SchedulerPM.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. namespace Venus_RT.Scheduler
  27. {
  28. public class SchedulerPM : SchedulerModule
  29. {
  30. public override bool IsAvailable
  31. {
  32. get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  33. }
  34. public override bool IsOnline
  35. {
  36. get { return _entity != null && _entity.IsOnline; }
  37. }
  38. public override bool IsError
  39. {
  40. get { return _entity.IsError; }
  41. }
  42. public override bool IsIdle
  43. {
  44. get { return _entity.IsIdle; }
  45. }
  46. public override bool IsVac
  47. {
  48. get { return _entity.IsVac; }
  49. }
  50. public override bool IsAtm
  51. {
  52. get { return _entity.IsAtm; }
  53. }
  54. public override int TimeToReady
  55. {
  56. get { return _entity.TimeToReady; }
  57. }
  58. public TaskType Task => _task;
  59. private PMEntity _entity = null;
  60. private ModuleName _taskRobot;
  61. private EnumTransferType _taskTransferType;
  62. private Hand _taskBlade;
  63. private int _taskSlot;
  64. private int _entityTaskToken = (int)FSM_MSG.NONE;
  65. private DeviceTimer _timerProcess = new DeviceTimer();
  66. private JetPMBase _pm;
  67. private int _idleCleanOpt = 0;
  68. private int _idleCleanHourSetPoint;
  69. private int _idleCleanWaferSetPoint;
  70. private int _idleCleanWaferCount;
  71. private string _idleCleanRecipe;
  72. private DateTime _lastRunTime = new DateTime();
  73. private float _paramTemp;
  74. public float Temperature
  75. {
  76. get
  77. {
  78. return _entity.ChamberTemperature;
  79. }
  80. }
  81. public JetChamber ChamberType
  82. {
  83. get
  84. {
  85. return _entity.ChamberType;
  86. }
  87. }
  88. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  89. {
  90. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  91. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  92. EventWaferArrived += WaferArrived;
  93. LoadIdleCleanOpt();
  94. }
  95. public void InitClean()
  96. {
  97. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  98. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  99. }
  100. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  101. {
  102. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  103. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  104. }
  105. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  106. {
  107. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  108. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  109. }
  110. public bool IsTemperatureReady(float temp)
  111. {
  112. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  113. }
  114. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  115. {
  116. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  117. _taskTransferType == type;
  118. }
  119. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  120. {
  121. _task = TaskType.PrepareTransfer;
  122. _taskRobot = robot;
  123. _taskSlot = slot;
  124. _taskTransferType = type;
  125. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  126. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  127. return _entityTaskToken != (int)FSM_MSG.NONE;
  128. }
  129. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  130. {
  131. _task = TaskType.PrepareTransfer;
  132. _taskRobot = robot;
  133. _taskSlot = slot;
  134. _taskBlade = blade;
  135. _taskTransferType = type;
  136. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  137. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  138. return _entityTaskToken != (int)FSM_MSG.NONE;
  139. }
  140. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  141. {
  142. _task = TaskType.PrepareTransfer;
  143. _taskRobot = robot;
  144. _taskSlot = slot;
  145. _taskBlade = blade;
  146. _taskTransferType = type;
  147. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  148. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  149. return _entityTaskToken != (int)FSM_MSG.NONE;
  150. }
  151. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  152. {
  153. StopWaitTransfer(robot);
  154. _task = TaskType.PostTransfer;
  155. _taskRobot = robot;
  156. _taskSlot = slot;
  157. _taskTransferType = type;
  158. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  159. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  160. return _entityTaskToken != (int)FSM_MSG.NONE;
  161. }
  162. public override bool PostTransfer(ModuleName robot)
  163. {
  164. StopWaitTransfer(robot);
  165. _task = TaskType.PostTransfer;
  166. _taskRobot = robot;
  167. _taskSlot = _inTransferSlot;
  168. _taskTransferType = _inTransferType;
  169. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  170. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  171. return _entityTaskToken != (int)FSM_MSG.NONE;
  172. }
  173. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  174. {
  175. bool withWafer;
  176. if (recipeType == RecipeType.Clean)
  177. {
  178. withWafer = false;
  179. }
  180. else
  181. {
  182. withWafer = true;
  183. }
  184. _task = TaskType.Process;
  185. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  186. if (RouteManager.IsATMMode)
  187. {
  188. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  189. _timerProcess.Start(time * 1000);
  190. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  191. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  192. return true;
  193. }
  194. else
  195. {
  196. if(isCleanRecipe)
  197. {
  198. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  199. }
  200. else
  201. {
  202. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  203. }
  204. return _entityTaskToken != (int)FSM_MSG.NONE;
  205. }
  206. }
  207. public override bool Preheating(float temperature)
  208. {
  209. _task = TaskType.Heating;
  210. _paramTemp = temperature;
  211. _entityTaskToken = _entity.InvokePreHeat(temperature);
  212. LogTaskStart(_task, $"preheat to {temperature}");
  213. return _entityTaskToken != (int)FSM_MSG.NONE;
  214. }
  215. public bool CheckTaskDone()
  216. {
  217. bool ret = false;
  218. switch (_task)
  219. {
  220. case TaskType.None:
  221. ret = true;
  222. break;
  223. case TaskType.PrepareTransfer:
  224. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  225. break;
  226. case TaskType.PostTransfer:
  227. ret = _entity.CheckAcked(_entityTaskToken);
  228. break;
  229. case TaskType.Heating:
  230. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  231. break;
  232. case TaskType.Process:
  233. case TaskType.IdlePurgeProcess:
  234. case TaskType.IdleCleanProcess:
  235. case TaskType.PreJobProcess:
  236. case TaskType.CompleteJobProcess:
  237. if (RouteManager.IsATMMode)
  238. {
  239. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  240. if (ret)
  241. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  242. }
  243. else
  244. {
  245. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  246. }
  247. break;
  248. }
  249. if (ret && _task != TaskType.None)
  250. {
  251. LogTaskDone(_task, "");
  252. _task = TaskType.None;
  253. }
  254. return ret;
  255. }
  256. public bool Monitor()
  257. {
  258. return true;
  259. }
  260. public void SetPMAuto()
  261. {
  262. _entity.SetAuto();
  263. }
  264. public bool IdlePurgeProcess(string recipeName)
  265. {
  266. _task = TaskType.IdlePurgeProcess;
  267. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  268. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  269. return _entityTaskToken != (int)FSM_MSG.NONE;
  270. }
  271. public bool IdleCleanProcess(string recipeName)
  272. {
  273. _task = TaskType.IdleCleanProcess;
  274. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  275. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  276. return _entityTaskToken != (int)FSM_MSG.NONE;
  277. }
  278. public void PreJobClean()
  279. {
  280. }
  281. public bool PreJobProcess(string recipeName)
  282. {
  283. _task = TaskType.PreJobProcess;
  284. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  285. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  286. return _entityTaskToken != (int)FSM_MSG.NONE;
  287. }
  288. public bool CompleteJobProcess(string recipeName)
  289. {
  290. _task = TaskType.CompleteJobProcess;
  291. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  292. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  293. return _entityTaskToken != (int)FSM_MSG.NONE;
  294. }
  295. private void WaferArrived(object sender, EventArgs e)
  296. {
  297. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  298. {
  299. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  300. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  301. if (recipeName.Length > 0)
  302. {
  303. Process(recipeName, false, RecipeType.Process, wafer);
  304. }
  305. else
  306. {
  307. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  308. }
  309. }
  310. else
  311. {
  312. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  313. }
  314. }
  315. public override void ResetTask()
  316. {
  317. _entity.ResetRecipeTime();
  318. base.ResetTask();
  319. }
  320. #region clean task
  321. private void LoadIdleCleanOpt()
  322. {
  323. // Load Idle Clean Config
  324. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  325. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  326. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  327. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  328. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  329. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  330. if (lastRun.Length > 10)
  331. {
  332. try
  333. {
  334. _lastRunTime = DateTime.Parse(lastRun);
  335. }
  336. catch
  337. {
  338. lastRun = string.Empty;
  339. }
  340. }
  341. if (lastRun.Length <= 10)
  342. {
  343. _lastRunTime = DateTime.Now;
  344. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  345. }
  346. // validate the idle clean recipe name
  347. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  348. if (File.Exists(path))
  349. {
  350. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  351. Recipe recipe = Recipe.Load(recipeContent);
  352. if (recipe == null)
  353. {
  354. _idleCleanRecipe = string.Empty;
  355. }
  356. }
  357. }
  358. public void WaferProcessDone()
  359. {
  360. _lastRunTime = DateTime.Now;
  361. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  362. _idleCleanWaferCount++;
  363. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  364. }
  365. private void ResetIdleCleanCounter()
  366. {
  367. _lastRunTime = DateTime.Now;
  368. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  369. _idleCleanWaferCount = 0;
  370. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  371. }
  372. public bool RunIdleCleanTask()
  373. {
  374. if(_idleCleanOpt == 1)
  375. {
  376. TimeSpan span = DateTime.Now - _lastRunTime;
  377. if(span.TotalHours >= _idleCleanHourSetPoint)
  378. {
  379. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  380. ResetIdleCleanCounter();
  381. return true;
  382. }
  383. }
  384. else if(_idleCleanOpt == 2)
  385. {
  386. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  387. {
  388. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  389. ResetIdleCleanCounter();
  390. return true;
  391. }
  392. }
  393. return false;
  394. }
  395. public bool RunJobCleanTask(string jobCleanRecipe)
  396. {
  397. // validate the job clean recipe name
  398. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  399. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  400. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  401. if (recipeContent.Length == 0)
  402. {
  403. return false;
  404. }
  405. Recipe recipe = Recipe.Load(recipeContent);
  406. if (recipe == null)
  407. {
  408. LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
  409. return false;
  410. }
  411. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  412. }
  413. #endregion
  414. }
  415. }