Kepler-Release/Venus/Venus_RT/Modules/PMs/ProcessUnitDefine.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace Venus_Core
{
    /// <summary>
    /// 设计概述：
    /// 本设计主要目的，为了满足复杂的刻蚀工艺需求(各个工艺参数之间相互关联)， 和应对未来不断新增的工艺需求（新的设备、
    ///     新的工艺、新的材料等等）， 同时又能对现存的Recipe保持最大的兼容
    /// 
    /// 1. 将Process 的每道工艺分解为1个至多个逻辑工艺单元， 每个逻辑工艺单元通过 Class Name 和RT的工艺算法绑定， 
    ///     同时也和 GUI Recipe Editor 的页面布局绑定。
    ///     
    /// 2. 一个逻辑单元功能调试好， 并且有在客户端使用后， 此逻辑单元想关联的 RT Process 代码和GUI 界面代码， 
    ///     不允许再修改， 只能增加新的Class 来实现新的工艺需求
    ///     
    /// 3. 通过配置文件里面定义 ProcessUnit Class Name列表， 来定义当前机台支持的工艺功能， 也就是说如果Recipe文件里面保函了
    ///     配置文件里面没有列出的工艺单元， 表明本机台不支持此Recipe， 并报警提示用户
    /// </summary>
 

    public partial class PressureUnitByPressureMode : ProcessUnitBase
    {
        public string UnitName { get; set; } = "PressureUnitByPressureMode";
        public bool EnableRamp { get; set; }
        public int StartPressure { get; set; }
        public int TargetPressure { get; set; }
        public int ValvePositionPreset { get; set; }
        public int HoldTime { get; set; }
    }

    public class PressureUnitByValveMode : ProcessUnitBase
    {
        public string UnitName { get; set; } = "PressureUnitByValveMode";

        public bool EnableRamp { get; set; }
        public int StartPosition { get; set; }
        public int TargetPosition { get; set; }
        public int HoldTime { get; set; }

    }

    public class TCPUnit : ProcessUnitBase
    {
        public string UnitName { get; set; } = "TCPUnit";

        public bool EnableRamp { get; set; }
        public int RFPower { get; set; }
        public int StartPower { get; set; }
        public int TargetPower { get; set; }
        public int HoldTime { get; set; }
        public int TuneCapPreset { get; set; }
        public int LoadCapPreset { get; set; }
        public int MaxReflectedPower { get; set; }
    }


    public class BiasUnit : ProcessUnitBase
    {
        public string UnitName { get; set; } = "BiasUnit";

        public int BiasRFPower { get; set; }
        public bool EnableRamp { get; set; }
        public int StartBiasRFPower { get; set; }
        public int TargetBiasRFPower { get; set; }
        public int BiasRFHoldTime { get; set; }
        public int BiasTuneCapPreset { get; set; }
        public int BiasLoadCapPreset { get; set; }
        public int BiasMaxReflectedPower { get; set; }
        public GeneratorMode BiasGeneratorMode { get; set; }
        public int PulseRateFreq { get; set; }
        public int PulseDutyCycle { get; set; }

    }

    public class GasControlUnit : ProcessUnitBase
    {
        public string UnitName { get; set; } = "GasControlUnit";

        public bool EnableRamp { get; set; }
        public int Gas1 { get; set; }
        public int Gas1Target { get; set; }
        public int Gas2 { get; set; }
        public int Gas2Target { get; set; }
        public int Gas3 { get; set; }
        public int Gas3Target { get; set; }
        public int Gas4 { get; set; }
        public int Gas4Target { get; set; }
        public int Gas5 { get; set; }
        public int Gas5Target { get; set; }
        public int Gas6 { get; set; }
        public int Gas6Target { get; set; }
        public int Gas7 { get; set; }
        public int Gas7Target { get; set; }
        public int Gas8 { get; set; }
        public int Gas8Target { get; set; }
        public int FlowRatie { get; set; }
    }

    public class ESCHVUnit : ProcessUnitBase
    {
        public string UnitName { get; set; } = "ESCHVUnit";

        public int BacksideHelum { get; set; }
        public int MaxHeFlow { get; set; }
        public int MinHeFlow { get; set; }
        public int ESCClampValtage { get; set; }
        public int Temperature { get; set; }
    }

    public class ProcessKitUnit : ProcessUnitBase
    {
        public string UnitName { get; set; } = "ProcessKitUnit";

        public MovementPosition LiftPinPostion { get; set; }
        public MovementPosition WeprBasrPinPosition { get; set; }
    }
}