OverKepler2200AViewModel.cs 66 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. using System.Windows.Controls;
  24. namespace Venus_MainPages.ViewModels
  25. {
  26. internal class OverKepler2200AViewModel : BindableBase
  27. {
  28. #region 私有字段
  29. private List<string> m_CurrentModuleRecipes=new List<string>();
  30. private bool m_PVN21ValveIsOpen;
  31. private bool m_PVN22ValveIsOpen;
  32. private bool m_N2ValveIsOpen;
  33. private bool m_PV11ValveIsOpen;
  34. private bool m_PV12ValveIsOpen;
  35. private bool m_PV21ValveIsOpen;
  36. private bool m_PV22ValveIsOpen;
  37. private bool m_PV31ValveIsOpen;
  38. private bool m_PV32ValveIsOpen;
  39. private bool m_PV41ValveIsOpen;
  40. private bool m_PV42ValveIsOpen;
  41. private bool m_MFC1ValveIsOpen;
  42. private bool m_MFC2ValveIsOpen;
  43. private bool m_MFC3ValveIsOpen;
  44. private bool m_MFC4ValveIsOpen;
  45. private bool m_MFC5ValveIsOpen;
  46. private bool m_MFC6ValveIsOpen;
  47. private bool m_MFC7ValveIsOpen;
  48. private bool m_MFC8ValveIsOpen;
  49. private bool m_GasFinalValveIsOpen;
  50. private bool m_SoftPumpValveIsOpen;
  51. private bool m_FastPumpValveIsOpen;
  52. private bool m_PVHe1ValveIsOpen;
  53. private bool m_PVHe2ValveIsOpen;
  54. private bool m_TurboPumpPumpingValveIsOpen;
  55. private bool m_TurboPumpPurgeValveIsOpen;
  56. private bool m_GuageValveIsOpen;
  57. private bool m_PendulumValveIsOpen;
  58. //private bool m_BRFIsOn;
  59. //private bool m_SRFIsOn;
  60. private double m_HeGasSetpoint;
  61. private int m_HePressureSetpoint;
  62. private float m_SRFFwdPowerSetpoint;
  63. private float m_BRFFwdPowerSetpoint;
  64. private float m_SRFMatchC1;
  65. private float m_SRFMatchC2;
  66. private float m_BRFMatchC1;
  67. private float m_BRFMatchC2;
  68. private double m_MFC1SetPoint;
  69. private double m_MFC2SetPoint;
  70. private double m_MFC3SetPoint;
  71. private double m_MFC4SetPoint;
  72. private double m_MFC5SetPoint;
  73. private double m_MFC6SetPoint;
  74. private double m_MFC7SetPoint;
  75. private double m_MFC8SetPoint;
  76. private double m_N2SetPoint;
  77. private AITMfcData m_MFC1Data;
  78. private AITMfcData m_MFC2Data;
  79. private AITMfcData m_MFC3Data;
  80. private AITMfcData m_MFC4Data;
  81. private AITMfcData m_MFC5Data;
  82. private AITMfcData m_MFC6Data;
  83. private AITMfcData m_MFC7Data;
  84. private AITMfcData m_MFC8Data;
  85. private AITMfcData m_MFCHeData;
  86. private AITMfcData m_MFCN2Data;
  87. private AITHeaterData m_ValveHeaterData;
  88. private AITHeaterData m_ForelineHeaterData;
  89. private AITHeaterData m_WallHeaterData;
  90. private AITRfData m_SRFData;
  91. private AITRfData m_BRFData;
  92. private AITPendulumValveData m_PendulumValveData;
  93. //private AITHVData m_ESCHVData;
  94. private PMState m_PMCurrentState;
  95. private bool m_SourceRFFanInterlock;
  96. private bool m_IsWLK;
  97. private bool m_IsWaterFlowOk;
  98. private bool m_IsTurboPumpInterlock;
  99. private bool m_IsCDAOK;
  100. private bool m_SensorGasBoxDoor;
  101. private bool m_SensorGasBoxPressure;
  102. private bool m_PumpIsOpen;
  103. private bool m_TurboIsOpen;
  104. private bool m_IsATM;
  105. private bool m_IsVAC;
  106. private List<string> m_RtDataKeys;
  107. private Dictionary<string, object> m_RtDataValues;
  108. private int m_PositionValue;
  109. private bool m_IsPositionMode;
  110. private int m_ESCVoltage;
  111. private bool m_GasIsFlowing;
  112. private bool m_IsProcessing;
  113. private bool m_IsAutoMode;
  114. private string m_SelectedRecipe;
  115. private float m_ChillerTempSetpoint;
  116. private float m_WallTempSetpoint;
  117. private bool m_HeIsPressureMode=true;
  118. private bool m_ChillerIsOn;
  119. private float m_ProcessHighPressure;
  120. private float m_ProcessLowPressure;
  121. private float m_ForelinePressurePressure;
  122. private float m_ESCHePressure;
  123. ButterflyValveView butterflyValveMessageBox;
  124. HeaterView heaterView;
  125. private int m_TurboPumpRotationalSpeed;
  126. private bool m_LiftPinIsUp;
  127. private bool m_IsSlitDoorClosed;
  128. private bool m_IsLidClosed;
  129. private float m_ChillerTemperature;
  130. //private float m_HVTemperature;
  131. private int m_ESCHVOutputVoltage;
  132. //private float m_SRfReflectPower;
  133. //private float m_SRfForwardPowerFeedBack;
  134. //private float m_BRfReflectPower;
  135. //private float m_BRfForwardPowerFeedBack;
  136. //private int m_MatchWorkMode;
  137. //private int m_BiasMatchWorkMode;
  138. private float m_MatchC1;
  139. private float m_MatchC2;
  140. private float m_BiasMatchC1;
  141. private float m_BiasMatchC2;
  142. private float m_PendulumValvePosition;
  143. private bool m_IsTurboPumpAtSpeed;
  144. private bool m_TurboPumpWaterFlowSwitch;
  145. private bool m_IsHasWafer;
  146. private Recipe m_CurrentRecipe=new Recipe ();
  147. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  148. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  149. private double m_ChamberPressureFeedBack;
  150. private string m_WaferID;
  151. private string m_ModuleName;
  152. private int? currentRecipeNumber;
  153. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  154. private ComboBoxItem m_SelectedPosition;
  155. private int m_HighTemperatureHeaterTemperatureSetpoint;
  156. #endregion
  157. #region 属性
  158. public List<string> CurrentModuleRecipes
  159. {
  160. get { return m_CurrentModuleRecipes; }
  161. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  162. }
  163. public Recipe CurrentRecipe
  164. {
  165. get { return m_CurrentRecipe; }
  166. set { SetProperty(ref m_CurrentRecipe, value); }
  167. }
  168. public RecipeResult CurrentRecipeResult
  169. {
  170. get { return m_CurrentRecipeResult; }
  171. set { SetProperty(ref m_CurrentRecipeResult, value); }
  172. }
  173. public RecipeStep CurrentRecipeStep
  174. {
  175. get { return m_CurrentRecipeStep; }
  176. set { SetProperty(ref m_CurrentRecipeStep, value); }
  177. }
  178. public bool IsHasWafer
  179. {
  180. get { return m_IsHasWafer; }
  181. set { SetProperty(ref m_IsHasWafer, value); }
  182. }
  183. public bool IsTurboPumpAtSpeed
  184. {
  185. get { return m_IsTurboPumpAtSpeed; }
  186. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  187. }
  188. public bool TurboPumpWaterFlowSwitch
  189. {
  190. get { return m_TurboPumpWaterFlowSwitch; }
  191. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  192. }
  193. public float PendulumValvePosition
  194. {
  195. get { return m_PendulumValvePosition; }
  196. set{SetProperty(ref m_PendulumValvePosition, value);}
  197. }
  198. public float BiasMatchC1
  199. {
  200. get { return m_BiasMatchC1; }
  201. set
  202. {
  203. SetProperty(ref m_BiasMatchC1, value);
  204. }
  205. }
  206. public float BiasMatchC2
  207. {
  208. get { return m_BiasMatchC2; }
  209. set
  210. {
  211. SetProperty(ref m_BiasMatchC2, value);
  212. }
  213. }
  214. public float MatchC1
  215. {
  216. get { return m_MatchC1; }
  217. set
  218. {
  219. SetProperty(ref m_MatchC1, value);
  220. }
  221. }
  222. public float MatchC2
  223. {
  224. get { return m_MatchC2; }
  225. set
  226. {
  227. SetProperty(ref m_MatchC2, value);
  228. }
  229. }
  230. public AITPendulumValveData PendulumValveData
  231. {
  232. get { return m_PendulumValveData; }
  233. set
  234. {
  235. SetProperty(ref m_PendulumValveData, value);
  236. }
  237. }
  238. //public AITHVData ESCHVData
  239. //{
  240. // get { return m_ESCHVData; }
  241. // set
  242. // {
  243. // SetProperty(ref m_ESCHVData, value);
  244. // }
  245. //}
  246. public int ESCHVOutputVoltage
  247. {
  248. get { return m_ESCHVOutputVoltage; }
  249. set
  250. {
  251. SetProperty(ref m_ESCHVOutputVoltage, value);
  252. }
  253. }
  254. public float ChillerTemperature
  255. {
  256. get { return m_ChillerTemperature; }
  257. set
  258. {
  259. SetProperty(ref m_ChillerTemperature, value);
  260. }
  261. }
  262. //public float HVTemperature
  263. //{
  264. // get { return m_HVTemperature; }
  265. // set
  266. // {
  267. // SetProperty(ref m_HVTemperature, value);
  268. // }
  269. //}
  270. public bool IsLidClosed
  271. {
  272. get { return m_IsLidClosed; }
  273. set
  274. {
  275. SetProperty(ref m_IsLidClosed, value);
  276. }
  277. }
  278. public bool IsSlitDoorClosed
  279. {
  280. get { return m_IsSlitDoorClosed; }
  281. set
  282. {
  283. SetProperty(ref m_IsSlitDoorClosed, value);
  284. }
  285. }
  286. public bool LiftPinIsUp
  287. {
  288. get { return m_LiftPinIsUp; }
  289. set
  290. {
  291. SetProperty(ref m_LiftPinIsUp, value);
  292. }
  293. }
  294. public int TurboPumpRotationalSpeed
  295. {
  296. get { return m_TurboPumpRotationalSpeed; }
  297. set
  298. {
  299. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  300. }
  301. }
  302. public float ESCHePressure
  303. {
  304. get { return m_ESCHePressure; }
  305. set
  306. {
  307. SetProperty(ref m_ESCHePressure, value);
  308. }
  309. }
  310. public float ProcessHighPressure
  311. {
  312. get { return m_ProcessHighPressure; }
  313. set
  314. {
  315. SetProperty(ref m_ProcessHighPressure, value);
  316. }
  317. }
  318. public float ProcessLowPressure
  319. {
  320. get { return m_ProcessLowPressure; }
  321. set
  322. {
  323. SetProperty(ref m_ProcessLowPressure, value);
  324. }
  325. }
  326. public float ForelinePressure
  327. {
  328. get { return m_ForelinePressurePressure; }
  329. set
  330. {
  331. SetProperty(ref m_ForelinePressurePressure, value);
  332. }
  333. }
  334. public bool SourceRFFanInterlock
  335. {
  336. get { return m_SourceRFFanInterlock; }
  337. set
  338. {
  339. SetProperty(ref m_SourceRFFanInterlock, value);
  340. }
  341. }
  342. public bool IsWLK
  343. {
  344. get { return m_IsWLK; }
  345. set
  346. {
  347. SetProperty(ref m_IsWLK, value);
  348. }
  349. }
  350. public bool IsWaterFlowOk
  351. {
  352. get { return m_IsWaterFlowOk; }
  353. set
  354. {
  355. SetProperty(ref m_IsWaterFlowOk, value);
  356. }
  357. }
  358. public bool IsCDAOK
  359. {
  360. get { return m_IsCDAOK; }
  361. set
  362. {
  363. SetProperty(ref m_IsCDAOK, value);
  364. }
  365. }
  366. public bool SensorGasBoxDoor
  367. {
  368. get { return m_SensorGasBoxDoor; }
  369. set
  370. {
  371. SetProperty(ref m_SensorGasBoxDoor, value);
  372. }
  373. }
  374. public bool SensorGasBoxPressure
  375. {
  376. get { return m_SensorGasBoxPressure; }
  377. set
  378. {
  379. SetProperty(ref m_SensorGasBoxPressure, value);
  380. }
  381. }
  382. public bool IsTurboPumpInterlock
  383. {
  384. get { return m_IsTurboPumpInterlock; }
  385. set
  386. {
  387. SetProperty(ref m_IsTurboPumpInterlock, value);
  388. }
  389. }
  390. public string ModuleName
  391. {
  392. get { return m_ModuleName; }
  393. set
  394. {
  395. SetProperty(ref m_ModuleName, value);
  396. }
  397. }
  398. public double MFC1SetPoint
  399. {
  400. get { return m_MFC1SetPoint; }
  401. set { SetProperty(ref m_MFC1SetPoint, value); }
  402. }
  403. public double MFC2SetPoint
  404. {
  405. get { return m_MFC2SetPoint; }
  406. set { SetProperty(ref m_MFC2SetPoint, value); }
  407. }
  408. public double MFC3SetPoint
  409. {
  410. get { return m_MFC3SetPoint; }
  411. set { SetProperty(ref m_MFC3SetPoint, value); }
  412. }
  413. public double MFC4SetPoint
  414. {
  415. get { return m_MFC4SetPoint; }
  416. set { SetProperty(ref m_MFC4SetPoint, value); }
  417. }
  418. public double MFC5SetPoint
  419. {
  420. get { return m_MFC5SetPoint; }
  421. set { SetProperty(ref m_MFC5SetPoint, value); }
  422. }
  423. public double MFC6SetPoint
  424. {
  425. get { return m_MFC6SetPoint; }
  426. set { SetProperty(ref m_MFC6SetPoint, value); }
  427. }
  428. public double MFC7SetPoint
  429. {
  430. get { return m_MFC7SetPoint; }
  431. set { SetProperty(ref m_MFC7SetPoint, value); }
  432. }
  433. public double MFC8SetPoint
  434. {
  435. get { return m_MFC8SetPoint; }
  436. set { SetProperty(ref m_MFC8SetPoint, value); }
  437. }
  438. public double N2SetPoint
  439. {
  440. get { return m_N2SetPoint; }
  441. set { SetProperty(ref m_N2SetPoint, value); }
  442. }
  443. public AITMfcData MFC1Data
  444. {
  445. get { return m_MFC1Data; }
  446. set { SetProperty(ref m_MFC1Data, value); }
  447. }
  448. public AITMfcData MFC2Data
  449. {
  450. get { return m_MFC2Data; }
  451. set { SetProperty(ref m_MFC2Data, value); }
  452. }
  453. public AITMfcData MFC3Data
  454. {
  455. get { return m_MFC3Data; }
  456. set { SetProperty(ref m_MFC3Data, value); }
  457. }
  458. public AITMfcData MFC4Data
  459. {
  460. get { return m_MFC4Data; }
  461. set { SetProperty(ref m_MFC4Data, value); }
  462. }
  463. public AITMfcData MFC5Data
  464. {
  465. get { return m_MFC5Data; }
  466. set { SetProperty(ref m_MFC5Data, value); }
  467. }
  468. public AITMfcData MFC6Data
  469. {
  470. get { return m_MFC6Data; }
  471. set { SetProperty(ref m_MFC6Data, value); }
  472. }
  473. public AITMfcData MFC7Data
  474. {
  475. get { return m_MFC7Data; }
  476. set { SetProperty(ref m_MFC7Data, value); }
  477. }
  478. public AITMfcData MFC8Data
  479. {
  480. get { return m_MFC8Data; }
  481. set { SetProperty(ref m_MFC8Data, value); }
  482. }
  483. public AITMfcData MFCHeData
  484. {
  485. get { return m_MFCHeData; }
  486. set { SetProperty(ref m_MFCHeData, value); }
  487. }
  488. public AITMfcData MFCN2Data
  489. {
  490. get { return m_MFCN2Data; }
  491. set { SetProperty(ref m_MFCN2Data, value); }
  492. }
  493. public AITHeaterData ValveHeaterData
  494. {
  495. get { return m_ValveHeaterData; }
  496. set { SetProperty(ref m_ValveHeaterData, value); }
  497. }
  498. public AITHeaterData ForelineHeaterData
  499. {
  500. get { return m_ForelineHeaterData; }
  501. set { SetProperty(ref m_ForelineHeaterData, value); }
  502. }
  503. public AITHeaterData WallHeaterData
  504. {
  505. get { return m_WallHeaterData; }
  506. set { SetProperty(ref m_WallHeaterData, value); }
  507. }
  508. public AITRfData SRFData
  509. {
  510. get { return m_SRFData; }
  511. set { SetProperty(ref m_SRFData, value); }
  512. }
  513. public AITRfData BRFData
  514. {
  515. get { return m_BRFData; }
  516. set { SetProperty(ref m_BRFData, value); }
  517. }
  518. public PMState PMCurrentState
  519. {
  520. get { return m_PMCurrentState; }
  521. set { SetProperty(ref m_PMCurrentState, value); }
  522. }
  523. #region 阀
  524. public bool GasFinalValveIsOpen
  525. {
  526. get { return m_GasFinalValveIsOpen; }
  527. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  528. }
  529. public bool PVN21ValveIsOpen
  530. {
  531. get { return m_PVN21ValveIsOpen; }
  532. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  533. }
  534. public bool PVN22ValveIsOpen
  535. {
  536. get { return m_PVN22ValveIsOpen; }
  537. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  538. }
  539. public bool N2ValveIsOpen
  540. {
  541. get { return m_N2ValveIsOpen; }
  542. set { SetProperty(ref m_N2ValveIsOpen, value); }
  543. }
  544. public bool PV11ValveIsOpen
  545. {
  546. get { return m_PV11ValveIsOpen; }
  547. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  548. }
  549. public bool PV12ValveIsOpen
  550. {
  551. get { return m_PV12ValveIsOpen; }
  552. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  553. }
  554. public bool MFC1ValveIsOpen
  555. {
  556. get { return m_MFC1ValveIsOpen; }
  557. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  558. }
  559. public bool PV21ValveIsOpen
  560. {
  561. get { return m_PV21ValveIsOpen; }
  562. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  563. }
  564. public bool PV22ValveIsOpen
  565. {
  566. get { return m_PV22ValveIsOpen; }
  567. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  568. }
  569. public bool MFC2ValveIsOpen
  570. {
  571. get { return m_MFC2ValveIsOpen; }
  572. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  573. }
  574. public bool PV31ValveIsOpen
  575. {
  576. get { return m_PV31ValveIsOpen; }
  577. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  578. }
  579. public bool PV32ValveIsOpen
  580. {
  581. get { return m_PV32ValveIsOpen; }
  582. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  583. }
  584. public bool MFC3ValveIsOpen
  585. {
  586. get { return m_MFC3ValveIsOpen; }
  587. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  588. }
  589. public bool PV41ValveIsOpen
  590. {
  591. get { return m_PV41ValveIsOpen; }
  592. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  593. }
  594. public bool PV42ValveIsOpen
  595. {
  596. get { return m_PV42ValveIsOpen; }
  597. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  598. }
  599. public bool MFC4ValveIsOpen
  600. {
  601. get { return m_MFC4ValveIsOpen; }
  602. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  603. }
  604. public bool MFC5ValveIsOpen
  605. {
  606. get { return m_MFC5ValveIsOpen; }
  607. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  608. }
  609. public bool MFC6ValveIsOpen
  610. {
  611. get { return m_MFC6ValveIsOpen; }
  612. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  613. }
  614. public bool MFC7ValveIsOpen
  615. {
  616. get { return m_MFC7ValveIsOpen; }
  617. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  618. }
  619. public bool MFC8ValveIsOpen
  620. {
  621. get { return m_MFC8ValveIsOpen; }
  622. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  623. }
  624. public bool PVHe1ValveIsOpen
  625. {
  626. get { return m_PVHe1ValveIsOpen; }
  627. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  628. }
  629. public bool PVHe2ValveIsOpen
  630. {
  631. get { return m_PVHe2ValveIsOpen; }
  632. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  633. }
  634. public bool TurboPumpPumpingValveIsOpen
  635. {
  636. get { return m_TurboPumpPumpingValveIsOpen; }
  637. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  638. }
  639. public bool TurboPumpPurgeValveIsOpen
  640. {
  641. get { return m_TurboPumpPurgeValveIsOpen; }
  642. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  643. }
  644. public bool SoftPumpValveIsOpen
  645. {
  646. get { return m_SoftPumpValveIsOpen; }
  647. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  648. }
  649. public bool FastPumpValveIsOpen
  650. {
  651. get { return m_FastPumpValveIsOpen; }
  652. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  653. }
  654. public bool GuageValveIsOpen
  655. {
  656. get { return m_GuageValveIsOpen; }
  657. set { SetProperty(ref m_GuageValveIsOpen, value); }
  658. }
  659. #endregion
  660. public Dictionary<string, object> RtDataValues
  661. {
  662. get { return m_RtDataValues; }
  663. set { SetProperty(ref m_RtDataValues, value); }
  664. }
  665. public bool PumpIsOpen
  666. {
  667. get { return m_PumpIsOpen; }
  668. set { SetProperty(ref m_PumpIsOpen, value); }
  669. }
  670. public bool PendulumValveIsOpen
  671. {
  672. get { return m_PendulumValveIsOpen; }
  673. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  674. }
  675. public bool TurboIsOpen
  676. {
  677. get { return m_TurboIsOpen; }
  678. set { SetProperty(ref m_TurboIsOpen, value); }
  679. }
  680. public bool IsATM
  681. {
  682. get { return m_IsATM; }
  683. set { SetProperty(ref m_IsATM, value); }
  684. }
  685. public bool IsVAC
  686. {
  687. get { return m_IsVAC; }
  688. set { SetProperty(ref m_IsVAC, value); }
  689. }
  690. //public bool BRFIsOn
  691. //{
  692. // get { return m_BRFIsOn; }
  693. // set { SetProperty(ref m_BRFIsOn, value); }
  694. //}
  695. //public bool SRFIsOn
  696. //{
  697. // get { return m_SRFIsOn; }
  698. // set { SetProperty(ref m_SRFIsOn, value); }
  699. //}
  700. public int PositionValue
  701. {
  702. get { return m_PositionValue; }
  703. set { SetProperty(ref m_PositionValue, value); }
  704. }
  705. public bool IsPositionMode
  706. {
  707. get { return m_IsPositionMode; }
  708. set { SetProperty(ref m_IsPositionMode, value); }
  709. }
  710. public double HeGasSetpoint
  711. {
  712. get { return m_HeGasSetpoint; }
  713. set
  714. {
  715. SetProperty(ref m_HeGasSetpoint, value);
  716. }
  717. }
  718. public int HePressureSetpoint
  719. {
  720. get { return m_HePressureSetpoint; }
  721. set
  722. {
  723. SetProperty(ref m_HePressureSetpoint, value);
  724. }
  725. }
  726. public float SRFFwdPowerSetpoint
  727. {
  728. get { return m_SRFFwdPowerSetpoint; }
  729. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  730. }
  731. public float BRFFwdPowerSetpoint
  732. {
  733. get { return m_BRFFwdPowerSetpoint; }
  734. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  735. }
  736. public int ESCVoltage
  737. {
  738. get { return m_ESCVoltage; }
  739. set { SetProperty(ref m_ESCVoltage, value); }
  740. }
  741. public float SRFMatchC1
  742. {
  743. get { return m_SRFMatchC1; }
  744. set { SetProperty(ref m_SRFMatchC1, value); }
  745. }
  746. public float SRFMatchC2
  747. {
  748. get { return m_SRFMatchC2; }
  749. set { SetProperty(ref m_SRFMatchC2, value); }
  750. }
  751. public float BRFMatchC1
  752. {
  753. get { return m_BRFMatchC1; }
  754. set { SetProperty(ref m_BRFMatchC1, value); }
  755. }
  756. public float BRFMatchC2
  757. {
  758. get { return m_BRFMatchC2; }
  759. set { SetProperty(ref m_BRFMatchC2, value); }
  760. }
  761. public bool GasIsFlowing
  762. {
  763. get { return m_GasIsFlowing; }
  764. set { SetProperty(ref m_GasIsFlowing, value); }
  765. }
  766. public bool IsProcessing
  767. {
  768. get { return m_IsProcessing; }
  769. set { SetProperty(ref m_IsProcessing, value); }
  770. }
  771. public bool IsAutoMode
  772. {
  773. get { return m_IsAutoMode; }
  774. set { SetProperty(ref m_IsAutoMode, value); }
  775. }
  776. public string SelectedRecipe
  777. {
  778. get { return m_SelectedRecipe; }
  779. set { SetProperty(ref m_SelectedRecipe, value); }
  780. }
  781. public float ChillerTempSetpoint
  782. {
  783. get { return m_ChillerTempSetpoint; }
  784. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  785. }
  786. public float WallTempSetpoint
  787. {
  788. get { return m_WallTempSetpoint; }
  789. set { SetProperty(ref m_WallTempSetpoint, value); }
  790. }
  791. public bool HeIsPressureMode
  792. {
  793. get { return m_HeIsPressureMode; }
  794. set { SetProperty(ref m_HeIsPressureMode, value); }
  795. }
  796. public bool ChillerIsOn
  797. {
  798. get { return m_ChillerIsOn; }
  799. set { SetProperty(ref m_ChillerIsOn, value); }
  800. }
  801. public double ChamberPressureFeedBack
  802. {
  803. get { return m_ChamberPressureFeedBack; }
  804. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  805. }
  806. public string WaferID
  807. {
  808. get { return m_WaferID; }
  809. set { SetProperty(ref m_WaferID, value); }
  810. }
  811. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  812. {
  813. get { return m_HighTemperatureHeaterData; }
  814. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  815. }
  816. public ComboBoxItem SelectedPosition
  817. {
  818. get { return m_SelectedPosition; }
  819. set { SetProperty(ref m_SelectedPosition, value); }
  820. }
  821. public int HighTemperatureHeaterTemperatureSetpoint
  822. {
  823. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  824. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  825. }
  826. #endregion
  827. #region 命令
  828. private DelegateCommand _PMInitCommnad;
  829. public DelegateCommand PMInitCommnad =>
  830. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  831. private DelegateCommand _PMAbortCommnad;
  832. public DelegateCommand PMAbortCommnad =>
  833. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  834. private DelegateCommand _GasCommand;
  835. public DelegateCommand GasCommand =>
  836. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  837. private DelegateCommand _HeCommand;
  838. public DelegateCommand HeCommand =>
  839. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  840. private DelegateCommand _RfCommand;
  841. public DelegateCommand RfCommand =>
  842. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  843. private DelegateCommand _PurgeCommand;
  844. public DelegateCommand PurgeCommand =>
  845. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  846. private DelegateCommand _VentCommand;
  847. public DelegateCommand VentCommand =>
  848. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  849. private DelegateCommand _PumpCommand;
  850. public DelegateCommand PumpCommand =>
  851. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  852. private DelegateCommand _OpenPumpCommand;
  853. public DelegateCommand OpenPumpCommand =>
  854. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  855. private DelegateCommand _ClosePumpCommand;
  856. public DelegateCommand ClosePumpCommand =>
  857. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  858. private DelegateCommand _OpenTurboPumpCommand;
  859. public DelegateCommand OpenTurboPumpCommand =>
  860. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  861. private DelegateCommand _CloseTurboPumpCommand;
  862. public DelegateCommand CloseTurboPumpCommand =>
  863. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  864. private DelegateCommand _OpenPendulumValveCommand;
  865. public DelegateCommand OpenPendulumValveCommand =>
  866. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  867. private DelegateCommand _ClosePendulumValveCommand;
  868. public DelegateCommand ClosePendulumValveCommand =>
  869. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  870. private DelegateCommand<object> _PinUpDownCommand;
  871. public DelegateCommand<object> PinUpDownCommand =>
  872. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  873. private DelegateCommand<object> _LidUpDownCommand;
  874. public DelegateCommand<object> LidUpDownCommand =>
  875. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  876. private DelegateCommand _SetSRfCommand;
  877. public DelegateCommand SetSRfCommand =>
  878. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  879. private DelegateCommand _SetBRfCommand;
  880. public DelegateCommand SetBRfCommand =>
  881. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  882. private DelegateCommand _OpenButterflyValveViewCommand;
  883. public DelegateCommand OpenButterflyValveViewCommand =>
  884. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  885. //private DelegateCommand _HVCommand;
  886. //public DelegateCommand HVCommand =>
  887. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  888. private DelegateCommand _HVSetCommand;
  889. public DelegateCommand HVSetCommand =>
  890. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  891. private DelegateCommand _LoadRecipeCommand;
  892. public DelegateCommand LoadRecipeCommand =>
  893. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  894. private DelegateCommand<object> _ControlValveCommand;
  895. public DelegateCommand<object> ControlValveCommand =>
  896. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  897. private DelegateCommand<object> _RunRecipeCommand;
  898. public DelegateCommand<object> RunRecipeCommand =>
  899. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  900. private DelegateCommand _SetChillerTempCommand;
  901. public DelegateCommand SetChillerTempCommand =>
  902. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  903. private DelegateCommand _OnOffChillerCommand;
  904. public DelegateCommand OnOffChillerCommand =>
  905. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  906. private DelegateCommand<object> _HeaterCommand;
  907. public DelegateCommand<object> HeaterCommand =>
  908. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  909. private DelegateCommand _EndStepCommand;
  910. public DelegateCommand EndStepCommand =>
  911. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  912. private DelegateCommand _GotoPositionCommand;
  913. public DelegateCommand GotoPositionCommand =>
  914. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  915. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  916. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  917. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  918. private DelegateCommand<object> _AbortRecipeCommnad;
  919. public DelegateCommand<object> AbortRecipeCommnad =>
  920. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  921. #endregion
  922. #region 构造函数
  923. public OverKepler2200AViewModel()
  924. {
  925. m_RtDataKeys = new List<string>();
  926. m_IsATM = true;
  927. ModuleName = "PMA";
  928. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  929. DispatcherTimer timer = new DispatcherTimer();
  930. timer.Interval = TimeSpan.FromSeconds(0.5);
  931. timer.Tick += timer_Tick;
  932. timer.Start();
  933. }
  934. #endregion
  935. #region 命令方法
  936. private void OnControlValve(object obj)
  937. {
  938. CommonValveControl commonValveControl = (CommonValveControl)obj;
  939. if (commonValveControl.IsCanEdit == true)
  940. {
  941. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  942. }
  943. }
  944. private void OnPMInit()
  945. {
  946. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  947. }
  948. private async void OnGas()
  949. {
  950. await Task.Run(async () =>
  951. {
  952. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  953. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  954. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  955. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  958. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  959. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  960. await Task.Delay(1000);
  961. object[] mfc = new object[8];
  962. string[] mfcSetPoint = new string[8];
  963. mfc[0] = MFC1Data.SetPoint;
  964. mfc[1] = MFC2Data.SetPoint;
  965. mfc[2] = MFC3Data.SetPoint;
  966. mfc[3] = MFC4Data.SetPoint;
  967. mfc[4] = MFC5Data.SetPoint;
  968. mfc[5] = MFC6Data.SetPoint;
  969. mfc[6] = MFC7Data.SetPoint;
  970. mfc[7] = MFC8Data.SetPoint;
  971. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  972. });
  973. }
  974. private void OnHe()
  975. {
  976. if (PVHe1ValveIsOpen == true)
  977. {
  978. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  980. }
  981. else
  982. {
  983. if (HeIsPressureMode)
  984. {
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  986. }
  987. else
  988. {
  989. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  990. }
  991. }
  992. }
  993. private void OnRf()
  994. {
  995. if (PMCurrentState == PMState.RfPowering)
  996. {
  997. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  998. }
  999. else
  1000. {
  1001. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1002. }
  1003. }
  1004. private void OnPurge()
  1005. {
  1006. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1007. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1008. //{
  1009. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1010. // await Task.Delay(1000);
  1011. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1012. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1013. //}
  1014. //else
  1015. //{
  1016. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1017. // await Task.Delay(1000);
  1018. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1019. //}
  1020. if (PMCurrentState == PMState.Purging)
  1021. {
  1022. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1023. //await Task.Delay(1000);
  1024. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1025. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1026. }
  1027. else
  1028. {
  1029. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1030. //await Task.Delay(1000);
  1031. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1032. }
  1033. }
  1034. private void OnVent()
  1035. {
  1036. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1037. if (PMCurrentState == PMState.Venting)
  1038. {
  1039. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1040. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1041. }
  1042. else
  1043. {
  1044. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1045. }
  1046. }
  1047. private void OnPump()
  1048. {
  1049. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1050. if (PMCurrentState==PMState.Pumping)
  1051. {
  1052. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1053. return;
  1054. }
  1055. //if (PMCurrentState == PMState.pum)
  1056. //{
  1057. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1058. // return;
  1059. //}
  1060. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1061. //{
  1062. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1063. //}
  1064. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1065. //{
  1066. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1067. //}
  1068. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1069. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1070. // 设置底压
  1071. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1072. if (basePressure <= 0.01 || basePressure >= 1000)
  1073. {
  1074. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1075. return;
  1076. }
  1077. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1078. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1079. {
  1080. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1081. return;
  1082. }
  1083. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1084. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1085. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1086. }
  1087. private void OnOpenPump()
  1088. {
  1089. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1090. if (PMCurrentState==PMState.LaunchingPump)
  1091. {
  1092. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1093. return;
  1094. }
  1095. //if (PumpIsOpen == true)
  1096. //{
  1097. // return;
  1098. //}
  1099. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1100. }
  1101. private void OnClosePump()
  1102. {
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1104. }
  1105. private void OnOpenTurboPump()
  1106. {
  1107. //TurboIsOpen = true;
  1108. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1109. if (PMCurrentState == PMState.LaunchingTurboPump)
  1110. {
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1112. return;
  1113. }
  1114. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1115. }
  1116. private void OnCloseTurboPump()
  1117. {
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1119. }
  1120. private void OnOpenPendulumValve()
  1121. {
  1122. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1123. }
  1124. private void OnClosePendulumValve()
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1127. }
  1128. private void OnPinUpDown(object upDown)
  1129. {
  1130. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1131. }
  1132. private void OnLidUpDown(object upDown)
  1133. {
  1134. //var value = (bool)upDown;
  1135. if (upDown.ToString()== "Up")
  1136. {
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1138. }
  1139. else
  1140. {
  1141. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1142. }
  1143. }
  1144. private async void OnSetSRf()
  1145. {
  1146. if (SRFData.IsRfOn == true)
  1147. {
  1148. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1149. }
  1150. else
  1151. {
  1152. if (GasIsFlowing == true)
  1153. {
  1154. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1155. await Task.Delay(100);
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1157. }
  1158. }
  1159. }
  1160. private async void OnSetBRf()
  1161. {
  1162. if (BRFData.IsRfOn == true)
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1165. }
  1166. else
  1167. {
  1168. if (GasIsFlowing == true)
  1169. {
  1170. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1171. await Task.Delay(100);
  1172. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1173. }
  1174. }
  1175. }
  1176. private void OnPMAbort()
  1177. {
  1178. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1179. }
  1180. private void OnOpenButterflyValveView()
  1181. {
  1182. //if (butterflyValveMessageBox == null)
  1183. //{
  1184. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1185. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1186. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1187. butterflyValveMessageBox.Left = 700;
  1188. butterflyValveMessageBox.Top = 600;
  1189. butterflyValveMessageBox.Show();
  1190. butterflyValveMessageBox.Owner = _mainWindow;
  1191. //}
  1192. }
  1193. private void OnLoadRecipe()
  1194. {
  1195. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1196. }
  1197. //private async void OnHV()
  1198. //{
  1199. // if (ESCHVData.IsOn == true)
  1200. // {
  1201. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1202. // }
  1203. // else
  1204. // {
  1205. // await Task.Run(async () =>
  1206. // {
  1207. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1208. // await Task.Delay(1000);
  1209. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1210. // });
  1211. // }
  1212. //}
  1213. private void OnHVSet()
  1214. {
  1215. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1216. }
  1217. private void OnRunRecipe(object obj)
  1218. {
  1219. string recipeName = SelectedRecipe;
  1220. if (recipeName == null)
  1221. {
  1222. return;
  1223. }
  1224. ClearData();
  1225. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1226. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1227. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1228. }
  1229. private void OnOffChiller()
  1230. {
  1231. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1232. }
  1233. private void OnHeater(object obj)
  1234. {
  1235. if (IsAutoMode == true)
  1236. {
  1237. return;
  1238. }
  1239. AITHeaterData heaterData = obj as AITHeaterData;
  1240. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1241. heaterView = new HeaterView(heaterData);
  1242. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1243. heaterView.Owner = _mainWindow;
  1244. heaterView.Show();
  1245. }
  1246. private void OnOnline()
  1247. {
  1248. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1249. }
  1250. private void OnOffline()
  1251. {
  1252. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1253. }
  1254. private void OnEndStep()
  1255. {
  1256. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1257. {
  1258. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1259. }
  1260. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1261. {
  1262. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1263. }
  1264. }
  1265. private void OnGotoPosition()
  1266. {
  1267. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1268. }
  1269. private void OnSwitchHighTemperatureHeater()
  1270. {
  1271. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
  1272. }
  1273. private void OnSetChillerTemp()
  1274. {
  1275. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1276. }
  1277. private DelegateCommand _OnlineCommand;
  1278. public DelegateCommand OnlineCommand =>
  1279. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1280. private DelegateCommand _OfflineCommand;
  1281. public DelegateCommand OfflineCommand =>
  1282. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1283. private async void OnAbortRecipe(object obj)
  1284. {
  1285. if (PMCurrentState != PMState.Processing)
  1286. {
  1287. return;
  1288. }
  1289. switch (obj.ToString())
  1290. {
  1291. case "0":
  1292. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1293. break;
  1294. case "1":
  1295. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1296. //if (ESCHVData.IsOn == true)
  1297. //{
  1298. // await Task.Delay(3000);
  1299. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1300. //}
  1301. break;
  1302. case "2":
  1303. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1304. break;
  1305. }
  1306. }
  1307. #endregion
  1308. #region 私有方法
  1309. private void ClearData()
  1310. {
  1311. ESCVoltage = 0;
  1312. SRFFwdPowerSetpoint = 0;
  1313. SRFMatchC1 = 0;
  1314. SRFMatchC2 = 0;
  1315. BRFFwdPowerSetpoint = 0;
  1316. BRFMatchC1 = 0;
  1317. BRFMatchC2 = 0;
  1318. HeGasSetpoint = 0;
  1319. MFC1SetPoint = 0;
  1320. MFC2SetPoint = 0;
  1321. MFC3SetPoint = 0;
  1322. MFC4SetPoint = 0;
  1323. MFC5SetPoint = 0;
  1324. MFC6SetPoint = 0;
  1325. MFC7SetPoint = 0;
  1326. MFC8SetPoint = 0;
  1327. }
  1328. private IEnumerable<string> GetFilesNames(string path)
  1329. {
  1330. return Directory.GetFiles(path, "*.rcp")
  1331. .Select(Path.GetFileNameWithoutExtension);
  1332. }
  1333. void timer_Tick(object sender, EventArgs e)
  1334. {
  1335. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1336. if (RtDataValues==null)
  1337. {
  1338. return;
  1339. }
  1340. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1341. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1342. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1343. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1344. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1345. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1346. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1347. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1348. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1349. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1350. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1351. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1352. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1353. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1354. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1355. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1356. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1357. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1358. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1359. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1360. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1361. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1362. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1363. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1364. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1365. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1366. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1367. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1368. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1369. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1370. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1371. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1372. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1373. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1374. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1375. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1376. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1377. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1378. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1379. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1380. IsProcessing=PMCurrentState == PMState.Processing;
  1381. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1382. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1383. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1384. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1385. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1386. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1387. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1388. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1389. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1390. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1391. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1392. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1393. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1394. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1395. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1396. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1397. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1398. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1399. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1400. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1401. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1402. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1403. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1404. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1405. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1406. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1407. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1408. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1409. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1410. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1411. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1412. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1413. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1414. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1415. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1416. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1417. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1418. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1419. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1420. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1421. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1422. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1423. if (PMCurrentState == PMState.Processing)
  1424. {
  1425. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1426. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1427. {
  1428. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1429. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1430. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1431. }
  1432. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1433. }
  1434. else
  1435. {
  1436. CurrentRecipeResult = null;
  1437. CurrentRecipeStep = null;
  1438. }
  1439. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1440. {
  1441. ChamberPressureFeedBack = ProcessLowPressure;
  1442. }
  1443. else
  1444. {
  1445. ChamberPressureFeedBack = ProcessHighPressure;
  1446. }
  1447. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1448. }
  1449. public void addDataKeys()
  1450. {
  1451. m_RtDataKeys.Clear();
  1452. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1453. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1454. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1455. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1456. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1457. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1458. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1459. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1460. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1461. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1462. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1463. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1464. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1465. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1466. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1467. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1468. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1469. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1470. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1471. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1472. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1473. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1474. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1475. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1476. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1477. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1478. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1479. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1480. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1481. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1482. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1483. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1484. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1485. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1486. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1487. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1488. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1489. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1490. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1491. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1492. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1493. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1494. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1495. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1496. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1497. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1498. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1499. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1500. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1501. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1502. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1503. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1504. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1505. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1506. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1507. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1508. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1509. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1510. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1511. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1512. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1513. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1514. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1515. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1516. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1517. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1518. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1519. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1520. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1521. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1522. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1523. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1524. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1525. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1526. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1527. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1529. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1530. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1531. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1532. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1533. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1534. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1535. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1536. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1537. }
  1538. #endregion
  1539. }
  1540. }