LLEntity.cs 23 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.RT.Event;
  15. namespace Venus_RT.Modules
  16. {
  17. class LLEntity : Entity, IEntity, IModuleEntity
  18. {
  19. public enum LLStatus
  20. {
  21. Not_Ready,
  22. Ready_For_TM,
  23. Ready_For_EFEM,
  24. }
  25. public enum STATE
  26. {
  27. Unknown,
  28. Init,
  29. Initializing,
  30. Idle,
  31. Error,
  32. Pumping,
  33. Venting,
  34. Purging,
  35. LeakCheck,
  36. Prepare_For_TM,
  37. Prepare_For_EFEM,
  38. Ready_For_TM,
  39. Ready_For_EFEM,
  40. }
  41. public enum MSG
  42. {
  43. Home,
  44. Online,
  45. Offline,
  46. Pump,
  47. Vent,
  48. AutoPump,
  49. AutoVent,
  50. Purge,
  51. CyclePurge,
  52. LeakCheck,
  53. Prepare_TM,
  54. Prepare_EFEM,
  55. TM_Exchange_Ready,
  56. EFEM_Exchange_Ready,
  57. Error,
  58. Abort,
  59. }
  60. public ModuleName Module { get; private set; }
  61. public LLStatus Status { get; private set; }
  62. public bool Check(int msg, out string reason, params object[] args)
  63. {
  64. throw new NotImplementedException();
  65. }
  66. public bool IsIdle
  67. {
  68. get { return fsm.State == (int)STATE.Idle; }
  69. }
  70. public bool IsError
  71. {
  72. get { return fsm.State == (int)STATE.Error; }
  73. }
  74. public bool IsInit
  75. {
  76. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  77. }
  78. public bool IsBusy
  79. {
  80. get { return !IsInit && !IsError && !IsIdle; }
  81. }
  82. public bool IsOnline { get; internal set; }
  83. public bool IsInclude
  84. {
  85. get;
  86. private set;
  87. } = true;
  88. public bool IsVac { get { return _JetTM.IsModuleVaccum(Module); } }
  89. public bool IsATM { get { return _JetTM.IsModuleATM(Module); } }
  90. public override int TimeToReady
  91. {
  92. get
  93. {
  94. switch ((STATE)fsm.State)
  95. {
  96. case STATE.Pumping:
  97. case STATE.Venting:
  98. return base.TimeToReady;
  99. }
  100. return int.MaxValue;
  101. }
  102. }
  103. private readonly JetTM _JetTM;
  104. private readonly MFPumpRoutine _pumpingRoutine;
  105. private readonly MFVentRoutine _ventingRoutine;
  106. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  107. private readonly MFPurgeRoutine _purgeRoutine;
  108. private readonly int _slotNumber = 4;
  109. private bool startControlPressureFlag = true;
  110. private int _controlPressureCheckPoint = 100;
  111. private int _controlPressureSetPoint = 90;
  112. private int _controlFlowSetPoint = 90;
  113. public LLEntity(ModuleName module)
  114. {
  115. Module = module;
  116. _JetTM = DEVICE.GetDevice<JetTM>("TM");
  117. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  118. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  119. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  120. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  121. _slotNumber = SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  122. WaferManager.Instance.SubscribeLocation(Module, _slotNumber);
  123. InitFsmMap();
  124. }
  125. protected override bool Init()
  126. {
  127. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  128. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  129. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  130. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  131. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  132. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  133. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  134. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  135. OP.Subscribe($"{Module}.{RtOperation.Include}", (cmd, args) => FnSetInclude());
  136. OP.Subscribe($"{Module}.{RtOperation.Exclude}", (cmd, args) => FnSetExclude());
  137. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  138. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  139. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  140. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  141. DATA.Subscribe($"{Module}.IsInclude", () => IsInclude, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  142. return true;
  143. }
  144. private void InitFsmMap()
  145. {
  146. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  147. fsm.EnableRepeatedMsg(true);
  148. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  149. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  150. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  151. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  152. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  153. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  154. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  155. // Home
  156. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  157. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  158. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  159. //vent sequence
  160. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  161. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  162. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  163. //Pump sequence
  164. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  165. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  166. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  167. // Purge sequence
  168. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  169. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  170. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  171. // Leak check sequence
  172. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  173. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  174. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  175. // Prepare TM Transfer
  176. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  177. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  178. Transition(STATE.Prepare_For_TM, MSG.Prepare_TM, null, STATE.Prepare_For_TM);
  179. Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
  180. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  181. Transition(STATE.Ready_For_TM, MSG.Prepare_TM, null, STATE.Ready_For_TM);
  182. Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
  183. Transition(STATE.Ready_For_TM, MSG.AutoVent, FnTryAutoVent, STATE.Venting);
  184. // Prepare EFEM Transfer
  185. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  186. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  187. Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
  188. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  189. Transition(STATE.Ready_For_EFEM, MSG.Prepare_EFEM, null, STATE.Ready_For_EFEM);
  190. Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
  191. Transition(STATE.Ready_For_EFEM, MSG.AutoPump, FnTryAutoPump, STATE.Pumping);
  192. //AnyStateTransition(FSM_MSG.TIMER, LLControlPressureTimer_Elapsed, FSM_STATE.SAME);
  193. Running = true;
  194. }
  195. public int Invoke(string function, params object[] args)
  196. {
  197. switch (function)
  198. {
  199. case "Home":
  200. case "Vent":
  201. case "Pump":
  202. if(Enum.TryParse(function, out MSG message))
  203. {
  204. if (CheckToPostMessage((int)message))
  205. return (int)message;
  206. }
  207. break;
  208. }
  209. return (int)FSM_MSG.NONE;
  210. }
  211. public bool CheckAcked(int msg)
  212. {
  213. return fsm.CheckExecuted(msg);
  214. }
  215. public bool CheckToPostMessage(int msg, params object[] args)
  216. {
  217. if (!fsm.FindTransition(fsm.State, msg))
  218. {
  219. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  220. return false;
  221. }
  222. Running = true;
  223. fsm.PostMsg(msg, args);
  224. return true;
  225. }
  226. public (int processed, int unprocessed) GetWaferProcessStatus()
  227. {
  228. int processedCount = 0;
  229. int unprocessCount = 0;
  230. for (int i = 0; i < _slotNumber; i++)
  231. {
  232. var wafer = WaferManager.Instance.GetWafer(Module, i);
  233. if (!wafer.IsEmpty)
  234. {
  235. if (wafer.ProcessState == Aitex.Core.Common.EnumWaferProcessStatus.Completed)
  236. {
  237. processedCount++;
  238. }
  239. else
  240. {
  241. unprocessCount++;
  242. }
  243. }
  244. }
  245. return (processedCount, unprocessCount);
  246. }
  247. private bool fnEnterTMReady(object[] param)
  248. {
  249. if (RouteManager.IsATMMode)
  250. {
  251. Status = LLStatus.Ready_For_TM;
  252. return true;
  253. }
  254. startControlPressureFlag = false;
  255. _controlPressureCheckPoint = SC.GetValue<int>($"{Module}.ControlPressureCheckPoint");
  256. _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  257. _controlFlowSetPoint = SC.GetValue<int>($"{Module}.{Module}_MFC1.DefaultSetPoint");
  258. _JetTM.TurnFastPumpValve(Module, true);
  259. _JetTM.TurnPurgeValve(Module, true);
  260. if (Module == ModuleName.LLA)
  261. {
  262. _JetTM.SwitchLLAPressureMode(true);
  263. _JetTM.SetLLAPressure(_controlPressureSetPoint);
  264. }
  265. else if (Module == ModuleName.LLB)
  266. {
  267. _JetTM.SwitchLLBPressureMode(true);
  268. _JetTM.SetLLBPressure(_controlPressureSetPoint);
  269. }
  270. Status = LLStatus.Ready_For_TM;
  271. return true;
  272. }
  273. private bool fnExitTMReady(object[] param)
  274. {
  275. if (RouteManager.IsATMMode)
  276. {
  277. Status = LLStatus.Not_Ready;
  278. return true;
  279. }
  280. _JetTM.TurnFastPumpValve(Module, false);
  281. _JetTM.TurnPurgeValve(Module, false);
  282. if (Module == ModuleName.LLA)
  283. {
  284. _JetTM.SwitchLLAPressureMode(false);
  285. _JetTM.SetLLAPressure(0);
  286. }
  287. else if (Module == ModuleName.LLB)
  288. {
  289. _JetTM.SwitchLLBPressureMode(false);
  290. _JetTM.SetLLBPressure(0);
  291. }
  292. Status = LLStatus.Not_Ready;
  293. return true;
  294. }
  295. private bool fnEnterEFEMReady(object[] param)
  296. {
  297. Status = LLStatus.Ready_For_EFEM;
  298. return true;
  299. }
  300. private bool fnExitEFEMReady(object[] param)
  301. {
  302. Status = LLStatus.Not_Ready;
  303. return true;
  304. }
  305. private bool fnMonitor(object[] param)
  306. {
  307. _debugRoutine();
  308. return true;
  309. }
  310. private bool fnError(object[] param)
  311. {
  312. IsOnline = false;
  313. return true;
  314. }
  315. private bool fnOnline(object[] param)
  316. {
  317. if (!IsInclude)
  318. {
  319. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is excluded,can not be put online");
  320. return false;
  321. }
  322. IsOnline = true;
  323. return true;
  324. }
  325. private bool fnOffline(object[] param)
  326. {
  327. IsOnline = false;
  328. return true;
  329. }
  330. private bool FnSetInclude()
  331. {
  332. if (IsOnline == true)
  333. {
  334. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Include");
  335. return false;
  336. }
  337. IsInclude = true;
  338. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Include Success");
  339. return true;
  340. }
  341. private bool FnSetExclude()
  342. {
  343. if (IsOnline == true)
  344. {
  345. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Exclude");
  346. return false;
  347. }
  348. IsInclude = false;
  349. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Exclude Success");
  350. return true;
  351. }
  352. private bool fnAbort(object[] param)
  353. {
  354. return true;
  355. }
  356. private bool fnHome(object[] param)
  357. {
  358. IsOnline = true;
  359. return true;
  360. }
  361. private bool fnHoming(object[] param)
  362. {
  363. return true;
  364. }
  365. private bool FnStartVent(object[] param)
  366. {
  367. return _ventingRoutine.Start() == RState.Running;
  368. }
  369. private bool FnTryAutoVent(object[] param)
  370. {
  371. if (RouteManager.IsATMMode)
  372. {
  373. PostMsg(MSG.TM_Exchange_Ready);
  374. return false;
  375. }
  376. return _ventingRoutine.Start() == RState.Running;
  377. }
  378. private bool FnVentTimeout(object[] param)
  379. {
  380. RState ret = _ventingRoutine.Monitor();
  381. if (ret == RState.Failed || ret == RState.Timeout)
  382. {
  383. PostMsg(MSG.Error);
  384. return false;
  385. }
  386. if(ret == RState.End)
  387. {
  388. MarkStateTime();
  389. return true;
  390. }
  391. return false;
  392. }
  393. private bool FnAbortVent(object[] param)
  394. {
  395. _ventingRoutine.Abort();
  396. return true;
  397. }
  398. private bool FnStartPump(object[] param)
  399. {
  400. return _pumpingRoutine.Start() == RState.Running;
  401. }
  402. private bool FnPumpTimeout(object[] param)
  403. {
  404. RState ret = _pumpingRoutine.Monitor();
  405. if (ret == RState.Failed || ret == RState.Timeout)
  406. {
  407. PostMsg(MSG.Error);
  408. return false;
  409. }
  410. if (ret == RState.End)
  411. {
  412. MarkStateTime();
  413. return true;
  414. }
  415. return false;
  416. }
  417. private bool FnAbortPump(object[] param)
  418. {
  419. _pumpingRoutine.Abort();
  420. return true;
  421. }
  422. private bool FnTryAutoPump(object[] param)
  423. {
  424. if (_JetTM.LLPumpStatus != JetTM.LLPumpState.Idle || RouteManager.IsATMMode)
  425. {
  426. PostMsg(MSG.EFEM_Exchange_Ready);
  427. return false;
  428. }
  429. return _pumpingRoutine.Start() == RState.Running;
  430. }
  431. private bool FnStartPurge(object[] param)
  432. {
  433. return _purgeRoutine.Start() == RState.Running;
  434. }
  435. private bool FnPurgeTimeout(object[] param)
  436. {
  437. RState ret = _purgeRoutine.Monitor();
  438. if (ret == RState.Failed || ret == RState.Timeout)
  439. {
  440. PostMsg(MSG.Error);
  441. return false;
  442. }
  443. return ret == RState.End;
  444. }
  445. private bool FnAbortPurge(object[] param)
  446. {
  447. _purgeRoutine.Abort();
  448. return true;
  449. }
  450. private bool FnStartLeakCheck(object[] param)
  451. {
  452. return _leakCheckRoutine.Start() == RState.Running;
  453. }
  454. private bool FnLeakCheckTimeout(object[] param)
  455. {
  456. RState ret = _leakCheckRoutine.Monitor();
  457. if (ret == RState.Failed || ret == RState.Timeout)
  458. {
  459. PostMsg(MSG.Error);
  460. return false;
  461. }
  462. return ret == RState.End;
  463. }
  464. private bool FnAbortLeakCheck(object[] param)
  465. {
  466. _leakCheckRoutine.Abort();
  467. return true;
  468. }
  469. private bool FnStartPrepareTM(object[] param)
  470. {
  471. if (RouteManager.IsATMMode)
  472. return true;
  473. return _pumpingRoutine.Start() == RState.Running;
  474. }
  475. private bool FnPreparaTMTimeout(object[] param)
  476. {
  477. if (RouteManager.IsATMMode)
  478. {
  479. if (fsm.ElapsedTime > 10000)
  480. {
  481. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  482. PostMsg(MSG.Error);
  483. return true;
  484. }
  485. return _JetTM.IsModuleATM(Module);
  486. }
  487. RState ret = _pumpingRoutine.Monitor();
  488. if (ret == RState.Failed || ret == RState.Timeout)
  489. {
  490. PostMsg(MSG.Error);
  491. return false;
  492. }
  493. return ret == RState.End;
  494. }
  495. private bool FnAbortPreparaTM(object[] param)
  496. {
  497. _pumpingRoutine.Abort();
  498. return true;
  499. }
  500. private bool FnStartPrepareEFEM(object[] param)
  501. {
  502. if (RouteManager.IsATMMode)
  503. return true;
  504. return _ventingRoutine.Start() == RState.Running;
  505. }
  506. private bool FnPrepareEFEMTimeout(object[] param)
  507. {
  508. if (RouteManager.IsATMMode)
  509. {
  510. if (fsm.ElapsedTime > 10000)
  511. {
  512. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  513. PostMsg(MSG.Error);
  514. return true;
  515. }
  516. return _JetTM.IsModuleATM(Module);
  517. }
  518. RState ret = _ventingRoutine.Monitor();
  519. if (ret == RState.Failed || ret == RState.Timeout)
  520. {
  521. PostMsg(MSG.Error);
  522. return false;
  523. }
  524. return ret == RState.End;
  525. }
  526. private bool FnAbortPrepareEFEM(object[] param)
  527. {
  528. _ventingRoutine.Abort();
  529. return true;
  530. }
  531. private void _debugRoutine()
  532. {
  533. int flag = 0;
  534. // Test Home routine
  535. if (flag == 1)
  536. {
  537. PostMsg(MSG.Home);
  538. }
  539. else if (flag == 2)
  540. {
  541. PostMsg(MSG.Vent);
  542. }
  543. else if (flag == 3)
  544. {
  545. PostMsg(MSG.Pump);
  546. }
  547. //else if (flag == 4)
  548. //{
  549. // PostMsg(MSG.PumpLoadLock);
  550. //}
  551. //else if (flag == 5)
  552. //{
  553. // PostMsg(MSG.VentLoadLock);
  554. //}
  555. //else if (flag == 6)
  556. //{
  557. // PostMsg(MSG.PurgeLoadLock);
  558. //}
  559. //else if (flag == 7)
  560. //{
  561. // PostMsg(MSG.LaunchPump);
  562. //}
  563. //else if (flag == 8)
  564. //{
  565. // PostMsg(MSG.LaunchTurboPump);
  566. //}
  567. //else if (flag == 9)
  568. //{
  569. // PostMsg(MSG.LoadLockLeakCheck);
  570. //}
  571. else if (flag == 10)
  572. {
  573. PostMsg(MSG.CyclePurge);
  574. }
  575. //else if (flag == 11)
  576. //{
  577. // PostMsg(MSG.GasLinePurge);
  578. //}
  579. //else if (flag == 12)
  580. //{
  581. // PostMsg(MSG.LeakCheck);
  582. //}
  583. //else if (flag == 13)
  584. //{
  585. // PostMsg(MSG.GasLeakCheck);
  586. //}
  587. //else if (flag == 14)
  588. //{
  589. // PostMsg(MSG.LLPlace);
  590. //}
  591. //else if (flag == 15)
  592. //{
  593. // PostMsg(MSG.LLPick);
  594. //}
  595. //else if (flag == 16)
  596. //{
  597. // PostMsg(MSG.RunRecipe, "7777");
  598. //}
  599. //else if (flag == 17)
  600. //{
  601. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  602. //}
  603. }
  604. }
  605. }