SimulatorSystem.cs 130 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. namespace Venus_Simulator.Instances
  17. {
  18. public class SimulatorSystem : Singleton<SimulatorSystem>
  19. {
  20. private PeriodicJob _thread;
  21. private Random _rd = new Random();
  22. ConfigType type;
  23. private RD_TRIG _trigATM = new RD_TRIG();
  24. private RD_TRIG _trigVAC = new RD_TRIG();
  25. private R_TRIG _trigLLExtend = new R_TRIG();
  26. private R_TRIG _trigLLRetract = new R_TRIG();
  27. private static int count = 0;
  28. private readonly float ATM_THRESHOLD = 750000;
  29. private readonly float ATM_PRESSURE = 760000;
  30. private readonly float ATM_LoadLock_PRESSURE = 760000;
  31. private readonly uint VAC_SW_PRESSURE = 9500;
  32. private readonly uint PROCESS_GAUGE = 10000;
  33. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  34. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  35. public SimulatorSystem()
  36. {
  37. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  38. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  40. // TODO
  41. type = (ConfigType)QueryDataClient.Instance.Service.GetData("System.ConfigType");
  42. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  45. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  46. }
  47. ~SimulatorSystem()
  48. {
  49. _thread?.Stop();
  50. }
  51. public void Initialize()
  52. {
  53. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  54. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  55. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  56. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  57. if (type == ConfigType.Kepler2200 || type == ConfigType.Kepler2300 || type == ConfigType.Other)
  58. {
  59. SetTMDefaultValue();
  60. }
  61. else if (type == ConfigType.VenusSE)
  62. {
  63. SetSETMDefaultValue();
  64. }
  65. else if (type == ConfigType.VenusDE)
  66. {
  67. SetDETMDefaultValue();
  68. }
  69. Singleton<DataManager>.Instance.Initialize(false);
  70. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  71. }
  72. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  73. {
  74. switch (jetChamber)
  75. {
  76. case JetChamber.VenusSE:
  77. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  78. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  79. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  80. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  81. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  82. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  83. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  84. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  85. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  86. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  87. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  88. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  89. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  92. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  93. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  97. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  98. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  99. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  100. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  101. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  102. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  106. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  107. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  108. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  117. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  122. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  123. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  124. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  125. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  126. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  127. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  128. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  129. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  130. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  131. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  132. //// pressure
  133. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  134. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  135. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  136. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  137. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  138. //// Temperature
  139. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  140. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  141. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  142. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  143. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  144. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  145. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  146. // Datetime
  147. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  148. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  149. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  150. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  151. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  152. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  153. break;
  154. case JetChamber.VenusDE:
  155. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  156. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  157. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  158. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  159. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  160. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  161. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  162. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  163. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  164. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  165. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  166. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  167. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  168. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  169. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  173. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  174. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  175. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  178. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  181. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  182. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  183. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  184. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  185. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  186. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  200. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  206. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  207. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  208. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  209. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  210. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  211. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  212. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  213. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  214. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  215. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  216. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  217. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  218. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  219. //// pressure
  220. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  221. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  222. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  223. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  224. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  225. //// Temperature
  226. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  227. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  228. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  229. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  230. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  231. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  232. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  233. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  234. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  235. // Datetime
  236. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  237. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  238. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  239. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  240. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  241. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  242. break;
  243. case JetChamber.Kepler2300:
  244. // chamber
  245. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  246. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  247. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  248. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  249. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  250. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  251. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  252. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  253. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  254. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  255. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  256. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  258. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  259. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  260. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  261. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  262. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  263. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  265. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  266. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  267. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  269. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  272. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  273. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  274. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  275. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  281. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  285. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  286. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  287. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  288. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  289. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  290. //// pressure
  291. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  292. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  293. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  294. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  295. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  296. //// Temperature
  297. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  298. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  299. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  300. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  301. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  302. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  303. // Datetime
  304. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  305. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  306. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  307. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  308. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  309. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  310. break;
  311. case JetChamber.Kepler2200A:
  312. case JetChamber.Kepler2200B:
  313. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  314. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  316. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  317. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  318. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  319. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  320. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  321. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  322. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  324. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  325. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  326. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  327. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  328. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  329. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  330. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  331. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  332. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  333. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  335. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  336. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  337. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  338. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  339. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  340. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  341. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  342. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  343. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  344. //// pressure
  345. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  346. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  347. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  348. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  349. //// Temperature
  350. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  351. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  352. // Datetime
  353. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  354. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  355. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  356. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  357. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  358. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  359. break;
  360. }
  361. }
  362. private void SetTMDefaultValue()
  363. {
  364. ModuleName mod = ModuleName.TM;
  365. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  366. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  367. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  368. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  369. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  370. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  371. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  372. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  373. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  374. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  375. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  376. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  378. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  379. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  381. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  382. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  383. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  384. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  385. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  386. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  387. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  388. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  389. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  390. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  391. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  392. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  393. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  394. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  395. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  396. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  397. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  400. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  401. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  404. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  405. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  406. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  407. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  408. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  409. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  410. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  411. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  412. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  413. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  414. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  415. // Datetime
  416. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  417. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  418. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  419. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  420. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  421. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  422. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  423. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  424. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  425. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  426. {
  427. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  428. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  429. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  430. }
  431. else
  432. {
  433. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  434. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  435. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  436. }
  437. }
  438. private void SetSETMDefaultValue()
  439. {
  440. ModuleName mod = ModuleName.SETM;
  441. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  442. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  443. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  444. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  445. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  446. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  447. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  448. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  449. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  450. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  451. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  452. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  453. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  454. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  455. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  456. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  457. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  458. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  459. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  461. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  463. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  464. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  465. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  466. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  468. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  469. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  471. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  472. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  473. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  474. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  475. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  476. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  477. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  478. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  479. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  480. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  481. }
  482. private void SetDETMDefaultValue()
  483. {
  484. ModuleName mod = ModuleName.DETM;
  485. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  486. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  487. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  488. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  489. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  490. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  491. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  492. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  493. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  494. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  495. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  496. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  497. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  498. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  499. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  500. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  501. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  502. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  503. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  504. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  505. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  506. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  507. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  508. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  509. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  510. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  511. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  512. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  513. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  514. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  515. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  516. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  517. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  518. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  519. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  520. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  521. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  522. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  523. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  524. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  525. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  526. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  527. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  528. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  529. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  530. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  531. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  532. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  533. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  537. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  538. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  539. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  540. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  541. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  542. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  543. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  544. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  545. }
  546. private bool OnMonitor()
  547. {
  548. try
  549. {
  550. foreach (var item in jetChambers)
  551. {
  552. switch (item.Value)
  553. {
  554. case JetChamber.Kepler2300:
  555. MonitorSlitDoorInTM(item.Key);
  556. MonitorPin(item.Key);
  557. MonitorPressure_Kepler(item.Key);
  558. //MonitorTemperature(item.Key);
  559. MonitorGas(item.Key);
  560. this.SimulateHe(item.Key);
  561. //MonitorRF(item.Key);
  562. ChangeTime(item.Key);
  563. //MonitorIOPumpCtrl(item.Key);
  564. MonitorLid(item.Key);
  565. break;
  566. case JetChamber.Kepler2200A:
  567. case JetChamber.Kepler2200B:
  568. MonitorSlitDoorInTM(item.Key);
  569. MonitorPressure_Kepler2200A(item.Key);
  570. //MonitorTemperature(item.Key);
  571. MonitorGas(item.Key);
  572. // MonitorRF(item.Key);
  573. ChangeTime(item.Key);
  574. //MonitorIOPumpCtrl(item.Key);
  575. MonitorLid(item.Key);
  576. MonitorIOHighTemperatureHeater(item.Key);
  577. MonitorKepler2200Heater(item.Key);
  578. break;
  579. case JetChamber.VenusSE:
  580. MonitorPin(item.Key);
  581. //MonitorVenuSESlitDoor(item.Key);
  582. MonitorSEPressure(item.Key);
  583. MonitorSEGas(item.Key);
  584. ChangeTime(item.Key);
  585. this.SimulateSEHe(item.Key);
  586. break;
  587. case JetChamber.VenusDE:
  588. MonitorPin(item.Key);
  589. MonitorDEGas(item.Key);
  590. //MonitorVenuDESlitDoor(item.Key);
  591. MonitorDEPressure(item.Key);
  592. ChangeTime(item.Key);
  593. MonitorLinerDoor(item.Key);
  594. this.SimulateDEHe(item.Key);
  595. break;
  596. }
  597. }
  598. ChangeTime(ModuleName.TM);
  599. if (type == ConfigType.Kepler2200 || type == ConfigType.Kepler2300 || type == ConfigType.Other)
  600. {
  601. MonitorMFSlitDoor();
  602. MonitorMFPressure();
  603. }
  604. else if (type == ConfigType.VenusSE)
  605. {
  606. MonitorSEMFSlitDoor();
  607. MonitorSEMFPressure();
  608. }
  609. else if (type == ConfigType.VenusDE)
  610. {
  611. MonitorDEMFSlitDoor();
  612. MonitorDEMFPressure();
  613. }
  614. }
  615. catch (Exception e)
  616. {
  617. LOG.WriteExeption(e);
  618. }
  619. return true;
  620. }
  621. private void ChangeTime(ModuleName mod)
  622. {
  623. // Heartbeat with PLC
  624. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  625. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  626. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  627. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  628. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  629. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  630. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  631. }
  632. //void MonitorVenuSESlitDoor(ModuleName mod)
  633. //{
  634. //}
  635. void MonitorSlitDoorInPM(ModuleName mod)
  636. {
  637. // slit door open
  638. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  639. {
  640. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  641. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  642. }
  643. // slit door close
  644. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  645. {
  646. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  647. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  648. }
  649. }
  650. void MonitorLinerDoor(ModuleName mod)
  651. {
  652. // slit door open
  653. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  654. {
  655. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  656. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  657. }
  658. // slit door close
  659. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  660. {
  661. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  662. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  663. }
  664. }
  665. void MonitorSlitDoorInTM(ModuleName mod)
  666. {
  667. // slit door open
  668. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  669. {
  670. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  671. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  672. }
  673. // slit door close
  674. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  675. {
  676. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  677. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  678. }
  679. }
  680. void MonitorMFSlitDoor()
  681. {
  682. ModuleName mod = ModuleName.TM;
  683. // LLA T door open
  684. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  685. {
  686. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  687. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  688. }
  689. // LLB T door open
  690. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  691. {
  692. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  693. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  694. }
  695. // LLA E door open
  696. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  697. {
  698. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  699. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  700. }
  701. // LLB E door open
  702. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  703. {
  704. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  705. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  706. }
  707. // LLA T door close
  708. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  709. {
  710. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  711. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  712. }
  713. // LLB T door close
  714. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  715. {
  716. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  717. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  718. }
  719. // LLA E door close
  720. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  721. {
  722. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  723. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  724. }
  725. // LLB E door close
  726. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  727. {
  728. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  729. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  730. }
  731. // PMA slitdoor door close/open
  732. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  733. {
  734. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  735. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  736. }
  737. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  738. {
  739. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  740. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  741. }
  742. // PMB slitdoor door close/open
  743. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  744. {
  745. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  746. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  747. }
  748. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  749. {
  750. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  751. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  752. }
  753. // PMC slitdoor door close/open
  754. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  755. {
  756. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  757. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  758. }
  759. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  760. {
  761. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  762. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  763. }
  764. // PMD slitdoor door close/open
  765. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  766. {
  767. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  768. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  769. }
  770. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  771. {
  772. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  773. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  774. }
  775. }
  776. void MonitorSEMFSlitDoor()
  777. {
  778. ModuleName mod = ModuleName.SETM;
  779. // VCE T door open
  780. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  781. {
  782. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  783. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  784. }
  785. // VCE T door Close
  786. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  787. {
  788. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  789. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  790. }
  791. //pma
  792. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  793. {
  794. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  795. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  796. }
  797. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  798. {
  799. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  800. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  801. }
  802. //pmb
  803. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  804. {
  805. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  806. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  807. }
  808. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  809. {
  810. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  811. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  812. }
  813. //pmc
  814. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  815. {
  816. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  817. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  818. }
  819. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  820. {
  821. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  822. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  823. }
  824. }
  825. void MonitorDEMFSlitDoor()
  826. {
  827. ModuleName mod = ModuleName.DETM;
  828. // VCE L door open
  829. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  830. {
  831. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  832. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  833. }
  834. // VCE R door open
  835. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  836. {
  837. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  838. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  839. }
  840. // VCE L door Close
  841. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  842. {
  843. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  844. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  845. }
  846. // VCE R door Close
  847. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  848. {
  849. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  850. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  851. }
  852. //pma
  853. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  854. {
  855. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  856. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  857. }
  858. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  859. {
  860. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  861. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  862. }
  863. //pmb
  864. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  865. {
  866. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  867. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  868. }
  869. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  870. {
  871. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  872. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  873. }
  874. //pmc
  875. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  876. {
  877. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  878. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  879. }
  880. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  881. {
  882. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  883. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  884. }
  885. }
  886. void MonitorPin(ModuleName mod)
  887. {
  888. // lift pin up
  889. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  890. {
  891. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  892. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  893. }
  894. }
  895. void MonitorLid(ModuleName mod)
  896. {
  897. // lift pin up
  898. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  899. {
  900. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  901. }
  902. }
  903. void MonitorExtendAndRetract(ModuleName mod)
  904. {
  905. // Extend
  906. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  907. if (_trigLLExtend.Q)
  908. {
  909. _trigLLRetract.RST = true;
  910. Thread.Sleep(500);
  911. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  912. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  913. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  914. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  915. }
  916. // Retract
  917. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  918. if (_trigLLRetract.Q)
  919. {
  920. count++;
  921. _trigLLExtend.RST = true;
  922. Thread.Sleep(500);
  923. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  924. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  925. if (count == 1)
  926. {
  927. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  928. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  929. }
  930. else if (count == 2)
  931. {
  932. count = 0;
  933. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  934. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  935. }
  936. }
  937. }
  938. void MonitorPressure(ModuleName mod)
  939. {
  940. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  941. // Loadlock pressure
  942. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  943. // Foreline
  944. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  945. {
  946. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  947. }
  948. else
  949. {
  950. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  951. }
  952. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  953. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  954. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  955. //float chamber_pressure = GetMockChamberPressure(mod);
  956. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  957. // soft pump & fast pump
  958. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  959. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  960. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  961. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  962. {
  963. //任意泵打开
  964. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  965. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  966. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  967. {//开双泵
  968. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  969. {
  970. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  971. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  972. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  973. }
  974. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  975. {
  976. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  977. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  978. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  979. }
  980. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  981. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  982. }
  983. else if (fast_pump_vlv.Value)//开
  984. {
  985. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  986. {
  987. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  988. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  989. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  990. }
  991. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  992. {
  993. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  994. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  995. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  996. }
  997. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  998. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  999. }
  1000. else if (soft_pump_vlv.Value)
  1001. {
  1002. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1003. {
  1004. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1005. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1006. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1007. }
  1008. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1009. {
  1010. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1011. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1012. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1013. }
  1014. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1015. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1016. }
  1017. else if (turbo_pump_vlv.Value)
  1018. {
  1019. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1020. if ((getAiValue_ChamberPressure - 500) >= 0)
  1021. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1022. else
  1023. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1024. if ((getAiValue_ProcessPressure - 500) >= 0)
  1025. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1026. else
  1027. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1028. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1029. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1030. }
  1031. }
  1032. // fast vent & purge
  1033. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1034. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1035. //if (vent_vlv.Value || purge_vlv.Value)
  1036. //{
  1037. // if (vent_vlv.Value && purge_vlv.Value)
  1038. // {
  1039. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1040. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1041. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1042. // {
  1043. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1044. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1045. // }
  1046. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1047. // {
  1048. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1049. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1050. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1051. // }
  1052. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1053. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1054. // }
  1055. // else
  1056. //
  1057. if (vent_vlv.Value)
  1058. {
  1059. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1060. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1061. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1062. {
  1063. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1064. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1065. }
  1066. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1067. {
  1068. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1069. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1070. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1071. }
  1072. else
  1073. {
  1074. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1075. }
  1076. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1077. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1078. }
  1079. // Loadlock Pumping Valve
  1080. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1081. if (Loadlock_pump_vlv.Value)
  1082. {
  1083. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1084. }
  1085. // Loadlock vent
  1086. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1087. if (Loadlock_vent_vlv.Value)
  1088. {
  1089. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1090. }
  1091. // 压力值越界,复位
  1092. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1093. if (chamber_pressure1 > ATM_PRESSURE)
  1094. {
  1095. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1096. }
  1097. else if (chamber_pressure1 < 20)
  1098. {
  1099. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1100. }
  1101. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1102. if (process_pressure1 > PROCESS_GAUGE)
  1103. {
  1104. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1105. }
  1106. else if (process_pressure1 < 20)
  1107. {
  1108. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1109. }
  1110. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1111. if (foreline_pressure > 10000)
  1112. {
  1113. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1114. }
  1115. else if (foreline_pressure < 150)
  1116. {
  1117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1118. }
  1119. // 模拟压力计漂移
  1120. //int p1 = (int)GetMockChamberPressure(mod);
  1121. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1122. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1123. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1124. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1125. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1126. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1127. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1128. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1129. // 根据当前压力值设定信号
  1130. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1131. // ATM switch
  1132. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1133. // VAC switch
  1134. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1135. // Throttle valve
  1136. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1137. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1138. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1139. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1140. // 压力值
  1141. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1142. //{
  1143. // short increase = (short)_rd.Next(20, 30);
  1144. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1145. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1146. // {
  1147. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1148. // }
  1149. //}
  1150. //else
  1151. //{
  1152. // short increase = (short)_rd.Next(20, 30);
  1153. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1154. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1155. // {
  1156. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1157. // }
  1158. //}
  1159. //// 位置值
  1160. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1161. //{
  1162. // short increase = (short)_rd.Next(20, 30);
  1163. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1164. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1165. // {
  1166. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1167. // }
  1168. //}
  1169. //else
  1170. //{
  1171. // short increase = (short)_rd.Next(20, 30);
  1172. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1173. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1174. // {
  1175. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1176. // }
  1177. //}
  1178. }
  1179. void MonitorSEPressure(ModuleName mod)
  1180. {
  1181. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1182. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1183. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1184. // Foreline
  1185. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1186. {
  1187. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1188. }
  1189. else
  1190. {
  1191. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1192. }
  1193. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1194. // soft pump & fast pump
  1195. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1196. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1197. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1198. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1199. {
  1200. //任意泵打开
  1201. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1202. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1203. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1204. {//开双泵
  1205. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1206. {
  1207. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1208. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1209. }
  1210. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1211. {
  1212. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1213. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1214. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1215. }
  1216. }
  1217. else if (fast_pump_vlv.Value)//开
  1218. {
  1219. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1220. {
  1221. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1222. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1223. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1224. }
  1225. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1226. {
  1227. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1228. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1229. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1230. }
  1231. }
  1232. else if (soft_pump_vlv.Value)
  1233. {
  1234. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1235. {
  1236. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1237. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1238. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1239. }
  1240. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1241. {
  1242. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1243. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1244. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1245. }
  1246. }
  1247. else if (turbo_pump_vlv.Value)
  1248. {
  1249. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1250. if ((getAiValue_ChamberPressure - 500) >= 0)
  1251. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1252. else
  1253. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1254. if ((getAiValue_ProcessPressure - 500) >= 0)
  1255. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1256. else
  1257. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1258. }
  1259. }
  1260. // fast vent & purge
  1261. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1262. if (vent_vlv.Value)
  1263. {
  1264. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1265. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1266. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1267. {
  1268. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1269. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1270. }
  1271. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1272. {
  1273. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1274. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1275. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1276. }
  1277. else
  1278. {
  1279. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1280. }
  1281. }
  1282. // Loadlock Pumping Valve
  1283. // 压力值越界,复位
  1284. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1285. if (chamber_pressure1 > ATM_PRESSURE)
  1286. {
  1287. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1288. }
  1289. else if (chamber_pressure1 < 20)
  1290. {
  1291. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1292. }
  1293. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1294. if (process_pressure1 > PROCESS_GAUGE)
  1295. {
  1296. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1297. }
  1298. else if (process_pressure1 < 20)
  1299. {
  1300. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1301. }
  1302. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1303. if (foreline_pressure > 1999)
  1304. {
  1305. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1306. }
  1307. else if (foreline_pressure < 150)
  1308. {
  1309. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1310. }
  1311. // ATM switch
  1312. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1313. // VAC switch
  1314. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1315. }
  1316. void MonitorDEPressure(ModuleName mod)
  1317. {
  1318. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1319. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1320. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1321. // Foreline
  1322. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1323. {
  1324. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1325. }
  1326. else
  1327. {
  1328. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1329. }
  1330. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1331. // soft pump & fast pump
  1332. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1333. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1334. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1335. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1336. {
  1337. //任意泵打开
  1338. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1339. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1340. if (fast_pump_vlv.Value)
  1341. {//开双泵
  1342. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1343. {
  1344. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1345. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1346. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1347. }
  1348. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1349. {
  1350. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1351. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1352. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1353. }
  1354. }
  1355. else if (turbo_pump_vlv.Value)
  1356. {
  1357. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1358. if ((getAiValue_ChamberPressure - 500) >= 0)
  1359. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1360. else
  1361. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1362. if ((getAiValue_ProcessPressure - 500) >= 0)
  1363. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1364. else
  1365. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1366. }
  1367. }
  1368. // fast vent & purge
  1369. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1370. if (vent_vlv.Value)
  1371. {
  1372. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1373. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1374. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1375. {
  1376. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1377. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1378. }
  1379. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1380. {
  1381. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1382. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1383. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1384. }
  1385. else
  1386. {
  1387. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1388. }
  1389. }
  1390. // Loadlock Pumping Valve
  1391. // 压力值越界,复位
  1392. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1393. if (chamber_pressure1 > ATM_PRESSURE)
  1394. {
  1395. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1396. }
  1397. else if (chamber_pressure1 < 20)
  1398. {
  1399. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1400. }
  1401. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1402. if (process_pressure1 > PROCESS_GAUGE)
  1403. {
  1404. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1405. }
  1406. else if (process_pressure1 < 20)
  1407. {
  1408. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1409. }
  1410. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1411. if (foreline_pressure > 10000)
  1412. {
  1413. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1414. }
  1415. else if (foreline_pressure < 150)
  1416. {
  1417. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1418. }
  1419. // ATM switch
  1420. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1421. // VAC switch
  1422. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1423. }
  1424. void MonitorPressure_Kepler(ModuleName mod)
  1425. {
  1426. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1427. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1428. {
  1429. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1430. }
  1431. else
  1432. {
  1433. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1434. }
  1435. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1436. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1437. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1438. //float chamber_pressure = GetMockChamberPressure(mod);
  1439. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1440. // soft pump & fast pump
  1441. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1442. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1443. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1444. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1445. {
  1446. //任意泵打开
  1447. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1448. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1449. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1450. {//开双泵
  1451. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1452. {
  1453. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1454. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1455. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1456. }
  1457. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1458. {
  1459. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1460. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1461. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1462. }
  1463. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1464. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1465. }
  1466. else if (fast_pump_vlv.Value)//开
  1467. {
  1468. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1469. {
  1470. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1471. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1472. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1473. }
  1474. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1475. {
  1476. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1477. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1478. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1479. }
  1480. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1481. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1482. }
  1483. else if (soft_pump_vlv.Value)
  1484. {
  1485. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1486. {
  1487. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1488. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1489. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1490. }
  1491. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1492. {
  1493. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1494. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1495. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1496. }
  1497. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1498. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1499. }
  1500. else if (turbo_pump_vlv.Value)
  1501. {
  1502. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1503. if ((getAiValue_ChamberPressure - 500) >= 0)
  1504. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1505. else
  1506. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1507. if ((getAiValue_ProcessPressure - 500) >= 0)
  1508. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1509. else
  1510. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1511. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1512. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1513. }
  1514. }
  1515. // fast vent & purge
  1516. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1517. if (vent_vlv.Value)
  1518. {
  1519. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1520. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1521. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1522. {
  1523. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1524. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1525. }
  1526. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1527. {
  1528. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1529. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1530. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1531. }
  1532. else
  1533. {
  1534. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1535. }
  1536. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1537. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1538. }
  1539. // Loadlock Pumping Valve
  1540. // 压力值越界,复位
  1541. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1542. if (chamber_pressure1 > ATM_PRESSURE)
  1543. {
  1544. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1545. }
  1546. else if (chamber_pressure1 < 20)
  1547. {
  1548. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1549. }
  1550. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1551. if (process_pressure1 > PROCESS_GAUGE)
  1552. {
  1553. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1554. }
  1555. else if (process_pressure1 < 20)
  1556. {
  1557. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1558. }
  1559. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1560. if (foreline_pressure > 10000)
  1561. {
  1562. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1563. }
  1564. else if (foreline_pressure < 150)
  1565. {
  1566. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1567. }
  1568. // ATM switch
  1569. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1570. // VAC switch
  1571. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1572. }
  1573. void MonitorPressure_Kepler2200A(ModuleName mod)
  1574. {
  1575. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1576. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1577. {
  1578. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1579. }
  1580. else
  1581. {
  1582. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1583. }
  1584. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1585. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1586. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1587. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1588. //float chamber_pressure = GetMockChamberPressure(mod);
  1589. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1590. // soft pump & fast pump
  1591. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1592. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1593. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1594. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1595. {
  1596. //任意泵打开
  1597. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1598. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1599. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1600. {//开双泵
  1601. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1602. {
  1603. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1604. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1605. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1606. }
  1607. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1608. {
  1609. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1610. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1611. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1612. }
  1613. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1614. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1615. }
  1616. else if (fast_pump_vlv.Value)//开
  1617. {
  1618. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1619. {
  1620. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1621. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1622. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1623. }
  1624. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1625. {
  1626. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1627. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1628. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1629. }
  1630. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1631. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1632. }
  1633. else if (soft_pump_vlv.Value)
  1634. {
  1635. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1636. {
  1637. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1638. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1639. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1640. }
  1641. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1642. {
  1643. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1644. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1645. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1646. }
  1647. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1648. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1649. }
  1650. else if (turbo_pump_vlv.Value)
  1651. {
  1652. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1653. if ((getAiValue_ChamberPressure - 500) >= 0)
  1654. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1655. else
  1656. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1657. if ((getAiValue_ProcessPressure - 500) >= 0)
  1658. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1659. else
  1660. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1661. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1662. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1663. }
  1664. }
  1665. // fast vent & purge
  1666. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1667. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1668. if (vent_vlv.Value && gas_final_vlv.Value)
  1669. {
  1670. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1671. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1672. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1673. {
  1674. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1675. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1676. }
  1677. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1678. {
  1679. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1680. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1681. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1682. }
  1683. else
  1684. {
  1685. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1686. }
  1687. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1688. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1689. }
  1690. // Loadlock Pumping Valve
  1691. // 压力值越界,复位
  1692. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1693. if (chamber_pressure1 > ATM_PRESSURE)
  1694. {
  1695. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1696. }
  1697. else if (chamber_pressure1 < 20)
  1698. {
  1699. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1700. }
  1701. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1702. if (process_pressure1 > PROCESS_GAUGE)
  1703. {
  1704. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1705. }
  1706. else if (process_pressure1 < 20)
  1707. {
  1708. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1709. }
  1710. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1711. if (foreline_pressure > 10000)
  1712. {
  1713. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1714. }
  1715. else if (foreline_pressure < 150)
  1716. {
  1717. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1718. }
  1719. // ATM switch
  1720. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1721. // VAC switch
  1722. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1723. SetAiValue($"{mod}.AI_Process_Pressure_2t", 1995);
  1724. }
  1725. void MonitorSEMFPressure()
  1726. {
  1727. ModuleName mod = ModuleName.SETM;
  1728. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1729. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1730. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1731. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1732. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1733. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1734. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1735. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1736. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1737. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1738. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1739. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1740. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1741. {
  1742. if (getAiValue_TM_ChamberPressure > 10000)
  1743. {
  1744. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1745. }
  1746. else if (getAiValue_TM_ChamberPressure <= 10000)
  1747. {
  1748. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1749. }
  1750. }
  1751. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1752. {
  1753. if (getAiValue_TM_ChamberPressure > 10000)
  1754. {
  1755. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1756. }
  1757. else if (getAiValue_TM_ChamberPressure <= 10000)
  1758. {
  1759. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1760. }
  1761. }
  1762. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1763. {
  1764. if (getAiValue_VCE_ChamberPressure > 10000)
  1765. {
  1766. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1767. }
  1768. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1769. {
  1770. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1771. }
  1772. }
  1773. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1774. {
  1775. if (getAiValue_VCE_ChamberPressure > 10000)
  1776. {
  1777. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1778. }
  1779. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1780. {
  1781. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1782. }
  1783. }
  1784. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1785. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1786. {
  1787. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1788. }
  1789. else if (getAiValue_VCE_ChamberPressure < 20)
  1790. {
  1791. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1792. }
  1793. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1794. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1795. {
  1796. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1797. }
  1798. else if (getAiValue_TM_ChamberPressure < 20)
  1799. {
  1800. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1801. }
  1802. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1803. // VAC switch
  1804. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1805. }
  1806. void MonitorDEMFPressure()
  1807. {
  1808. ModuleName mod = ModuleName.DETM;
  1809. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1810. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1811. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1812. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1813. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1814. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1815. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1816. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1817. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1818. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1819. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1820. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1821. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1822. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1823. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1824. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1825. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1826. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1827. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1828. {
  1829. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1830. {
  1831. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1832. }
  1833. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1834. {
  1835. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1836. }
  1837. }
  1838. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1839. {
  1840. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1841. {
  1842. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1843. }
  1844. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1845. {
  1846. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1847. }
  1848. }
  1849. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1850. {
  1851. if (getAiValue_TM_ChamberPressure > 10000)
  1852. {
  1853. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1854. }
  1855. else if (getAiValue_TM_ChamberPressure <= 10000)
  1856. {
  1857. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1858. }
  1859. }
  1860. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1861. {
  1862. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1863. {
  1864. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1865. }
  1866. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1867. {
  1868. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1869. }
  1870. }
  1871. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1872. {
  1873. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1874. {
  1875. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1876. }
  1877. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1878. {
  1879. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1880. }
  1881. }
  1882. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1883. {
  1884. if (getAiValue_TM_ChamberPressure > 10000)
  1885. {
  1886. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1887. }
  1888. else if (getAiValue_TM_ChamberPressure <= 10000)
  1889. {
  1890. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1891. }
  1892. }
  1893. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1894. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1895. {
  1896. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1897. }
  1898. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1899. {
  1900. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1901. }
  1902. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1903. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  1904. {
  1905. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  1906. }
  1907. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  1908. {
  1909. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  1910. }
  1911. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1912. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1913. {
  1914. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1915. }
  1916. else if (getAiValue_TM_ChamberPressure < 20)
  1917. {
  1918. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1919. }
  1920. // ATM switch
  1921. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1922. // VAC switch
  1923. // ATM switch
  1924. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  1925. // ATM switch
  1926. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  1927. }
  1928. void MonitorMFPressure()
  1929. {
  1930. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1931. //{
  1932. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1933. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1934. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1935. ModuleName mod = ModuleName.TM;
  1936. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1937. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1938. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1939. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1940. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1941. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1942. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1943. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1944. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1945. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1946. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1947. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1948. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1949. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1950. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1951. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1952. {
  1953. if (getAiValue_LLA_ChamberPressure > 10000)
  1954. {
  1955. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1956. }
  1957. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1958. {
  1959. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1960. }
  1961. }
  1962. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1963. {
  1964. if (getAiValue_LLB_ChamberPressure > 10000)
  1965. {
  1966. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1967. }
  1968. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1969. {
  1970. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1971. }
  1972. }
  1973. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1974. {
  1975. if (getAiValue_TM_ChamberPressure > 10000)
  1976. {
  1977. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1978. }
  1979. else if (getAiValue_TM_ChamberPressure <= 10000)
  1980. {
  1981. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1982. }
  1983. }
  1984. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1985. {
  1986. if (getAiValue_LLA_ChamberPressure > 10000)
  1987. {
  1988. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1989. }
  1990. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1991. {
  1992. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1993. }
  1994. }
  1995. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1996. {
  1997. if (getAiValue_LLB_ChamberPressure > 10000)
  1998. {
  1999. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2000. }
  2001. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2002. {
  2003. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2004. }
  2005. }
  2006. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2007. {
  2008. if (getAiValue_TM_ChamberPressure > 10000)
  2009. {
  2010. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2011. }
  2012. else if (getAiValue_TM_ChamberPressure <= 10000)
  2013. {
  2014. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2015. }
  2016. }
  2017. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2018. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2019. {
  2020. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2021. }
  2022. else if (getAiValue_LLA_ChamberPressure < 20)
  2023. {
  2024. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2025. }
  2026. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2027. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2028. {
  2029. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2030. }
  2031. else if (getAiValue_LLB_ChamberPressure < 20)
  2032. {
  2033. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2034. }
  2035. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2036. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2037. {
  2038. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2039. }
  2040. else if (getAiValue_TM_ChamberPressure < 20)
  2041. {
  2042. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2043. }
  2044. // ATM switch
  2045. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2046. // VAC switch
  2047. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2048. // ATM switch
  2049. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2050. // VAC switch
  2051. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2052. // ATM switch
  2053. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2054. // VAC switch
  2055. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2056. // }
  2057. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2058. //{
  2059. // ModuleName mod = ModuleName.TM;
  2060. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2061. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2062. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2063. //}
  2064. }
  2065. void SetAiValue(string name, float value)
  2066. {
  2067. byte[] flow = BitConverter.GetBytes(value);
  2068. short high1 = BitConverter.ToInt16(flow, 0);
  2069. short low1 = BitConverter.ToInt16(flow, 2);
  2070. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2071. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2072. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2073. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2074. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2075. }
  2076. float GetAiValue(string name)
  2077. {
  2078. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2079. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2080. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2081. return flow;
  2082. }
  2083. float GetAoValue(string name)
  2084. {
  2085. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2086. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2087. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2088. return flow;
  2089. }
  2090. void MonitorTemperature(ModuleName mod)
  2091. {
  2092. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2093. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2094. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2095. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2096. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2097. // 底座
  2098. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2099. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2100. //{
  2101. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2102. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2103. //}
  2104. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2105. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2106. //{
  2107. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2108. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2109. //}
  2110. // Foreline
  2111. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2112. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2113. {
  2114. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2115. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2116. }
  2117. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2118. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2119. {
  2120. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2121. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2122. }
  2123. // Wall
  2124. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2125. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2126. {
  2127. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2128. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2129. }
  2130. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2131. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2132. {
  2133. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2134. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2135. }
  2136. }
  2137. void MonitorGas(ModuleName mod)
  2138. {
  2139. // gas
  2140. this.SimulateMFC(mod, 1);
  2141. this.SimulateMFC(mod, 2);
  2142. this.SimulateMFC(mod, 3);
  2143. this.SimulateMFC(mod, 4);
  2144. this.SimulateMFC(mod, 5);
  2145. this.SimulateMFC(mod, 6);
  2146. this.SimulateMFC(mod, 7);
  2147. this.SimulateMFC(mod, 8);
  2148. this.SimulateN2(mod);
  2149. }
  2150. void MonitorSEGas(ModuleName mod)
  2151. {
  2152. SimulateMFC(mod, 1);
  2153. SimulateMFC(mod, 2);
  2154. SimulateMFC(mod, 3);
  2155. SimulateMFC(mod, 4);
  2156. SimulateMFC(mod, 5);
  2157. SimulateMFC(mod, 6);
  2158. SimulateMFC(mod, 7);
  2159. SimulateMFC(mod, 8);
  2160. SimulateMFC(mod, 9);
  2161. SimulateMFC(mod, 10);
  2162. SimulateMFC(mod, 11);
  2163. SimulateMFC(mod, 12);
  2164. }
  2165. void MonitorDEGas(ModuleName mod)
  2166. {
  2167. SimulateMFC(mod, 1);
  2168. SimulateMFC(mod, 2);
  2169. SimulateMFC(mod, 3);
  2170. SimulateMFC(mod, 4);
  2171. SimulateMFC(mod, 5);
  2172. SimulateMFC(mod, 6);
  2173. SimulateMFC(mod, 7);
  2174. SimulateMFC(mod, 8);
  2175. SimulateMFC(mod, 9);
  2176. SimulateMFC(mod, 10);
  2177. SimulateMFC(mod, 11);
  2178. SimulateMFC(mod, 12);
  2179. }
  2180. private void SimulateMFC(ModuleName mod, byte gasNum)
  2181. {
  2182. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2183. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2184. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2185. }
  2186. private void SimulateN2(ModuleName mod)
  2187. {
  2188. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2189. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2190. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2191. }
  2192. private void SimulateSEHe(ModuleName mod)
  2193. {
  2194. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2195. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2196. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2197. }
  2198. private void SimulateDEHe(ModuleName mod)
  2199. {
  2200. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2201. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2202. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2203. }
  2204. private void SimulateHe(ModuleName mod)
  2205. {
  2206. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2207. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2208. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2209. }
  2210. void MonitorRF(ModuleName mod)
  2211. {
  2212. // RF generator
  2213. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2214. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2215. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2216. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2217. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2218. }
  2219. void MonitorIOPumpCtrl(ModuleName mod)
  2220. {
  2221. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2222. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2223. }
  2224. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2225. {
  2226. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2227. {
  2228. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2229. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2230. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2231. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2232. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2233. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2234. }
  2235. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2236. {
  2237. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2238. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2239. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2240. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2241. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2242. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2243. }
  2244. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2245. {
  2246. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2247. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2248. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2249. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2250. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2251. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2252. }
  2253. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2254. {
  2255. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2256. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2257. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2258. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2259. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2260. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2261. }
  2262. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2263. {
  2264. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2265. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2266. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2267. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2268. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2269. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2270. }
  2271. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2272. {
  2273. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2274. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2275. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2276. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2277. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2278. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2279. }
  2280. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2281. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2282. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2283. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2284. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2285. }
  2286. void MonitorKepler2200Heater(ModuleName mod)
  2287. {
  2288. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2289. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2290. }
  2291. public void Terminate()
  2292. {
  2293. _thread.Stop();
  2294. }
  2295. public void SetCoolantOutletTemp(string module, int Temp)
  2296. {
  2297. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2298. //{
  2299. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2300. //}
  2301. }
  2302. }
  2303. }