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PM
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 gadu atpakaļ |
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TM
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 gadu atpakaļ |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 gadu atpakaļ |
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DBModel.sql
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fa67219b9f
1.Add automatically update database column codes
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1 gadu atpakaļ |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 gadi atpakaļ |
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EquipmentVariables.xml
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44fc6989ef
1、Remove FabConnect dll file;
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1 gadu atpakaļ |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 gadi atpakaļ |
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IoProviderConfig.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 gadu atpakaļ |
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LogDefine.json
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4338503e2a
1.添加霍庭格RF Device
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1 gadu atpakaļ |
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RecipeFormat.xml
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9760d40cf7
port simulator
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2 gadi atpakaļ |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 gadu atpakaļ |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 gadu atpakaļ |
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SignalTower.xml
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3a078d515d
1.修复ui灯闪烁错误bug
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1 gadu atpakaļ |
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System.sccfg
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d744d950e1
配置文件添加Ethercat开关功能
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1 gadu atpakaļ |
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System_Kepler2200.sccfg
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 gadu atpakaļ |
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VenusPreProcess.py
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64c7ef574e
log
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2 gadi atpakaļ |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能