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							- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using Venus_RT.Devices;
 
- using MECF.Framework.Common.Routine;
 
- using Venus_Core;
 
- namespace Venus_RT.Modules.PMs
 
- {
 
-     class LoadLockVentRoutine : PMRoutineBase, IRoutine
 
-     {
 
-         private enum VentStep
 
-         {
 
-             kClosePendulumValve,
 
-             kCloseValves,
 
-             kVent,
 
-             kOverVent,
 
-             kCloseVentValves,
 
-         }
 
-         private int _overVentTime = 2000;
 
-         private int _checkATMTimeout = 90000;
 
-         //private int _ATMPressureLL = 720000;
 
-         public LoadLockVentRoutine(JetPMBase chamber) : base(chamber)
 
-         {
 
-             Name = "Loadlock Vent";
 
-         }
 
-         public RState Start(params object[] objs)
 
-         {
 
-             if (CheckLidLoadLock()&&
 
-                 CheckSlitDoor()&&
 
-                 CheckATMLoadLock())
 
-             {
 
-                 Reset();
 
-                 // _chamber.CloseValves();
 
-                 //_chamber.TurnPendulumValve(false);
 
-                 _checkATMTimeout = SC.GetValue<int>($"{Module}.CheckATMTimeout") * 1000;
 
-                 _overVentTime = SC.GetValue<int>($"{Module}.OverVentTime");
 
-                 return Runner.Start(Module, Name);
 
-             }
 
-             return RState.Failed;
 
-         }
 
-         public RState Monitor()
 
-         {
 
-           Runner.Run((int)VentStep.kClosePendulumValve, ClosePendulumValve, _delay_1s)
 
-                 .Run((int)VentStep.kCloseValves, CloseValves,   _delay_1s)
 
-                 //.Run((int)VentStep.kVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _ATMPressureLL; }, _checkATMTimeout)
 
-                 .Run((int)VentStep.kVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.IsATMLoadlock; }, _checkATMTimeout)
 
-                 .Delay((int)VentStep.kOverVent,         _overVentTime)
 
-                 .End((int)VentStep.kCloseVentValves,    HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false),     _delay_1s);
 
-             return Runner.Status;
 
-         }
 
-         public void Abort()
 
-         {
 
-             CloseAllValves();
 
-         }
 
-         public bool ClosePendulumValve()
 
-         {
 
-             if (_chamber.PendulumValveIsOpen() == true)
 
-             {
 
-                 _chamber.TurnPendulumValve(false);
 
-             }
 
-             _chamber.OpenValve(ValveType.TurboPumpPurge, false);
 
-             _chamber.OpenValve(ValveType.Guage, false);
 
-             return true;
 
-         }
 
-         public bool CloseValves()
 
-         {
 
-             _chamber.OpenValve(ValveType.TurboPumpPumping, false);
 
-             return true;
 
-         }
 
-         public bool CheckATMLoadLock()
 
-         {
 
-             if (_chamber.IsATMLoadlock)
 
-             {
 
-                 this.Stop("LoadLock 是ATM状态");
 
-                 return false;
 
-             }
 
-             return true;
 
-         }
 
-     }
 
- }
 
 
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