PMLeakCheckRoutine.cs 5.8 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using System.Diagnostics;
  6. using Venus_Core;
  7. using System;
  8. using Venus_Unity;
  9. using MECF.Framework.Common.DBCore;
  10. namespace Venus_RT.Modules.PMs
  11. {
  12. class PMLeakCheckRoutine : PMRoutineBase, IRoutine
  13. {
  14. private enum LeakCheckStep
  15. {
  16. kPumpToBasePressure,
  17. kPumpingDelay,
  18. kLeakCheckDelay,
  19. kEnd,
  20. }
  21. public double LeakRate { get; private set; }
  22. private int _basePressure = 100;
  23. private int _leakcheckPumpTime = 180;
  24. private int _leakcheckHoldTime = 300;
  25. private double _startPressure = 0;
  26. private double _endPressure = 0;
  27. private double _leakRate = 30.0;
  28. private double _leakCheckBasePressure = 1;
  29. Stopwatch _leakCheckTimer = new Stopwatch();
  30. PMLeakCheckResult pMLeakCheckResult;
  31. Stopwatch _routineTimer=new Stopwatch();
  32. public PMLeakCheckRoutine(JetPMBase chamber) : base(chamber)
  33. {
  34. Name = "PM Leakcheck";
  35. }
  36. public RState Start(params object[] objs)
  37. {
  38. if (CheckLid() &&
  39. CheckSlitDoor() &&
  40. CheckTurboPump())
  41. {
  42. Reset();
  43. _basePressure = SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  44. //_leakcheckPumpTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
  45. //_leakcheckHoldTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckHoldTime");
  46. //_leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");
  47. _leakcheckPumpTime = (int)(objs[0]);
  48. _leakcheckHoldTime = (int)(objs[1]);
  49. _leakRate = (double)(objs[2]);
  50. _leakCheckBasePressure = SC.GetValue<double>($"{Module}.Pump.LeakCheckBasePressure");
  51. PreSetValves();
  52. pMLeakCheckResult = new PMLeakCheckResult();
  53. pMLeakCheckResult.CheckDate = DateTime.Now.ToString("yyyyMMddHHmm");
  54. pMLeakCheckResult.CheckMode = "ChamberOnly";
  55. _routineTimer.Restart();
  56. return Runner.Start(Module, Name);
  57. }
  58. return RState.Failed;
  59. }
  60. public RState Monitor()
  61. {
  62. Runner.Wait((int)LeakCheckStep.kPumpToBasePressure, PumpingToBasePressure)
  63. .Run((int)LeakCheckStep.kPumpingDelay, HOFs.WrapAction(_chamber.OpenValve, ValveType.GasFinal, false), PumpingDelay)
  64. .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckHoldTime * 1000)
  65. .End((int)LeakCheckStep.kEnd, CalcLeakCheckResult, _delay_50ms);
  66. return Runner.Status;
  67. }
  68. public void Abort()
  69. {
  70. CloseAllValves();
  71. }
  72. private bool PumpingToBasePressure()
  73. {
  74. if (_chamber.ChamberPressure <= _basePressure)
  75. {
  76. _leakCheckTimer.Restart();
  77. return true;
  78. }
  79. else
  80. return false;
  81. }
  82. private bool PumpingDelay()
  83. {
  84. if(_leakCheckTimer.ElapsedMilliseconds >= _leakcheckPumpTime * 1000)
  85. {
  86. if (_chamber.ChamberPressure <= _leakCheckBasePressure)
  87. return true;
  88. else
  89. {
  90. Runner.Stop($"PM Leakcheck失败, 腔体压力 [{_chamber.ChamberPressure}]mTor, 高于LeakCheck Base Pressure: [{_leakCheckBasePressure}] mTor");
  91. }
  92. }
  93. return false;
  94. }
  95. private bool StartLeakCheck()
  96. {
  97. _startPressure = _chamber.ChamberPressure;
  98. pMLeakCheckResult.StartPressure = _startPressure;
  99. Notify($"PM 压力开始值 {_startPressure} mt");
  100. _chamber.TurnPendulumValve(false);
  101. return true;
  102. }
  103. private bool CalcLeakCheckResult()
  104. {
  105. _endPressure = _chamber.ChamberPressure;
  106. pMLeakCheckResult.EndPressure = _endPressure;
  107. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckHoldTime;
  108. pMLeakCheckResult.LeakRate = LeakRate;
  109. if (LeakRate < _leakRate)
  110. {
  111. Notify($"PM Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  112. pMLeakCheckResult.Result = "Success";
  113. }
  114. else
  115. {
  116. Stop($"PM Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  117. pMLeakCheckResult.Result = "Fail";
  118. }
  119. LeakCheckDataRecorder.Add(_leakcheckHoldTime, (int)_startPressure, (int)_endPressure, LeakRate, pMLeakCheckResult.Result, "ChamberOnly",_chamber.Name);
  120. _chamber.OpenValve(ValveType.GasFinal, true);
  121. _chamber.TurnPendulumValve(true);
  122. pMLeakCheckResult.LeakCheckTime = (int)_routineTimer.ElapsedMilliseconds / 1000;
  123. //SerializeHelper.Instance.WriteToJsonFile<PMLeakCheckResult>(pMLeakCheckResult, $"LeakCheck/PM/{DateTime.Now.ToString("yyyyMMddHHmm")}.json");
  124. return true;
  125. }
  126. private void PreSetValves()
  127. {
  128. _chamber.OpenValve(ValveType.FastPump, false);
  129. _chamber.OpenValve(ValveType.SoftPump, false);
  130. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  131. _chamber.OpenValve(ValveType.Guage, true);
  132. _chamber.OpenValve(ValveType.GasFinal, true);
  133. _chamber.TurnPendulumValve(true);
  134. }
  135. }
  136. }