SEMFPlaceRoutine.cs 8.4 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.TM;
  18. using Venus_RT.Devices.VCE;
  19. using Venus_RT.Modules.VCE;
  20. namespace Venus_RT.Modules.TM.VenusEntity
  21. {
  22. public class SEMFPlaceRoutine : ModuleRoutineBase, IRoutine
  23. {
  24. private enum PlaceStep
  25. {
  26. seWaitModuleReady,
  27. sePrepareModule,
  28. seDoorOpen,
  29. sePlacing,
  30. seNotifyDone
  31. }
  32. private TMBase _tm;
  33. private ITransferRobot _robot;
  34. private IPreAlign _vpa;
  35. private VceEntity _vceModule;
  36. private ModuleName _targetModule;
  37. private int _targetSlot;
  38. private int _placingTimeout;
  39. public int currentStepNo;
  40. Hand _hand;
  41. public SEMFPlaceRoutine(TMBase tm, ITransferRobot robot, IPreAlign vpa, ModuleName module) : base(module)
  42. {
  43. _tm = tm;
  44. _robot = robot;
  45. _vpa = vpa;
  46. }
  47. public RState Start(params object[] objs)
  48. {
  49. if (!_robot.IsHomed)
  50. {
  51. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  52. return RState.Failed;
  53. }
  54. //MoveItem placeItem = (MoveItem)objs[0];
  55. var placeItem = (Queue<MoveItem>)objs[0];
  56. _targetModule = placeItem.Peek().DestinationModule;
  57. _targetSlot = placeItem.Peek().DestinationSlot;
  58. _hand = placeItem.Peek().RobotHand;
  59. //如果目标是Vce 获取vce
  60. if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  61. {
  62. if (ModuleHelper.IsVCE(VCE2LP.QueryLP2VCE(_targetModule)))
  63. {
  64. _vceModule = Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(_targetModule));
  65. }
  66. else
  67. {
  68. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} ,which cannot find VCE2LP");
  69. return RState.Failed;
  70. }
  71. //如果vce有错误 报错
  72. if (_vceModule.IsError)
  73. {
  74. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  75. return RState.Failed;
  76. }
  77. if (_targetSlot < 0)
  78. {
  79. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  80. return RState.Failed;
  81. }
  82. //if (_tm.VCESlitDoorClosed)
  83. //{
  84. // LOG.Write(eEvent.ERR_TM, Module, $"cannot place cause vce slitdoor not open.");
  85. // return RState.Failed;
  86. //}
  87. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  88. //if (_tm.VCESlitDoorClosed)
  89. //{
  90. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  91. // return RState.Failed;
  92. //}
  93. }
  94. //如果目标又不是VPA 报错
  95. else if (!ModuleHelper.IsAligner(_targetModule))
  96. {
  97. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
  98. return RState.Failed;
  99. }
  100. //检查目标手臂上有wafer
  101. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
  102. {
  103. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as TM Robot Arm: {_hand} has no wafer");
  104. return RState.Failed;
  105. }
  106. //检查目标槽位上没有wafer
  107. if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
  108. {
  109. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Slot {_targetSlot + 1} has a wafer");
  110. return RState.Failed;
  111. }
  112. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  113. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  114. //{
  115. // if (!_tm.IsVCEATM)
  116. // {
  117. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  118. // return RState.Failed;
  119. // }
  120. //
  121. // if (!_tm.IsTMATM)
  122. // {
  123. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  124. // return RState.Failed;
  125. // }
  126. //}
  127. //else
  128. //{
  129. // if (_tm.IsVCEATM)
  130. // {
  131. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  132. // return RState.Failed;
  133. // }
  134. //
  135. // if (_tm.IsTMATM)
  136. // {
  137. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  138. // return RState.Failed;
  139. // }
  140. //}
  141. Reset();
  142. _placingTimeout = SC.GetValue<int>($"{Module}.PlaceTimeout") * 1000;
  143. return Runner.Start(Module, $"Place to {_targetModule}");
  144. }
  145. public RState Monitor()
  146. {
  147. Runner.Wait(PlaceStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  148. .Run(PlaceStep.sePrepareModule, PrepareModule, CheckModuleReady)
  149. .RunIf(PlaceStep.seDoorOpen, ModuleHelper.IsLoadPort(_targetModule), VCEDoorOpen, CheckVCEDoorOpen)
  150. .Run(PlaceStep.sePlacing, Placing, WaitPlaceDone, _placingTimeout)
  151. .End(PlaceStep.seNotifyDone, NullFun, 500);
  152. return Runner.Status;
  153. }
  154. private bool PrepareModule()
  155. {
  156. switch (_targetModule)
  157. {
  158. case ModuleName.LP1:
  159. case ModuleName.LP2:
  160. _vceModule.PostMsg(VceMSG.Goto, _targetSlot);
  161. return true;//移动到目标槽位
  162. case ModuleName.VPA:
  163. case ModuleName.Aligner1:
  164. case ModuleName.Aligner2:
  165. return true;//10/17暂时为true 后可能要求旋转
  166. default:
  167. return false;
  168. }
  169. }
  170. private bool WaitPlaceDone()
  171. {
  172. if (_robot.Status == RState.Running)
  173. {
  174. return false;
  175. }
  176. else if (_robot.Status == RState.End)
  177. {
  178. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
  179. return true;
  180. }
  181. else
  182. {
  183. Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
  184. return true;
  185. }
  186. }
  187. private bool VCEDoorOpen()
  188. {
  189. return _tm.TurnSlitDoor(VCE2LP.QueryLP2VCE(_targetModule), true);
  190. }
  191. private bool CheckVCEDoorOpen()
  192. {
  193. return _tm.CheckSlitValveOpen(VCE2LP.QueryLP2VCE(_targetModule));
  194. }
  195. private bool Placing()
  196. {
  197. return _robot.Place(VCE2LP.QueryLP2VCE(_targetModule), 0, _hand);
  198. }
  199. private bool CheckModuleReady()
  200. {
  201. switch (_targetModule)
  202. {
  203. case ModuleName.LP1:
  204. case ModuleName.LP2:
  205. return _vceModule.IsIdle;
  206. case ModuleName.VPA:
  207. case ModuleName.Aligner1:
  208. case ModuleName.Aligner2:
  209. return _vpa.Status == RState.End;
  210. default:
  211. return false;
  212. }
  213. }
  214. public void Abort()
  215. {
  216. }
  217. }
  218. }