Strona główna Odkrywaj Pomoc
Zarejestruj się Zaloguj się
JetPlasma
/
Kepler-Release
Obserwuj 2
Polub 0
Forkuj 0
Pliki Problemy 0 Oczekujące zmiany 0 Wiki
Drzewo: 6579ef1d85
Gałęzie Tagi
Kepler-Release
/
Venus
/
Venus_RT
/
Config
/
Interlock.Venus.xml

Interlock.Venus.xml 43 KB
Historia Czysty

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272 
  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4.   <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    5. 

  5. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    6. 

  6. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    7. 

  7. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    8. 

  8. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    9. 

  9. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    10. 

  10. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    11. 

  11.   </Action>
    12. 

  12. 

  13.   <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    14. 

  14. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    15. 

  15. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"       tip.zh-CN="" tip.en-US="DI-34" />
    16. 

  16. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    17. 

  17. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    18. 

  18.   </Action>
    19. 

  19.   
    20. 

  20.   <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    21. 

  21. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    22. 

  22. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    23. 

  23. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    24. 

  24. 	<Limit di="PMA.DI_MFC1_Pressure_SW"		value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
    25. 

  25. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    26. 

  26. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    27. 

  27.   </Action>
    28. 

  28. 

  29.   <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    30. 

  30. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    31. 

  31. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    32. 

  32. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    33. 

  33. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    34. 

  34. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    35. 

  35. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    36. 

  36.   </Action>
    37. 

  37. 

  38.   <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    39. 

  39. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    40. 

  40. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    41. 

  41. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    42. 

  42. 	<Limit di="PMA.DI_MFC2_Pressure_SW"		value="true" tip="DI MFC2 Pressure SW"      tip.zh-CN="" tip.en-US="DI-36" />
    43. 

  43. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    44. 

  44. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    45. 

  45.   </Action>
    46. 

  46. 

  47.   <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    48. 

  48. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    49. 

  49. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    50. 

  50. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    51. 

  51. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    52. 

  52. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    53. 

  53. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    54. 

  54.   </Action>
    55. 

  55.   
    56. 

  56.   <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    57. 

  57. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    58. 

  58. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    59. 

  59. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    60. 

  60. 	<Limit di="PMA.DI_MFC3_Pressure_SW"		value="true" tip="DI MFC3 Pressure SW"		tip.zh-CN="" tip.en-US="DI-37" />
    61. 

  61. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    62. 

  62. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    63. 

  63.   </Action>
    64. 

  64. 

  65.   <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    66. 

  66. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    67. 

  67. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    68. 

  68. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    69. 

  69. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    70. 

  70. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    71. 

  71. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    72. 

  72.   </Action>
    73. 

  73. 

  74.   <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    75. 

  75. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    76. 

  76. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    77. 

  77. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    78. 

  78. 	<Limit di="PMA.DI_MFC4_Pressure_SW"		value="true" tip="DI MFC4 Pressure SW"		tip.zh-CN="" tip.en-US="DI-38" />
    79. 

  79. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    80. 

  80. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    81. 

  81.   </Action>
    82. 

  82.   
    83. 

  83.   <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    84. 

  84. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    85. 

  85. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    86. 

  86. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    87. 

  87. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    88. 

  88. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    89. 

  89. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    90. 

  90.   </Action>
    91. 

  91. 

  92.   <Action do="PMA.DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
    93. 

  93. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    94. 

  94. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    95. 

  95. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    96. 

  96. 	<Limit di="PMA.DI_PN2_Pressure_SW"		value="true" tip="DI PN2 Pressure SW"		tip.zh-CN="" tip.en-US="DI-34" />
    97. 

  97. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    98. 

  98. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    99. 

  99. 	<Limit do="PMA.DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
    100. 

  100. 	<Limit do="PMA.DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
    101. 

  101.   </Action>
    102. 

  102. 

  103.   <Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    104. 

  104. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    105. 

  105. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    106. 

  106. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    107. 

  107. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    108. 

  108. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    109. 

  109.   </Action>
    110. 

  110. 

  111.   <Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    112. 

  112. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    113. 

  113. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    114. 

  114. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    115. 

  115. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    116. 

  116. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    117. 

  117.   </Action>
    118. 

  118. 

  119.   <Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    120. 

  120. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    121. 

  121. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    122. 

  122. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    123. 

  123. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    124. 

  124. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    125. 

  125.   </Action>
    126. 

  126. 

  127.   <Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    128. 

  128. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    129. 

  129. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    130. 

  130. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    131. 

  131. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    132. 

  132. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    133. 

  133.   </Action>
    134. 

  134. 

  135.   <Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    136. 

  136. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    137. 

  137. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    138. 

  138. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    139. 

  139. 	<Limit di="PMA.DI_MFC5_Pressure_SW"		value="true" tip="DI MFC5 Pressure SW"		tip.zh-CN="" tip.en-US="DI-39" />
    140. 

  140. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    141. 

  141. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    142. 

  142.   </Action>
    143. 

  143. 

  144.   <Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    145. 

  145. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    146. 

  146. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    147. 

  147. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    148. 

  148. 	<Limit di="PMA.DI_MFC6_Pressure_SW"		value="true" tip="DI MFC6 Pressure SW"		tip.zh-CN="" tip.en-US="DI-40" />
    149. 

  149. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    150. 

  150. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    151. 

  151.   </Action>
    152. 

  152. 

  153.   <Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    154. 

  154. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    155. 

  155. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    156. 

  156. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    157. 

  157. 	<Limit di="PMA.DI_MFC7_Pressure_SW"		value="true" tip="DI MFC7 Pressure SW"		tip.zh-CN="" tip.en-US="DI-41" />
    158. 

  158. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    159. 

  159. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    160. 

  160.   </Action>
    161. 

  161. 

  162.   <Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    163. 

  163. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    164. 

  164. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    165. 

  165. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    166. 

  166. 	<Limit di="PMA.DI_MFC8_Pressure_SW"		value="true" tip="DI MFC8 Pressure SW"		tip.zh-CN="" tip.en-US="DI-42" />
    167. 

  167. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    168. 

  168. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    169. 

  169.   </Action>
    170. 

  170. 

  171.   <Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    172. 

  172. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    173. 

  173. 	<Limit di="PMA.DI_He_Pressure_SW"		value="true" tip="DI He Pressure SW"		tip.zh-CN="" tip.en-US="DI-43" />
    174. 

  174. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    175. 

  175. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    176. 

  176.   </Action>
    177. 

  177. 

  178.   <Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    179. 

  179. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    180. 

  180. 	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    181. 

  181. 	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    182. 

  182.   </Action>
    183. 

  183. 

  184.   <Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
    185. 

  185. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    186. 

  186. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    187. 

  187. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    188. 

  188.   </Action>
    189. 

  189. 

  190.   <Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    191. 

  191. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    192. 

  192. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    193. 

  193. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    194. 

  194. 	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    195. 

  195.   </Action>
    196. 

  196. 

  197.   <Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    198. 

  198. 	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    199. 

  199. 	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    200. 

  200. 	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    201. 

  201. 	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    202. 

  202.   </Action>
    203. 

  203. 

  204.   <Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    205. 

  205. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    206. 

  206. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    207. 

  207. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    208. 

  208. 	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    209. 

  209.   </Action>
    210. 

  210. 

  211.   <Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    212. 

  212. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    213. 

  213. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    214. 

  214. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    215. 

  215. 	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
    216. 

  216.   </Action>
    217. 

  217. 

  218. 	
    219. 

  219.   <Action do="PMA.DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
    220. 

  220. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    221. 

  221.   </Action>
    222. 

  222. 

  223.   <Action do="PMA.DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
    224. 

  224. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    225. 

  225.   </Action>
    226. 

  226. 

  227.   <Action do="PMA.DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
    228. 

  228. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    229. 

  229.   </Action>
    230. 

  230. 

  231.   <Action do="PMA.DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
    232. 

  232. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    233. 

  233. 	<Limit di="PMA.DI_PN2_Pressure_SW"			value="true" tip="DI PN2 Pressure SW"			tip.zh-CN="" tip.en-US="DI-34" />
    234. 

  234.   </Action>
    235. 

  235. 

  236.   <Action do="PMA.DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
    237. 

  237. 	<Limit di="PMA.DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
    238. 

  238. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    239. 

  239.   </Action>
    240. 

  240. 

  241.   <Action do="PMA.DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
    242. 

  242. 	<Limit di="PMA.DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
    243. 

  243.   </Action>
    244. 

  244. 

  245.   <Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Loadlock Pumping Valve" tip.zh-CN="" tip.en-US="DO-42" >
    246. 

  246. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    247. 

  247. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    248. 

  248. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    249. 

  249. 	<Limit do="PMA.DO_Loadlock_Vent_Valve"		value="false" tip="DO Loadlock Vent Valve"		tip.zh-CN="" tip.en-US="DO-43" />
    250. 

  250.   </Action>
    251. 

  251. 

  252.   <Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Loadlock Vent Valve" tip.zh-CN="" tip.en-US="DO-43" >
    253. 

  253. 	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
    254. 

  254. 	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    255. 

  255. 	<Limit di="PMA.DI_PN2_Pressure_SW"			value="true" tip="DI PN2 Pressure SW"			tip.zh-CN="" tip.en-US="DI-34" />
    256. 

  256. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    257. 

  257. 	<Limit do="PMA.DO_Loadlock_Pumping_Valve"	value="false" tip="DO Loadlock Pumping Valve"	tip.zh-CN="" tip.en-US="DO-42" />
    258. 

  258.   </Action>
    259. 

  259. 

  260.   <Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Loadlock Arm Extend" tip.zh-CN="" tip.en-US="DO-44" >
    261. 

  261. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    262. 

  262. 	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    263. 

  263. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    264. 

  264.   </Action>
    265. 

  265. 	
    266. 

  266.   <Action do="PMA.DO_Loadlock_Arm_Retract" value="true" tip="Loadlock Arm Retract" tip.zh-CN="" tip.en-US="DO-45" >
    267. 

  267. 	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    268. 

  268. 	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
    269. 

  269. 	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
    270. 

  270.   </Action>
    271. 

  271. 	
    272. 

  272. </Interlock>
    273.