hand, hand));
  853. }
  854. }
  855. return _efemMovingItems.Count > 0;
  856. }
  857. private List<int> GetNextWaferInJobQueue(ModuleName lp)
  858. {
  859. var inSlots = new List<int>();
  860. //if (GetSystemInnerWaferCount() >= SystemInternalWaferCount || GetBufferWaferCount() > _maxBufferWaferCount)
  861. //return new SlotItem(ModuleName.System, -1);
  862. foreach (var cj in _lstControlJobs)
  863. {
  864. if (lp != ModuleName.System && (cj.Module != lp.ToString()))
  865. continue;
  866. if (cj.State == EnumControlJobState.Executing)
  867. {
  868. foreach (var pj in _lstProcessJobs)
  869. {
  870. if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
  871. {
  872. foreach (var pjSlotWafer in pj.SlotWafers)
  873. {
  874. if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
  875. {
  876. //return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
  877. inSlots.Add(pjSlotWafer.Item2);
  878. }
  879. }
  880. }
  881. }
  882. }
  883. }
  884. return inSlots;
  885. }
  886. private bool ProcessAlignerEFEMRobotTask(ModuleName aligner)
  887. {
  888. if(WaferManager.Instance.CheckHasWafer(aligner, 0) && IsAtmWaferReadyOut(aligner, 0))
  889. {
  890. var hand = GetEFEMRobotFreeHand();
  891. if(hand != Hand.None)
  892. {
  893. _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, (int)hand, hand));
  894. }
  895. }
  896. else
  897. {
  898. var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
  899. if(robotSlots.Count > 0)
  900. {
  901. _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
  902. }
  903. }
  904. return _efemMovingItems.Count > 0;
  905. }
  906. private bool ProcessCoolingEFEMRobotTask(ModuleName cooling)
  907. {
  908. if (WaferManager.Instance.CheckHasWafer(cooling, 0) && IsAtmWaferReadyOut(cooling, 0))
  909. {
  910. var hand = GetEFEMRobotFreeHand();
  911. if (hand != Hand.None)
  912. {
  913. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, (int)hand, hand));
  914. }
  915. }
  916. else
  917. {
  918. var robotSlots = GetEfemRobotWaferReadyInHands(cooling);
  919. if (robotSlots.Count > 0)
  920. {
  921. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
  922. }
  923. }
  924. return _efemMovingItems.Count > 0;
  925. }
  926. private void RuningEFEMRobotTask()
  927. {
  928. if (_efemRobot.IsAvailable)
  929. {
  930. if (_efemRobot.PostMoveItems(_efemMovingItems.ToArray()))
  931. {
  932. foreach (var item in _efemMovingItems)
  933. {
  934. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  935. if (wafer.IsEmpty)
  936. {
  937. // post alarm
  938. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run EFEM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  939. return;
  940. }
  941. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  942. _atmWaferTargets[slot] = wafer.InnerId;
  943. }
  944. _efemMovingItems.Clear();
  945. }
  946. }
  947. }
  948. private Hand GetEFEMRobotFreeHand()
  949. {
  950. for(int i = 0; i < 2; i++)
  951. {
  952. if ((WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, i) && !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)) ||
  953. (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i) && _efemMovingItems.Exists(item => item.SourceModule == ModuleName.EfemRobot && item.SourceSlot == i)))
  954. return (Hand)i;
  955. }
  956. return Hand.None;
  957. }
  958. #endregion Atm System
  959. #region Sequence validation
  960. private bool CheckSequencePmReady(SequenceInfo seq, List<ModuleName> pmOccupied, out List<ModuleName> pmUsed, out string reason)
  961. {
  962. pmUsed = new List<ModuleName>();
  963. reason = "";
  964. bool pmIsReady = true;
  965. for (int i = 0; i < seq.Steps.Count; i++)
  966. {
  967. SequenceStepInfo stepInfo = seq.Steps[i];
  968. bool hasPm = false;
  969. foreach (var module in stepInfo.StepModules)
  970. {
  971. if (!ModuleHelper.IsPm(module))
  972. {
  973. hasPm = true;
  974. break;
  975. }
  976. if (ModuleHelper.IsInstalled(module) && (pmOccupied == null || !pmOccupied.Contains(module)))
  977. {
  978. hasPm = true;
  979. }
  980. if (!pmUsed.Contains(module))
  981. pmUsed.Add(module);
  982. }
  983. if (pmIsReady && !hasPm)
  984. {
  985. reason = $"Step {i + 1} no valid PM, " + string.Join("|", stepInfo.StepModules);
  986. pmIsReady = false;
  987. }
  988. }
  989. return pmIsReady;
  990. }
  991. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  992. {
  993. for (int i = 0; i < seq.Steps.Count; i++)
  994. {
  995. SequenceStepInfo stepInfo = seq.Steps[i];
  996. foreach (var module in stepInfo.StepModules)
  997. {
  998. if (ModuleHelper.IsPm(module))
  999. {
  1000. string attr = $"{module}Recipe";
  1001. if (stepInfo.StepParameter.ContainsKey(attr)
  1002. && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
  1003. {
  1004. var recipeName = (string)stepInfo.StepParameter[attr];
  1005. if (!string.IsNullOrEmpty(recipeName))
  1006. {
  1007. var recipeContent =
  1008. RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
  1009. if (string.IsNullOrEmpty(recipeContent))
  1010. {
  1011. reason = $"Can not find recipe file{recipeName}";
  1012. return false;
  1013. }
  1014. }
  1015. }
  1016. }
  1017. }
  1018. }
  1019. reason = "";
  1020. return true;
  1021. }
  1022. private bool CheckWaferNeedProcessAndPMAvailable(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  1023. {
  1024. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  1025. if (wafer.IsEmpty)
  1026. return false;
  1027. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  1028. return false;
  1029. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  1030. return false;
  1031. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  1032. {
  1033. var hasPmAvailable = false;
  1034. foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
  1035. {
  1036. if (!ModuleHelper.IsPm(stepModule))
  1037. break;
  1038. var pm = _vacSchedulers[stepModule] as SchedulerPM;
  1039. if (pm != null)
  1040. {
  1041. if (pm.IsAvailable || (pm.IsOnline && pm.Task != SchedulerModule.TaskType.PreJobProcess))
  1042. {
  1043. hasPmAvailable = true;
  1044. break;
  1045. }
  1046. }
  1047. }
  1048. if (!hasPmAvailable)
  1049. continue;
  1050. if (processIn == ModuleName.System)
  1051. return true;
  1052. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  1053. .Contains(processIn))
  1054. return true;
  1055. }
  1056. return false;
  1057. }
  1058. #endregion
  1059. }
  1060. }