LLEntity.cs 16 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. namespace Venus_RT.Modules
  15. {
  16. class LLEntity : Entity, IEntity, IModuleEntity
  17. {
  18. public enum LLStatus
  19. {
  20. Not_Ready,
  21. Ready_For_TM,
  22. Ready_For_EFEM,
  23. }
  24. public enum STATE
  25. {
  26. Unknown,
  27. Init,
  28. Initializing,
  29. Idle,
  30. Error,
  31. Pumping,
  32. Venting,
  33. Purging,
  34. LeakCheck,
  35. Prepare_For_TM,
  36. Prepare_For_EFEM,
  37. Ready_For_TM,
  38. Ready_For_EFEM,
  39. }
  40. public enum MSG
  41. {
  42. Home,
  43. Online,
  44. Offline,
  45. Pump,
  46. Vent,
  47. Purge,
  48. CyclePurge,
  49. LeakCheck,
  50. Prepare_TM,
  51. Prepare_EFEM,
  52. TM_Exchange_Ready,
  53. EFEM_Exchange_Ready,
  54. Error,
  55. Abort,
  56. }
  57. public ModuleName Module { get; private set; }
  58. public LLStatus Status { get; private set; }
  59. public bool Check(int msg, out string reason, params object[] args)
  60. {
  61. throw new NotImplementedException();
  62. }
  63. public bool IsIdle
  64. {
  65. get { return fsm.State == (int)STATE.Idle; }
  66. }
  67. public bool IsError
  68. {
  69. get { return fsm.State == (int)STATE.Error; }
  70. }
  71. public bool IsInit
  72. {
  73. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  74. }
  75. public bool IsBusy
  76. {
  77. get { return !IsInit && !IsError && !IsIdle; }
  78. }
  79. public bool IsOnline { get; internal set; }
  80. private readonly JetTM _JetTM;
  81. private readonly MFPumpRoutine _pumpingRoutine;
  82. private readonly MFVentRoutine _ventingRoutine;
  83. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  84. private readonly MFPurgeRoutine _purgeRoutine;
  85. public LLEntity(ModuleName module)
  86. {
  87. Module = module;
  88. //_JetTM = Singleton<JetTM>.Instance;
  89. _JetTM= DEVICE.GetDevice<JetTM>("TM");
  90. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  91. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  92. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  93. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  94. var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  95. WaferManager.Instance.SubscribeLocation(Module, soltCount);
  96. InitFsmMap();
  97. }
  98. protected override bool Init()
  99. {
  100. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  101. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  102. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  103. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  104. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  105. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  106. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  107. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  108. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()));
  109. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));
  110. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));
  111. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
  112. return true;
  113. }
  114. private void InitFsmMap()
  115. {
  116. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  117. fsm.EnableRepeatedMsg(true);
  118. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  119. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  120. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  121. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  122. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  123. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  124. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  125. // Home
  126. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  127. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  128. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  129. //vent sequence
  130. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  131. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  132. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  133. //Pump sequence
  134. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  135. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  136. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  137. // Purge sequence
  138. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  139. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  140. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  141. // Leak check sequence
  142. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  143. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  144. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  145. // Prepare TM Transfer
  146. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  147. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  148. Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
  149. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  150. Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
  151. // Prepare EFEM Transfer
  152. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  153. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  154. Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
  155. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  156. Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
  157. Running = true;
  158. }
  159. public int Invoke(string function, params object[] args)
  160. {
  161. switch (function)
  162. {
  163. case "Home":
  164. CheckToPostMessage((int)MSG.Home);
  165. return (int)MSG.Home;
  166. }
  167. return (int)FSM_MSG.NONE;
  168. }
  169. public bool CheckAcked(int msg)
  170. {
  171. return fsm.CheckExecuted(msg);
  172. }
  173. public bool CheckToPostMessage(int msg, params object[] args)
  174. {
  175. if (!fsm.FindTransition(fsm.State, msg))
  176. {
  177. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  178. return false;
  179. }
  180. Running = true;
  181. fsm.PostMsg(msg, args);
  182. return true;
  183. }
  184. private bool fnEnterTMReady(object[] param)
  185. {
  186. Status = LLStatus.Ready_For_TM;
  187. return true;
  188. }
  189. private bool fnExitTMReady(object[] param)
  190. {
  191. Status = LLStatus.Not_Ready;
  192. return true;
  193. }
  194. private bool fnEnterEFEMReady(object[] param)
  195. {
  196. Status = LLStatus.Ready_For_EFEM;
  197. return true;
  198. }
  199. private bool fnExitEFEMReady(object[] param)
  200. {
  201. Status = LLStatus.Not_Ready;
  202. return true;
  203. }
  204. private bool fnMonitor(object[] param)
  205. {
  206. _debugRoutine();
  207. return true;
  208. }
  209. private bool fnError(object[] param)
  210. {
  211. IsOnline = false;
  212. return true;
  213. }
  214. private bool fnOnline(object[] param)
  215. {
  216. IsOnline = true;
  217. return true;
  218. }
  219. private bool fnOffline(object[] param)
  220. {
  221. IsOnline = false;
  222. return true;
  223. }
  224. private bool fnAbort(object[] param)
  225. {
  226. return true;
  227. }
  228. private bool fnHome(object[] param)
  229. {
  230. return true;
  231. }
  232. private bool fnHoming(object[] param)
  233. {
  234. return true;
  235. }
  236. private bool FnStartVent(object[] param)
  237. {
  238. return _ventingRoutine.Start() == RState.Running;
  239. }
  240. private bool FnVentTimeout(object[] param)
  241. {
  242. RState ret = _ventingRoutine.Monitor();
  243. if (ret == RState.Failed || ret == RState.Timeout)
  244. {
  245. PostMsg(MSG.Error);
  246. return false;
  247. }
  248. return ret == RState.End;
  249. }
  250. private bool FnAbortVent(object[] param)
  251. {
  252. _ventingRoutine.Abort();
  253. return true;
  254. }
  255. private bool FnStartPump(object[] param)
  256. {
  257. return _pumpingRoutine.Start() == RState.Running;
  258. }
  259. private bool FnPumpTimeout(object[] param)
  260. {
  261. RState ret = _pumpingRoutine.Monitor();
  262. if (ret == RState.Failed || ret == RState.Timeout)
  263. {
  264. PostMsg(MSG.Error);
  265. return false;
  266. }
  267. return ret == RState.End;
  268. }
  269. private bool FnAbortPump(object[] param)
  270. {
  271. _pumpingRoutine.Abort();
  272. return true;
  273. }
  274. private bool FnStartPurge(object[] param)
  275. {
  276. return _purgeRoutine.Start() == RState.Running;
  277. }
  278. private bool FnPurgeTimeout(object[] param)
  279. {
  280. RState ret = _purgeRoutine.Monitor();
  281. if (ret == RState.Failed || ret == RState.Timeout)
  282. {
  283. PostMsg(MSG.Error);
  284. return false;
  285. }
  286. return ret == RState.End;
  287. }
  288. private bool FnAbortPurge(object[] param)
  289. {
  290. _purgeRoutine.Abort();
  291. return true;
  292. }
  293. private bool FnStartLeakCheck(object[] param)
  294. {
  295. return _leakCheckRoutine.Start() == RState.Running;
  296. }
  297. private bool FnLeakCheckTimeout(object[] param)
  298. {
  299. RState ret = _leakCheckRoutine.Monitor();
  300. if (ret == RState.Failed || ret == RState.Timeout)
  301. {
  302. PostMsg(MSG.Error);
  303. return false;
  304. }
  305. return ret == RState.End;
  306. }
  307. private bool FnAbortLeakCheck(object[] param)
  308. {
  309. _leakCheckRoutine.Abort();
  310. return true;
  311. }
  312. private bool FnStartPrepareTM(object[] param)
  313. {
  314. if (Singleton<RouteManager>.Instance.IsATMMode)
  315. return true;
  316. return _pumpingRoutine.Start() == RState.Running;
  317. }
  318. private bool FnPreparaTMTimeout(object[] param)
  319. {
  320. if (Singleton<RouteManager>.Instance.IsATMMode)
  321. {
  322. if (fsm.ElapsedTime > 10000)
  323. {
  324. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  325. PostMsg(MSG.Error);
  326. return true;
  327. }
  328. return _JetTM.IsModuleATM(Module);
  329. }
  330. RState ret = _pumpingRoutine.Monitor();
  331. if (ret == RState.Failed || ret == RState.Timeout)
  332. {
  333. PostMsg(MSG.Error);
  334. return false;
  335. }
  336. return ret == RState.End;
  337. }
  338. private bool FnAbortPreparaTM(object[] param)
  339. {
  340. _pumpingRoutine.Abort();
  341. return true;
  342. }
  343. private bool FnStartPrepareEFEM(object[] param)
  344. {
  345. if (Singleton<RouteManager>.Instance.IsATMMode)
  346. return true;
  347. return _ventingRoutine.Start() == RState.Running;
  348. }
  349. private bool FnPrepareEFEMTimeout(object[] param)
  350. {
  351. if (Singleton<RouteManager>.Instance.IsATMMode)
  352. {
  353. if (fsm.ElapsedTime > 10000)
  354. {
  355. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  356. PostMsg(MSG.Error);
  357. return true;
  358. }
  359. return _JetTM.IsModuleATM(Module);
  360. }
  361. RState ret = _ventingRoutine.Monitor();
  362. if (ret == RState.Failed || ret == RState.Timeout)
  363. {
  364. PostMsg(MSG.Error);
  365. return false;
  366. }
  367. return ret == RState.End;
  368. }
  369. private bool FnAbortPrepareEFEM(object[] param)
  370. {
  371. _ventingRoutine.Abort();
  372. return true;
  373. }
  374. private void _debugRoutine()
  375. {
  376. int flag = 0;
  377. // Test Home routine
  378. if (flag == 1)
  379. {
  380. PostMsg(MSG.Home);
  381. }
  382. else if (flag == 2)
  383. {
  384. PostMsg(MSG.Vent);
  385. }
  386. else if (flag == 3)
  387. {
  388. PostMsg(MSG.Pump);
  389. }
  390. //else if (flag == 4)
  391. //{
  392. // PostMsg(MSG.PumpLoadLock);
  393. //}
  394. //else if (flag == 5)
  395. //{
  396. // PostMsg(MSG.VentLoadLock);
  397. //}
  398. //else if (flag == 6)
  399. //{
  400. // PostMsg(MSG.PurgeLoadLock);
  401. //}
  402. //else if (flag == 7)
  403. //{
  404. // PostMsg(MSG.LaunchPump);
  405. //}
  406. //else if (flag == 8)
  407. //{
  408. // PostMsg(MSG.LaunchTurboPump);
  409. //}
  410. //else if (flag == 9)
  411. //{
  412. // PostMsg(MSG.LoadLockLeakCheck);
  413. //}
  414. else if (flag == 10)
  415. {
  416. PostMsg(MSG.CyclePurge);
  417. }
  418. //else if (flag == 11)
  419. //{
  420. // PostMsg(MSG.GasLinePurge);
  421. //}
  422. //else if (flag == 12)
  423. //{
  424. // PostMsg(MSG.LeakCheck);
  425. //}
  426. //else if (flag == 13)
  427. //{
  428. // PostMsg(MSG.GasLeakCheck);
  429. //}
  430. //else if (flag == 14)
  431. //{
  432. // PostMsg(MSG.LLPlace);
  433. //}
  434. //else if (flag == 15)
  435. //{
  436. // PostMsg(MSG.LLPick);
  437. //}
  438. //else if (flag == 16)
  439. //{
  440. // PostMsg(MSG.RunRecipe, "7777");
  441. //}
  442. //else if (flag == 17)
  443. //{
  444. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  445. //}
  446. }
  447. }
  448. }