OverVenusViewModel.cs 63 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659166016611662166316641665166616671668166916701671167216731674167516761677167816791680168116821683168416851686168716881689169016911692169316941695169616971698169917001701
  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverVenusViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes=new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_PVHe3ValveIsOpen;
  53. private bool m_HeISOValveIsOpen;
  54. private bool m_TurboPumpPumpingValveIsOpen;
  55. private bool m_TurboPumpPurgeValveIsOpen;
  56. private bool m_GuageValveIsOpen;
  57. private bool m_PendulumValveIsOpen;
  58. //private bool m_BRFIsOn;
  59. //private bool m_SRFIsOn;
  60. private double m_HeGasSetpoint;
  61. private int m_HePressureSetpoint;
  62. private float m_SRFFwdPowerSetpoint;
  63. private float m_BRFFwdPowerSetpoint;
  64. private float m_SRFMatchC1;
  65. private float m_SRFMatchC2;
  66. private float m_BRFMatchC1;
  67. private float m_BRFMatchC2;
  68. private double m_MFC1SetPoint;
  69. private double m_MFC2SetPoint;
  70. private double m_MFC3SetPoint;
  71. private double m_MFC4SetPoint;
  72. private double m_MFC5SetPoint;
  73. private double m_MFC6SetPoint;
  74. private double m_MFC7SetPoint;
  75. private double m_MFC8SetPoint;
  76. private double m_N2SetPoint;
  77. private double m_TurboN2FlowSetPoint;
  78. private AITMfcData m_MFC1Data;
  79. private AITMfcData m_MFC2Data;
  80. private AITMfcData m_MFC3Data;
  81. private AITMfcData m_MFC4Data;
  82. private AITMfcData m_MFC5Data;
  83. private AITMfcData m_MFC6Data;
  84. private AITMfcData m_MFC7Data;
  85. private AITMfcData m_MFC8Data;
  86. private AITMfcData m_MFCHeData;
  87. private AITMfcData m_MFCN2Data;
  88. private AITHeaterData m_ValveHeaterData;
  89. private AITHeaterData m_ForelineHeaterData;
  90. private AITHeaterData m_WallHeaterData;
  91. private AITRfData m_SRFData;
  92. private AITRfData m_BRFData;
  93. private AITPendulumValveData m_PendulumValveData;
  94. private AITHVData m_ESCHVData;
  95. private PMState m_PMCurrentState;
  96. private bool m_SourceRFFanInterlock;
  97. private bool m_IsWLK;
  98. private bool m_IsWaterFlowOk;
  99. private bool m_IsTurboPumpInterlock;
  100. private bool m_IsCDAOK;
  101. private bool m_SensorGasBoxDoor;
  102. private bool m_SensorGasBoxPressure;
  103. private bool m_PumpIsOpen;
  104. private bool m_TurboIsOpen;
  105. private bool m_IsATM;
  106. private bool m_IsVAC;
  107. private List<string> m_RtDataKeys;
  108. private Dictionary<string, object> m_RtDataValues;
  109. private int m_PositionValue;
  110. private bool m_IsPositionMode;
  111. private int m_ESCVoltage;
  112. private bool m_GasIsFlowing;
  113. private bool m_IsProcessing;
  114. private bool m_IsAutoMode;
  115. private string m_SelectedRecipe;
  116. private float m_ChillerTempSetpoint;
  117. private float m_WallTempSetpoint;
  118. private bool m_HeIsPressureMode=true;
  119. private bool m_ChillerIsOn;
  120. private float m_ProcessHighPressure;
  121. private float m_ProcessLowPressure;
  122. private float m_ForelinePressurePressure;
  123. private float m_ESCHePressure;
  124. ButterflyValveView butterflyValveMessageBox;
  125. HeaterView heaterView;
  126. private int m_TurboPumpRotationalSpeed;
  127. private bool m_LiftPinIsUp;
  128. private bool m_IsSlitDoorClosed;
  129. private bool m_IsLidClosed;
  130. private float m_ChillerTemperature;
  131. private float m_HVTemperature;
  132. private int m_ESCHVOutputVoltage;
  133. //private float m_SRfReflectPower;
  134. //private float m_SRfForwardPowerFeedBack;
  135. //private float m_BRfReflectPower;
  136. //private float m_BRfForwardPowerFeedBack;
  137. //private int m_MatchWorkMode;
  138. //private int m_BiasMatchWorkMode;
  139. private float m_MatchC1;
  140. private float m_MatchC2;
  141. private float m_BiasMatchC1;
  142. private float m_BiasMatchC2;
  143. private float m_PendulumValvePosition;
  144. private bool m_IsTurboPumpAtSpeed;
  145. private bool m_TurboPumpWaterFlowSwitch;
  146. private bool m_IsHasWafer;
  147. private Recipe m_CurrentRecipe=new Recipe ();
  148. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  149. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  150. private double m_ChamberPressureFeedBack;
  151. #endregion
  152. #region 属性
  153. public List<string> CurrentModuleRecipes
  154. {
  155. get { return m_CurrentModuleRecipes; }
  156. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  157. }
  158. public Recipe CurrentRecipe
  159. {
  160. get { return m_CurrentRecipe; }
  161. set { SetProperty(ref m_CurrentRecipe, value); }
  162. }
  163. public RecipeResult CurrentRecipeResult
  164. {
  165. get { return m_CurrentRecipeResult; }
  166. set { SetProperty(ref m_CurrentRecipeResult, value); }
  167. }
  168. public RecipeStep CurrentRecipeStep
  169. {
  170. get { return m_CurrentRecipeStep; }
  171. set { SetProperty(ref m_CurrentRecipeStep, value); }
  172. }
  173. public bool IsHasWafer
  174. {
  175. get { return m_IsHasWafer; }
  176. set { SetProperty(ref m_IsHasWafer, value); }
  177. }
  178. public bool IsTurboPumpAtSpeed
  179. {
  180. get { return m_IsTurboPumpAtSpeed; }
  181. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  182. }
  183. public bool TurboPumpWaterFlowSwitch
  184. {
  185. get { return m_TurboPumpWaterFlowSwitch; }
  186. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  187. }
  188. public float PendulumValvePosition
  189. {
  190. get { return m_PendulumValvePosition; }
  191. set{SetProperty(ref m_PendulumValvePosition, value);}
  192. }
  193. public float BiasMatchC1
  194. {
  195. get { return m_BiasMatchC1; }
  196. set
  197. {
  198. SetProperty(ref m_BiasMatchC1, value);
  199. }
  200. }
  201. public float BiasMatchC2
  202. {
  203. get { return m_BiasMatchC2; }
  204. set
  205. {
  206. SetProperty(ref m_BiasMatchC2, value);
  207. }
  208. }
  209. public float MatchC1
  210. {
  211. get { return m_MatchC1; }
  212. set
  213. {
  214. SetProperty(ref m_MatchC1, value);
  215. }
  216. }
  217. public float MatchC2
  218. {
  219. get { return m_MatchC2; }
  220. set
  221. {
  222. SetProperty(ref m_MatchC2, value);
  223. }
  224. }
  225. public AITPendulumValveData PendulumValveData
  226. {
  227. get { return m_PendulumValveData; }
  228. set
  229. {
  230. SetProperty(ref m_PendulumValveData, value);
  231. }
  232. }
  233. public AITHVData ESCHVData
  234. {
  235. get { return m_ESCHVData; }
  236. set
  237. {
  238. SetProperty(ref m_ESCHVData, value);
  239. }
  240. }
  241. public int ESCHVOutputVoltage
  242. {
  243. get { return m_ESCHVOutputVoltage; }
  244. set
  245. {
  246. SetProperty(ref m_ESCHVOutputVoltage, value);
  247. }
  248. }
  249. public float ChillerTemperature
  250. {
  251. get { return m_ChillerTemperature; }
  252. set
  253. {
  254. SetProperty(ref m_ChillerTemperature, value);
  255. }
  256. }
  257. public float HVTemperature
  258. {
  259. get { return m_HVTemperature; }
  260. set
  261. {
  262. SetProperty(ref m_HVTemperature, value);
  263. }
  264. }
  265. public bool IsLidClosed
  266. {
  267. get { return m_IsLidClosed; }
  268. set
  269. {
  270. SetProperty(ref m_IsLidClosed, value);
  271. }
  272. }
  273. public bool IsSlitDoorClosed
  274. {
  275. get { return m_IsSlitDoorClosed; }
  276. set
  277. {
  278. SetProperty(ref m_IsSlitDoorClosed, value);
  279. }
  280. }
  281. public bool LiftPinIsUp
  282. {
  283. get { return m_LiftPinIsUp; }
  284. set
  285. {
  286. SetProperty(ref m_LiftPinIsUp, value);
  287. }
  288. }
  289. public int TurboPumpRotationalSpeed
  290. {
  291. get { return m_TurboPumpRotationalSpeed; }
  292. set
  293. {
  294. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  295. }
  296. }
  297. public float ESCHePressure
  298. {
  299. get { return m_ESCHePressure; }
  300. set
  301. {
  302. SetProperty(ref m_ESCHePressure, value);
  303. }
  304. }
  305. public float ProcessHighPressure
  306. {
  307. get { return m_ProcessHighPressure; }
  308. set
  309. {
  310. SetProperty(ref m_ProcessHighPressure, value);
  311. }
  312. }
  313. public float ProcessLowPressure
  314. {
  315. get { return m_ProcessLowPressure; }
  316. set
  317. {
  318. SetProperty(ref m_ProcessLowPressure, value);
  319. }
  320. }
  321. public float ForelinePressure
  322. {
  323. get { return m_ForelinePressurePressure; }
  324. set
  325. {
  326. SetProperty(ref m_ForelinePressurePressure, value);
  327. }
  328. }
  329. public bool SourceRFFanInterlock
  330. {
  331. get { return m_SourceRFFanInterlock; }
  332. set
  333. {
  334. SetProperty(ref m_SourceRFFanInterlock, value);
  335. }
  336. }
  337. public bool IsWLK
  338. {
  339. get { return m_IsWLK; }
  340. set
  341. {
  342. SetProperty(ref m_IsWLK, value);
  343. }
  344. }
  345. public bool IsWaterFlowOk
  346. {
  347. get { return m_IsWaterFlowOk; }
  348. set
  349. {
  350. SetProperty(ref m_IsWaterFlowOk, value);
  351. }
  352. }
  353. public bool IsCDAOK
  354. {
  355. get { return m_IsCDAOK; }
  356. set
  357. {
  358. SetProperty(ref m_IsCDAOK, value);
  359. }
  360. }
  361. public bool SensorGasBoxDoor
  362. {
  363. get { return m_SensorGasBoxDoor; }
  364. set
  365. {
  366. SetProperty(ref m_SensorGasBoxDoor, value);
  367. }
  368. }
  369. public bool SensorGasBoxPressure
  370. {
  371. get { return m_SensorGasBoxPressure; }
  372. set
  373. {
  374. SetProperty(ref m_SensorGasBoxPressure, value);
  375. }
  376. }
  377. public bool IsTurboPumpInterlock
  378. {
  379. get { return m_IsTurboPumpInterlock; }
  380. set
  381. {
  382. SetProperty(ref m_IsTurboPumpInterlock, value);
  383. }
  384. }
  385. public string ModuleName { get; set; }
  386. public double MFC1SetPoint
  387. {
  388. get { return m_MFC1SetPoint; }
  389. set { SetProperty(ref m_MFC1SetPoint, value); }
  390. }
  391. public double MFC2SetPoint
  392. {
  393. get { return m_MFC2SetPoint; }
  394. set { SetProperty(ref m_MFC2SetPoint, value); }
  395. }
  396. public double MFC3SetPoint
  397. {
  398. get { return m_MFC3SetPoint; }
  399. set { SetProperty(ref m_MFC3SetPoint, value); }
  400. }
  401. public double MFC4SetPoint
  402. {
  403. get { return m_MFC4SetPoint; }
  404. set { SetProperty(ref m_MFC4SetPoint, value); }
  405. }
  406. public double MFC5SetPoint
  407. {
  408. get { return m_MFC5SetPoint; }
  409. set { SetProperty(ref m_MFC5SetPoint, value); }
  410. }
  411. public double MFC6SetPoint
  412. {
  413. get { return m_MFC6SetPoint; }
  414. set { SetProperty(ref m_MFC6SetPoint, value); }
  415. }
  416. public double MFC7SetPoint
  417. {
  418. get { return m_MFC7SetPoint; }
  419. set { SetProperty(ref m_MFC7SetPoint, value); }
  420. }
  421. public double MFC8SetPoint
  422. {
  423. get { return m_MFC8SetPoint; }
  424. set { SetProperty(ref m_MFC8SetPoint, value); }
  425. }
  426. public double N2SetPoint
  427. {
  428. get { return m_N2SetPoint; }
  429. set { SetProperty(ref m_N2SetPoint, value); }
  430. }
  431. public double TurboN2FlowSetPoint
  432. {
  433. get { return m_TurboN2FlowSetPoint; }
  434. set
  435. {
  436. if (value != m_TurboN2FlowSetPoint)
  437. {
  438. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  439. }
  440. SetProperty(ref m_TurboN2FlowSetPoint, value);
  441. }
  442. }
  443. public AITMfcData MFC1Data
  444. {
  445. get { return m_MFC1Data; }
  446. set { SetProperty(ref m_MFC1Data, value); }
  447. }
  448. public AITMfcData MFC2Data
  449. {
  450. get { return m_MFC2Data; }
  451. set { SetProperty(ref m_MFC2Data, value); }
  452. }
  453. public AITMfcData MFC3Data
  454. {
  455. get { return m_MFC3Data; }
  456. set { SetProperty(ref m_MFC3Data, value); }
  457. }
  458. public AITMfcData MFC4Data
  459. {
  460. get { return m_MFC4Data; }
  461. set { SetProperty(ref m_MFC4Data, value); }
  462. }
  463. public AITMfcData MFC5Data
  464. {
  465. get { return m_MFC5Data; }
  466. set { SetProperty(ref m_MFC5Data, value); }
  467. }
  468. public AITMfcData MFC6Data
  469. {
  470. get { return m_MFC6Data; }
  471. set { SetProperty(ref m_MFC6Data, value); }
  472. }
  473. public AITMfcData MFC7Data
  474. {
  475. get { return m_MFC7Data; }
  476. set { SetProperty(ref m_MFC7Data, value); }
  477. }
  478. public AITMfcData MFC8Data
  479. {
  480. get { return m_MFC8Data; }
  481. set { SetProperty(ref m_MFC8Data, value); }
  482. }
  483. public AITMfcData MFCHeData
  484. {
  485. get { return m_MFCHeData; }
  486. set { SetProperty(ref m_MFCHeData, value); }
  487. }
  488. public AITMfcData MFCN2Data
  489. {
  490. get { return m_MFCN2Data; }
  491. set { SetProperty(ref m_MFCN2Data, value); }
  492. }
  493. public AITHeaterData ValveHeaterData
  494. {
  495. get { return m_ValveHeaterData; }
  496. set { SetProperty(ref m_ValveHeaterData, value); }
  497. }
  498. public AITHeaterData ForelineHeaterData
  499. {
  500. get { return m_ForelineHeaterData; }
  501. set { SetProperty(ref m_ForelineHeaterData, value); }
  502. }
  503. public AITHeaterData WallHeaterData
  504. {
  505. get { return m_WallHeaterData; }
  506. set { SetProperty(ref m_WallHeaterData, value); }
  507. }
  508. public AITRfData SRFData
  509. {
  510. get { return m_SRFData; }
  511. set { SetProperty(ref m_SRFData, value); }
  512. }
  513. public AITRfData BRFData
  514. {
  515. get { return m_BRFData; }
  516. set { SetProperty(ref m_BRFData, value); }
  517. }
  518. public PMState PMCurrentState
  519. {
  520. get { return m_PMCurrentState; }
  521. set { SetProperty(ref m_PMCurrentState, value); }
  522. }
  523. #region 阀
  524. public bool GasFinalValveIsOpen
  525. {
  526. get { return m_GasFinalValveIsOpen; }
  527. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  528. }
  529. public bool PVN21ValveIsOpen
  530. {
  531. get { return m_PVN21ValveIsOpen; }
  532. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  533. }
  534. public bool PVN22ValveIsOpen
  535. {
  536. get { return m_PVN22ValveIsOpen; }
  537. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  538. }
  539. public bool N2ValveIsOpen
  540. {
  541. get { return m_N2ValveIsOpen; }
  542. set { SetProperty(ref m_N2ValveIsOpen, value); }
  543. }
  544. public bool PV11ValveIsOpen
  545. {
  546. get { return m_PV11ValveIsOpen; }
  547. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  548. }
  549. public bool PV12ValveIsOpen
  550. {
  551. get { return m_PV12ValveIsOpen; }
  552. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  553. }
  554. public bool MFC1ValveIsOpen
  555. {
  556. get { return m_MFC1ValveIsOpen; }
  557. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  558. }
  559. public bool PV21ValveIsOpen
  560. {
  561. get { return m_PV21ValveIsOpen; }
  562. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  563. }
  564. public bool PV22ValveIsOpen
  565. {
  566. get { return m_PV22ValveIsOpen; }
  567. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  568. }
  569. public bool MFC2ValveIsOpen
  570. {
  571. get { return m_MFC2ValveIsOpen; }
  572. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  573. }
  574. public bool PV31ValveIsOpen
  575. {
  576. get { return m_PV31ValveIsOpen; }
  577. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  578. }
  579. public bool PV32ValveIsOpen
  580. {
  581. get { return m_PV32ValveIsOpen; }
  582. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  583. }
  584. public bool MFC3ValveIsOpen
  585. {
  586. get { return m_MFC3ValveIsOpen; }
  587. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  588. }
  589. public bool PV41ValveIsOpen
  590. {
  591. get { return m_PV41ValveIsOpen; }
  592. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  593. }
  594. public bool PV42ValveIsOpen
  595. {
  596. get { return m_PV42ValveIsOpen; }
  597. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  598. }
  599. public bool MFC4ValveIsOpen
  600. {
  601. get { return m_MFC4ValveIsOpen; }
  602. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  603. }
  604. public bool MFC5ValveIsOpen
  605. {
  606. get { return m_MFC5ValveIsOpen; }
  607. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  608. }
  609. public bool MFC6ValveIsOpen
  610. {
  611. get { return m_MFC6ValveIsOpen; }
  612. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  613. }
  614. public bool MFC7ValveIsOpen
  615. {
  616. get { return m_MFC7ValveIsOpen; }
  617. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  618. }
  619. public bool MFC8ValveIsOpen
  620. {
  621. get { return m_MFC8ValveIsOpen; }
  622. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  623. }
  624. public bool PVHe1ValveIsOpen
  625. {
  626. get { return m_PVHe1ValveIsOpen; }
  627. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  628. }
  629. public bool PVHe2ValveIsOpen
  630. {
  631. get { return m_PVHe2ValveIsOpen; }
  632. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  633. }
  634. public bool PVHe3ValveIsOpen
  635. {
  636. get { return m_PVHe3ValveIsOpen; }
  637. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  638. }
  639. public bool HeISOValveIsOpen
  640. {
  641. get { return m_HeISOValveIsOpen; }
  642. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  643. }
  644. public bool TurboPumpPumpingValveIsOpen
  645. {
  646. get { return m_TurboPumpPumpingValveIsOpen; }
  647. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  648. }
  649. public bool TurboPumpPurgeValveIsOpen
  650. {
  651. get { return m_TurboPumpPurgeValveIsOpen; }
  652. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  653. }
  654. public bool SoftPumpValveIsOpen
  655. {
  656. get { return m_SoftPumpValveIsOpen; }
  657. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  658. }
  659. public bool FastPumpValveIsOpen
  660. {
  661. get { return m_FastPumpValveIsOpen; }
  662. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  663. }
  664. public bool GuageValveIsOpen
  665. {
  666. get { return m_GuageValveIsOpen; }
  667. set { SetProperty(ref m_GuageValveIsOpen, value); }
  668. }
  669. #endregion
  670. public Dictionary<string, object> RtDataValues
  671. {
  672. get { return m_RtDataValues; }
  673. set { SetProperty(ref m_RtDataValues, value); }
  674. }
  675. public bool PumpIsOpen
  676. {
  677. get { return m_PumpIsOpen; }
  678. set { SetProperty(ref m_PumpIsOpen, value); }
  679. }
  680. public bool PendulumValveIsOpen
  681. {
  682. get { return m_PendulumValveIsOpen; }
  683. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  684. }
  685. public bool TurboIsOpen
  686. {
  687. get { return m_TurboIsOpen; }
  688. set { SetProperty(ref m_TurboIsOpen, value); }
  689. }
  690. public bool IsATM
  691. {
  692. get { return m_IsATM; }
  693. set { SetProperty(ref m_IsATM, value); }
  694. }
  695. public bool IsVAC
  696. {
  697. get { return m_IsVAC; }
  698. set { SetProperty(ref m_IsVAC, value); }
  699. }
  700. //public bool BRFIsOn
  701. //{
  702. // get { return m_BRFIsOn; }
  703. // set { SetProperty(ref m_BRFIsOn, value); }
  704. //}
  705. //public bool SRFIsOn
  706. //{
  707. // get { return m_SRFIsOn; }
  708. // set { SetProperty(ref m_SRFIsOn, value); }
  709. //}
  710. public int PositionValue
  711. {
  712. get { return m_PositionValue; }
  713. set { SetProperty(ref m_PositionValue, value); }
  714. }
  715. public bool IsPositionMode
  716. {
  717. get { return m_IsPositionMode; }
  718. set { SetProperty(ref m_IsPositionMode, value); }
  719. }
  720. public double HeGasSetpoint
  721. {
  722. get { return m_HeGasSetpoint; }
  723. set
  724. {
  725. SetProperty(ref m_HeGasSetpoint, value);
  726. }
  727. }
  728. public int HePressureSetpoint
  729. {
  730. get { return m_HePressureSetpoint; }
  731. set
  732. {
  733. SetProperty(ref m_HePressureSetpoint, value);
  734. }
  735. }
  736. public float SRFFwdPowerSetpoint
  737. {
  738. get { return m_SRFFwdPowerSetpoint; }
  739. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  740. }
  741. public float BRFFwdPowerSetpoint
  742. {
  743. get { return m_BRFFwdPowerSetpoint; }
  744. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  745. }
  746. public int ESCVoltage
  747. {
  748. get { return m_ESCVoltage; }
  749. set { SetProperty(ref m_ESCVoltage, value); }
  750. }
  751. public float SRFMatchC1
  752. {
  753. get { return m_SRFMatchC1; }
  754. set { SetProperty(ref m_SRFMatchC1, value); }
  755. }
  756. public float SRFMatchC2
  757. {
  758. get { return m_SRFMatchC2; }
  759. set { SetProperty(ref m_SRFMatchC2, value); }
  760. }
  761. public float BRFMatchC1
  762. {
  763. get { return m_BRFMatchC1; }
  764. set { SetProperty(ref m_BRFMatchC1, value); }
  765. }
  766. public float BRFMatchC2
  767. {
  768. get { return m_BRFMatchC2; }
  769. set { SetProperty(ref m_BRFMatchC2, value); }
  770. }
  771. public bool GasIsFlowing
  772. {
  773. get { return m_GasIsFlowing; }
  774. set { SetProperty(ref m_GasIsFlowing, value); }
  775. }
  776. public bool IsProcessing
  777. {
  778. get { return m_IsProcessing; }
  779. set { SetProperty(ref m_IsProcessing, value); }
  780. }
  781. public bool IsAutoMode
  782. {
  783. get { return m_IsAutoMode; }
  784. set { SetProperty(ref m_IsAutoMode, value); }
  785. }
  786. public string SelectedRecipe
  787. {
  788. get { return m_SelectedRecipe; }
  789. set { SetProperty(ref m_SelectedRecipe, value); }
  790. }
  791. public float ChillerTempSetpoint
  792. {
  793. get { return m_ChillerTempSetpoint; }
  794. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  795. }
  796. public float WallTempSetpoint
  797. {
  798. get { return m_WallTempSetpoint; }
  799. set { SetProperty(ref m_WallTempSetpoint, value); }
  800. }
  801. public bool HeIsPressureMode
  802. {
  803. get { return m_HeIsPressureMode; }
  804. set { SetProperty(ref m_HeIsPressureMode, value); }
  805. }
  806. public bool ChillerIsOn
  807. {
  808. get { return m_ChillerIsOn; }
  809. set { SetProperty(ref m_ChillerIsOn, value); }
  810. }
  811. public double ChamberPressureFeedBack
  812. {
  813. get { return m_ChamberPressureFeedBack; }
  814. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  815. }
  816. #endregion
  817. #region 命令
  818. private DelegateCommand _PMInitCommnad;
  819. public DelegateCommand PMInitCommnad =>
  820. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  821. private DelegateCommand _PMAbortCommnad;
  822. public DelegateCommand PMAbortCommnad =>
  823. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  824. private DelegateCommand _GasCommand;
  825. public DelegateCommand GasCommand =>
  826. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  827. private DelegateCommand _HeCommand;
  828. public DelegateCommand HeCommand =>
  829. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  830. private DelegateCommand _RfCommand;
  831. public DelegateCommand RfCommand =>
  832. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  833. private DelegateCommand _PurgeCommand;
  834. public DelegateCommand PurgeCommand =>
  835. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  836. private DelegateCommand _VentCommand;
  837. public DelegateCommand VentCommand =>
  838. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  839. private DelegateCommand _PumpCommand;
  840. public DelegateCommand PumpCommand =>
  841. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  842. private DelegateCommand _OpenPumpCommand;
  843. public DelegateCommand OpenPumpCommand =>
  844. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  845. private DelegateCommand _ClosePumpCommand;
  846. public DelegateCommand ClosePumpCommand =>
  847. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  848. private DelegateCommand _OpenTurboPumpCommand;
  849. public DelegateCommand OpenTurboPumpCommand =>
  850. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  851. private DelegateCommand _CloseTurboPumpCommand;
  852. public DelegateCommand CloseTurboPumpCommand =>
  853. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  854. private DelegateCommand _OpenPendulumValveCommand;
  855. public DelegateCommand OpenPendulumValveCommand =>
  856. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  857. private DelegateCommand _ClosePendulumValveCommand;
  858. public DelegateCommand ClosePendulumValveCommand =>
  859. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  860. private DelegateCommand<object> _PinUpDownCommand;
  861. public DelegateCommand<object> PinUpDownCommand =>
  862. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  863. private DelegateCommand _SetSRfCommand;
  864. public DelegateCommand SetSRfCommand =>
  865. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  866. private DelegateCommand _SetBRfCommand;
  867. public DelegateCommand SetBRfCommand =>
  868. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  869. private DelegateCommand _OpenButterflyValveViewCommand;
  870. public DelegateCommand OpenButterflyValveViewCommand =>
  871. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  872. private DelegateCommand _HVCommand;
  873. public DelegateCommand HVCommand =>
  874. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  875. private DelegateCommand _HVSetCommand;
  876. public DelegateCommand HVSetCommand =>
  877. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  878. private DelegateCommand _LoadRecipeCommand;
  879. public DelegateCommand LoadRecipeCommand =>
  880. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  881. private DelegateCommand<object> _ControlValveCommand;
  882. public DelegateCommand<object> ControlValveCommand =>
  883. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  884. private DelegateCommand<object> _RunRecipeCommand;
  885. public DelegateCommand<object> RunRecipeCommand =>
  886. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  887. private DelegateCommand _SetChillerTempCommand;
  888. public DelegateCommand SetChillerTempCommand =>
  889. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  890. private DelegateCommand _OnOffChillerCommand;
  891. public DelegateCommand OnOffChillerCommand =>
  892. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  893. private DelegateCommand<object> _HeaterCommand;
  894. public DelegateCommand<object> HeaterCommand =>
  895. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  896. private DelegateCommand _EndStepCommand;
  897. public DelegateCommand EndStepCommand =>
  898. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  899. #endregion
  900. #region 构造函数
  901. public OverVenusViewModel()
  902. {
  903. m_RtDataKeys = new List<string>();
  904. m_IsATM = true;
  905. ModuleName = "PMA";
  906. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  907. DispatcherTimer timer = new DispatcherTimer();
  908. timer.Interval = TimeSpan.FromSeconds(0.5);
  909. timer.Tick += timer_Tick;
  910. timer.Start();
  911. }
  912. #endregion
  913. #region 命令方法
  914. private void OnControlValve(object obj)
  915. {
  916. CommonValveControl commonValveControl = (CommonValveControl)obj;
  917. if (commonValveControl.IsCanEdit == true)
  918. {
  919. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  920. }
  921. }
  922. private void OnPMInit()
  923. {
  924. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  925. }
  926. private async void OnGas()
  927. {
  928. await Task.Run(async () =>
  929. {
  930. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  931. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  932. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  933. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  934. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  935. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  936. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  937. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  938. await Task.Delay(1000);
  939. object[] mfc = new object[8];
  940. string[] mfcSetPoint = new string[8];
  941. mfc[0] = MFC1Data.SetPoint;
  942. mfc[1] = MFC2Data.SetPoint;
  943. mfc[2] = MFC3Data.SetPoint;
  944. mfc[3] = MFC4Data.SetPoint;
  945. mfc[4] = MFC5Data.SetPoint;
  946. mfc[5] = MFC6Data.SetPoint;
  947. mfc[6] = MFC7Data.SetPoint;
  948. mfc[7] = MFC8Data.SetPoint;
  949. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  950. });
  951. }
  952. private void OnHe()
  953. {
  954. if (PVHe1ValveIsOpen == true)
  955. {
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  958. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  959. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  960. }
  961. else
  962. {
  963. if (HeIsPressureMode)
  964. {
  965. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  966. }
  967. else
  968. {
  969. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  970. }
  971. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  972. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  973. }
  974. }
  975. private void OnRf()
  976. {
  977. if (PMCurrentState == PMState.RfPowering)
  978. {
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  980. }
  981. else
  982. {
  983. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  984. }
  985. }
  986. private void OnPurge()
  987. {
  988. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  989. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  990. //{
  991. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  992. // await Task.Delay(1000);
  993. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  994. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  995. //}
  996. //else
  997. //{
  998. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  999. // await Task.Delay(1000);
  1000. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1001. //}
  1002. if (PMCurrentState == PMState.Purging)
  1003. {
  1004. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1005. //await Task.Delay(1000);
  1006. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1008. }
  1009. else
  1010. {
  1011. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1012. //await Task.Delay(1000);
  1013. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1014. }
  1015. }
  1016. private void OnVent()
  1017. {
  1018. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1019. if (PMCurrentState == PMState.Venting)
  1020. {
  1021. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1022. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1023. }
  1024. else
  1025. {
  1026. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1027. }
  1028. }
  1029. private void OnPump()
  1030. {
  1031. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1032. if (PMCurrentState==PMState.Pumping)
  1033. {
  1034. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1035. return;
  1036. }
  1037. //if (PMCurrentState == PMState.pum)
  1038. //{
  1039. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1040. // return;
  1041. //}
  1042. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1043. //{
  1044. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1045. //}
  1046. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1047. //{
  1048. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1049. //}
  1050. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1051. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1052. // 设置底压
  1053. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1054. if (basePressure <= 0.01 || basePressure >= 1000)
  1055. {
  1056. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1057. return;
  1058. }
  1059. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1060. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1061. {
  1062. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1063. return;
  1064. }
  1065. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1066. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1067. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1068. }
  1069. private void OnOpenPump()
  1070. {
  1071. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1072. if (PMCurrentState==PMState.LaunchingPump)
  1073. {
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1075. return;
  1076. }
  1077. //if (PumpIsOpen == true)
  1078. //{
  1079. // return;
  1080. //}
  1081. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1082. }
  1083. private void OnClosePump()
  1084. {
  1085. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1086. }
  1087. private void OnOpenTurboPump()
  1088. {
  1089. //TurboIsOpen = true;
  1090. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1091. if (PMCurrentState == PMState.LaunchingTurboPump)
  1092. {
  1093. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1094. return;
  1095. }
  1096. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1097. }
  1098. private void OnCloseTurboPump()
  1099. {
  1100. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1101. }
  1102. private void OnOpenPendulumValve()
  1103. {
  1104. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1105. }
  1106. private void OnClosePendulumValve()
  1107. {
  1108. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1109. }
  1110. private void OnPinUpDown(object upDown)
  1111. {
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1113. }
  1114. private async void OnSetSRf()
  1115. {
  1116. if (SRFData.IsRfOn == true)
  1117. {
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1119. }
  1120. else
  1121. {
  1122. if (GasIsFlowing == true)
  1123. {
  1124. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1125. await Task.Delay(100);
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1127. }
  1128. }
  1129. }
  1130. private async void OnSetBRf()
  1131. {
  1132. if (BRFData.IsRfOn == true)
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1135. }
  1136. else
  1137. {
  1138. if (GasIsFlowing == true)
  1139. {
  1140. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1141. await Task.Delay(100);
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1143. }
  1144. }
  1145. }
  1146. private void OnPMAbort()
  1147. {
  1148. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1149. }
  1150. private void OnOpenButterflyValveView()
  1151. {
  1152. //if (butterflyValveMessageBox == null)
  1153. //{
  1154. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1155. butterflyValveMessageBox = new ButterflyValveView();
  1156. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1157. butterflyValveMessageBox.Left = 700;
  1158. butterflyValveMessageBox.Top = 600;
  1159. butterflyValveMessageBox.Show();
  1160. butterflyValveMessageBox.Owner = _mainWindow;
  1161. //}
  1162. }
  1163. private void OnLoadRecipe()
  1164. {
  1165. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1166. }
  1167. private void OnHV()
  1168. {
  1169. if (ESCHVData.IsOn == true)
  1170. {
  1171. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1172. }
  1173. else
  1174. {
  1175. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1176. //await Task.Run(async () =>
  1177. //{
  1178. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1179. // //await Task.Delay(1000);
  1180. //});
  1181. }
  1182. }
  1183. private void OnHVSet()
  1184. {
  1185. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1186. }
  1187. private void OnRunRecipe(object obj)
  1188. {
  1189. string recipeName = SelectedRecipe;
  1190. if (recipeName == null)
  1191. {
  1192. return;
  1193. }
  1194. ClearData();
  1195. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1196. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1197. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1198. }
  1199. private void OnSetChillerTemp()
  1200. {
  1201. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1202. float x;
  1203. float.TryParse(value, out x);
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1205. }
  1206. private void OnOffChiller()
  1207. {
  1208. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1209. }
  1210. private void OnHeater(object obj)
  1211. {
  1212. AITHeaterData heaterData = obj as AITHeaterData;
  1213. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1214. heaterView = new HeaterView(heaterData);
  1215. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1216. heaterView.Owner = _mainWindow;
  1217. heaterView.Show();
  1218. }
  1219. private void OnEndStep()
  1220. {
  1221. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1222. {
  1223. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1224. }
  1225. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1226. {
  1227. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1228. }
  1229. }
  1230. #endregion
  1231. #region 私有方法
  1232. private void ClearData()
  1233. {
  1234. ESCVoltage = 0;
  1235. SRFFwdPowerSetpoint = 0;
  1236. SRFMatchC1 = 0;
  1237. SRFMatchC2 = 0;
  1238. BRFFwdPowerSetpoint = 0;
  1239. BRFMatchC1 = 0;
  1240. BRFMatchC2 = 0;
  1241. HeGasSetpoint = 0;
  1242. MFC1SetPoint = 0;
  1243. MFC2SetPoint = 0;
  1244. MFC3SetPoint = 0;
  1245. MFC4SetPoint = 0;
  1246. MFC5SetPoint = 0;
  1247. MFC6SetPoint = 0;
  1248. MFC7SetPoint = 0;
  1249. MFC8SetPoint = 0;
  1250. }
  1251. private IEnumerable<string> GetFilesNames(string path)
  1252. {
  1253. return Directory.GetFiles(path, "*.rcp")
  1254. .Select(Path.GetFileNameWithoutExtension);
  1255. }
  1256. void timer_Tick(object sender, EventArgs e)
  1257. {
  1258. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1259. if (RtDataValues==null)
  1260. {
  1261. return;
  1262. }
  1263. TurboN2FlowSetPoint = Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1264. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1265. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1266. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1267. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1268. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1269. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1270. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1271. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1272. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1273. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1274. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1275. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1276. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1277. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1278. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1279. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1280. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1281. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1282. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1283. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1284. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1285. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1286. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1287. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1288. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1289. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1290. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1291. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1292. PVHe3ValveIsOpen= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1293. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1294. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1295. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1296. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1297. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1298. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1299. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1300. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1301. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1302. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1303. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1304. IsProcessing=PMCurrentState == PMState.Processing;
  1305. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1306. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1307. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1308. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1309. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1310. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1311. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1312. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1313. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1314. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1315. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1316. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1317. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1318. ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1319. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1320. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1321. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1322. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1323. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1324. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1325. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1326. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1327. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1328. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1329. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1330. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1331. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1332. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1333. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1334. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1335. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1336. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1337. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1338. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1339. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1340. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1341. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1342. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1343. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1344. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1345. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1346. if (PMCurrentState == PMState.Processing)
  1347. {
  1348. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1349. if (CurrentRecipeResult.RecipeStepNumber != null)
  1350. {
  1351. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1352. }
  1353. }
  1354. else
  1355. {
  1356. CurrentRecipeResult = null;
  1357. CurrentRecipeStep = null;
  1358. }
  1359. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1360. {
  1361. ChamberPressureFeedBack = ProcessLowPressure;
  1362. }
  1363. else
  1364. {
  1365. ChamberPressureFeedBack = ProcessHighPressure;
  1366. }
  1367. }
  1368. public void addDataKeys()
  1369. {
  1370. m_RtDataKeys.Clear();
  1371. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1372. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1373. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1374. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1375. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1376. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1377. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1378. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1379. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1380. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1381. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1382. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1383. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1384. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1385. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1386. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1387. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1388. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1389. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1390. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1391. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1392. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1393. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1394. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1395. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1396. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1397. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1398. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1399. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1400. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1401. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1402. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1403. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1404. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1405. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1406. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1407. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1408. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1409. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1410. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1411. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1412. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1413. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1414. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1415. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1416. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1417. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1418. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1419. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1420. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1421. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1422. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1423. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1424. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1425. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1426. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1427. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1428. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1429. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1430. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1431. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1432. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1433. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1434. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1435. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1436. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1437. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1438. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1439. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1440. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1441. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1442. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1443. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1444. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1445. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1446. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1447. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1448. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1449. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1450. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1451. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1452. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1453. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1454. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1455. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1456. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1457. }
  1458. #endregion
  1459. }
  1460. }