ChamberWithHeater.xaml 22 KB

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  1. <UserControl x:Class="Venus_Themes.UserControls.ChamberWithHeater"
  2. xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
  3. xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
  4. xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
  5. xmlns:d="http://schemas.microsoft.com/expression/blend/2008"
  6. xmlns:controls="http://OpenSEMI.Ctrlib.com/presentation"
  7. mc:Ignorable="d"
  8. xmlns:converters="clr-namespace:Venus_Themes.Converters"
  9. d:DesignHeight="300" d:DesignWidth="300" x:Name="chamber">
  10. <VisualStateManager.VisualStateGroups>
  11. <VisualStateGroup Name="HeaterActions">
  12. <VisualStateGroup.Transitions>
  13. <VisualTransition To="Position1">
  14. <Storyboard FillBehavior="HoldEnd">
  15. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  16. <LinearDoubleKeyFrame Value="10" KeyTime="0:0:0.5"/>
  17. </DoubleAnimationUsingKeyFrames>
  18. </Storyboard>
  19. </VisualTransition>
  20. <VisualTransition To="Origin">
  21. <Storyboard FillBehavior="HoldEnd">
  22. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  23. <LinearDoubleKeyFrame Value="0" KeyTime="0:0:0.5"/>
  24. </DoubleAnimationUsingKeyFrames>
  25. </Storyboard>
  26. </VisualTransition>
  27. <VisualTransition To="Position2">
  28. <Storyboard FillBehavior="HoldEnd">
  29. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  30. <LinearDoubleKeyFrame Value="-10" KeyTime="0:0:0.5"/>
  31. </DoubleAnimationUsingKeyFrames>
  32. </Storyboard>
  33. </VisualTransition>
  34. <VisualTransition To="Position3">
  35. <Storyboard FillBehavior="HoldEnd">
  36. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  37. <LinearDoubleKeyFrame Value="-20" KeyTime="0:0:0.5"/>
  38. </DoubleAnimationUsingKeyFrames>
  39. </Storyboard>
  40. </VisualTransition>
  41. <VisualTransition To="Position4">
  42. <Storyboard FillBehavior="HoldEnd">
  43. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  44. <LinearDoubleKeyFrame Value="-30" KeyTime="0:0:0.5"/>
  45. </DoubleAnimationUsingKeyFrames>
  46. </Storyboard>
  47. </VisualTransition>
  48. <VisualTransition To="Position5">
  49. <Storyboard FillBehavior="HoldEnd">
  50. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  51. <LinearDoubleKeyFrame Value="-40" KeyTime="0:0:0.5"/>
  52. </DoubleAnimationUsingKeyFrames>
  53. </Storyboard>
  54. </VisualTransition>
  55. </VisualStateGroup.Transitions>
  56. <VisualState Name="Position1">
  57. <Storyboard FillBehavior="HoldEnd">
  58. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  59. <LinearDoubleKeyFrame Value="10" KeyTime="0:0:0"/>
  60. </DoubleAnimationUsingKeyFrames>
  61. </Storyboard>
  62. </VisualState>
  63. <VisualState Name="Origin">
  64. <Storyboard FillBehavior="HoldEnd">
  65. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  66. <LinearDoubleKeyFrame Value="0" KeyTime="0:0:0"/>
  67. </DoubleAnimationUsingKeyFrames>
  68. </Storyboard>
  69. </VisualState>
  70. <VisualState Name="Position2">
  71. <Storyboard FillBehavior="HoldEnd">
  72. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  73. <LinearDoubleKeyFrame Value="-10" KeyTime="0:0:0"/>
  74. </DoubleAnimationUsingKeyFrames>
  75. </Storyboard>
  76. </VisualState>
  77. <VisualState Name="Position3">
  78. <Storyboard FillBehavior="HoldEnd">
  79. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  80. <LinearDoubleKeyFrame Value="-20" KeyTime="0:0:0"/>
  81. </DoubleAnimationUsingKeyFrames>
  82. </Storyboard>
  83. </VisualState>
  84. <VisualState Name="Position4">
  85. <Storyboard FillBehavior="HoldEnd">
  86. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  87. <LinearDoubleKeyFrame Value="-30" KeyTime="0:0:0"/>
  88. </DoubleAnimationUsingKeyFrames>
  89. </Storyboard>
  90. </VisualState>
  91. <VisualState Name="Position5">
  92. <Storyboard FillBehavior="HoldEnd">
  93. <DoubleAnimationUsingKeyFrames Storyboard.TargetName="heaterRotateAct" Storyboard.TargetProperty="Y">
  94. <LinearDoubleKeyFrame Value="-40" KeyTime="0:0:0"/>
  95. </DoubleAnimationUsingKeyFrames>
  96. </Storyboard>
  97. </VisualState>
  98. </VisualStateGroup>
  99. </VisualStateManager.VisualStateGroups>
  100. <UserControl.Resources>
  101. <Storyboard x:Key="SlitValve_Open">
  102. <DoubleAnimation Storyboard.TargetProperty="(FrameworkElement.Height)" Duration="0:0:1" To="42"/>
  103. </Storyboard>
  104. <Storyboard x:Key="SlitValve_Close">
  105. <DoubleAnimation Storyboard.TargetProperty="(FrameworkElement.Height)" Duration="0:0:1" To="75"/>
  106. </Storyboard>
  107. <Style TargetType="{x:Type Rectangle}" x:Key="SlitValve_Animation" >
  108. <Style.Triggers>
  109. <DataTrigger Binding="{Binding ElementName=chamber,Path=IsOpenSlitDoor}" Value="true">
  110. <DataTrigger.EnterActions>
  111. <BeginStoryboard Storyboard="{StaticResource SlitValve_Open}"/>
  112. </DataTrigger.EnterActions>
  113. <DataTrigger.ExitActions>
  114. <BeginStoryboard Storyboard="{StaticResource SlitValve_Close}"/>
  115. </DataTrigger.ExitActions>
  116. </DataTrigger>
  117. </Style.Triggers>
  118. </Style>
  119. <LinearGradientBrush StartPoint="0,0" EndPoint="1,1" x:Key="rfcolor">
  120. <LinearGradientBrush.GradientStops>
  121. <GradientStop Color="#FFCC00" Offset="0" />
  122. <GradientStop Color="#FF6600" Offset="0.5" />
  123. <GradientStop Color="#CC3300" Offset="0.75" />
  124. <GradientStop Color="#FF0000" Offset="1" />
  125. </LinearGradientBrush.GradientStops>
  126. </LinearGradientBrush>
  127. <LinearGradientBrush StartPoint="0,0" EndPoint="0,1" x:Key="chambercolor">
  128. <LinearGradientBrush.GradientStops>
  129. <GradientStop Color="#D3D3D3" Offset="0" />
  130. <GradientStop Color="White" Offset="0.5" />
  131. <GradientStop Color="#D3D3D3" Offset="1" />
  132. </LinearGradientBrush.GradientStops>
  133. </LinearGradientBrush>
  134. <LinearGradientBrush StartPoint="0,0" EndPoint="0,1" x:Key="threadrcolor">
  135. <LinearGradientBrush.GradientStops>
  136. <GradientStop Color="#FFECB7" Offset="0" />
  137. <GradientStop Color="#B98903" Offset="0.3" />
  138. <GradientStop Color="#EBBF43" Offset=".6" />
  139. <GradientStop Color="#BB8900" Offset="1" />
  140. </LinearGradientBrush.GradientStops>
  141. </LinearGradientBrush>
  142. <LinearGradientBrush StartPoint="0,0" EndPoint="1,1" x:Key="heatercolor">
  143. <LinearGradientBrush.GradientStops>
  144. <GradientStop Color="#C88D02" Offset="0" />
  145. <GradientStop Color="#EBBF43" Offset=".5" />
  146. <GradientStop Color="#BB8900" Offset="1" />
  147. </LinearGradientBrush.GradientStops>
  148. </LinearGradientBrush>
  149. </UserControl.Resources>
  150. <Canvas >
  151. <Grid Width="240" Height="190" Canvas.Top="80">
  152. <Grid.RowDefinitions>
  153. <RowDefinition Height="160"/>
  154. <RowDefinition />
  155. </Grid.RowDefinitions>
  156. <Path Data="M0.5,0.5 L33.5,0.5 33.5,17.5 206.5,17.5 206.5,0.5 239.5,0.5 239.5,149.5 0.5,149.5 z" Stroke="#FF747474" Margin="0,10,0,0">
  157. <Path.Fill>
  158. <LinearGradientBrush EndPoint="1,1" StartPoint="0,0">
  159. <GradientStop Color="#FF8F8F8F" Offset="0"/>
  160. <GradientStop Color="#FF9B9B9B" Offset="1"/>
  161. <GradientStop Color="#FEF1ECEC" Offset="0.15"/>
  162. <GradientStop Color="#FEC0C0C0" Offset="0.38"/>
  163. <GradientStop Color="#FEB4B4B4" Offset="0.5"/>
  164. <GradientStop Color="#FEE5E5E5" Offset="0.7"/>
  165. <GradientStop Color="#FFBABABA" Offset="0.85"/>
  166. <GradientStop Color="#FFE5E5E5" Offset="0.9"/>
  167. </LinearGradientBrush>
  168. </Path.Fill>
  169. </Path>
  170. <Rectangle Stroke="#FF747474" Margin="8,18">
  171. <Rectangle.Fill>
  172. <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
  173. <GradientStop Color="#FFE0DEDE" Offset="0"/>
  174. <GradientStop Color="#FFE2E2E2" Offset="1"/>
  175. <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
  176. <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
  177. </LinearGradientBrush>
  178. </Rectangle.Fill>
  179. </Rectangle>
  180. <Rectangle x:Name="BG_Status" Margin="9,19" Visibility="{Binding BiasRfPowerOnChamberVisibility}" Cursor="Hand">
  181. <Rectangle.ContextMenu >
  182. <ContextMenu>
  183. <MenuItem Header="Create Wafer" Click="CreateWafer_Click" IsChecked="{Binding IsHasWafer}" IsEnabled="{Binding IsHasWafer,Converter={StaticResource BoolToBool}}"/>
  184. <MenuItem Header="Delete Wafer" Click="DeleteWafer_Click" IsChecked="{Binding IsHasWafer,Converter={StaticResource BoolToBool}}" IsEnabled="{Binding IsHasWafer}"/>
  185. </ContextMenu>
  186. </Rectangle.ContextMenu>
  187. <Rectangle.Style>
  188. <Style>
  189. <Setter Property="Rectangle.Fill" Value="{StaticResource chambercolor}"/>
  190. <Style.Triggers>
  191. <DataTrigger Binding="{Binding ElementName=chamber,Path=IsBRFOn}" Value="True">
  192. <Setter Property="Rectangle.Fill" Value="{StaticResource rfcolor}"></Setter>
  193. </DataTrigger>
  194. </Style.Triggers>
  195. </Style>
  196. </Rectangle.Style>
  197. </Rectangle>
  198. <Rectangle Stroke="#FF747474" Height="11" VerticalAlignment="Bottom" Margin="12,0,12,8">
  199. <Rectangle.Fill>
  200. <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
  201. <GradientStop Color="#FFE0DEDE" Offset="0"/>
  202. <GradientStop Color="#FFE2E2E2" Offset="1"/>
  203. <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
  204. <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
  205. </LinearGradientBrush>
  206. </Rectangle.Fill>
  207. </Rectangle>
  208. <Grid x:Name="Cover" Width="180" Height="18" HorizontalAlignment="Left" VerticalAlignment="Top" Margin="30,2,0,0" RenderTransformOrigin="1,0.4444">
  209. <Grid.RenderTransform>
  210. <TransformGroup>
  211. <ScaleTransform/>
  212. <SkewTransform/>
  213. <RotateTransform/>
  214. <TranslateTransform/>
  215. </TransformGroup>
  216. </Grid.RenderTransform>
  217. <Grid.Resources>
  218. <Storyboard x:Key="CoverOpen">
  219. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
  220. <EasingDoubleKeyFrame KeyTime="0" Value="0"/>
  221. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="20"/>
  222. </DoubleAnimationUsingKeyFrames>
  223. </Storyboard>
  224. <Storyboard x:Key="CoverClose">
  225. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
  226. <EasingDoubleKeyFrame KeyTime="0" Value="20"/>
  227. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="0"/>
  228. </DoubleAnimationUsingKeyFrames>
  229. </Storyboard>
  230. </Grid.Resources>
  231. <Grid.Style>
  232. <Style>
  233. <Style.Triggers>
  234. <DataTrigger Binding="{Binding ElementName=chamber,Path=IsLidOpen}" Value="true">
  235. <DataTrigger.EnterActions>
  236. <BeginStoryboard Storyboard="{StaticResource CoverOpen}"/>
  237. </DataTrigger.EnterActions>
  238. <DataTrigger.ExitActions>
  239. <BeginStoryboard Storyboard="{StaticResource CoverClose}"/>
  240. </DataTrigger.ExitActions>
  241. </DataTrigger>
  242. </Style.Triggers>
  243. </Style>
  244. </Grid.Style>
  245. <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Bottom" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="172" Height="12"/>
  246. <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Top" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="180" Height="8"/>
  247. <Line X1="35" Y1="-80" X2="120" Y2="-90" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  248. <Line X1="35" Y1="-60" X2="145" Y2="-70" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  249. <Line X1="35" Y1="-40" X2="145" Y2="-50" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  250. <Line X1="35" Y1="-20" X2="145" Y2="-30" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  251. <Rectangle Stroke="Gray" Fill="{StaticResource doorColor}" Margin="130,-101,42,0" Width="8" VerticalAlignment="Top" Height="102" />
  252. <Rectangle Stroke="Gray" Fill="{StaticResource doorColor}" Margin="42,-101,130,0" Width="8" VerticalAlignment="Top" Height="102" />
  253. <Rectangle Stroke="Gray" Fill="{StaticResource doorColor2}" Margin="42,-106,42,0" VerticalAlignment="Top" Height="7" />
  254. <Rectangle Fill="White" Margin="50,-101,50,0" Width="80" Height="118" />
  255. <Rectangle x:Name="BG_Status1" Margin="50,-101,50,0" Width="80" Height="118" Visibility="{Binding RfPowerOnChamberVisibility}" >
  256. <Rectangle.Style>
  257. <Style>
  258. <Setter Property="Rectangle.Fill" Value="{StaticResource chambercolor}"/>
  259. <Style.Triggers>
  260. <DataTrigger Binding="{Binding ElementName=chamber,Path=IsSRFOn}" Value="True">
  261. <Setter Property="Rectangle.Fill" Value="{StaticResource rfcolor}"/>
  262. </DataTrigger>
  263. </Style.Triggers>
  264. </Style>
  265. </Rectangle.Style>
  266. </Rectangle>
  267. <Rectangle Stroke="#FF000000" Width="80" Height="10" Margin="0,8,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
  268. <Rectangle Stroke="#FF000000" Width="80" Height="9" Margin="0,-10,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
  269. <Line X1="35" Y1="-40" X2="145" Y2="-30" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  270. <Line X1="35" Y1="-60" X2="145" Y2="-50" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  271. <Line X1="35" Y1="-80" X2="145" Y2="-70" Stroke="{StaticResource threadrcolor}" StrokeThickness="5"/>
  272. </Grid>
  273. <Grid Grid.RowSpan="2" Width="160" Height="167" VerticalAlignment="Bottom" Margin="0,0,0,2">
  274. <!--lift pin-->
  275. <Grid x:Name="Top_LiftPin" Height="51" VerticalAlignment="Bottom" Margin="0,0,0,28" >
  276. <Rectangle HorizontalAlignment="Left" Fill="{StaticResource heatercolor}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="48,10,0,4"/>
  277. <Rectangle HorizontalAlignment="Right" Fill="{StaticResource heatercolor}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,10,48,4"/>
  278. <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{StaticResource heatercolor}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0" Width="64" />
  279. <Rectangle HorizontalAlignment="Center" Margin="-100,0" Width="{Binding WaferLength}" Height="10" VerticalAlignment="Top"/>
  280. </Grid>
  281. <Canvas Margin="29.5,100,0,0" x:Name="heater">
  282. <Canvas.RenderTransform>
  283. <TransformGroup>
  284. <TranslateTransform x:Name="heaterRotateAct"/>
  285. </TransformGroup>
  286. </Canvas.RenderTransform>
  287. <!--<TextBlock Text="{Binding ElementName=chamber,Path=WaferID}" Margin="30,-32,0,0" TextAlignment="Center" ></TextBlock>
  288. <Border x:Name="border1" BorderThickness="1" BorderBrush="DarkGray" CornerRadius="4" VerticalAlignment="Top" Height="10" Margin="0,-12,0,0" Width="100" Visibility="{Binding ElementName=chamber,Path=IsHasWafer,Converter={StaticResource bool2VisibilityConverter}}">
  289. <Border.Background>
  290. <RadialGradientBrush >
  291. <GradientStop Color="AliceBlue" Offset="0" />
  292. <GradientStop Color="LightGreen" Offset="1" />
  293. </RadialGradientBrush>
  294. </Border.Background>
  295. </Border>-->
  296. <controls:Slot x:Name="border1" WaferStatus="{Binding WaferStatus}" SlotID="{Binding SlotID}" ModuleID="{Binding ModuleID}" SourceName="{Binding SourceName}" DataContext="{Binding ElementName=chamber, Path=RobotWafer}" HorizontalAlignment="Center" VerticalAlignment="Top" Margin="5,-11,0,0" >
  297. </controls:Slot>
  298. <Rectangle HorizontalAlignment="Left" Fill="{StaticResource heatercolor}" Stroke="Black" Width="100" Height="10"/>
  299. <Rectangle HorizontalAlignment="Left" Fill="{StaticResource heatercolor}" Stroke="Black" Width="100" Height="10" Canvas.Top="10"/>
  300. <Rectangle HorizontalAlignment="Left" Fill="{StaticResource heatercolor}" Stroke="Black" Width="30" Height="50" Canvas.Top="20" Canvas.Left="36"/>
  301. </Canvas>
  302. <!--<Canvas Margin="11,100,0,0">
  303. <Canvas.RenderTransform>
  304. <TransformGroup>
  305. <TranslateTransform x:Name="waferRotateAct"/>
  306. </TransformGroup>
  307. </Canvas.RenderTransform>
  308. </Canvas>-->
  309. <!--左边slit door-->
  310. <Grid x:Name="Slit_valve" Margin="-41,-10,191,29" >
  311. <Rectangle x:Name="SlitValve_Top" Fill="{StaticResource doorColor3}" Width="8" VerticalAlignment="Top" Height="75" />
  312. <Rectangle x:Name="SlitValve_Bottom" Fill="{StaticResource doorColor3}" Width="8" VerticalAlignment="Bottom" Height="75" />
  313. </Grid>
  314. <!--slit door右边-->
  315. <Grid Margin="190,-10,-40,29" Cursor="Hand">
  316. <Grid.ContextMenu>
  317. <ContextMenu >
  318. <MenuItem Header="Open Door" Click="OpenDoor_Click" IsChecked="{Binding IsSlitDoorClosed,Converter={StaticResource BoolToBool}}" IsEnabled="{Binding IsSlitDoorClosed}"/>
  319. <MenuItem Header="Close Door" Click="CloseDoor_Click" IsChecked="{Binding IsSlitDoorClosed}" IsEnabled="{Binding IsSlitDoorClosed,Converter={StaticResource BoolToBool}}"/>
  320. </ContextMenu>
  321. </Grid.ContextMenu>
  322. <Rectangle x:Name="rectangle1" Fill="{StaticResource doorColor3}" Style="{StaticResource SlitValve_Animation}" Width="8" VerticalAlignment="Top" Height="75" />
  323. <Rectangle x:Name="rectangle2" Fill="{StaticResource doorColor3}" Style="{StaticResource SlitValve_Animation}" Width="8" VerticalAlignment="Bottom" Height="75" />
  324. </Grid>
  325. </Grid>
  326. </Grid>
  327. </Canvas>
  328. </UserControl>