| .. |
|
VenusEntity
|
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
|
преди 11 месеца |
|
MFHomeRoutine.cs
|
ed38ed5c95
1.check load function bugs fix
|
преди 1 година |
|
MFLeakCheckRoutine.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
преди 1 година |
|
MFPMExtendRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
преди 1 година |
|
MFPMPickRoutine.cs
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
преди 11 месеца |
|
MFPMPlaceRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
преди 1 година |
|
MFPMRetractRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
преди 1 година |
|
MFPMSwapRoutine.cs
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
преди 11 месеца |
|
MFPickRoutine.cs
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
преди 11 месеца |
|
MFPlaceRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
преди 1 година |
|
MFPumpRoutine.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
преди 11 месеца |
|
MFPurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
преди 1 година |
|
MFSwapRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
преди 1 година |
|
MFVentRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
преди 11 месеца |
|
TMEntity.cs
|
d33079596b
1.优化新版跑片动画
|
преди 11 месеца |
zhouhr
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob