Kepler-Release/Venus/Venus_MainPages/ViewModels/OverKepler2200AViewModel.cs

using Aitex.Core.Common.DeviceData;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.OperationCenter;
using Prism.Commands;
using Prism.Mvvm;
using System;
using System.Collections.Generic;
using System.Windows;
using System.Windows.Threading;
using Venus_Core;
using Venus_MainPages.Views;
using System.Linq;
using System.Threading.Tasks;
using Microsoft.Win32;
using System.IO;
using Venus_Themes.CustomControls;
using Venus_MainPages.Unity;
using Venus_Unity;
using MECF.Framework.Common.CommonData.DeviceData;
using System.Windows.Shapes;
using Path = System.IO.Path;
using MECF.Framework.Common.Equipment;
using System.Windows.Controls;

namespace Venus_MainPages.ViewModels
{
    internal class OverKepler2200AViewModel : BindableBase
    {
        #region 私有字段
        private List<string> m_CurrentModuleRecipes=new List<string>();
        private bool m_PVN21ValveIsOpen;
        private bool m_PVN22ValveIsOpen;
        private bool m_N2ValveIsOpen;
        private bool m_PV11ValveIsOpen;
        private bool m_PV12ValveIsOpen;
        private bool m_PV21ValveIsOpen;
        private bool m_PV22ValveIsOpen;
        private bool m_PV31ValveIsOpen;
        private bool m_PV32ValveIsOpen;
        private bool m_PV41ValveIsOpen;
        private bool m_PV42ValveIsOpen;
        private bool m_MFC1ValveIsOpen;
        private bool m_MFC2ValveIsOpen;
        private bool m_MFC3ValveIsOpen;
        private bool m_MFC4ValveIsOpen;
        private bool m_MFC5ValveIsOpen;
        private bool m_MFC6ValveIsOpen;
        private bool m_MFC7ValveIsOpen;
        private bool m_MFC8ValveIsOpen;
        private bool m_GasFinalValveIsOpen;
        private bool m_SoftPumpValveIsOpen;
        private bool m_FastPumpValveIsOpen;
        private bool m_PVHe1ValveIsOpen;
        private bool m_PVHe2ValveIsOpen;
        private bool m_TurboPumpPumpingValveIsOpen;
        private bool m_TurboPumpPurgeValveIsOpen;
        private bool m_GuageValveIsOpen;
        private bool m_PendulumValveIsOpen;


        //private bool m_BRFIsOn;
        //private bool m_SRFIsOn;

        private double m_HeGasSetpoint;
        private int m_HePressureSetpoint;


        private float m_SRFFwdPowerSetpoint;
        private float m_BRFFwdPowerSetpoint;

        private float m_SRFMatchC1;
        private float m_SRFMatchC2;
        private float m_BRFMatchC1;
        private float m_BRFMatchC2;

        private double m_MFC1SetPoint;
        private double m_MFC2SetPoint;
        private double m_MFC3SetPoint;
        private double m_MFC4SetPoint;
        private double m_MFC5SetPoint;
        private double m_MFC6SetPoint;
        private double m_MFC7SetPoint;
        private double m_MFC8SetPoint;
        private double m_N2SetPoint;




        private AITMfcData m_MFC1Data;
        private AITMfcData m_MFC2Data;
        private AITMfcData m_MFC3Data;
        private AITMfcData m_MFC4Data;
        private AITMfcData m_MFC5Data;
        private AITMfcData m_MFC6Data;
        private AITMfcData m_MFC7Data;
        private AITMfcData m_MFC8Data;
        private AITMfcData m_MFCHeData;
        private AITMfcData m_MFCN2Data;

        private AITHeaterData m_ValveHeaterData;
        private AITHeaterData m_ForelineHeaterData;
        private AITHeaterData m_WallHeaterData;

        private AITRfData m_SRFData;
        private AITRfData m_BRFData;

        private AITPendulumValveData m_PendulumValveData;

        //private AITHVData m_ESCHVData;

        private PMState m_PMCurrentState;

        private bool m_SourceRFFanInterlock;
        private bool m_IsWLK;
        private bool m_IsWaterFlowOk;
        private bool m_IsTurboPumpInterlock;
        private bool m_IsCDAOK;
        private bool m_SensorGasBoxDoor;
        private bool m_SensorGasBoxPressure;

        private bool m_PumpIsOpen;
        private bool m_TurboIsOpen;
        private bool m_IsATM;
        private bool m_IsVAC;


        private List<string> m_RtDataKeys;
        private Dictionary<string, object> m_RtDataValues;

        private int m_PositionValue;
        private bool m_IsPositionMode;

        private int m_ESCVoltage;

        private bool m_GasIsFlowing;
        private bool m_IsProcessing;


        private bool m_IsAutoMode;
        private string m_SelectedRecipe;

        private float m_ChillerTempSetpoint;
        private float m_WallTempSetpoint;

        private bool m_HeIsPressureMode=true;

        private bool m_ChillerIsOn;

        private float m_ProcessHighPressure;
        private float m_ProcessLowPressure;
        private float m_ForelinePressurePressure;
        private float m_ESCHePressure;



        ButterflyValveView butterflyValveMessageBox;
        HeaterView heaterView;

        private int m_TurboPumpRotationalSpeed;

        private bool m_LiftPinIsUp;
        private bool m_IsSlitDoorClosed;
        private bool m_IsLidClosed;

        private float m_ChillerTemperature;
        //private float m_HVTemperature;


        private int m_ESCHVOutputVoltage;

        //private float m_SRfReflectPower;
        //private float m_SRfForwardPowerFeedBack;

        //private float m_BRfReflectPower;
        //private float m_BRfForwardPowerFeedBack;

        //private int m_MatchWorkMode;
        //private int m_BiasMatchWorkMode;

        private float m_MatchC1;
        private float m_MatchC2;
        private float m_BiasMatchC1;
        private float m_BiasMatchC2;

        private float m_PendulumValvePosition;

        private bool m_IsTurboPumpAtSpeed; 
        private bool m_TurboPumpWaterFlowSwitch;

        private bool m_IsHasWafer;

        private Recipe m_CurrentRecipe=new Recipe ();

        private RecipeResult m_CurrentRecipeResult=new RecipeResult ();

        private RecipeStep   m_CurrentRecipeStep = new RecipeStep();

        private double m_ChamberPressureFeedBack;

        private string m_WaferID;
        private string m_ModuleName;
        private int? currentRecipeNumber;

        private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;

        private ComboBoxItem m_SelectedPosition;

        private int m_HighTemperatureHeaterTemperatureSetpoint;

        #endregion

        #region  属性
       
        public List<string> CurrentModuleRecipes
        {
            get { return m_CurrentModuleRecipes; }
            set { SetProperty(ref m_CurrentModuleRecipes, value); }

        }
        public Recipe CurrentRecipe
        {
            get { return m_CurrentRecipe; }
            set { SetProperty(ref m_CurrentRecipe, value); }

        }
        public RecipeResult CurrentRecipeResult
        {
            get { return m_CurrentRecipeResult; }
            set { SetProperty(ref m_CurrentRecipeResult, value); }
        }
        public RecipeStep CurrentRecipeStep
        {
            get { return m_CurrentRecipeStep; }
            set { SetProperty(ref m_CurrentRecipeStep, value); }
        }
        public bool IsHasWafer
        {
            get { return m_IsHasWafer; }
            set { SetProperty(ref m_IsHasWafer, value); }
        }
        public bool IsTurboPumpAtSpeed
        {
            get { return m_IsTurboPumpAtSpeed; }
            set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
        }
        public bool TurboPumpWaterFlowSwitch
        {
            get { return m_TurboPumpWaterFlowSwitch; }
            set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
        }
        public float PendulumValvePosition
        {
            get { return m_PendulumValvePosition; }
            set{SetProperty(ref m_PendulumValvePosition, value);}
        }

        public float BiasMatchC1
        {
            get { return m_BiasMatchC1; }
            set
            {
                SetProperty(ref m_BiasMatchC1, value);
            }
        }
        public float BiasMatchC2
        {
            get { return m_BiasMatchC2; }
            set
            {
                SetProperty(ref m_BiasMatchC2, value);
            }
        }
        public float MatchC1
        {
            get { return m_MatchC1; }
            set
            {
                SetProperty(ref m_MatchC1, value);
            }
        }
        public float MatchC2
        {
            get { return m_MatchC2; }
            set
            {
                SetProperty(ref m_MatchC2, value);
            }
        }

        public AITPendulumValveData PendulumValveData
        {
            get { return m_PendulumValveData; }
            set
            {
                SetProperty(ref m_PendulumValveData, value);
            }
        }

        //public AITHVData ESCHVData
        //{
        //    get { return m_ESCHVData; }
        //    set
        //    {
        //        SetProperty(ref m_ESCHVData, value);
        //    }
        //}
        public int ESCHVOutputVoltage
        {
            get { return m_ESCHVOutputVoltage; }
            set
            {
                SetProperty(ref m_ESCHVOutputVoltage, value);
            }
        }
        public float ChillerTemperature
        {
            get { return m_ChillerTemperature; }
            set
            {
                SetProperty(ref m_ChillerTemperature, value);
            }
        }
        //public float HVTemperature
        //{
        //    get { return m_HVTemperature; }
        //    set
        //    {
        //        SetProperty(ref m_HVTemperature, value);
        //    }
        //}
        public bool IsLidClosed
        {
            get { return m_IsLidClosed; }
            set
            {
                SetProperty(ref m_IsLidClosed, value);
            }
        }

        public bool IsSlitDoorClosed
        {
            get { return m_IsSlitDoorClosed; }
            set
            {
                SetProperty(ref m_IsSlitDoorClosed, value);
            }
        }

        public bool LiftPinIsUp
        {
            get { return m_LiftPinIsUp; }
            set
            {
                SetProperty(ref m_LiftPinIsUp, value);
            }
        }

        public int TurboPumpRotationalSpeed
        {
            get { return m_TurboPumpRotationalSpeed; }
            set
            {
                SetProperty(ref m_TurboPumpRotationalSpeed, value);
            }
        }

        public float ESCHePressure
        {
            get { return m_ESCHePressure; }
            set
            {
                SetProperty(ref m_ESCHePressure, value);
            }
        }

        public float ProcessHighPressure
        {
            get { return m_ProcessHighPressure; }
            set
            {
                SetProperty(ref m_ProcessHighPressure, value);
            }
        }
        public float ProcessLowPressure
        {
            get { return m_ProcessLowPressure; }
            set
            {
                SetProperty(ref m_ProcessLowPressure, value);
            }
        }
        public float ForelinePressure
        {
            get { return m_ForelinePressurePressure; }
            set
            {
                SetProperty(ref m_ForelinePressurePressure, value);
            }
        }
        public bool SourceRFFanInterlock
        {
            get { return m_SourceRFFanInterlock; }
            set
            {
                SetProperty(ref m_SourceRFFanInterlock, value);
            }
        }
        public bool IsWLK
        {
            get { return m_IsWLK; }
            set
            {
                SetProperty(ref m_IsWLK, value);
            }
        }
        public bool IsWaterFlowOk
        {
            get { return m_IsWaterFlowOk; }
            set
            {
                SetProperty(ref m_IsWaterFlowOk, value);
            }
        }
        public bool IsCDAOK
        {
            get { return m_IsCDAOK; }
            set
            {
                SetProperty(ref m_IsCDAOK, value);
            }
        }
        public bool SensorGasBoxDoor
        {
            get { return m_SensorGasBoxDoor; }
            set
            {
                SetProperty(ref m_SensorGasBoxDoor, value);
            }
        }

        public bool SensorGasBoxPressure
        {
            get { return m_SensorGasBoxPressure; }
            set
            {
                SetProperty(ref m_SensorGasBoxPressure, value);
            }
        }

        public bool IsTurboPumpInterlock
        {
            get { return m_IsTurboPumpInterlock; }
            set
            {
                SetProperty(ref m_IsTurboPumpInterlock, value);
            }
        }
        public string ModuleName 
        {
            get { return m_ModuleName; }
            set
            {
                SetProperty(ref m_ModuleName, value);
            }
        }
        public double MFC1SetPoint
        {
            get { return m_MFC1SetPoint; }
            set { SetProperty(ref m_MFC1SetPoint, value); }
        }
        public double MFC2SetPoint
        {
            get { return m_MFC2SetPoint; }
            set { SetProperty(ref m_MFC2SetPoint, value); }
        }
        public double MFC3SetPoint
        {
            get { return m_MFC3SetPoint; }
            set { SetProperty(ref m_MFC3SetPoint, value); }
        }
        public double MFC4SetPoint
        {
            get { return m_MFC4SetPoint; }
            set { SetProperty(ref m_MFC4SetPoint, value); }
        }
        public double MFC5SetPoint
        {
            get { return m_MFC5SetPoint; }
            set { SetProperty(ref m_MFC5SetPoint, value); }
        }
        public double MFC6SetPoint
        {
            get { return m_MFC6SetPoint; }
            set { SetProperty(ref m_MFC6SetPoint, value); }
        }
        public double MFC7SetPoint
        {
            get { return m_MFC7SetPoint; }
            set { SetProperty(ref m_MFC7SetPoint, value); }
        }
        public double MFC8SetPoint
        {
            get { return m_MFC8SetPoint; }
            set { SetProperty(ref m_MFC8SetPoint, value); }
        }
        public double N2SetPoint
        {
            get { return m_N2SetPoint; }
            set { SetProperty(ref m_N2SetPoint, value); }
        }
        public AITMfcData MFC1Data
        {
            get { return m_MFC1Data; }
            set { SetProperty(ref m_MFC1Data, value); }
        }
        public AITMfcData MFC2Data
        {
            get { return m_MFC2Data; }
            set { SetProperty(ref m_MFC2Data, value); }
        }
        public AITMfcData MFC3Data
        {
            get { return m_MFC3Data; }
            set { SetProperty(ref m_MFC3Data, value); }
        }
        public AITMfcData MFC4Data
        {
            get { return m_MFC4Data; }
            set { SetProperty(ref m_MFC4Data, value); }
        }
        public AITMfcData MFC5Data
        {
            get { return m_MFC5Data; }
            set { SetProperty(ref m_MFC5Data, value); }
        }
        public AITMfcData MFC6Data
        {
            get { return m_MFC6Data; }
            set { SetProperty(ref m_MFC6Data, value); }
        }
        public AITMfcData MFC7Data
        {
            get { return m_MFC7Data; }
            set { SetProperty(ref m_MFC7Data, value); }
        }
        public AITMfcData MFC8Data
        {
            get { return m_MFC8Data; }
            set { SetProperty(ref m_MFC8Data, value); }
        }
        public AITMfcData MFCHeData
        {
            get { return m_MFCHeData; }
            set { SetProperty(ref m_MFCHeData, value); }
        }
        public AITMfcData MFCN2Data
        {
            get { return m_MFCN2Data; }
            set { SetProperty(ref m_MFCN2Data, value); }
        }
        public AITHeaterData ValveHeaterData
        {
            get { return m_ValveHeaterData; }
            set { SetProperty(ref m_ValveHeaterData, value); }
        }
        public AITHeaterData ForelineHeaterData
        {
            get { return m_ForelineHeaterData; }
            set { SetProperty(ref m_ForelineHeaterData, value); }
        }
        public AITHeaterData WallHeaterData
        {
            get { return m_WallHeaterData; }
            set { SetProperty(ref m_WallHeaterData, value); }
        }

        public AITRfData SRFData
        {
            get { return m_SRFData; }
            set { SetProperty(ref m_SRFData, value); }
        }
        public AITRfData BRFData
        {
            get { return m_BRFData; }
            set { SetProperty(ref m_BRFData, value); }
        }
        public PMState PMCurrentState
        {
            get { return m_PMCurrentState; }
            set { SetProperty(ref m_PMCurrentState, value); }
        }

        #region 阀
        public bool GasFinalValveIsOpen
        {
            get { return m_GasFinalValveIsOpen; }
            set { SetProperty(ref m_GasFinalValveIsOpen, value); }
        }
        public bool PVN21ValveIsOpen
        {
            get { return m_PVN21ValveIsOpen; }
            set { SetProperty(ref m_PVN21ValveIsOpen, value); }
        }
        public bool PVN22ValveIsOpen
        {
            get { return m_PVN22ValveIsOpen; }
            set { SetProperty(ref m_PVN22ValveIsOpen, value); }
        }
        public bool N2ValveIsOpen
        {
            get { return m_N2ValveIsOpen; }
            set { SetProperty(ref m_N2ValveIsOpen, value); }
        }
        public bool PV11ValveIsOpen
        {
            get { return m_PV11ValveIsOpen; }
            set { SetProperty(ref m_PV11ValveIsOpen, value); }
        }
        public bool PV12ValveIsOpen
        {
            get { return m_PV12ValveIsOpen; }
            set { SetProperty(ref m_PV12ValveIsOpen, value); }
        }
        public bool MFC1ValveIsOpen
        {
            get { return m_MFC1ValveIsOpen; }
            set { SetProperty(ref m_MFC1ValveIsOpen, value); }
        }
        public bool PV21ValveIsOpen
        {
            get { return m_PV21ValveIsOpen; }
            set { SetProperty(ref m_PV21ValveIsOpen, value); }
        }
        public bool PV22ValveIsOpen
        {
            get { return m_PV22ValveIsOpen; }
            set { SetProperty(ref m_PV22ValveIsOpen, value); }
        }
        public bool MFC2ValveIsOpen
        {
            get { return m_MFC2ValveIsOpen; }
            set { SetProperty(ref m_MFC2ValveIsOpen, value); }
        }
        public bool PV31ValveIsOpen
        {
            get { return m_PV31ValveIsOpen; }
            set { SetProperty(ref m_PV31ValveIsOpen, value); }
        }
        public bool PV32ValveIsOpen
        {
            get { return m_PV32ValveIsOpen; }
            set { SetProperty(ref m_PV32ValveIsOpen, value); }
        }
        public bool MFC3ValveIsOpen
        {
            get { return m_MFC3ValveIsOpen; }
            set { SetProperty(ref m_MFC3ValveIsOpen, value); }
        }
        public bool PV41ValveIsOpen
        {
            get { return m_PV41ValveIsOpen; }
            set { SetProperty(ref m_PV41ValveIsOpen, value); }
        }
        public bool PV42ValveIsOpen
        {
            get { return m_PV42ValveIsOpen; }
            set { SetProperty(ref m_PV42ValveIsOpen, value); }
        }
        public bool MFC4ValveIsOpen
        {
            get { return m_MFC4ValveIsOpen; }
            set { SetProperty(ref m_MFC4ValveIsOpen, value); }
        }
        public bool MFC5ValveIsOpen
        {
            get { return m_MFC5ValveIsOpen; }
            set { SetProperty(ref m_MFC5ValveIsOpen, value); }
        }
        public bool MFC6ValveIsOpen
        {
            get { return m_MFC6ValveIsOpen; }
            set { SetProperty(ref m_MFC6ValveIsOpen, value); }
        }
        public bool MFC7ValveIsOpen
        {
            get { return m_MFC7ValveIsOpen; }
            set { SetProperty(ref m_MFC7ValveIsOpen, value); }
        }
        public bool MFC8ValveIsOpen
        {
            get { return m_MFC8ValveIsOpen; }
            set { SetProperty(ref m_MFC8ValveIsOpen, value); }
        }
        public bool PVHe1ValveIsOpen
        {
            get { return m_PVHe1ValveIsOpen; }
            set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
        }
        public bool PVHe2ValveIsOpen
        {
            get { return m_PVHe2ValveIsOpen; }
            set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
        }
        public bool TurboPumpPumpingValveIsOpen
        {
            get { return m_TurboPumpPumpingValveIsOpen; }
            set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
        }
        public bool TurboPumpPurgeValveIsOpen
        {
            get { return m_TurboPumpPurgeValveIsOpen; }
            set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
        }
        public bool SoftPumpValveIsOpen
        {
            get { return m_SoftPumpValveIsOpen; }
            set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
        }
        public bool FastPumpValveIsOpen
        {
            get { return m_FastPumpValveIsOpen; }
            set { SetProperty(ref m_FastPumpValveIsOpen, value); }
        }
        public bool GuageValveIsOpen
        {
            get { return m_GuageValveIsOpen; }
            set { SetProperty(ref m_GuageValveIsOpen, value); }
        }
        #endregion
        public Dictionary<string, object> RtDataValues
        {
            get { return m_RtDataValues; }
            set { SetProperty(ref m_RtDataValues, value); }
        }
       
        

        public bool PumpIsOpen
        {
            get { return m_PumpIsOpen; }
            set { SetProperty(ref m_PumpIsOpen, value); }
        }

        public bool PendulumValveIsOpen
        {
            get { return m_PendulumValveIsOpen; }
            set { SetProperty(ref m_PendulumValveIsOpen, value); }
        }

        public bool TurboIsOpen
        {
            get { return m_TurboIsOpen; }
            set { SetProperty(ref m_TurboIsOpen, value); }
        }
        public bool IsATM
        {
            get { return m_IsATM; }
            set { SetProperty(ref m_IsATM, value); }
        }

        public bool IsVAC
        {
            get { return m_IsVAC; }
            set { SetProperty(ref m_IsVAC, value); }
        }

       
        //public bool BRFIsOn
        //{
        //    get { return m_BRFIsOn; }
        //    set { SetProperty(ref m_BRFIsOn, value); }
        //}
        //public bool SRFIsOn
        //{
        //    get { return m_SRFIsOn; }
        //    set { SetProperty(ref m_SRFIsOn, value); }
        //}

        public int PositionValue
        {
            get { return m_PositionValue; }
            set { SetProperty(ref m_PositionValue, value); }
        }
        public bool IsPositionMode
        {
            get { return m_IsPositionMode; }
            set { SetProperty(ref m_IsPositionMode, value); }
        }
        

        public double HeGasSetpoint
        {
            get { return m_HeGasSetpoint; }
            set 
            {
                SetProperty(ref m_HeGasSetpoint, value); 
            }
        }
        public int HePressureSetpoint
        {
            get { return m_HePressureSetpoint; }
            set 
            {
                SetProperty(ref m_HePressureSetpoint, value); 
            }
        }
        public float SRFFwdPowerSetpoint
        {
            get { return m_SRFFwdPowerSetpoint; }
            set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
        }
        public float BRFFwdPowerSetpoint
        {
            get { return m_BRFFwdPowerSetpoint; }
            set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
        }
        public int ESCVoltage
        {
            get { return m_ESCVoltage; }
            set { SetProperty(ref m_ESCVoltage, value); }
        }

        public float SRFMatchC1
        {
            get { return m_SRFMatchC1; }
            set { SetProperty(ref m_SRFMatchC1, value); }
        }
        public float SRFMatchC2
        {
            get { return m_SRFMatchC2; }
            set { SetProperty(ref m_SRFMatchC2, value); }
        }

        public float BRFMatchC1
        {
            get { return m_BRFMatchC1; }
            set { SetProperty(ref m_BRFMatchC1, value); }
        }
        public float BRFMatchC2
        {
            get { return m_BRFMatchC2; }
            set { SetProperty(ref m_BRFMatchC2, value); }
        }
        public bool GasIsFlowing
        {
            get { return m_GasIsFlowing; }
            set { SetProperty(ref m_GasIsFlowing, value); }
        }
        public bool IsProcessing
        {
            get { return m_IsProcessing; }
            set { SetProperty(ref m_IsProcessing, value); }
        }
        public bool IsAutoMode
        {
            get { return m_IsAutoMode; }
            set { SetProperty(ref m_IsAutoMode, value); }
        }
        public string SelectedRecipe
        {
            get { return m_SelectedRecipe; }
            set { SetProperty(ref m_SelectedRecipe, value); }
        }

        public float ChillerTempSetpoint
        {
            get { return m_ChillerTempSetpoint; }
            set { SetProperty(ref m_ChillerTempSetpoint, value); }
        }

        public float WallTempSetpoint
        {
            get { return m_WallTempSetpoint; }
            set { SetProperty(ref m_WallTempSetpoint, value); }
        }

        public bool HeIsPressureMode
        {
            get { return m_HeIsPressureMode; }
            set { SetProperty(ref m_HeIsPressureMode, value); }
        }
        public bool ChillerIsOn
        {
            get { return m_ChillerIsOn; }
            set { SetProperty(ref m_ChillerIsOn, value); }
        }

        public double ChamberPressureFeedBack
        {
            get { return m_ChamberPressureFeedBack; }
            set { SetProperty(ref m_ChamberPressureFeedBack, value); }
        }
        public string WaferID
        {
            get { return m_WaferID; }
            set { SetProperty(ref m_WaferID, value); }
        }
        public AITHighTemperatureHeaterData HighTemperatureHeaterData
        {
            get { return m_HighTemperatureHeaterData; }
            set { SetProperty(ref m_HighTemperatureHeaterData, value); }
        }
        public ComboBoxItem SelectedPosition
        {
            get { return m_SelectedPosition; }
            set { SetProperty(ref m_SelectedPosition, value); }
        }
        public int HighTemperatureHeaterTemperatureSetpoint
        {
            get { return m_HighTemperatureHeaterTemperatureSetpoint; }
            set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
        }
        #endregion

        #region 命令

        private DelegateCommand _PMInitCommnad;
        public DelegateCommand PMInitCommnad =>
            _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));

        private DelegateCommand _PMAbortCommnad;
        public DelegateCommand PMAbortCommnad =>
            _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));

        private DelegateCommand _GasCommand;
        public DelegateCommand GasCommand =>
            _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));

        private DelegateCommand _HeCommand;
        public DelegateCommand HeCommand =>
            _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));

        private DelegateCommand _RfCommand;
        public DelegateCommand RfCommand =>
            _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));

        private DelegateCommand _PurgeCommand;
        public DelegateCommand PurgeCommand =>
            _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));

        private DelegateCommand _VentCommand;
        public DelegateCommand VentCommand =>
            _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));

        private DelegateCommand _PumpCommand;
        public DelegateCommand PumpCommand =>
            _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));

        private DelegateCommand _OpenPumpCommand;
        public DelegateCommand OpenPumpCommand =>
            _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));

        private DelegateCommand _ClosePumpCommand;
        public DelegateCommand ClosePumpCommand =>
            _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));

        private DelegateCommand _OpenTurboPumpCommand;
        public DelegateCommand OpenTurboPumpCommand =>
            _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));

        private DelegateCommand _CloseTurboPumpCommand;
        public DelegateCommand CloseTurboPumpCommand =>
            _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));

        private DelegateCommand _OpenPendulumValveCommand;
        public DelegateCommand OpenPendulumValveCommand =>
            _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));

        private DelegateCommand _ClosePendulumValveCommand;
        public DelegateCommand ClosePendulumValveCommand =>
            _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));

        private DelegateCommand<object> _PinUpDownCommand;
        public DelegateCommand<object> PinUpDownCommand =>
            _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));

        private DelegateCommand<object> _LidUpDownCommand;
        public DelegateCommand<object> LidUpDownCommand =>
            _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));

        private DelegateCommand _SetSRfCommand;
        public DelegateCommand SetSRfCommand =>
            _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));

        private DelegateCommand _SetBRfCommand;
        public DelegateCommand SetBRfCommand =>
            _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));

        private DelegateCommand _OpenButterflyValveViewCommand;
        public DelegateCommand OpenButterflyValveViewCommand =>
            _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));

        //private DelegateCommand _HVCommand;
        //public DelegateCommand HVCommand =>
        //    _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));

        private DelegateCommand _HVSetCommand;
        public DelegateCommand HVSetCommand =>
            _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));


        private DelegateCommand _LoadRecipeCommand;
        public DelegateCommand LoadRecipeCommand =>
            _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));


        private DelegateCommand<object> _ControlValveCommand;
        public DelegateCommand<object> ControlValveCommand =>
            _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));

        private DelegateCommand<object> _RunRecipeCommand;
        public DelegateCommand<object> RunRecipeCommand =>
            _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));

        private DelegateCommand _SetChillerTempCommand;
        public DelegateCommand SetChillerTempCommand =>
            _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));


        private DelegateCommand _OnOffChillerCommand;
        public DelegateCommand OnOffChillerCommand =>
            _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));


        private DelegateCommand<object> _HeaterCommand;
        public DelegateCommand<object> HeaterCommand =>
            _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));

        private DelegateCommand _EndStepCommand;
        public DelegateCommand EndStepCommand =>
            _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));

        private DelegateCommand _GotoPositionCommand;
        public DelegateCommand GotoPositionCommand =>
            _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));

        private DelegateCommand _SwitchHighTemperatureHeaterCommand;
        public DelegateCommand SwitchHighTemperatureHeaterCommand =>
            _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));

        #endregion

        #region 构造函数
        public OverKepler2200AViewModel()
        {
            m_RtDataKeys = new List<string>();

            m_IsATM = true;

            ModuleName = "PMA";
            
            CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();

            DispatcherTimer timer = new DispatcherTimer();
            timer.Interval = TimeSpan.FromSeconds(0.5);
            timer.Tick += timer_Tick;
            timer.Start();

        }
        #endregion

        #region 命令方法
        private void OnControlValve(object obj)
        {
            CommonValveControl commonValveControl = (CommonValveControl)obj;
            if (commonValveControl.IsCanEdit == true)
            { 
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
            }
        }
        private void OnPMInit()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
        }
        private async void OnGas()
        {
            await Task.Run(async () => 
            {
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);

                    await Task.Delay(1000);
                    object[] mfc = new object[8];
                    string[] mfcSetPoint = new string[8];

                    mfc[0] = MFC1Data.SetPoint;
                    mfc[1] = MFC2Data.SetPoint;
                    mfc[2] = MFC3Data.SetPoint;
                    mfc[3] = MFC4Data.SetPoint;
                    mfc[4] = MFC5Data.SetPoint;
                    mfc[5] = MFC6Data.SetPoint;
                    mfc[6] = MFC7Data.SetPoint;
                    mfc[7] = MFC8Data.SetPoint;

                   InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
                
            });
           
           
        }
        private void OnHe()
        {
            if (PVHe1ValveIsOpen == true)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
            }
            else
            {
                if (HeIsPressureMode)
                {
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
                }
                else
                { 
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
                }
            }
        }
        private void OnRf()
        {
            if (PMCurrentState == PMState.RfPowering)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
            }
            else
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
            }
        }

        private void OnPurge()
        {
            //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
            //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
            //{
            //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
            //    await Task.Delay(1000);
            //    //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
            //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");

            //}
            //else
            //{
            //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
            //    await Task.Delay(1000);
            //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
            //}
            if (PMCurrentState == PMState.Purging)
            {
                //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
                //await Task.Delay(1000);
                ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");

            }
            else
            {
                //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
                //await Task.Delay(1000);
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
            }
        }

        private void OnVent()
        {
            //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
            if (PMCurrentState == PMState.Venting)
            {
                //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");

            }
            else
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
            }

        }

        private void OnPump()
        {
            //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
            if (PMCurrentState==PMState.Pumping)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
                return;
            }

            //if (PMCurrentState == PMState.pum)
            //{
            //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
            //    return;
            //}
            //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
            //{
            //    get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
            //}

            //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
            //{
            //    get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
            //}

            string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();

            string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
            // 设置底压
            double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);

            if (basePressure <= 0.01 || basePressure >= 1000)
            {
                MessageBox.Show($"基准压力设定值 {basePressure} 无效，应该在0到1000毫托之间");
                return;
            }

            double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);

            if (pumpLimit <= 0.01 || pumpLimit >= 1200)
            {
                MessageBox.Show($"抽气时间应该在0到1200之间，当前设定值{pumpLimit}");
                return;
            }

            InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());

            InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());

            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
        }

        private void OnOpenPump()
        {

            //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
            if (PMCurrentState==PMState.LaunchingPump)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
                return;
            }
            //if (PumpIsOpen == true)
            //{
            //    return;
            //}
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
        }
        private void OnClosePump()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");

        }
        private void OnOpenTurboPump()
        {
            //TurboIsOpen = true;
            //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
            if (PMCurrentState == PMState.LaunchingTurboPump)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
                return;
            }

            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
        }

        private void OnCloseTurboPump()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
        }

        private void OnOpenPendulumValve()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
        }
        private void OnClosePendulumValve()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
        }
        private void OnPinUpDown(object upDown)
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
        }
        private void OnLidUpDown(object upDown)
        {
            //var value = (bool)upDown;
            if (upDown.ToString()== "Up")
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
            }
            else
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
            }
        }
        private async void OnSetSRf()
        {   

            if (SRFData.IsRfOn == true)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
            }
            else
            {
                if (GasIsFlowing == true)
                {
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
                    await Task.Delay(100);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
                }                   
            }
        }
        private async void OnSetBRf()
        {

            if (BRFData.IsRfOn == true)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
            }
            else
            {
                if (GasIsFlowing == true)
                {
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
                    await Task.Delay(100);
                    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
                }             
            }          
        }

        private void OnPMAbort()
        {

            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
        }
        private void OnOpenButterflyValveView()
        {
            //if (butterflyValveMessageBox == null)
            //{
                var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
                butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
                butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
                butterflyValveMessageBox.Left = 700;
                butterflyValveMessageBox.Top = 600;
                butterflyValveMessageBox.Show();
                butterflyValveMessageBox.Owner = _mainWindow;
            //}
           
        }
        private void OnLoadRecipe()
        {
            CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
        }

        //private async void OnHV()
        //{
        //    if (ESCHVData.IsOn == true)
        //    {
        //        InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);

        //    }
        //    else
        //    {
        //        await Task.Run(async () =>
        //        {
        //            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
        //            await Task.Delay(1000);
        //            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);

        //        });
        //    }
           
            
        //}
        private void OnHVSet()
        { 
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);

        }


        private void OnRunRecipe(object obj)
        {
            string recipeName = SelectedRecipe;
            if (recipeName == null)
            {
                return;
            }
            ClearData();
            var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
            CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
        }

       

        private void OnOffChiller()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
        }


        private void OnHeater(object obj)
        {
            if (IsAutoMode == true)
            {
                return;
            }
            AITHeaterData heaterData = obj as AITHeaterData;
            var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
            heaterView = new HeaterView(heaterData);
            heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
            heaterView.Owner = _mainWindow;
            heaterView.Show();
        }

        private void OnEndStep()
        {
            if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
            }
            else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
            {
                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
            }
        }

        private void OnGotoPosition()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
        }
        private void OnSwitchHighTemperatureHeater()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
        }
        private void OnSetChillerTemp()
        {
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
        }
        #endregion

        #region 私有方法
        private void ClearData()
        {
            ESCVoltage = 0;
            SRFFwdPowerSetpoint = 0;
            SRFMatchC1 = 0;
            SRFMatchC2 = 0;
            BRFFwdPowerSetpoint = 0;
            BRFMatchC1 = 0;
            BRFMatchC2 = 0;
            HeGasSetpoint = 0;
            MFC1SetPoint = 0;
            MFC2SetPoint = 0;
            MFC3SetPoint = 0;
            MFC4SetPoint = 0;
            MFC5SetPoint = 0;
            MFC6SetPoint = 0;
            MFC7SetPoint = 0;
            MFC8SetPoint = 0;

        }
        private  IEnumerable<string> GetFilesNames(string path)
        {
            return Directory.GetFiles(path, "*.rcp")
      .Select(Path.GetFileNameWithoutExtension);
        }
        void timer_Tick(object sender, EventArgs e)
        {
            RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);

            if (RtDataValues==null)
            {
                return;
            }

            var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
            InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);

            PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
            GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
            PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen"); 
            PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
            PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen"); 
            PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
            PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
            PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
            PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
            PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
            MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen"); 
            MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
            MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
            MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
            MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
            MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
            MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
            MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
            N2ValveIsOpen =   CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen"); 
            SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
            FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen"); 
            GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen"); 
            PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen"); 
            PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
            PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
            PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");        
            TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
            TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");

            

            PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
            TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");


            LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
            IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
            IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");

            PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
            TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());

            PositionValue = -((int)((PendulumValvePosition) * 0.09));


            PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  
            GasIsFlowing = PMCurrentState == PMState.GasFlowing;
            IsProcessing=PMCurrentState == PMState.Processing;
            MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
            MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
            MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
            MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
            MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
            MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
            MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
            MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
            MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
            MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");

            SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
            BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
            PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
            //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");


            ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
            ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
            WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];

            ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
            ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
            ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
            ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());

            ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());

            //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());



            ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");

            SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
            IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
            IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
            IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
            IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
            SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value"); 
            SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value"); 

            IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM"); 
            IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC"); 

            ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");

            
            MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
            MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
          
            BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
            BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
            TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
            IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed"); 
            IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
            WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";

            if (PMCurrentState == PMState.Processing)
            {
                CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
                if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
                {
                    var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
                    CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
                    CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
                }
                currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
            }
            else
            {
                CurrentRecipeResult = null;
                CurrentRecipeStep = null;
            }

            if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
            {
                ChamberPressureFeedBack =  ProcessLowPressure;
            }
            else
            { 
                ChamberPressureFeedBack =  ProcessHighPressure;
            }
            HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
        }       
        public void addDataKeys()
        {
            m_RtDataKeys.Clear();
            m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
            m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
            m_RtDataKeys.Add($"{ModuleName}.MfcHe");
            m_RtDataKeys.Add($"{ModuleName}.MfcN2");
       

            m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
            m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
            m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");

            m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
            m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");

            m_RtDataKeys.Add($"{ModuleName}.IsATM");
            m_RtDataKeys.Add($"{ModuleName}.IsVAC");

            m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
            m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");

            m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
            m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");


            m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
            m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");

            m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
            m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");

            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");


            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
           // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");

            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");

            m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
            //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");

            m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");

            m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");

            m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
            //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");

            //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
            //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");


            m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk"); 
            m_RtDataKeys.Add($"{ModuleName}.IsWLK");
            m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
            m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
            m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");

            m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
            m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");

            //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
            m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");

            m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
            m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
            m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
            m_RtDataKeys.Add($"{ModuleName}.FsmState");

            m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
            m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");

            m_RtDataKeys.Add($"{ModuleName}.HasWafer");
            m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");

            m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
        }
        #endregion
    }
}