OverVenusViewModel.cs 66 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using Aitex.Core.RT.Log;
  23. using MECF.Framework.Common.Equipment;
  24. namespace Venus_MainPages.ViewModels
  25. {
  26. internal class OverVenusViewModel : BindableBase
  27. {
  28. #region 私有字段
  29. private List<string> m_CurrentModuleRecipes = new List<string>();
  30. private bool m_PVN21ValveIsOpen;
  31. private bool m_PVN22ValveIsOpen;
  32. private bool m_N2ValveIsOpen;
  33. private bool m_PV11ValveIsOpen;
  34. private bool m_PV12ValveIsOpen;
  35. private bool m_PV21ValveIsOpen;
  36. private bool m_PV22ValveIsOpen;
  37. private bool m_PV31ValveIsOpen;
  38. private bool m_PV32ValveIsOpen;
  39. private bool m_PV41ValveIsOpen;
  40. private bool m_PV42ValveIsOpen;
  41. private bool m_MFC1ValveIsOpen;
  42. private bool m_MFC2ValveIsOpen;
  43. private bool m_MFC3ValveIsOpen;
  44. private bool m_MFC4ValveIsOpen;
  45. private bool m_MFC5ValveIsOpen;
  46. private bool m_MFC6ValveIsOpen;
  47. private bool m_MFC7ValveIsOpen;
  48. private bool m_MFC8ValveIsOpen;
  49. private bool m_GasFinalValveIsOpen;
  50. private bool m_SoftPumpValveIsOpen;
  51. private bool m_FastPumpValveIsOpen;
  52. private bool m_PVHe1ValveIsOpen;
  53. private bool m_PVHe2ValveIsOpen;
  54. private bool m_PVHe3ValveIsOpen;
  55. private bool m_HeISOValveIsOpen;
  56. private bool m_TurboPumpPumpingValveIsOpen;
  57. private bool m_TurboPumpPurgeValveIsOpen;
  58. private bool m_GuageValveIsOpen;
  59. private bool m_PendulumValveIsOpen;
  60. //private bool m_BRFIsOn;
  61. //private bool m_SRFIsOn;
  62. private double m_HeGasSetpoint;
  63. private int m_HePressureSetpoint;
  64. private float m_SRFFwdPowerSetpoint;
  65. private float m_BRFFwdPowerSetpoint;
  66. private float m_SRFMatchC1;
  67. private float m_SRFMatchC2;
  68. private float m_BRFMatchC1;
  69. private float m_BRFMatchC2;
  70. private double m_MFC1SetPoint;
  71. private double m_MFC2SetPoint;
  72. private double m_MFC3SetPoint;
  73. private double m_MFC4SetPoint;
  74. private double m_MFC5SetPoint;
  75. private double m_MFC6SetPoint;
  76. private double m_MFC7SetPoint;
  77. private double m_MFC8SetPoint;
  78. private double m_N2SetPoint;
  79. private double m_TurboN2FlowSetPoint;
  80. private AITMfcData m_MFC1Data;
  81. private AITMfcData m_MFC2Data;
  82. private AITMfcData m_MFC3Data;
  83. private AITMfcData m_MFC4Data;
  84. private AITMfcData m_MFC5Data;
  85. private AITMfcData m_MFC6Data;
  86. private AITMfcData m_MFC7Data;
  87. private AITMfcData m_MFC8Data;
  88. private AITMfcData m_MFCHeData;
  89. private AITMfcData m_MFCN2Data;
  90. private AITHeaterData m_ValveHeaterData;
  91. private AITHeaterData m_ForelineHeaterData;
  92. private AITHeaterData m_WallHeaterData;
  93. private AITRfData m_SRFData;
  94. private AITRfData m_BRFData;
  95. private AITPendulumValveData m_PendulumValveData;
  96. private AITHVData m_ESCHVData;
  97. private PMState m_PMCurrentState;
  98. private bool m_SourceRFFanInterlock;
  99. private bool m_IsWLK;
  100. private bool m_IsWaterFlowOk;
  101. private bool m_IsTurboPumpInterlock;
  102. private bool m_IsCDAOK;
  103. private bool m_SensorGasBoxDoor;
  104. private bool m_SensorGasBoxPressure;
  105. private bool m_PumpIsOpen;
  106. private bool m_TurboIsOpen;
  107. private bool m_IsATM;
  108. private bool m_IsVAC;
  109. private List<string> m_RtDataKeys;
  110. private Dictionary<string, object> m_RtDataValues;
  111. private int m_PositionValue;
  112. private bool m_IsPositionMode;
  113. private int m_ESCVoltage;
  114. private bool m_GasIsFlowing;
  115. private bool m_IsProcessing;
  116. private bool m_IsAutoMode;
  117. private string m_SelectedRecipe;
  118. private float m_ChillerTempSetpoint;
  119. private float m_WallTempSetpoint;
  120. private bool m_HeIsPressureMode = true;
  121. private bool m_ChillerIsOn;
  122. private float m_ProcessHighPressure;
  123. private float m_ProcessLowPressure;
  124. private float m_ForelinePressurePressure;
  125. private float m_ESCHePressure;
  126. ButterflyValveView butterflyValveMessageBox;
  127. HeaterView heaterView;
  128. private int m_TurboPumpRotationalSpeed;
  129. private bool m_LiftPinIsUp;
  130. private bool m_IsSlitDoorClosed;
  131. private bool m_IsLidClosed;
  132. private float m_ChillerTemperature;
  133. private float m_HVTemperature;
  134. private int m_ESCHVOutputVoltage;
  135. //private float m_SRfReflectPower;
  136. //private float m_SRfForwardPowerFeedBack;
  137. //private float m_BRfReflectPower;
  138. //private float m_BRfForwardPowerFeedBack;
  139. //private int m_MatchWorkMode;
  140. //private int m_BiasMatchWorkMode;
  141. private float m_MatchC1;
  142. private float m_MatchC2;
  143. private float m_BiasMatchC1;
  144. private float m_BiasMatchC2;
  145. private float m_PendulumValvePosition;
  146. private bool m_IsTurboPumpAtSpeed;
  147. private bool m_TurboPumpWaterFlowSwitch;
  148. private bool m_IsHasWafer;
  149. private Recipe m_CurrentRecipe = new Recipe();
  150. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  151. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  152. private double m_ChamberPressureFeedBack;
  153. private string m_WaferID;
  154. private string m_ModuleName;
  155. private int? currentRecipeNumber;
  156. #endregion
  157. #region 属性
  158. public List<string> CurrentModuleRecipes
  159. {
  160. get { return m_CurrentModuleRecipes; }
  161. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  162. }
  163. public Recipe CurrentRecipe
  164. {
  165. get { return m_CurrentRecipe; }
  166. set { SetProperty(ref m_CurrentRecipe, value); }
  167. }
  168. public RecipeResult CurrentRecipeResult
  169. {
  170. get { return m_CurrentRecipeResult; }
  171. set { SetProperty(ref m_CurrentRecipeResult, value); }
  172. }
  173. public RecipeStep CurrentRecipeStep
  174. {
  175. get { return m_CurrentRecipeStep; }
  176. set { SetProperty(ref m_CurrentRecipeStep, value); }
  177. }
  178. public bool IsHasWafer
  179. {
  180. get { return m_IsHasWafer; }
  181. set { SetProperty(ref m_IsHasWafer, value); }
  182. }
  183. public bool IsTurboPumpAtSpeed
  184. {
  185. get { return m_IsTurboPumpAtSpeed; }
  186. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  187. }
  188. public bool TurboPumpWaterFlowSwitch
  189. {
  190. get { return m_TurboPumpWaterFlowSwitch; }
  191. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  192. }
  193. public float PendulumValvePosition
  194. {
  195. get { return m_PendulumValvePosition; }
  196. set { SetProperty(ref m_PendulumValvePosition, value); }
  197. }
  198. public float BiasMatchC1
  199. {
  200. get { return m_BiasMatchC1; }
  201. set
  202. {
  203. SetProperty(ref m_BiasMatchC1, value);
  204. }
  205. }
  206. public float BiasMatchC2
  207. {
  208. get { return m_BiasMatchC2; }
  209. set
  210. {
  211. SetProperty(ref m_BiasMatchC2, value);
  212. }
  213. }
  214. public float MatchC1
  215. {
  216. get { return m_MatchC1; }
  217. set
  218. {
  219. SetProperty(ref m_MatchC1, value);
  220. }
  221. }
  222. public float MatchC2
  223. {
  224. get { return m_MatchC2; }
  225. set
  226. {
  227. SetProperty(ref m_MatchC2, value);
  228. }
  229. }
  230. public AITPendulumValveData PendulumValveData
  231. {
  232. get { return m_PendulumValveData; }
  233. set
  234. {
  235. SetProperty(ref m_PendulumValveData, value);
  236. }
  237. }
  238. public AITHVData ESCHVData
  239. {
  240. get { return m_ESCHVData; }
  241. set
  242. {
  243. SetProperty(ref m_ESCHVData, value);
  244. }
  245. }
  246. public int ESCHVOutputVoltage
  247. {
  248. get { return m_ESCHVOutputVoltage; }
  249. set
  250. {
  251. SetProperty(ref m_ESCHVOutputVoltage, value);
  252. }
  253. }
  254. public float ChillerTemperature
  255. {
  256. get { return m_ChillerTemperature; }
  257. set
  258. {
  259. SetProperty(ref m_ChillerTemperature, value);
  260. }
  261. }
  262. public float HVTemperature
  263. {
  264. get { return m_HVTemperature; }
  265. set
  266. {
  267. SetProperty(ref m_HVTemperature, value);
  268. }
  269. }
  270. public bool IsLidClosed
  271. {
  272. get { return m_IsLidClosed; }
  273. set
  274. {
  275. SetProperty(ref m_IsLidClosed, value);
  276. }
  277. }
  278. public bool IsSlitDoorClosed
  279. {
  280. get { return m_IsSlitDoorClosed; }
  281. set
  282. {
  283. SetProperty(ref m_IsSlitDoorClosed, value);
  284. }
  285. }
  286. public bool LiftPinIsUp
  287. {
  288. get { return m_LiftPinIsUp; }
  289. set
  290. {
  291. SetProperty(ref m_LiftPinIsUp, value);
  292. }
  293. }
  294. public int TurboPumpRotationalSpeed
  295. {
  296. get { return m_TurboPumpRotationalSpeed; }
  297. set
  298. {
  299. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  300. }
  301. }
  302. public float ESCHePressure
  303. {
  304. get { return m_ESCHePressure; }
  305. set
  306. {
  307. SetProperty(ref m_ESCHePressure, value);
  308. }
  309. }
  310. public float ProcessHighPressure
  311. {
  312. get { return m_ProcessHighPressure; }
  313. set
  314. {
  315. SetProperty(ref m_ProcessHighPressure, value);
  316. }
  317. }
  318. public float ProcessLowPressure
  319. {
  320. get { return m_ProcessLowPressure; }
  321. set
  322. {
  323. SetProperty(ref m_ProcessLowPressure, value);
  324. }
  325. }
  326. public float ForelinePressure
  327. {
  328. get { return m_ForelinePressurePressure; }
  329. set
  330. {
  331. SetProperty(ref m_ForelinePressurePressure, value);
  332. }
  333. }
  334. public bool SourceRFFanInterlock
  335. {
  336. get { return m_SourceRFFanInterlock; }
  337. set
  338. {
  339. SetProperty(ref m_SourceRFFanInterlock, value);
  340. }
  341. }
  342. public bool IsWLK
  343. {
  344. get { return m_IsWLK; }
  345. set
  346. {
  347. SetProperty(ref m_IsWLK, value);
  348. }
  349. }
  350. public bool IsWaterFlowOk
  351. {
  352. get { return m_IsWaterFlowOk; }
  353. set
  354. {
  355. SetProperty(ref m_IsWaterFlowOk, value);
  356. }
  357. }
  358. public bool IsCDAOK
  359. {
  360. get { return m_IsCDAOK; }
  361. set
  362. {
  363. SetProperty(ref m_IsCDAOK, value);
  364. }
  365. }
  366. public bool SensorGasBoxDoor
  367. {
  368. get { return m_SensorGasBoxDoor; }
  369. set
  370. {
  371. SetProperty(ref m_SensorGasBoxDoor, value);
  372. }
  373. }
  374. public bool SensorGasBoxPressure
  375. {
  376. get { return m_SensorGasBoxPressure; }
  377. set
  378. {
  379. SetProperty(ref m_SensorGasBoxPressure, value);
  380. }
  381. }
  382. public bool IsTurboPumpInterlock
  383. {
  384. get { return m_IsTurboPumpInterlock; }
  385. set
  386. {
  387. SetProperty(ref m_IsTurboPumpInterlock, value);
  388. }
  389. }
  390. public string ModuleName
  391. {
  392. get { return m_ModuleName; }
  393. set
  394. {
  395. SetProperty(ref m_ModuleName, value);
  396. }
  397. }
  398. public double MFC1SetPoint
  399. {
  400. get { return m_MFC1SetPoint; }
  401. set { SetProperty(ref m_MFC1SetPoint, value); }
  402. }
  403. public double MFC2SetPoint
  404. {
  405. get { return m_MFC2SetPoint; }
  406. set { SetProperty(ref m_MFC2SetPoint, value); }
  407. }
  408. public double MFC3SetPoint
  409. {
  410. get { return m_MFC3SetPoint; }
  411. set { SetProperty(ref m_MFC3SetPoint, value); }
  412. }
  413. public double MFC4SetPoint
  414. {
  415. get { return m_MFC4SetPoint; }
  416. set { SetProperty(ref m_MFC4SetPoint, value); }
  417. }
  418. public double MFC5SetPoint
  419. {
  420. get { return m_MFC5SetPoint; }
  421. set { SetProperty(ref m_MFC5SetPoint, value); }
  422. }
  423. public double MFC6SetPoint
  424. {
  425. get { return m_MFC6SetPoint; }
  426. set { SetProperty(ref m_MFC6SetPoint, value); }
  427. }
  428. public double MFC7SetPoint
  429. {
  430. get { return m_MFC7SetPoint; }
  431. set { SetProperty(ref m_MFC7SetPoint, value); }
  432. }
  433. public double MFC8SetPoint
  434. {
  435. get { return m_MFC8SetPoint; }
  436. set { SetProperty(ref m_MFC8SetPoint, value); }
  437. }
  438. public double N2SetPoint
  439. {
  440. get { return m_N2SetPoint; }
  441. set { SetProperty(ref m_N2SetPoint, value); }
  442. }
  443. public double TurboN2FlowSetPoint
  444. {
  445. get { return m_TurboN2FlowSetPoint; }
  446. set
  447. {
  448. if (value != m_TurboN2FlowSetPoint)
  449. {
  450. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  451. }
  452. SetProperty(ref m_TurboN2FlowSetPoint, value);
  453. }
  454. }
  455. public AITMfcData MFC1Data
  456. {
  457. get { return m_MFC1Data; }
  458. set { SetProperty(ref m_MFC1Data, value); }
  459. }
  460. public AITMfcData MFC2Data
  461. {
  462. get { return m_MFC2Data; }
  463. set { SetProperty(ref m_MFC2Data, value); }
  464. }
  465. public AITMfcData MFC3Data
  466. {
  467. get { return m_MFC3Data; }
  468. set { SetProperty(ref m_MFC3Data, value); }
  469. }
  470. public AITMfcData MFC4Data
  471. {
  472. get { return m_MFC4Data; }
  473. set { SetProperty(ref m_MFC4Data, value); }
  474. }
  475. public AITMfcData MFC5Data
  476. {
  477. get { return m_MFC5Data; }
  478. set { SetProperty(ref m_MFC5Data, value); }
  479. }
  480. public AITMfcData MFC6Data
  481. {
  482. get { return m_MFC6Data; }
  483. set { SetProperty(ref m_MFC6Data, value); }
  484. }
  485. public AITMfcData MFC7Data
  486. {
  487. get { return m_MFC7Data; }
  488. set { SetProperty(ref m_MFC7Data, value); }
  489. }
  490. public AITMfcData MFC8Data
  491. {
  492. get { return m_MFC8Data; }
  493. set { SetProperty(ref m_MFC8Data, value); }
  494. }
  495. public AITMfcData MFCHeData
  496. {
  497. get { return m_MFCHeData; }
  498. set { SetProperty(ref m_MFCHeData, value); }
  499. }
  500. public AITMfcData MFCN2Data
  501. {
  502. get { return m_MFCN2Data; }
  503. set { SetProperty(ref m_MFCN2Data, value); }
  504. }
  505. public AITHeaterData ValveHeaterData
  506. {
  507. get { return m_ValveHeaterData; }
  508. set { SetProperty(ref m_ValveHeaterData, value); }
  509. }
  510. public AITHeaterData ForelineHeaterData
  511. {
  512. get { return m_ForelineHeaterData; }
  513. set { SetProperty(ref m_ForelineHeaterData, value); }
  514. }
  515. public AITHeaterData WallHeaterData
  516. {
  517. get { return m_WallHeaterData; }
  518. set { SetProperty(ref m_WallHeaterData, value); }
  519. }
  520. public AITRfData SRFData
  521. {
  522. get { return m_SRFData; }
  523. set { SetProperty(ref m_SRFData, value); }
  524. }
  525. public AITRfData BRFData
  526. {
  527. get { return m_BRFData; }
  528. set { SetProperty(ref m_BRFData, value); }
  529. }
  530. public PMState PMCurrentState
  531. {
  532. get { return m_PMCurrentState; }
  533. set { SetProperty(ref m_PMCurrentState, value); }
  534. }
  535. #region 阀
  536. public bool GasFinalValveIsOpen
  537. {
  538. get { return m_GasFinalValveIsOpen; }
  539. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  540. }
  541. public bool PVN21ValveIsOpen
  542. {
  543. get { return m_PVN21ValveIsOpen; }
  544. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  545. }
  546. public bool PVN22ValveIsOpen
  547. {
  548. get { return m_PVN22ValveIsOpen; }
  549. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  550. }
  551. public bool N2ValveIsOpen
  552. {
  553. get { return m_N2ValveIsOpen; }
  554. set { SetProperty(ref m_N2ValveIsOpen, value); }
  555. }
  556. public bool PV11ValveIsOpen
  557. {
  558. get { return m_PV11ValveIsOpen; }
  559. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  560. }
  561. public bool PV12ValveIsOpen
  562. {
  563. get { return m_PV12ValveIsOpen; }
  564. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  565. }
  566. public bool MFC1ValveIsOpen
  567. {
  568. get { return m_MFC1ValveIsOpen; }
  569. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  570. }
  571. public bool PV21ValveIsOpen
  572. {
  573. get { return m_PV21ValveIsOpen; }
  574. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  575. }
  576. public bool PV22ValveIsOpen
  577. {
  578. get { return m_PV22ValveIsOpen; }
  579. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  580. }
  581. public bool MFC2ValveIsOpen
  582. {
  583. get { return m_MFC2ValveIsOpen; }
  584. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  585. }
  586. public bool PV31ValveIsOpen
  587. {
  588. get { return m_PV31ValveIsOpen; }
  589. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  590. }
  591. public bool PV32ValveIsOpen
  592. {
  593. get { return m_PV32ValveIsOpen; }
  594. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  595. }
  596. public bool MFC3ValveIsOpen
  597. {
  598. get { return m_MFC3ValveIsOpen; }
  599. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  600. }
  601. public bool PV41ValveIsOpen
  602. {
  603. get { return m_PV41ValveIsOpen; }
  604. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  605. }
  606. public bool PV42ValveIsOpen
  607. {
  608. get { return m_PV42ValveIsOpen; }
  609. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  610. }
  611. public bool MFC4ValveIsOpen
  612. {
  613. get { return m_MFC4ValveIsOpen; }
  614. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  615. }
  616. public bool MFC5ValveIsOpen
  617. {
  618. get { return m_MFC5ValveIsOpen; }
  619. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  620. }
  621. public bool MFC6ValveIsOpen
  622. {
  623. get { return m_MFC6ValveIsOpen; }
  624. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  625. }
  626. public bool MFC7ValveIsOpen
  627. {
  628. get { return m_MFC7ValveIsOpen; }
  629. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  630. }
  631. public bool MFC8ValveIsOpen
  632. {
  633. get { return m_MFC8ValveIsOpen; }
  634. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  635. }
  636. public bool PVHe1ValveIsOpen
  637. {
  638. get { return m_PVHe1ValveIsOpen; }
  639. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  640. }
  641. public bool PVHe2ValveIsOpen
  642. {
  643. get { return m_PVHe2ValveIsOpen; }
  644. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  645. }
  646. public bool PVHe3ValveIsOpen
  647. {
  648. get { return m_PVHe3ValveIsOpen; }
  649. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  650. }
  651. public bool HeISOValveIsOpen
  652. {
  653. get { return m_HeISOValveIsOpen; }
  654. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  655. }
  656. public bool TurboPumpPumpingValveIsOpen
  657. {
  658. get { return m_TurboPumpPumpingValveIsOpen; }
  659. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  660. }
  661. public bool TurboPumpPurgeValveIsOpen
  662. {
  663. get { return m_TurboPumpPurgeValveIsOpen; }
  664. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  665. }
  666. public bool SoftPumpValveIsOpen
  667. {
  668. get { return m_SoftPumpValveIsOpen; }
  669. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  670. }
  671. public bool FastPumpValveIsOpen
  672. {
  673. get { return m_FastPumpValveIsOpen; }
  674. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  675. }
  676. public bool GuageValveIsOpen
  677. {
  678. get { return m_GuageValveIsOpen; }
  679. set { SetProperty(ref m_GuageValveIsOpen, value); }
  680. }
  681. #endregion
  682. public Dictionary<string, object> RtDataValues
  683. {
  684. get { return m_RtDataValues; }
  685. set { SetProperty(ref m_RtDataValues, value); }
  686. }
  687. public bool PumpIsOpen
  688. {
  689. get { return m_PumpIsOpen; }
  690. set { SetProperty(ref m_PumpIsOpen, value); }
  691. }
  692. public bool PendulumValveIsOpen
  693. {
  694. get { return m_PendulumValveIsOpen; }
  695. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  696. }
  697. public bool TurboIsOpen
  698. {
  699. get { return m_TurboIsOpen; }
  700. set { SetProperty(ref m_TurboIsOpen, value); }
  701. }
  702. public bool IsATM
  703. {
  704. get { return m_IsATM; }
  705. set { SetProperty(ref m_IsATM, value); }
  706. }
  707. public bool IsVAC
  708. {
  709. get { return m_IsVAC; }
  710. set { SetProperty(ref m_IsVAC, value); }
  711. }
  712. //public bool BRFIsOn
  713. //{
  714. // get { return m_BRFIsOn; }
  715. // set { SetProperty(ref m_BRFIsOn, value); }
  716. //}
  717. //public bool SRFIsOn
  718. //{
  719. // get { return m_SRFIsOn; }
  720. // set { SetProperty(ref m_SRFIsOn, value); }
  721. //}
  722. public int PositionValue
  723. {
  724. get { return m_PositionValue; }
  725. set { SetProperty(ref m_PositionValue, value); }
  726. }
  727. public bool IsPositionMode
  728. {
  729. get { return m_IsPositionMode; }
  730. set { SetProperty(ref m_IsPositionMode, value); }
  731. }
  732. public double HeGasSetpoint
  733. {
  734. get { return m_HeGasSetpoint; }
  735. set
  736. {
  737. SetProperty(ref m_HeGasSetpoint, value);
  738. }
  739. }
  740. public int HePressureSetpoint
  741. {
  742. get { return m_HePressureSetpoint; }
  743. set
  744. {
  745. SetProperty(ref m_HePressureSetpoint, value);
  746. }
  747. }
  748. public float SRFFwdPowerSetpoint
  749. {
  750. get { return m_SRFFwdPowerSetpoint; }
  751. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  752. }
  753. public float BRFFwdPowerSetpoint
  754. {
  755. get { return m_BRFFwdPowerSetpoint; }
  756. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  757. }
  758. public int ESCVoltage
  759. {
  760. get { return m_ESCVoltage; }
  761. set { SetProperty(ref m_ESCVoltage, value); }
  762. }
  763. public float SRFMatchC1
  764. {
  765. get { return m_SRFMatchC1; }
  766. set { SetProperty(ref m_SRFMatchC1, value); }
  767. }
  768. public float SRFMatchC2
  769. {
  770. get { return m_SRFMatchC2; }
  771. set { SetProperty(ref m_SRFMatchC2, value); }
  772. }
  773. public float BRFMatchC1
  774. {
  775. get { return m_BRFMatchC1; }
  776. set { SetProperty(ref m_BRFMatchC1, value); }
  777. }
  778. public float BRFMatchC2
  779. {
  780. get { return m_BRFMatchC2; }
  781. set { SetProperty(ref m_BRFMatchC2, value); }
  782. }
  783. public bool GasIsFlowing
  784. {
  785. get { return m_GasIsFlowing; }
  786. set { SetProperty(ref m_GasIsFlowing, value); }
  787. }
  788. public bool IsProcessing
  789. {
  790. get { return m_IsProcessing; }
  791. set { SetProperty(ref m_IsProcessing, value); }
  792. }
  793. public bool IsAutoMode
  794. {
  795. get { return m_IsAutoMode; }
  796. set { SetProperty(ref m_IsAutoMode, value); }
  797. }
  798. public string SelectedRecipe
  799. {
  800. get { return m_SelectedRecipe; }
  801. set { SetProperty(ref m_SelectedRecipe, value); }
  802. }
  803. public float ChillerTempSetpoint
  804. {
  805. get { return m_ChillerTempSetpoint; }
  806. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  807. }
  808. public float WallTempSetpoint
  809. {
  810. get { return m_WallTempSetpoint; }
  811. set { SetProperty(ref m_WallTempSetpoint, value); }
  812. }
  813. public bool HeIsPressureMode
  814. {
  815. get { return m_HeIsPressureMode; }
  816. set { SetProperty(ref m_HeIsPressureMode, value); }
  817. }
  818. public bool ChillerIsOn
  819. {
  820. get { return m_ChillerIsOn; }
  821. set { SetProperty(ref m_ChillerIsOn, value); }
  822. }
  823. public double ChamberPressureFeedBack
  824. {
  825. get { return m_ChamberPressureFeedBack; }
  826. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  827. }
  828. public string WaferID
  829. {
  830. get { return m_WaferID; }
  831. set { SetProperty(ref m_WaferID, value); }
  832. }
  833. #endregion
  834. #region 命令
  835. private DelegateCommand _PMInitCommnad;
  836. public DelegateCommand PMInitCommnad =>
  837. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  838. private DelegateCommand _PMAbortCommnad;
  839. public DelegateCommand PMAbortCommnad =>
  840. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  841. private DelegateCommand _GasCommand;
  842. public DelegateCommand GasCommand =>
  843. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  844. private DelegateCommand _HeCommand;
  845. public DelegateCommand HeCommand =>
  846. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  847. private DelegateCommand _RfCommand;
  848. public DelegateCommand RfCommand =>
  849. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  850. private DelegateCommand _PurgeCommand;
  851. public DelegateCommand PurgeCommand =>
  852. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  853. private DelegateCommand _VentCommand;
  854. public DelegateCommand VentCommand =>
  855. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  856. private DelegateCommand _PumpCommand;
  857. public DelegateCommand PumpCommand =>
  858. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  859. private DelegateCommand _OpenPumpCommand;
  860. public DelegateCommand OpenPumpCommand =>
  861. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  862. private DelegateCommand _ClosePumpCommand;
  863. public DelegateCommand ClosePumpCommand =>
  864. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  865. private DelegateCommand _OpenTurboPumpCommand;
  866. public DelegateCommand OpenTurboPumpCommand =>
  867. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  868. private DelegateCommand _CloseTurboPumpCommand;
  869. public DelegateCommand CloseTurboPumpCommand =>
  870. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  871. private DelegateCommand _OpenPendulumValveCommand;
  872. public DelegateCommand OpenPendulumValveCommand =>
  873. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  874. private DelegateCommand _ClosePendulumValveCommand;
  875. public DelegateCommand ClosePendulumValveCommand =>
  876. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  877. private DelegateCommand<object> _PinUpDownCommand;
  878. public DelegateCommand<object> PinUpDownCommand =>
  879. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  880. private DelegateCommand _SetSRfCommand;
  881. public DelegateCommand SetSRfCommand =>
  882. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  883. private DelegateCommand _SetBRfCommand;
  884. public DelegateCommand SetBRfCommand =>
  885. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  886. private DelegateCommand _OpenButterflyValveViewCommand;
  887. public DelegateCommand OpenButterflyValveViewCommand =>
  888. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  889. private DelegateCommand _HVCommand;
  890. public DelegateCommand HVCommand =>
  891. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  892. private DelegateCommand _HVSetCommand;
  893. public DelegateCommand HVSetCommand =>
  894. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  895. private DelegateCommand _LoadRecipeCommand;
  896. public DelegateCommand LoadRecipeCommand =>
  897. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  898. private DelegateCommand<object> _ControlValveCommand;
  899. public DelegateCommand<object> ControlValveCommand =>
  900. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  901. private DelegateCommand<object> _RunRecipeCommand;
  902. public DelegateCommand<object> RunRecipeCommand =>
  903. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  904. private DelegateCommand _SetChillerTempCommand;
  905. public DelegateCommand SetChillerTempCommand =>
  906. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  907. private DelegateCommand _OnOffChillerCommand;
  908. public DelegateCommand OnOffChillerCommand =>
  909. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  910. private DelegateCommand<object> _HeaterCommand;
  911. public DelegateCommand<object> HeaterCommand =>
  912. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  913. private DelegateCommand _EndStepCommand;
  914. public DelegateCommand EndStepCommand =>
  915. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  916. private DelegateCommand _OnlineCommand;
  917. public DelegateCommand OnlineCommand =>
  918. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  919. private DelegateCommand _OfflineCommand;
  920. public DelegateCommand OfflineCommand =>
  921. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  922. private DelegateCommand<object> _AbortRecipeCommnad;
  923. public DelegateCommand<object> AbortRecipeCommnad =>
  924. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  925. #endregion
  926. #region 构造函数
  927. public OverVenusViewModel()
  928. {
  929. m_RtDataKeys = new List<string>();
  930. m_IsATM = true;
  931. ModuleName = "PMA";
  932. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  933. DispatcherTimer timer = new DispatcherTimer();
  934. timer.Interval = TimeSpan.FromSeconds(0.5);
  935. timer.Tick += timer_Tick;
  936. timer.Start();
  937. }
  938. #endregion
  939. #region 命令方法
  940. private void OnControlValve(object obj)
  941. {
  942. CommonValveControl commonValveControl = (CommonValveControl)obj;
  943. if (commonValveControl.IsCanEdit == true)
  944. {
  945. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  946. }
  947. }
  948. private void OnPMInit()
  949. {
  950. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  951. }
  952. private async void OnGas()
  953. {
  954. await Task.Run(async () =>
  955. {
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  958. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  959. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  960. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  961. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  962. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  963. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  964. await Task.Delay(1000);
  965. object[] mfc = new object[8];
  966. string[] mfcSetPoint = new string[8];
  967. mfc[0] = MFC1Data.SetPoint;
  968. mfc[1] = MFC2Data.SetPoint;
  969. mfc[2] = MFC3Data.SetPoint;
  970. mfc[3] = MFC4Data.SetPoint;
  971. mfc[4] = MFC5Data.SetPoint;
  972. mfc[5] = MFC6Data.SetPoint;
  973. mfc[6] = MFC7Data.SetPoint;
  974. mfc[7] = MFC8Data.SetPoint;
  975. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  976. });
  977. }
  978. private void OnHe()
  979. {
  980. if (PVHe1ValveIsOpen == true)
  981. {
  982. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  983. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  984. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  986. }
  987. else
  988. {
  989. if (HeIsPressureMode)
  990. {
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  992. }
  993. else
  994. {
  995. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  996. }
  997. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  998. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  999. }
  1000. }
  1001. private void OnRf()
  1002. {
  1003. if (PMCurrentState == PMState.RfPowering)
  1004. {
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1006. }
  1007. else
  1008. {
  1009. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1010. }
  1011. }
  1012. private void OnPurge()
  1013. {
  1014. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1015. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1016. //{
  1017. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1018. // await Task.Delay(1000);
  1019. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1020. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1021. //}
  1022. //else
  1023. //{
  1024. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1025. // await Task.Delay(1000);
  1026. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1027. //}
  1028. if (PMCurrentState == PMState.Purging)
  1029. {
  1030. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1031. //await Task.Delay(1000);
  1032. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1033. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1034. }
  1035. else
  1036. {
  1037. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1038. //await Task.Delay(1000);
  1039. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1040. }
  1041. }
  1042. private void OnVent()
  1043. {
  1044. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1045. if (PMCurrentState == PMState.Venting)
  1046. {
  1047. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1048. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1049. }
  1050. else
  1051. {
  1052. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1053. }
  1054. }
  1055. private void OnPump()
  1056. {
  1057. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1058. if (PMCurrentState == PMState.Pumping)
  1059. {
  1060. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1061. return;
  1062. }
  1063. //if (PMCurrentState == PMState.pum)
  1064. //{
  1065. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1066. // return;
  1067. //}
  1068. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1069. //{
  1070. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1071. //}
  1072. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1073. //{
  1074. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1075. //}
  1076. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1077. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1078. // 设置底压
  1079. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1080. if (basePressure <= 0.01 || basePressure >= 1000)
  1081. {
  1082. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1083. return;
  1084. }
  1085. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1086. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1087. {
  1088. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1089. return;
  1090. }
  1091. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1092. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1093. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1094. }
  1095. private void OnOpenPump()
  1096. {
  1097. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1098. if (PMCurrentState == PMState.LaunchingPump)
  1099. {
  1100. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1101. return;
  1102. }
  1103. //if (PumpIsOpen == true)
  1104. //{
  1105. // return;
  1106. //}
  1107. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1108. }
  1109. private void OnClosePump()
  1110. {
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1112. }
  1113. private void OnOpenTurboPump()
  1114. {
  1115. //TurboIsOpen = true;
  1116. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1117. if (PMCurrentState == PMState.LaunchingTurboPump)
  1118. {
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1120. return;
  1121. }
  1122. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1123. }
  1124. private void OnCloseTurboPump()
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1127. }
  1128. private void OnOpenPendulumValve()
  1129. {
  1130. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1131. }
  1132. private void OnClosePendulumValve()
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1135. }
  1136. private void OnPinUpDown(object upDown)
  1137. {
  1138. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1139. }
  1140. private async void OnSetSRf()
  1141. {
  1142. if (SRFData.IsRfOn == true)
  1143. {
  1144. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1145. }
  1146. else
  1147. {
  1148. if (GasIsFlowing == true)
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1151. await Task.Delay(100);
  1152. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1153. }
  1154. }
  1155. }
  1156. private async void OnSetBRf()
  1157. {
  1158. if (BRFData.IsRfOn == true)
  1159. {
  1160. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1161. }
  1162. else
  1163. {
  1164. if (GasIsFlowing == true)
  1165. {
  1166. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1167. await Task.Delay(100);
  1168. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1169. }
  1170. }
  1171. }
  1172. private void OnPMAbort()
  1173. {
  1174. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1175. }
  1176. private void OnOpenButterflyValveView()
  1177. {
  1178. //if (butterflyValveMessageBox == null)
  1179. //{
  1180. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1181. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1182. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1183. butterflyValveMessageBox.Left = 700;
  1184. butterflyValveMessageBox.Top = 600;
  1185. butterflyValveMessageBox.Show();
  1186. butterflyValveMessageBox.Owner = _mainWindow;
  1187. //}
  1188. }
  1189. private void OnLoadRecipe()
  1190. {
  1191. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1192. }
  1193. private void OnHV()
  1194. {
  1195. if (ESCHVData.IsOn == true)
  1196. {
  1197. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1198. }
  1199. else
  1200. {
  1201. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1202. //await Task.Run(async () =>
  1203. //{
  1204. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1205. // //await Task.Delay(1000);
  1206. //});
  1207. }
  1208. }
  1209. private void OnHVSet()
  1210. {
  1211. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1212. }
  1213. private void OnRunRecipe(object obj)
  1214. {
  1215. string recipeName = SelectedRecipe;
  1216. if (recipeName == null)
  1217. {
  1218. return;
  1219. }
  1220. ClearData();
  1221. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1222. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1223. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName);
  1224. }
  1225. private void OnSetChillerTemp()
  1226. {
  1227. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1228. float x;
  1229. float.TryParse(value, out x);
  1230. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerType.Chiller.ToString(), ChillerTempSetpoint, x);
  1231. }
  1232. private void OnOffChiller()
  1233. {
  1234. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(), !ChillerIsOn);
  1235. }
  1236. private void OnHeater(object obj)
  1237. {
  1238. if (IsAutoMode == true)
  1239. {
  1240. return;
  1241. }
  1242. AITHeaterData heaterData = obj as AITHeaterData;
  1243. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1244. heaterView = new HeaterView(heaterData);
  1245. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1246. heaterView.Owner = _mainWindow;
  1247. heaterView.Show();
  1248. }
  1249. private void OnEndStep()
  1250. {
  1251. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1252. {
  1253. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1254. }
  1255. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1256. {
  1257. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1258. }
  1259. }
  1260. private void OnOnline()
  1261. {
  1262. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1263. }
  1264. private void OnOffline()
  1265. {
  1266. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1267. }
  1268. private async void OnAbortRecipe(object obj)
  1269. {
  1270. if (PMCurrentState != PMState.Processing)
  1271. {
  1272. return;
  1273. }
  1274. switch (obj.ToString())
  1275. {
  1276. case "0":
  1277. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1278. break;
  1279. case "1":
  1280. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1281. if (ESCHVData.IsOn == true)
  1282. {
  1283. await Task.Delay(3000);
  1284. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1285. }
  1286. break;
  1287. case "2":
  1288. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1289. break;
  1290. }
  1291. }
  1292. #endregion
  1293. #region 私有方法
  1294. private void ClearData()
  1295. {
  1296. ESCVoltage = 0;
  1297. SRFFwdPowerSetpoint = 0;
  1298. SRFMatchC1 = 0;
  1299. SRFMatchC2 = 0;
  1300. BRFFwdPowerSetpoint = 0;
  1301. BRFMatchC1 = 0;
  1302. BRFMatchC2 = 0;
  1303. HeGasSetpoint = 0;
  1304. MFC1SetPoint = 0;
  1305. MFC2SetPoint = 0;
  1306. MFC3SetPoint = 0;
  1307. MFC4SetPoint = 0;
  1308. MFC5SetPoint = 0;
  1309. MFC6SetPoint = 0;
  1310. MFC7SetPoint = 0;
  1311. MFC8SetPoint = 0;
  1312. }
  1313. private IEnumerable<string> GetFilesNames(string path)
  1314. {
  1315. return Directory.GetFiles(path, "*.rcp")?
  1316. .Select(Path.GetFileNameWithoutExtension);
  1317. }
  1318. void timer_Tick(object sender, EventArgs e)
  1319. {
  1320. try
  1321. {
  1322. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1323. if (RtDataValues == null)
  1324. {
  1325. return;
  1326. }
  1327. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1328. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1329. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1330. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1331. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1332. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1333. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1334. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1335. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1336. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1337. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1338. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1339. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1340. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1341. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1342. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1343. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1344. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1345. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1346. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1347. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1348. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1349. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1350. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1351. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1352. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1353. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1354. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1355. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1356. PVHe3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1357. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1358. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1359. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1360. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1361. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1362. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1363. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1364. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1365. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1366. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1367. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1368. IsProcessing = PMCurrentState == PMState.Processing;
  1369. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1370. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1371. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1372. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1373. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1374. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1375. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1376. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1377. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1378. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1379. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1380. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1381. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1382. ESCHVData = CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1383. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1384. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1385. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1386. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1387. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1388. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1389. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1390. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1391. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1392. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1393. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1394. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1395. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1396. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1397. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1398. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1399. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1400. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1401. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1402. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1403. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1404. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1405. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1406. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1407. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1408. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1409. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1410. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1411. if (PMCurrentState == PMState.Processing)
  1412. {
  1413. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1414. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1415. {
  1416. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1417. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1418. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1419. }
  1420. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1421. }
  1422. else
  1423. {
  1424. CurrentRecipeResult = null;
  1425. CurrentRecipeStep = null;
  1426. }
  1427. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1428. {
  1429. ChamberPressureFeedBack = ProcessLowPressure;
  1430. }
  1431. else
  1432. {
  1433. ChamberPressureFeedBack = ProcessHighPressure;
  1434. }
  1435. }
  1436. catch (Exception ex)
  1437. {
  1438. LOG.WriteExeption(ex.Message, ex);
  1439. }
  1440. }
  1441. public void addDataKeys()
  1442. {
  1443. m_RtDataKeys.Clear();
  1444. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1445. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1446. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1447. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1448. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1449. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1450. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1451. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1452. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1453. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1454. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1455. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1456. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1457. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1458. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1459. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1460. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1461. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1462. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1463. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1464. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1465. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1466. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1467. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1468. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1469. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1470. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1471. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1472. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1473. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1474. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1475. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1476. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1477. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1478. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1479. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1480. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1481. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1482. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1483. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1484. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1485. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1486. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1487. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1488. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1489. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1490. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1491. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1492. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1493. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1494. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1495. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1496. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1497. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1498. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1499. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1500. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1501. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1502. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1503. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1504. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1505. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1506. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1507. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1508. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1509. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1510. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1511. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1512. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1513. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1514. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1515. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1516. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1517. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1518. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1519. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1520. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1521. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1523. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1524. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1525. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1526. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1527. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1528. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1529. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1530. }
  1531. #endregion
  1532. }
  1533. }