EfemSimulator.cs 13 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using Venus_Core;
  9. namespace Venus_Simulator.Devices
  10. {
  11. class EfemSimulatorServer : SocketDeviceSimulator
  12. {
  13. private const string CMD_PATTERN = "^MOV|^SET|^GET";
  14. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  15. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  16. private const string ACK = "ACK";
  17. private string[] _slotMap = new string[25];
  18. private PeriodicJob _HwThread;
  19. private bool _bCommReady;
  20. private bool _isDoorOpen;
  21. private bool _isPlaced;
  22. public int WaferSize = 3;
  23. public string SlotMap
  24. {
  25. get { return string.Join("", _slotMap); }
  26. }
  27. public bool _isVacuumError { get; set; }
  28. public bool _isAirError { get; set; }
  29. public bool _isFlowError { get; set; }
  30. public bool _isLeak { get; set; }
  31. public bool _isMaintain { get; set; }
  32. public bool _isWaferPresent { get; set; }
  33. public bool _isMaintainDoorOpen { get; private set; }
  34. public bool _isProtrude1 { get; set; }
  35. public bool _isProtrude2 { get; set; }
  36. public bool _isProtrude3 { get; set; }
  37. public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
  38. {
  39. for (int i = 0; i < _slotMap.Length; i++)
  40. _slotMap[i] = "0";
  41. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  42. }
  43. private bool OnSendEvent()
  44. {
  45. if (!_bCommReady)
  46. {
  47. OnWriteMessage("INF:READY/COMM;");
  48. }
  49. return true;
  50. }
  51. protected override void ProcessUnsplitMessage(string str)
  52. {
  53. if (!_bCommReady && str.Contains("ACK:READY/COMM"))
  54. {
  55. _bCommReady = true;
  56. }
  57. if (!Regex.IsMatch(str, CMD_PATTERN))
  58. return;
  59. // 发送ACK 表示收到
  60. string ack = Regex.Replace(str, CMD_PATTERN, ACK);
  61. OnWriteMessage(ack);
  62. // 处理INF
  63. OnWork(ack);
  64. }
  65. internal void SetCassetteDoor(bool doorOpen)
  66. {
  67. if (doorOpen != _isDoorOpen)
  68. {
  69. _isDoorOpen = doorOpen;
  70. SendSystemData();
  71. }
  72. }
  73. internal void SetMaintain(bool maintain)
  74. {
  75. if (maintain != _isMaintain)
  76. {
  77. _isMaintain = maintain;
  78. SendSystemData();
  79. }
  80. }
  81. internal void SetProtrude1(bool protrude)
  82. {
  83. if (protrude != _isProtrude1)
  84. {
  85. _isProtrude1 = protrude;
  86. SendLP1Data();
  87. }
  88. }
  89. internal void SetProtrude2(bool protrude)
  90. {
  91. if (protrude != _isProtrude2)
  92. {
  93. _isProtrude2 = protrude;
  94. SendLP2Data();
  95. }
  96. }
  97. internal void SetProtrude3(bool protrude)
  98. {
  99. if (protrude != _isProtrude3)
  100. {
  101. _isProtrude3 = protrude;
  102. SendLP3Data();
  103. }
  104. }
  105. private void OnWork(string strACK)
  106. {
  107. // match basic
  108. Match m1 = Regex.Match(strACK, SCMD);
  109. // get mock delay time
  110. string sBasic = m1.Groups[1].Value;
  111. if (string.IsNullOrEmpty(sBasic))
  112. return;
  113. EfemOperation op = EfemConstant.ToOperation(sBasic);
  114. ushort millionSec = this.SimuOperationTime(op);
  115. // delay
  116. //await Task.Delay(millionSec);
  117. Thread.Sleep(millionSec);
  118. // build the INF string
  119. string strINF = string.Empty;
  120. switch (EfemConstant.ToOperation(sBasic))
  121. {
  122. case EfemOperation.GetWaferInfo:
  123. strINF = strACK.Replace(ACK, "INF");
  124. strINF = strINF.TrimEnd(';');
  125. strINF += "/1111111111111110001111111;";
  126. break;
  127. case EfemOperation.Home:
  128. string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/P3/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
  129. strINF = s1 + strACK.Replace(ACK, "INF");
  130. SendSystemData();
  131. SendLP1Data();
  132. SendLP2Data();
  133. SendLP3Data();
  134. OnWriteMessage(strACK.Replace(ACK, "INF"));
  135. return;
  136. case EfemOperation.Map:
  137. case EfemOperation.Load:
  138. Match m2 = Regex.Match(strACK, SFOUP);
  139. if (m2.Success)
  140. {
  141. string map = string.Join("", _slotMap);
  142. string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
  143. strINF = s2 + strACK.Replace(ACK, "INF");
  144. }
  145. break;
  146. case EfemOperation.StateTrack:
  147. strINF = "INF:STATE/TRACK/000;";
  148. break;
  149. case EfemOperation.CarrierId:
  150. strINF = strACK.Replace(ACK, "INF");
  151. strINF = strINF.TrimEnd(';');
  152. strINF += "/12345678;";
  153. break;
  154. case EfemOperation.Align:
  155. case EfemOperation.Pick:
  156. case EfemOperation.Place:
  157. case EfemOperation.Orgsh:
  158. case EfemOperation.Light:
  159. case EfemOperation.SigStatus:
  160. default:
  161. strINF = strACK.Replace(ACK, "INF");
  162. break;
  163. }
  164. OnWriteMessage(strINF);
  165. }
  166. private void SendLP1Data()
  167. {
  168. uint data = GetLP1Data1();
  169. string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
  170. OnWriteMessage(msg);
  171. }
  172. private void SendLP2Data()
  173. {
  174. uint data = GetLP2Data1();
  175. string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
  176. OnWriteMessage(msg);
  177. }
  178. private void SendLP3Data()
  179. {
  180. uint data = GetLP3Data1();
  181. string msg = $"EVT:SIGSTAT/P3/{data:X8}/00000000;";
  182. OnWriteMessage(msg);
  183. }
  184. private void SendSystemData()
  185. {
  186. uint data = GetSystemData1();
  187. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  188. OnWriteMessage(msg);
  189. }
  190. private ushort SimuOperationTime(EfemOperation op)
  191. {
  192. ushort sec = 0;
  193. switch (op)
  194. {
  195. case EfemOperation.Map:
  196. case EfemOperation.GetWaferInfo:
  197. case EfemOperation.Align:
  198. sec = 2200;
  199. break;
  200. case EfemOperation.Pick:
  201. case EfemOperation.Place:
  202. case EfemOperation.Orgsh:
  203. sec = 2200;
  204. break;
  205. case EfemOperation.Light:
  206. case EfemOperation.SigStatus:
  207. sec = 200;
  208. break;
  209. default:
  210. sec = 100;
  211. break;
  212. }
  213. return sec;
  214. }
  215. public void PlaceCarrier1()
  216. {
  217. _isPlaced = true;
  218. SendLP1Data();
  219. }
  220. public void RemoveCarrier1()
  221. {
  222. _isPlaced = false;
  223. SendLP1Data();
  224. }
  225. public void PlaceCarrier2()
  226. {
  227. _isPlaced = true;
  228. SendLP2Data();
  229. }
  230. public void RemoveCarrier2()
  231. {
  232. _isPlaced = false;
  233. SendLP2Data();
  234. }
  235. public void PlaceCarrier3()
  236. {
  237. _isPlaced = true;
  238. SendLP3Data();
  239. }
  240. public void RemoveCarrier3()
  241. {
  242. _isPlaced = false;
  243. SendLP3Data();
  244. }
  245. public void ClearWafer()
  246. {
  247. for (int i = 0; i < _slotMap.Length; i++)
  248. {
  249. _slotMap[i] = "0";
  250. }
  251. }
  252. public void SetAllWafer()
  253. {
  254. for (int i = 0; i < _slotMap.Length; i++)
  255. {
  256. _slotMap[i] = "1";
  257. }
  258. }
  259. public void SetUpWafer()
  260. {
  261. for (int i = 0; i < _slotMap.Length; i++)
  262. {
  263. _slotMap[i] = i > 15 ? "1" : "0";
  264. }
  265. }
  266. public void SetLowWafer()
  267. {
  268. for (int i = 0; i < _slotMap.Length; i++)
  269. {
  270. _slotMap[i] = i < 10 ? "1" : "0";
  271. }
  272. }
  273. public void RandomWafer()
  274. {
  275. Random _rd = new Random();
  276. for (int i = 0; i < _slotMap.Length; i++)
  277. {
  278. //_slotMap[i] = (i % 9).ToString();
  279. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  280. }
  281. }
  282. private uint GetLP1Data1()
  283. {
  284. uint data1 = 0x0u;
  285. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  286. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  287. switch (WaferSize)
  288. {
  289. case 3:
  290. //data1 |= 0x00000040u;
  291. data1 |= 0x00000080u;
  292. data1 |= 0x00000100u;
  293. break;
  294. case 4:
  295. data1 |= 0x00000040u;
  296. //data1 |= 0x00000080u;
  297. data1 |= 0x00000100u;
  298. break;
  299. case 6:
  300. data1 |= 0x00000040u;
  301. data1 |= 0x00000080u;
  302. //data1 |= 0x00000100u;
  303. break;
  304. }
  305. data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
  306. return data1;
  307. }
  308. private uint GetLP2Data1()
  309. {
  310. uint data1 = 0x0u;
  311. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  312. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  313. switch (WaferSize)
  314. {
  315. case 3:
  316. //data1 |= 0x00000040u;
  317. data1 |= 0x00000080u;
  318. data1 |= 0x00000100u;
  319. break;
  320. case 4:
  321. data1 |= 0x00000040u;
  322. //data1 |= 0x00000080u;
  323. data1 |= 0x00000100u;
  324. break;
  325. case 6:
  326. data1 |= 0x00000040u;
  327. data1 |= 0x00000080u;
  328. //data1 |= 0x00000100u;
  329. break;
  330. }
  331. data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
  332. return data1;
  333. }
  334. private uint GetLP3Data1()
  335. {
  336. uint data1 = 0x0u;
  337. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  338. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  339. switch (WaferSize)
  340. {
  341. case 3:
  342. //data1 |= 0x00000040u;
  343. data1 |= 0x00000080u;
  344. data1 |= 0x00000100u;
  345. break;
  346. case 4:
  347. data1 |= 0x00000040u;
  348. //data1 |= 0x00000080u;
  349. data1 |= 0x00000100u;
  350. break;
  351. case 6:
  352. data1 |= 0x00000040u;
  353. data1 |= 0x00000080u;
  354. //data1 |= 0x00000100u;
  355. break;
  356. }
  357. data1 |= (!_isProtrude3) ? 0x00000200u : 0x0;
  358. return data1;
  359. }
  360. private uint GetSystemData1()
  361. {
  362. uint data1 = 0x0u;
  363. //0:
  364. data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
  365. //3:
  366. data1 |= (!_isAirError ? 0x00000004u : 0x0);
  367. //4 Flow gauge Sensor Warning
  368. data1 |= (_isFlowError ? 0x00000010u : 0x0);
  369. //5 Leakage Sensor Warning
  370. data1 |= (_isLeak ? 0x00000020u : 0x0);
  371. //6:Door switch Door close
  372. data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
  373. //7 Drive power Normal
  374. data1 |= 0x00000080u;
  375. //8 Differential pressure sensor setting 1 Normal
  376. data1 |= 0x00000100u;
  377. //9 Differential pressure sensor setting 1 Normal
  378. data1 |= 0x00000200u;
  379. //10 Ionizer alarm Normal
  380. data1 |= 0x00000400u;
  381. //11 FFU alarm Normal
  382. data1 |= 0x00000800u;
  383. //12 Area sensor(Reserved) Not blocked
  384. data1 |= 0x00001000u;
  385. //13 Mode switch RUN
  386. data1 |= (!_isMaintain ? 0x00002000u : 0x0);
  387. //14 Robot Wafer Present No presence
  388. data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
  389. //15 Cassette Door Door Closed
  390. data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
  391. return 65535;
  392. }
  393. }
  394. }