DeviceModelVenus.xml 39 KB

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  1. <?xml version="1.0" encoding="utf-16"?>
  2. <DeviceModelDefine type="Venus" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  3. <IoValves>
  4. <IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
  15. isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
  17. isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
  18. <IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
  19. isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
  20. <IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
  21. isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
  23. isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
  24. <IoValve id="ValveN2" display="N2 valve" schematicId=""
  25. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
  26. <IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
  27. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe1"
  28. diCloseSensor="" diOpenSensor="" />
  29. <IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
  30. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe2"
  31. diCloseSensor="" diOpenSensor="" />
  32. <IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
  33. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
  34. diCloseSensor="" diOpenSensor="" />
  35. <IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
  36. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
  37. diCloseSensor="" diOpenSensor="" />
  38. <IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
  39. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
  40. <IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
  41. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
  42. diCloseSensor="" diOpenSensor="" />
  43. <IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
  44. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
  45. diCloseSensor="" diOpenSensor="" />
  46. <IoValve id="ValveGuage" display="Guage valve" schematicId=""
  47. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
  48. diCloseSensor="" diOpenSensor="" />
  49. <IoValve id="ValveLoadlockVent" display="Loadlock Vent valve" schematicId=""
  50. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Vent_Valve"
  51. diCloseSensor="" diOpenSensor="" />
  52. <IoValve id="ValveLoadlockPumping" display="Loadlock Pumping valve" schematicId=""
  53. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Pumping_Valve"
  54. diCloseSensor="" diOpenSensor="" />
  55. <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
  56. isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
  57. <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
  58. isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
  59. <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
  60. isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
  61. <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
  62. isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
  63. <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
  64. isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
  65. <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
  66. isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
  67. <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
  68. isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
  69. <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
  70. isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
  71. </IoValves>
  72. <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
  73. <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
  74. aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
  75. diPressureAlarm="DI_MFC1_Pressure_SW"/>
  76. <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
  77. aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
  78. diPressureAlarm="DI_MFC2_Pressure_SW"/>
  79. <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
  80. aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
  81. diPressureAlarm="DI_MFC3_Pressure_SW"/>
  82. <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
  83. aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
  84. diPressureAlarm="DI_MFC4_Pressure_SW"/>
  85. <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
  86. aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
  87. diPressureAlarm="DI_MFC5_Pressure_SW"/>
  88. <IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
  89. aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
  90. diPressureAlarm="DI_MFC6_Pressure_SW"/>
  91. <IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
  92. aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
  93. diPressureAlarm="DI_MFC7_Pressure_SW"/>
  94. <IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
  95. aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
  96. diPressureAlarm="DI_MFC8_Pressure_SW"/>
  97. <IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
  98. aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange=""
  99. diPressureAlarm="DI_PN2_Pressure_SW"/>
  100. <IoMfc id="MfcHe" display="He" schematicId="He" unit="sccm"
  101. aiFlow="AI_He_Flow" aoFlow="AO_He_Flow_Setpoint" diOffline="" aoRange=""
  102. diPressureAlarm="DI_He_Pressure_SW"/>
  103. </IoMfcs>
  104. <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
  105. <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
  106. <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
  107. <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
  108. <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
  109. <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  110. <IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
  111. <IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
  112. <IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
  113. <IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
  114. <IoGasStick id="GasStickHe" display="" mfc ="MfcHe" downvalve="ValvePVHe1" />
  115. </IoGasSticks>
  116. <IoSensors>
  117. <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  118. <IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
  119. infoText="" warningText="" alarmText="" />
  120. <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true"
  121. infoText="" warningText="" alarmText="" />
  122. <IoSensor id="SensorWaterFlowOk" display="Water Flow OK" schematicId="" unit="" di="DI_PCW_Flow_SW" isLowAsNormal="" textOutTrigValue="false"
  123. infoText="" warningText="sensor water flow abnormal" alarmText="" />
  124. <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
  125. infoText="" warningText="Sensor water leak" alarmText="" />
  126. <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false"
  127. infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
  128. <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_SW" isLowAsNormal="" textOutTrigValue="false"
  129. infoText="" warningText="" alarmText="N2 Pressure Alarm" />
  130. <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
  131. </IoSensors>
  132. <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
  133. <IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
  134. aiValue="AI_Process_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  135. <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
  136. aiValue="AI_Chamber_Pressure"
  137. diGaugeFail="DI_Chamber_VAC_Gauge_Alarm"
  138. scPrecision="ChamberPressureGaugePrecision"
  139. scOffset=""/>
  140. <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
  141. aiValue="AI_Foreline_Pressure" diGaugeFail="DI_Foreline_Vacuum_Gauge_Alarm" scPrecision="" scOffset=""/>
  142. <IoPressureMeter id="ESCHeGauge" display="ESC He Pressure" schematicId="" unit="mTorr"
  143. aiValue="AI_ESC_He_Pressure" diGaugeFail="DI_ESC_He_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
  144. <IoPressureMeter id="LoadlockGauge" display="Loadlock Pressure" schematicId="" unit="mTorr"
  145. aiValue="AI_Loadlock_Pressure" diGaugeFail="DI_Loadlock_Vacuum_Gauge_Alarm" scPrecision="" scOffset=""/>
  146. </IoPressureMeters>
  147. <IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
  148. <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
  149. diBreakerState=""
  150. diRunning="DI_Pump_Running"
  151. diStart=""
  152. diStop=""
  153. diAlarm="DI_Pump_Alarm"
  154. diWarning="DI_Pump_Warning"
  155. diPumpTempAlarm=""
  156. diN2Alarm="DI_Pump_N2_Purge_Alarm"
  157. diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
  158. diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
  159. doStart="DO_Pump_Start"
  160. doStop="DO_Pump_Stop"
  161. doWaterFlowAlarm=""
  162. doN2PressureAlarm=""
  163. aiWaterFlow=""
  164. aiN2Pressure=""
  165. aoN2PressureAlarmMaxValue=""
  166. aoN2PressureAlarmMinValue=""
  167. aoWaterFlowAlarmMaxValue=""
  168. aoWaterFlowAlarmMinValue=""
  169. scEnableDryPump="EnableDryPump"
  170. scEnableWaterFlow="PumpEnableWaterFlow"
  171. scWaterFlowMinValue="PumpWaterFlowMinValue"
  172. scWaterFlowMaxValue="PumpWaterFlowMaxValue"
  173. scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
  174. scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
  175. scEnableN2Pressure="PumpEnableN2Pressure"
  176. scN2PressureMinValue="PumpN2PressureMinValue"
  177. scN2PressureMaxValue="PumpN2PressureMaxValue"
  178. scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
  179. scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  180. </IoPumps>
  181. <IoSignalTowers assembly="Venus_RT" classType="Venus_RT.Devices.IoSignalTower">
  182. <IoSignalTower id="SignalTower" display="" schematicId="" unit="" doRed="DO_Red_Light" doYellow="DO_Yellow_Light" doGreen="DO_Green_Light" doBlue="DO_Blue_Light" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2"/>
  183. </IoSignalTowers>
  184. <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
  185. <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
  186. diLogicProcessGasFlowing=""
  187. scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
  188. scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
  189. scIsIndependentControl="IsIndependentControl"
  190. scIsBoostPumpInstalled="EnableBoosterPump"
  191. scTvInstalled="EnableThrottleValve"
  192. boost="" tv="ThrottleValve" drypump="MainPump"
  193. pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" loadlockMeter="LoadlockGauge" escHeGauge="ESCHeGauge"/>
  194. </IoPressureControls>
  195. <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
  196. <IoHeater id="ValveHeater" display="Valve Heater" schematicId="" unit="℃"
  197. doPowerOn="DO_Valve_Heater_On"
  198. diDeviation="DI_Valve_TC_Deviation_out_of_range"
  199. diPowerOnFeedback="DI_Valve_Heater_On_FB"
  200. diControlTcBroken="DI_Valve_Control_TC_Broken_Alarm"
  201. diMonitorTcBroken="DI_Valve_Monitor_TC_Broken_Alarm"
  202. aoSetPoint="AO_Valve_Temperature_Setpoint"
  203. aoSetPointLimit="AO_Valve_Temp_Limit_Setpoint"
  204. aiFeedback="AI_Valve_Control_TC_Temp"
  205. aiMonitor="AI_Valve_Monitor_TC_Temp"
  206. scSetPointLimit="ValveHeaterSetPointLimit" />
  207. <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
  208. doPowerOn="DO_Foreline_Heater_On"
  209. diDeviation="DI_Foreline_TC_Deviation_out_of_range"
  210. diPowerOnFeedback="DI_Valve_Heater_On_FB"
  211. diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
  212. diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
  213. aoSetPoint="AO_Foreline_Temperature_Setpoint"
  214. aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
  215. aiFeedback="AI_Fline_Control_TC_Temp"
  216. aiMonitor="AI_Fline_Monitor_TC_Temp"
  217. scSetPointLimit="ForeLineHeaterSetPointLimit" />
  218. <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
  219. doPowerOn="DO_CHB_Wall_Heater_On"
  220. diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
  221. diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
  222. diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
  223. diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
  224. aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
  225. aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
  226. aiFeedback="AI_CHB_Wall_Control_TC_Temp"
  227. aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"
  228. scSetPointLimit="WallHeaterSetPointLimit" />
  229. </IoHeaters>
  230. <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
  231. <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  232. </IoHeartbeats>
  233. <IoResets>
  234. <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  235. </IoResets>
  236. <IoSetConfigs>
  237. <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  238. </IoSetConfigs>
  239. <IoStatisticss>
  240. <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
  241. diMonitorSignal="DI_Generator_Power_Status"
  242. scLastPMTime="RfOnTimeLastPMTime"
  243. scTimeFromLastPM="RfOnTimeFromLastPM"
  244. scTimeTotal="RfOnTimeTotal"
  245. scEnableAlarm="RfOnTimeEnableAlarm"
  246. scPMInterval="RfOnTimePMInterval" />
  247. <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
  248. diMonitorSignal="DI_Pump_Running"
  249. scLastPMTime="PumpOnTimeLastPMTime"
  250. scTimeFromLastPM="PumpOnTimeFromLastPM"
  251. scTimeTotal="PumpOnTimeTotal"
  252. scEnableAlarm="PumpOnTimeEnableAlarm"
  253. scPMInterval="PumpOnTimePMInterval" />
  254. </IoStatisticss>
  255. <IoPlcDateTimes>
  256. <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
  257. aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  258. </IoPlcDateTimes>
  259. <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
  260. <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
  261. doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up_POS" diOFF="DI_Lift_Pin_Down_POS" />
  262. <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
  263. doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
  264. <IoCylinder id="LoadLockArm" display="LoadLock Arm" schematicId="" unit="" doMotorRelay=""
  265. doON="DO_Loadlock_Arm_Extend" doOFF="DO_Loadlock_Arm_Retract" diON="DI_Loadlock_Arm_Extend_POS" diOFF="DI_Loadlock_Arm_Retract_POS" />
  266. </IoCylinders>
  267. <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
  268. <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PM_Lid_Closed" />
  269. <IoLid id="LidLoadlock" display="LidLoadlock" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Loadlock_Lid_Closed" />
  270. </IoLids>
  271. <IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
  272. <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
  273. </IoMessages>
  274. <IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
  275. <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
  276. </IoPumpCtrls>
  277. </DeviceModelDefine>