VenusDevice.cs 4.2 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValveGasFinal,
  27. ValveSoftPump,
  28. ValveFastPump,
  29. ValveCHBPurge,
  30. ValveTurboPumpPumping,
  31. ValveTurboPumpPurge,
  32. ValveGuage,
  33. ValveLoadlockVent,
  34. ValveLoadlockPumping,
  35. MfcGas1,
  36. MfcGas2,
  37. MfcGas3,
  38. MfcGas4,
  39. MfcGas5,
  40. GasStick1,
  41. GasStick2,
  42. GasStick3,
  43. TemperatureControl,
  44. ChamberLid,
  45. ATM_SW,
  46. VAC_SW,
  47. WaterFlow_SW,
  48. N2_Pressure,
  49. ProcessGauge,
  50. PressureGauge,
  51. ForelineGauge,
  52. MainPump,
  53. Chiller,
  54. Rf,
  55. BiasRf,
  56. Match,
  57. BiasMatch,
  58. PressureControl,
  59. ThrottleValve,
  60. HeaterChamber,
  61. ForelineHeater,
  62. Heartbeat,
  63. ResetPlcSignal,
  64. LiftPin,
  65. SlitDoor,
  66. SmallPin,
  67. MediumPin,
  68. LoadLockArm,
  69. StatisticsRfOnTime,
  70. StatisticsPumpOnTime,
  71. PlcDateTime,
  72. Lid,
  73. LidLoadlock,
  74. LidLocker,
  75. ESCHV,
  76. PendulumValve,
  77. TurboPump,
  78. }
  79. public enum StateData
  80. {
  81. RecipeProcessTime,
  82. RecipeStepNo,
  83. RecipeStepMode,
  84. RecipeName,
  85. RecipeBaseName,
  86. RecipeStepTimeElapsed,
  87. RecipeStepTimeSetPoint,
  88. RecipeStepRfTimeSetPoint,
  89. RecipeStepElectrodeTemp,
  90. SmallWafer,
  91. MidWafer,
  92. BigWafer,
  93. RfTimeElapsed,
  94. PumpTime,
  95. PMState,
  96. TMState,
  97. IsAutoMode,
  98. IsPmOnline,
  99. IsTmOnline,
  100. PMJobState,
  101. TMJobState,
  102. PmPlatformState,
  103. JobState,
  104. JobTmRecipe,
  105. JobPmRecipe,
  106. JobStartTime,
  107. JobStopTime,
  108. JobProcessCount,
  109. IsPumpingOkForProcess,
  110. IsCoolingOkForProcess,
  111. IsGasFlowingOkForProcess,
  112. IsRfPowering,
  113. TotalCycle,
  114. ProcessStatus,
  115. AlarmEvent,
  116. LeakCheckElapseTime,
  117. DataLogName,
  118. LotName,
  119. CurrentMagazineType,
  120. SchedulerRecipe,
  121. SchedulerState,
  122. SchedulerLoadStationInSubstrate,
  123. SchedulerRailInSubstrate,
  124. SchedulerPmSubstrate,
  125. SchedulerRailOutSubstrate,
  126. SchedulerLoadStationOutSubstrate,
  127. }
  128. public enum RtOperation
  129. {
  130. DeviceOperation,
  131. LockLid,
  132. UnlockLid,
  133. StartPump,
  134. Pump,
  135. StopPump,
  136. GasFlow,
  137. StopGasFlow,
  138. Cooling,
  139. StopCooling,
  140. /// <summary>
  141. ///
  142. /// 0:Step mode
  143. /// 1:Power on time
  144. /// 2:Electrode temperature
  145. /// 3:Electrode Critical temperature
  146. /// </summary>
  147. RfPower,
  148. Vent,
  149. Purge,
  150. Abort,
  151. Heat,
  152. SetConfig,
  153. SetPMBChillerState,
  154. SetHardwareConfig,
  155. RunRecipe,
  156. SkipCurrentStep,
  157. ResumeRecipe,
  158. AbortRecipe,
  159. Reset,
  160. LeakCheck,
  161. DeleteLeakCheck,
  162. MFCVerification,
  163. AllMFCVerification,
  164. SwitchOffBuzzer,
  165. // Lift pin & Guide pin
  166. MoveLiftPin,
  167. MoveGuidePin,
  168. StartAutoRun,
  169. StopAutoRun,
  170. PauseAutoRun,
  171. ResumeAutoRun,
  172. InitAll,
  173. AckError,
  174. TmRun,
  175. TmStop,
  176. PmAuto,
  177. PmManual,
  178. PmOnline,
  179. PmOffline,
  180. JobAuto,
  181. JobManual,
  182. JobRun,
  183. JobStop,
  184. JobAbort,
  185. JobPmLoadRecipe,
  186. JobTmLoadRecipe,
  187. JobTmRun,
  188. JobTmStop,
  189. JobPmOnline,
  190. JobPmOffline,
  191. JobPmProcessDone,
  192. JobTmRecovered,
  193. }
  194. public enum MovementPosition
  195. {
  196. Down, Up, Left, Right, Middle, Unknown
  197. }
  198. public enum RState
  199. {
  200. Init,
  201. Running,
  202. End,
  203. Failed,
  204. Timeout,
  205. }
  206. }