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Interlock.xml

Interlock.xml 43 KB
Cronologia Originale

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4. 	<!--PMA-->
    5. 

  5.   <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    6. 

  6. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    7. 

  7. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    8. 

  8. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    9. 

  9. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    10. 

  10. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    11. 

  11.   </Action>
    12. 

  12. 

  13.   <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    14. 

  14. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    15. 

  15. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    16. 

  16. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    17. 

  17.   </Action>
    18. 

  18.   
    19. 

  19.   <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    20. 

  20. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    21. 

  21. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    22. 

  22. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    23. 

  23. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    24. 

  24. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    25. 

  25.   </Action>
    26. 

  26. 

  27.   <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    28. 

  28. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    29. 

  29. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    30. 

  30. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    31. 

  31. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    32. 

  32. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    33. 

  33.   </Action>
    34. 

  34. 

  35.   <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    36. 

  36. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    37. 

  37. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    38. 

  38. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    39. 

  39. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    40. 

  40. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    41. 

  41.   </Action>
    42. 

  42. 

  43.   <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    44. 

  44. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    45. 

  45. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    46. 

  46. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    47. 

  47. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    48. 

  48. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    49. 

  49.   </Action>
    50. 

  50.   
    51. 

  51.   <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    52. 

  52. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    53. 

  53. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    54. 

  54. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    55. 

  55. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    56. 

  56. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    57. 

  57.   </Action>
    58. 

  58. 

  59.   <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    60. 

  60. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    61. 

  61. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    62. 

  62. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    63. 

  63. 

  64. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    65. 

  65. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    66. 

  66.   </Action>
    67. 

  67. 

  68.   <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    69. 

  69. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    70. 

  70. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    71. 

  71. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    72. 

  72. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    73. 

  73. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    74. 

  74.   </Action>
    75. 

  75.   
    76. 

  76.   <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    77. 

  77. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    78. 

  78. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    79. 

  79. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    80. 

  80. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    81. 

  81. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    82. 

  82.   </Action>
    83. 

  83. 

  84.   <Action do="PMA.DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
    85. 

  85. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    86. 

  86. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    87. 

  87. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    88. 

  88. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    89. 

  89. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    90. 

  90. 	<Limit do="PMA.DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
    91. 

  91. 	<Limit do="PMA.DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
    92. 

  92.   </Action>
    93. 

  93. 

  94.   <Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    95. 

  95. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    96. 

  96. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    97. 

  97. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    98. 

  98. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    99. 

  99. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    100. 

  100.   </Action>
    101. 

  101. 

  102.   <Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    103. 

  103. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    104. 

  104. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    105. 

  105. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    106. 

  106. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    107. 

  107. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    108. 

  108.   </Action>
    109. 

  109. 

  110.   <Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    111. 

  111. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    112. 

  112. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    113. 

  113. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    114. 

  114. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    115. 

  115. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    116. 

  116.   </Action>
    117. 

  117. 

  118.   <Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    119. 

  119. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    120. 

  120. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    121. 

  121. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    122. 

  122. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    123. 

  123. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    124. 

  124.   </Action>
    125. 

  125. 

  126.   <Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    127. 

  127. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    128. 

  128. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    129. 

  129. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    130. 

  130. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    131. 

  131. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    132. 

  132.   </Action>
    133. 

  133. 

  134.   <Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    135. 

  135. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    136. 

  136. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    137. 

  137. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    138. 

  138. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    139. 

  139. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    140. 

  140.   </Action>
    141. 

  141. 

  142.   <Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    143. 

  143. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    144. 

  144. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    145. 

  145. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    146. 

  146. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    147. 

  147. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    148. 

  148.   </Action>
    149. 

  149. 

  150.   <Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    151. 

  151. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    152. 

  152. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    153. 

  153. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    154. 

  154. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    155. 

  155. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    156. 

  156.   </Action>
    157. 

  157. 

  158.   <Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    159. 

  159. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    160. 

  160. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    161. 

  161. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    162. 

  162.   </Action>
    163. 

  163. 

  164.   <Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    165. 

  165. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    166. 

  166. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    167. 

  167. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    168. 

  168.   </Action>
    169. 

  169. 

  170.   <Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
    171. 

  171. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    172. 

  172. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    173. 

  173. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    174. 

  174.   </Action>
    175. 

  175. 

  176.   <Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    177. 

  177. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    178. 

  178. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    179. 

  179. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    180. 

  180. 	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    181. 

  181.   </Action>
    182. 

  182. 

  183.   <Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    184. 

  184. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    185. 

  185. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    186. 

  186. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    187. 

  187. 	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    188. 

  188.   </Action>
    189. 

  189. 

  190.   <Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    191. 

  191. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    192. 

  192. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    193. 

  193. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    194. 

  194. 	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    195. 

  195.   </Action>
    196. 

  196. 

  197.   <Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    198. 

  198. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    199. 

  199. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    200. 

  200. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    201. 

  201. 	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    202. 

  202.   </Action>
    203. 

  203. 

  204. 	
    205. 

  205.   <Action do="PMA.DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
    206. 

  206. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    207. 

  207.   </Action>
    208. 

  208. 

  209.   <Action do="PMA.DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
    210. 

  210. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    211. 

  211.   </Action>
    212. 

  212. 

  213.   <Action do="PMA.DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
    214. 

  214. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    215. 

  215.   </Action>
    216. 

  216. 

  217.   <Action do="PMA.DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
    218. 

  218. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    219. 

  219. 

  220.   </Action>
    221. 

  221. 

  222.   <Action do="PMA.DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
    223. 

  223. 	<Limit di="PMA.DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
    224. 

  224. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    225. 

  225.   </Action>
    226. 

  226. 

  227.   <Action do="PMA.DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
    228. 

  228. 	<Limit di="PMA.DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
    229. 

  229.   </Action>
    230. 

  230. 

  231.   <Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Loadlock Pumping Valve" tip.zh-CN="" tip.en-US="DO-42" >
    232. 

  232. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    233. 

  233. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    234. 

  234. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    235. 

  235. 	<Limit do="PMA.DO_Loadlock_Vent_Valve"		value="false" tip="DO Loadlock Vent Valve"		tip.zh-CN="" tip.en-US="DO-43" />
    236. 

  236.   </Action>
    237. 

  237. 

  238.   <Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Loadlock Vent Valve" tip.zh-CN="" tip.en-US="DO-43" >
    239. 

  239. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    240. 

  240. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    241. 

  241. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    242. 

  242. 	<Limit do="PMA.DO_Loadlock_Pumping_Valve"	value="false" tip="DO Loadlock Pumping Valve"	tip.zh-CN="" tip.en-US="DO-42" />
    243. 

  243.   </Action>
    244. 

  244. 

  245.   <Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Loadlock Arm Extend" tip.zh-CN="" tip.en-US="DO-44" >
    246. 

  246. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    247. 

  247. 	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    248. 

  248. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    249. 

  249.   </Action>
    250. 

  250. 	
    251. 

  251.   <Action do="PMA.DO_Loadlock_Arm_Retract" value="true" tip="Loadlock Arm Retract" tip.zh-CN="" tip.en-US="DO-45" >
    252. 

  252. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    253. 

  253. 	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    254. 

  254. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    255. 

  255.   </Action>
    256. 

  256. 

  257. 	<!--PMB-->
    258. 

  258. 	<!--<Action do="PMB.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    259. 

  259. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    260. 

  260. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    261. 

  261. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    262. 

  262. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    263. 

  263. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    264. 

  264. 	</Action>
    265. 

  265. 

  266. 	<Action do="PMB.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    267. 

  267. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    268. 

  268. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    269. 

  269. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    270. 

  270. 	</Action>
    271. 

  271. 

  272. 	<Action do="PMB.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    273. 

  273. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    274. 

  274. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    275. 

  275. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    276. 

  276. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    277. 

  277. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    278. 

  278. 	</Action>
    279. 

  279. 

  280. 	<Action do="PMB.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    281. 

  281. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    282. 

  282. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    283. 

  283. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    284. 

  284. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    285. 

  285. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    286. 

  286. 	</Action>
    287. 

  287. 

  288. 	<Action do="PMB.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    289. 

  289. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    290. 

  290. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    291. 

  291. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    292. 

  292. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    293. 

  293. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    294. 

  294. 	</Action>
    295. 

  295. 

  296. 	<Action do="PMB.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    297. 

  297. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    298. 

  298. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    299. 

  299. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    300. 

  300. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    301. 

  301. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    302. 

  302. 	</Action>
    303. 

  303. 

  304. 	<Action do="PMB.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    305. 

  305. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    306. 

  306. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    307. 

  307. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    308. 

  308. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    309. 

  309. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    310. 

  310. 	</Action>
    311. 

  311. 

  312. 	<Action do="PMB.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    313. 

  313. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    314. 

  314. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    315. 

  315. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    316. 

  316. 

  317. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    318. 

  318. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    319. 

  319. 	</Action>
    320. 

  320. 

  321. 	<Action do="PMB.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    322. 

  322. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    323. 

  323. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    324. 

  324. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    325. 

  325. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    326. 

  326. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    327. 

  327. 	</Action>
    328. 

  328. 

  329. 	<Action do="PMB.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    330. 

  330. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    331. 

  331. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    332. 

  332. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    333. 

  333. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    334. 

  334. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    335. 

  335. 	</Action>
    336. 

  336. 

  337. 	<Action do="PMB.DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
    338. 

  338. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    339. 

  339. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    340. 

  340. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    341. 

  341. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    342. 

  342. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    343. 

  343. 		<Limit do="PMB.DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
    344. 

  344. 		<Limit do="PMB.DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
    345. 

  345. 	</Action>
    346. 

  346. 

  347. 	<Action do="PMB.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    348. 

  348. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    349. 

  349. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    350. 

  350. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    351. 

  351. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    352. 

  352. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    353. 

  353. 	</Action>
    354. 

  354. 

  355. 	<Action do="PMB.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    356. 

  356. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    357. 

  357. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    358. 

  358. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    359. 

  359. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    360. 

  360. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    361. 

  361. 	</Action>
    362. 

  362. 

  363. 	<Action do="PMB.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    364. 

  364. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    365. 

  365. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    366. 

  366. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    367. 

  367. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    368. 

  368. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    369. 

  369. 	</Action>
    370. 

  370. 

  371. 	<Action do="PMB.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    372. 

  372. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    373. 

  373. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    374. 

  374. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    375. 

  375. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    376. 

  376. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    377. 

  377. 	</Action>
    378. 

  378. 

  379. 	<Action do="PMB.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    380. 

  380. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    381. 

  381. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    382. 

  382. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    383. 

  383. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    384. 

  384. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    385. 

  385. 	</Action>
    386. 

  386. 

  387. 	<Action do="PMB.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    388. 

  388. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    389. 

  389. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    390. 

  390. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    391. 

  391. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    392. 

  392. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    393. 

  393. 	</Action>
    394. 

  394. 

  395. 	<Action do="PMB.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    396. 

  396. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    397. 

  397. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    398. 

  398. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    399. 

  399. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    400. 

  400. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    401. 

  401. 	</Action>
    402. 

  402. 

  403. 	<Action do="PMB.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    404. 

  404. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    405. 

  405. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    406. 

  406. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    407. 

  407. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    408. 

  408. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    409. 

  409. 	</Action>
    410. 

  410. 

  411. 	<Action do="PMB.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    412. 

  412. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    413. 

  413. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    414. 

  414. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    415. 

  415. 	</Action>
    416. 

  416. 

  417. 	<Action do="PMB.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    418. 

  418. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    419. 

  419. 		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    420. 

  420. 		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    421. 

  421. 	</Action>
    422. 

  422. 

  423. 	<Action do="PMB.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
    424. 

  424. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    425. 

  425. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    426. 

  426. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    427. 

  427. 	</Action>
    428. 

  428. 

  429. 	<Action do="PMB.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    430. 

  430. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    431. 

  431. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    432. 

  432. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    433. 

  433. 		<Limit do="PMB.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    434. 

  434. 	</Action>
    435. 

  435. 

  436. 	<Action do="PMB.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    437. 

  437. 		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    438. 

  438. 		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    439. 

  439. 		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    440. 

  440. 		<Limit do="PMB.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    441. 

  441. 	</Action>
    442. 

  442. 

  443. 	<Action do="PMB.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    444. 

  444. 		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    445. 

  445. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    446. 

  446. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    447. 

  447. 		<Limit di="PMB.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    448. 

  448. 	</Action>
    449. 

  449. 

  450. 	<Action do="PMB.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    451. 

  451. 		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    452. 

  452. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    453. 

  453. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    454. 

  454. 		<Limit di="PMB.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    455. 

  455. 	</Action>
    456. 

  456. 

  457. 

  458. 	<Action do="PMB.DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
    459. 

  459. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    460. 

  460. 	</Action>
    461. 

  461. 

  462. 	<Action do="PMB.DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
    463. 

  463. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    464. 

  464. 	</Action>
    465. 

  465. 

  466. 	<Action do="PMB.DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
    467. 

  467. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    468. 

  468. 	</Action>
    469. 

  469. 

  470. 	<Action do="PMB.DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
    471. 

  471. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    472. 

  472. 

  473. 	</Action>
    474. 

  474. 

  475. 	<Action do="PMB.DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
    476. 

  476. 		<Limit di="PMB.DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
    477. 

  477. 		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    478. 

  478. 	</Action>
    479. 

  479. 

  480. 	<Action do="PMB.DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
    481. 

  481. 		<Limit di="PMB.DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
    482. 

  482. 	</Action>
    483. 

  483. 

  484. 	<Action do="PMB.DO_Loadlock_Pumping_Valve" value="true" tip="Loadlock Pumping Valve" tip.zh-CN="" tip.en-US="DO-42" >
    485. 

  485. 		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    486. 

  486. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    487. 

  487. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    488. 

  488. 		<Limit do="PMB.DO_Loadlock_Vent_Valve"		value="false" tip="DO Loadlock Vent Valve"		tip.zh-CN="" tip.en-US="DO-43" />
    489. 

  489. 	</Action>
    490. 

  490. 

  491. 	<Action do="PMB.DO_Loadlock_Vent_Valve" value="true" tip="Loadlock Vent Valve" tip.zh-CN="" tip.en-US="DO-43" >
    492. 

  492. 		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    493. 

  493. 		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    494. 

  494. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    495. 

  495. 		<Limit do="PMB.DO_Loadlock_Pumping_Valve"	value="false" tip="DO Loadlock Pumping Valve"	tip.zh-CN="" tip.en-US="DO-42" />
    496. 

  496. 	</Action>
    497. 

  497. 

  498. 	<Action do="PMB.DO_Loadlock_Arm_Extend" value="true" tip="Loadlock Arm Extend" tip.zh-CN="" tip.en-US="DO-44" >
    499. 

  499. 		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    500. 

  500. 		<Limit di="PMB.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    501. 

  501. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    502. 

  502. 	</Action>
    503. 

  503. 

  504. 	<Action do="PMB.DO_Loadlock_Arm_Retract" value="true" tip="Loadlock Arm Retract" tip.zh-CN="" tip.en-US="DO-45" >
    505. 

  505. 		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    506. 

  506. 		<Limit di="PMB.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    507. 

  507. 		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    508. 

  508. 	</Action>-->
    509. 

  509. 	
    510. 

  510.    <!--TM-->
    511. 

  511. 	<Action do="TM.DO_LLA_Slit_Door_E_Open"					value="true" tip="Loadlock A EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-11" >
    512. 

  512. 		<Limit di="TM.DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
    513. 

  513. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    514. 

  514. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    515. 

  515. 	</Action>
    516. 

  516. 	
    517. 

  517. 	<Action do="TM.DO_LLA_Slit_Door_E_Close"				value="true" tip="Loadlock A EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
    518. 

  518. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    519. 

  519. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    520. 

  520. 	</Action>
    521. 

  521. 	
    522. 

  522. 	<Action do="TM.DO_LLB_Slit_Door_E_Open"					value="true" tip="Loadlock B EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-21" >
    523. 

  523. 		<Limit di="TM.DI_LLB_T_Slit_Door_close_Position"	value="true" tip="LLB TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-30" />
    524. 

  524. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    525. 

  525. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
    526. 

  526. 	</Action>
    527. 

  527. 	
    528. 

  528. 	<Action do="TM.DO_LLB_Slit_Door_E_Close"				value="true" tip="Loadlock B EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
    529. 

  529. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    530. 

  530. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
    531. 

  531. 	</Action>
    532. 

  532. 

  533. 	<Action do="TM.DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
    534. 

  534. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    535. 

  535. 		<Limit di="TM.DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
    536. 

  536. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    537. 

  537. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    538. 

  538. 	</Action>
    539. 

  539. 	
    540. 

  540. 	<Action do="TM.DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
    541. 

  541. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    542. 

  542. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    543. 

  543. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    544. 

  544. 	</Action>
    545. 

  545. 	
    546. 

  546. 	<Action do="TM.DO_LLB_Slit_Door_T_Open"					value="true" tip="Loadlock B TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-23" >
    547. 

  547. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    548. 

  548. 		<Limit di="TM.DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    549. 

  549. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    550. 

  550. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    551. 

  551. 	</Action>
    552. 

  552. 	
    553. 

  553. 	<Action do="TM.DO_LLB_Slit_Door_T_Close"				value="true" tip="Loadlock B TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-24" >
    554. 

  554. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    555. 

  555. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    556. 

  556. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    557. 

  557. 	</Action>
    558. 

  558. 	
    559. 

  559. </Interlock>
    560.