SchedulerPM.cs 14 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. namespace Venus_RT.Scheduler
  25. {
  26. public class SchedulerPM : SchedulerModule
  27. {
  28. public override bool IsAvailable
  29. {
  30. get { return _entity.IsIdle && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  31. }
  32. public override bool IsOnline
  33. {
  34. get { return _entity != null && _entity.IsOnline; }
  35. }
  36. public override bool IsError
  37. {
  38. get { return _entity.IsError; }
  39. }
  40. public bool IsIdle
  41. {
  42. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  43. }
  44. public TaskType Task => _task;
  45. private PMEntity _entity = null;
  46. private ModuleName _taskRobot;
  47. private EnumTransferType _taskTransferType;
  48. private Hand _taskBlade;
  49. private int _taskSlot;
  50. private int _entityTaskToken = (int)FSM_MSG.NONE;
  51. private DeviceTimer _timerProcess = new DeviceTimer();
  52. private JetPMBase _pm;
  53. private int _idleCleanOpt = 0;
  54. private int _idleCleanHourSetPoint;
  55. private int _idleCleanWaferSetPoint;
  56. private int _idleCleanWaferCount;
  57. private string _idleCleanRecipe;
  58. private DateTime _lastRunTime = new DateTime();
  59. private float _paramTemp;
  60. public float Temperature
  61. {
  62. get
  63. {
  64. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  65. //{
  66. // return _pm.CoolantOutletTempFB;
  67. //}
  68. //return _pm.SubstrateTempFB;
  69. return _pm.CoolantOutletTempFB;
  70. }
  71. }
  72. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  73. {
  74. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  75. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  76. EventWaferArrived += WaferArrived;
  77. LoadIdleCleanOpt();
  78. }
  79. public void InitClean()
  80. {
  81. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  82. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  83. }
  84. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  85. {
  86. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  87. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  88. }
  89. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  90. {
  91. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  92. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  93. }
  94. public bool IsTemperatureReady(float temp)
  95. {
  96. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  97. }
  98. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  99. {
  100. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  101. _taskTransferType == type;
  102. }
  103. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  104. {
  105. _task = TaskType.PrepareTransfer;
  106. _taskRobot = robot;
  107. _taskSlot = slot;
  108. _taskTransferType = type;
  109. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  110. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  111. return _entityTaskToken != (int)FSM_MSG.NONE;
  112. }
  113. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  114. {
  115. _task = TaskType.PrepareTransfer;
  116. _taskRobot = robot;
  117. _taskSlot = slot;
  118. _taskBlade = blade;
  119. _taskTransferType = type;
  120. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  121. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  122. return _entityTaskToken != (int)FSM_MSG.NONE;
  123. }
  124. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  125. {
  126. _task = TaskType.PrepareTransfer;
  127. _taskRobot = robot;
  128. _taskSlot = slot;
  129. _taskBlade = blade;
  130. _taskTransferType = type;
  131. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  132. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  133. return _entityTaskToken != (int)FSM_MSG.NONE;
  134. }
  135. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  136. {
  137. StopWaitTransfer(robot);
  138. _task = TaskType.PostTransfer;
  139. _taskRobot = robot;
  140. _taskSlot = slot;
  141. _taskTransferType = type;
  142. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  143. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  144. return _entityTaskToken != (int)FSM_MSG.NONE;
  145. }
  146. public override bool PostTransfer(ModuleName robot)
  147. {
  148. StopWaitTransfer(robot);
  149. _task = TaskType.PostTransfer;
  150. _taskRobot = robot;
  151. _taskSlot = _inTransferSlot;
  152. _taskTransferType = _inTransferType;
  153. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  154. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  155. return _entityTaskToken != (int)FSM_MSG.NONE;
  156. }
  157. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  158. {
  159. _task = TaskType.Process;
  160. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  161. if (RouteManager.IsATMMode)
  162. {
  163. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  164. _timerProcess.Start(time * 1000);
  165. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  166. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  167. return true;
  168. }
  169. else
  170. {
  171. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  172. return _entityTaskToken != (int)FSM_MSG.NONE;
  173. }
  174. }
  175. public override bool Preheating(float temperature)
  176. {
  177. _task = TaskType.Heating;
  178. _paramTemp = temperature;
  179. _entityTaskToken = _entity.InvokePreHeat(temperature);
  180. LogTaskStart(_task, $"preheat to {temperature}");
  181. return _entityTaskToken != (int)FSM_MSG.NONE;
  182. }
  183. public bool CheckTaskDone()
  184. {
  185. bool ret = false;
  186. switch (_task)
  187. {
  188. case TaskType.None:
  189. ret = true;
  190. break;
  191. case TaskType.PrepareTransfer:
  192. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  193. break;
  194. case TaskType.PostTransfer:
  195. ret = _entity.CheckAcked(_entityTaskToken);
  196. break;
  197. case TaskType.Heating:
  198. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  199. break;
  200. case TaskType.Process:
  201. case TaskType.IdlePurgeProcess:
  202. case TaskType.IdleCleanProcess:
  203. case TaskType.PreJobProcess:
  204. case TaskType.CompleteJobProcess:
  205. if (RouteManager.IsATMMode)
  206. {
  207. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  208. if (ret)
  209. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  210. }
  211. else
  212. {
  213. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  214. }
  215. break;
  216. }
  217. if (ret && _task != TaskType.None)
  218. {
  219. LogTaskDone(_task, "");
  220. _task = TaskType.None;
  221. }
  222. return ret;
  223. }
  224. public bool Monitor()
  225. {
  226. return true;
  227. }
  228. public void SetPMAuto()
  229. {
  230. _entity.SetAuto();
  231. }
  232. public bool IdlePurgeProcess(string recipeName)
  233. {
  234. _task = TaskType.IdlePurgeProcess;
  235. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  236. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  237. return _entityTaskToken != (int)FSM_MSG.NONE;
  238. }
  239. public bool IdleCleanProcess(string recipeName)
  240. {
  241. _task = TaskType.IdleCleanProcess;
  242. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  243. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  244. return _entityTaskToken != (int)FSM_MSG.NONE;
  245. }
  246. public void PreJobClean()
  247. {
  248. }
  249. public bool PreJobProcess(string recipeName)
  250. {
  251. _task = TaskType.PreJobProcess;
  252. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  253. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  254. return _entityTaskToken != (int)FSM_MSG.NONE;
  255. }
  256. public bool CompleteJobProcess(string recipeName)
  257. {
  258. _task = TaskType.CompleteJobProcess;
  259. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  260. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  261. return _entityTaskToken != (int)FSM_MSG.NONE;
  262. }
  263. private void WaferArrived(object sender, EventArgs e)
  264. {
  265. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  266. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  267. if(recipeName.Length > 0)
  268. {
  269. Process(recipeName, false, true, wafer);
  270. }
  271. }
  272. #region clean task
  273. private void LoadIdleCleanOpt()
  274. {
  275. // Load Idle Clean Config
  276. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  277. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  278. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  279. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  280. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  281. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  282. if (lastRun.Length > 10)
  283. {
  284. try
  285. {
  286. _lastRunTime = DateTime.Parse(lastRun);
  287. }
  288. catch (Exception _)
  289. {
  290. lastRun = string.Empty;
  291. }
  292. }
  293. if (lastRun.Length <= 10)
  294. {
  295. _lastRunTime = DateTime.Now;
  296. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  297. }
  298. // validate the idle clean recipe name
  299. string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), _idleCleanRecipe, false);
  300. Recipe recipe = Recipe.Load(recipeContent);
  301. if (recipe == null)
  302. {
  303. _idleCleanRecipe = string.Empty;
  304. }
  305. }
  306. public void WaferProcessDone()
  307. {
  308. _lastRunTime = DateTime.Now;
  309. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  310. _idleCleanWaferCount++;
  311. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  312. }
  313. private void ResetIdleCleanCounter()
  314. {
  315. _lastRunTime = DateTime.Now;
  316. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  317. _idleCleanWaferCount = 0;
  318. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  319. }
  320. public bool RunIdleCleanTask()
  321. {
  322. if(_idleCleanOpt == 1)
  323. {
  324. TimeSpan span = DateTime.Now - _lastRunTime;
  325. if(span.TotalHours >= _idleCleanHourSetPoint)
  326. {
  327. Process(_idleCleanRecipe, true, false, null);
  328. ResetIdleCleanCounter();
  329. return true;
  330. }
  331. }
  332. else if(_idleCleanOpt == 2)
  333. {
  334. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  335. {
  336. Process(_idleCleanRecipe, true, false, null);
  337. ResetIdleCleanCounter();
  338. return true;
  339. }
  340. }
  341. return false;
  342. }
  343. #endregion
  344. }
  345. }