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- <?xml version="1.0" encoding="utf-16"?>
- <DeviceModelDefine type="SETM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
- <IoValves>
- <IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_TM_V_HS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_TM_V_LS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCESoftPumpValve" display="VCE Soft Pump Valve" schematicId="SoftPumpVCE" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCE_V_LS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEFastPumpValve" display="VCE Fast Pump Valve" schematicId="FastPumpVCE" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCE_V_HS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_TM_B_HS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_TM_B_LS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCESoftVentValve" display="VCE Soft Vent Valve" schematicId="SoftVentVCE" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCE_B_LS" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEFastVentValve" display="VCE Fast Vent Valve" schematicId="FastVentVCE" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCE_B_HS" diCloseSensor="" diOpenSensor="" />
- </IoValves>
- <IoSensors>
- <IoSensor id="VCESlitDoorOpenEnable" display="VCE Slit Door Open Enable" schematicId="" unit="" di="DI_TM_DI3" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="PMASlitDoorOpenEnable" display="PMA Slit Door Open Enable" schematicId="" unit="" di="DI_TM_DI5" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="PMBSlitDoorOpenEnable" display="PMB Slit Door Open Enable" schematicId="" unit="" di="DI_TM_DI7" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="PMCSlitDoorOpenEnable" display="PMC Slit Door Open Enable" schematicId="" unit="" di="DI_TM_DI9" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="TMExtendVCEEnable" display="TM Extend VCE Enable" schematicId="" unit="" di="DI_TM_DI4" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="TMExtendPMAEnable" display="TM Extend PMA Enable" schematicId="" unit="" di="DI_TM_DI6" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="TMExtendPMBEnable" display="TM Extend PMB Enable" schematicId="" unit="" di="DI_TM_DI8" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="TMExtendPMCEnable" display="TM Extend PMC Enable" schematicId="" unit="" di="DI_TM_DI10" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="TMVACSensor" display="TM VAC Sensor" schematicId="" unit="" di="DI_TM_V" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEVACSensor" display="VCE VAC Sensor" schematicId="" unit="" di="DI_VCE_V" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- </IoSensors>
- <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
- <IoCylinder id="VCESlitDoor" display="VCE Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_VCE_TM_OP" doOFF="DO_VCE_TM_CL" diON="DI_VCE_TM_OPS" diOFF="DI_VCE_TM_CLS" />
- <IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_TM_PMA_OP" doOFF="DO_TM_PMA_CL" diON="DI_TM_PMA_OPS" diOFF="DI_TM_PMA_CLS" />
- <IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_TM_PMB_OP" doOFF="DO_TM_PMB_CL" diON="DI_TM_PMB_OPS" diOFF="DI_TM_PMB_CLS" />
- <IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_TM_PMC_OP" doOFF="DO_TM_PMC_CL" diON="DI_TM_PMC_OPS" diOFF="DI_TM_PMC_CLS" />
- </IoCylinders>
- <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
- <IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
- aiValue="AI_TM_Vacuum_Gauge" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_TM_Pipeline_Vacuum_Gauge" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="VCEPressure" display="VCE Pressure" schematicId="" unit="mTorr"
- aiValue="AI_VCE_Vacuum_Gauge" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="VCEPipelinePressure" display="VCE Pipeline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_VCE_Pipeline_Vacuum_Gauge" diGaugeFail="" scPrecision="" scOffset=""/>
- </IoPressureMeters>
-
- <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
- <IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
- aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_TM_DI2"/>
- </IoMfcs>
-
- </DeviceModelDefine>
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