| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Venus_RT.Devices;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Common;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using Venus_RT.Devices.EFEM;namespace Venus_RT.Modules.EFEM{    class EfemHomeRoutine : ModuleRoutineBase, IRoutine    {        private enum HomeStep        {            ClearError,            InitRobot,            HomeAllAxes,            CheckWaferPresence,            End,        }        private enum HomeModuleStep        {            Home,            HomeAxes,            End,        }        private int _homeTimeout = 30 * 1000;        ModuleName _targetModule;        EfemBase _efem;        public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)        {            _efem = efem;        }        public RState Start(params object[] objs)        {            _targetModule = (ModuleName)objs[0];            _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;            return Runner.Start(Module, $"Home {_targetModule}");        }        public RState Monitor()        {            if(_targetModule == ModuleName.EFEM)            {                Runner.Run(HomeStep.ClearError,            ClearError,             IsStepComplete,         _homeTimeout)                    .Run(HomeStep.InitRobot,               HomeAll,                IsStepComplete,         _homeTimeout)                    .Run(HomeStep.HomeAllAxes,             HomeAllAxes,            IsStepComplete,         _homeTimeout)                    .Run(HomeStep.CheckWaferPresence,      CheckWaferPresence,     VerifyWaferPresence,    _homeTimeout)                    .End(HomeStep.End,                     NullFun,                _delay_50ms);            }            else            {                Runner.Run(HomeModuleStep.Home,        HomeModule,         IsStepComplete,     _homeTimeout)                    .Run(HomeModuleStep.HomeAxes,      HomeModuleAxes,     IsStepComplete,     _homeTimeout)                    .End(HomeModuleStep.End,           NullFun,            _delay_50ms);            }            return Runner.Status;        }        public void Abort()        {        }        private bool IsStepComplete()        {            if (_efem.Status == RState.End)            {                return true;            }            else if (_efem.Status == RState.Failed || _efem.Status == RState.Timeout)            {                Runner.Stop($"Efem home failed: {_efem.Status}");                //LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem home failed: {_efem.Status}");                return true;            }            else                return false;        }        private bool ClearError()        {            return _efem.ClearError();        }        private bool HomeAll()        {            return _efem.HomeAll();        }        private bool HomeModule()        {            return _efem.Home(_targetModule);        }        private bool HomeAllAxes()        {            return _efem.OriginalSearch(ModuleName.EFEM);        }        private bool HomeModuleAxes()        {            return _efem.OriginalSearch(_targetModule);        }        private bool CheckWaferPresence()        {            return _efem.CheckWaferPresence();        }        private bool VerifyWaferPresence()        {            if (_efem.Status == RState.End)            {                var waferPresence = _efem.GetWaferPresence();                //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,                 if (waferPresence.Length != 3)                {                    LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");                    return false;                }                //upper arm                if (waferPresence[0] == '1')                {                    if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))                    {                        WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1,  WaferStatus.Normal);                    }                }                else                {                    if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))                    {                        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");                    }                }                //lower arm                if (waferPresence[1] == '1')                {                    if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))                    {                        WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);                    }                }                else                {                    if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))                    {                        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");                    }                }                //aligner1                if (waferPresence[2] == '1')                {                    if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))                    {                        WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);                    }                }                else                {                    if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))                    {                        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");                    }                }                //aligner2                //if (waferPresence[3] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                //cooling1                //if (waferPresence[4] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                //cooling2                //if (waferPresence[5] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                return true;            }            else if (_efem.Status != RState.Running)            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");                return true;            }            else                return false;        }    }}
 |