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EFEM
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a4dfe941cc
Debug EFEM device driver.
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il y a 1 an |
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EPD
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68c484e4c3
兼容去胶机使用的Endpoint.
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il y a 1 an |
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EPDs
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68c484e4c3
兼容去胶机使用的Endpoint.
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il y a 1 an |
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IODevices
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dbf06a2134
添加TM Operation界面
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il y a 1 an |
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TM
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bdec2c0d74
1.修改TM robot模拟器
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il y a 1 an |
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AIRSYSChiller.cs
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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il y a 2 ans |
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AdTecRF.cs
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546436c2c7
模拟器读取chamber bug修改
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il y a 1 an |
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AdixenTurboPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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il y a 1 an |
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CometRF.cs
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de406b964e
1.添加EFEM等ui界面
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il y a 1 an |
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DataDefine.cs
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f211c4242f
Efem module raw design.
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il y a 1 an |
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DeviceManager.cs
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bdec2c0d74
1.修改TM robot模拟器
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il y a 1 an |
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ESC5HighVoltage.cs
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a6ac889dc6
底部按钮添加背景色
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il y a 1 an |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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il y a 1 an |
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FinsPlc.cs
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2b930e56b9
Log output for exception.
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il y a 2 ans |
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JetEPDBase.cs
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68c484e4c3
兼容去胶机使用的Endpoint.
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il y a 1 an |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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il y a 1 an |
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JetKepler2300PM.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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il y a 1 an |
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JetPMBase.cs
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3a078d515d
1.修复ui灯闪烁错误bug
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il y a 1 an |
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JetVenusPM.cs
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a5813eb09d
1.修改chamber wafer样式
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il y a 1 an |
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PendulumValve.cs
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de406b964e
1.添加EFEM等ui界面
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il y a 1 an |
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PlasmaController.cs
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75710d35d8
RF Match.
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il y a 2 ans |
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SMCChiller.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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il y a 1 an |
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SkyPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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il y a 1 an |
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VirgoSignalTower.cs
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bdec2c0d74
1.修改TM robot模拟器
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il y a 1 an |
sangwq
68c484e4c3
兼容去胶机使用的Endpoint.