VenusDevice.cs 4.1 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValveGasFinal,
  27. ValveSoftPump,
  28. ValveFastPump,
  29. ValveCHBPurge,
  30. ValveCHBVent,
  31. ValveTurboPumpPurge,
  32. ValveGuage,
  33. ValveLoadlockVent,
  34. ValveLoadlockPumping,
  35. MfcGas1,
  36. MfcGas2,
  37. MfcGas3,
  38. MfcGas4,
  39. MfcGas5,
  40. GasStick1,
  41. GasStick2,
  42. GasStick3,
  43. TemperatureControl,
  44. ChamberLid,
  45. ATM_SW,
  46. VAC_SW,
  47. WaterFlow_SW,
  48. N2_Pressure,
  49. ProcessGauge,
  50. PressureGauge,
  51. ForelineGauge,
  52. MainPump,
  53. Chiller,
  54. Rf,
  55. BiasRf,
  56. Match,
  57. BiasMatch,
  58. PressureControl,
  59. ThrottleValve,
  60. HeaterChamber,
  61. ForelineHeater,
  62. Heartbeat,
  63. ResetPlcSignal,
  64. LiftPin,
  65. SlitDoor,
  66. SmallPin,
  67. MediumPin,
  68. LoadLockArm,
  69. StatisticsRfOnTime,
  70. StatisticsPumpOnTime,
  71. PlcDateTime,
  72. Lid,
  73. LidLoadlock,
  74. LidLocker
  75. }
  76. public enum StateData
  77. {
  78. RecipeProcessTime,
  79. RecipeStepNo,
  80. RecipeStepMode,
  81. RecipeName,
  82. RecipeBaseName,
  83. RecipeStepTimeElapsed,
  84. RecipeStepTimeSetPoint,
  85. RecipeStepRfTimeSetPoint,
  86. RecipeStepElectrodeTemp,
  87. SmallWafer,
  88. MidWafer,
  89. BigWafer,
  90. RfTimeElapsed,
  91. PumpTime,
  92. PMState,
  93. TMState,
  94. IsAutoMode,
  95. IsPmOnline,
  96. IsTmOnline,
  97. PMJobState,
  98. TMJobState,
  99. PmPlatformState,
  100. JobState,
  101. JobTmRecipe,
  102. JobPmRecipe,
  103. JobStartTime,
  104. JobStopTime,
  105. JobProcessCount,
  106. IsPumpingOkForProcess,
  107. IsCoolingOkForProcess,
  108. IsGasFlowingOkForProcess,
  109. IsRfPowering,
  110. TotalCycle,
  111. ProcessStatus,
  112. AlarmEvent,
  113. LeakCheckElapseTime,
  114. DataLogName,
  115. LotName,
  116. CurrentMagazineType,
  117. SchedulerRecipe,
  118. SchedulerState,
  119. SchedulerLoadStationInSubstrate,
  120. SchedulerRailInSubstrate,
  121. SchedulerPmSubstrate,
  122. SchedulerRailOutSubstrate,
  123. SchedulerLoadStationOutSubstrate,
  124. }
  125. public enum RtOperation
  126. {
  127. DeviceOperation,
  128. LockLid,
  129. UnlockLid,
  130. StartPump,
  131. Pump,
  132. StopPump,
  133. GasFlow,
  134. StopGasFlow,
  135. Cooling,
  136. StopCooling,
  137. /// <summary>
  138. ///
  139. /// 0:Step mode
  140. /// 1:Power on time
  141. /// 2:Electrode temperature
  142. /// 3:Electrode Critical temperature
  143. /// </summary>
  144. RfPower,
  145. Vent,
  146. Purge,
  147. Abort,
  148. Heat,
  149. SetConfig,
  150. SetPMBChillerState,
  151. SetHardwareConfig,
  152. RunRecipe,
  153. SkipCurrentStep,
  154. ResumeRecipe,
  155. AbortRecipe,
  156. Reset,
  157. LeakCheck,
  158. DeleteLeakCheck,
  159. MFCVerification,
  160. AllMFCVerification,
  161. SwitchOffBuzzer,
  162. // Lift pin & Guide pin
  163. MoveLiftPin,
  164. MoveGuidePin,
  165. StartAutoRun,
  166. StopAutoRun,
  167. PauseAutoRun,
  168. ResumeAutoRun,
  169. InitAll,
  170. AckError,
  171. TmRun,
  172. TmStop,
  173. PmAuto,
  174. PmManual,
  175. PmOnline,
  176. PmOffline,
  177. JobAuto,
  178. JobManual,
  179. JobRun,
  180. JobStop,
  181. JobAbort,
  182. JobPmLoadRecipe,
  183. JobTmLoadRecipe,
  184. JobTmRun,
  185. JobTmStop,
  186. JobPmOnline,
  187. JobPmOffline,
  188. JobPmProcessDone,
  189. JobTmRecovered,
  190. }
  191. public enum MovementPosition
  192. {
  193. Unknown, Down, Up, Left, Right, Middle
  194. }
  195. }