PMPurgeRoutine.cs 5.6 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using Venus_Core;
  6. namespace Venus_RT.Modules.PMs
  7. {
  8. class PMPurgeRoutine : PMRoutineBase, IRoutine
  9. {
  10. private enum PurgeStep
  11. {
  12. kStart,
  13. kCloseValvesExceptN2Purge,
  14. kPurgeVent,
  15. kStopVent,
  16. kCloseISOValve,
  17. kSoftPump,
  18. kFastPump,
  19. kCloseFastPump,
  20. kOpenISOValve,
  21. kOpenVATValve,
  22. kOpenV8N2Purge,
  23. kCloseVATValve,
  24. kEnd,
  25. }
  26. public int PurgeCounter { get; private set; }
  27. private readonly int _pumpingTargetPressure = 200;
  28. private int _purgeVentPressure = 1000;
  29. private int _roughPumpDownPressure = 75;
  30. private int _purgePumpTime = 60;
  31. private int _purgeCycleCount = 30;
  32. public PMPurgeRoutine(JetPMBase chamber) : base(chamber)
  33. {
  34. Name = "PM Purge";
  35. }
  36. public RState Start(params object[] objs)
  37. {
  38. if (CheckLid() &&
  39. CheckSlitDoor() &&
  40. CheckDryPump() &&
  41. CheckTurboPump())
  42. {
  43. _purgeVentPressure = SC.GetValue<int>($"{Module}.Purge.PurgeVentPressure");
  44. _roughPumpDownPressure = SC.GetValue<int>($"{Module}.Purge.PurgePumpPressure") * 1000;
  45. _purgePumpTime = SC.GetValue<int>($"{Module}.Purge.PurgePumpTime");
  46. _purgeCycleCount = SC.GetValue<int>($"{Module}.Purge.PurgeCycleCount");
  47. Reset();
  48. //CloseValvesExceptN2Purge();
  49. PurgeCounter = 0;
  50. return Runner.Start(Module, Name);
  51. }
  52. return RState.Failed;
  53. }
  54. public RState Monitor()
  55. {
  56. Runner.Delay((int)PurgeStep.kStart, _delay_1s)
  57. .LoopStart((int)PurgeStep.kCloseValvesExceptN2Purge, "Purge Cycle", _purgeCycleCount, CloseValvesExceptN2Purge, _delay_5s)
  58. .LoopRun((int)PurgeStep.kPurgeVent, OpenVentValves, () => { return _chamber.ChamberPressure >= _purgeVentPressure; })
  59. .LoopRun((int)PurgeStep.kStopVent, CloseVentValves, _delay_2s)
  60. .LoopRun((int)PurgeStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  61. .LoopRun((int)PurgeStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure <= _roughPumpDownPressure; })
  62. .LoopRun((int)PurgeStep.kFastPump, StartFastPump, () => { return _chamber.ChamberPressure <= _pumpingTargetPressure; })
  63. .LoopRun((int)PurgeStep.kCloseFastPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.FastPump, false), _delay_2s)
  64. .LoopRun((int)PurgeStep.kOpenISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, true), _delay_2s)
  65. .LoopRun((int)PurgeStep.kOpenVATValve, HOFs.Apply(_chamber.TurnPendulumValve, true), _delay_5s)
  66. .LoopRun((int)PurgeStep.kOpenV8N2Purge, OpenV8N2Purge, (_purgePumpTime - 5) * 1000)
  67. .LoopEnd((int)PurgeStep.kCloseVATValve, CloseVATValve, _delay_1s)
  68. .End((int)PurgeStep.kEnd, NullFun, _delay_1s);
  69. return Runner.Status;
  70. }
  71. public void Abort()
  72. {
  73. CloseAllValves();
  74. }
  75. private bool CloseValvesExceptN2Purge()
  76. {
  77. _chamber.OpenValve(ValveType.Guage, false);
  78. _chamber.OpenValve(ValveType.SoftPump, false);
  79. _chamber.OpenValve(ValveType.FastPump, false);
  80. _chamber.TurnPendulumValve(false);
  81. _chamber.OpenValve(ValveType.GasFinal, false);
  82. _chamber.OpenValve(ValveType.N2, false);
  83. _chamber.OpenValve(ValveType.PVN22, true);
  84. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  85. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  86. return true;
  87. }
  88. private bool OpenVentValves()
  89. {
  90. _chamber.OpenValve(ValveType.GasFinal, true);
  91. _chamber.OpenValve(ValveType.N2, true);
  92. return true;
  93. }
  94. private bool CloseVentValves()
  95. {
  96. _chamber.OpenValve(ValveType.GasFinal, false);
  97. _chamber.OpenValve(ValveType.N2, false);
  98. _chamber.OpenValve(ValveType.PVN22, false);
  99. //_chamber.OpenValve(ValveType.TurboPumpPurge, false);
  100. return true;
  101. }
  102. private bool StartFastPump()
  103. {
  104. _chamber.OpenValve(ValveType.SoftPump, false);
  105. _chamber.OpenValve(ValveType.FastPump, true);
  106. return true;
  107. }
  108. private bool OpenV8N2Purge()
  109. {
  110. _chamber.OpenValve(ValveType.Guage, true);
  111. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  112. return true;
  113. }
  114. private bool CloseVATValve()
  115. {
  116. _chamber.TurnPendulumValve(false);
  117. PurgeCounter++;
  118. return true;
  119. }
  120. }
  121. }