SEMFPickRoutine.cs 7.3 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Modules.VCE;
  18. namespace Venus_RT.Modules.TM.VenusEntity
  19. {
  20. public class SEMFPickRoutine : ModuleRoutineBase, IRoutine
  21. {
  22. private enum PickStep
  23. {
  24. seWaitModuleReady,
  25. sePrepareModule,
  26. sePicking,
  27. seNotifyDone,
  28. }
  29. private HongHuTM _tm;
  30. private IPreAlign _vpa;
  31. private ITransferRobot _robot;
  32. private VceEntity _vceModule;
  33. private ModuleName _targetModule;
  34. private int _targetSlot;
  35. private int _pickingTimeout;
  36. public int currentStepNo;
  37. Hand _hand;
  38. /// <summary>
  39. /// 完整pick动作仅可vce vpa取片
  40. /// </summary>
  41. /// <param name="tm"></param>
  42. /// <param name="robot"></param>
  43. /// <param name="vpa"></param>
  44. public SEMFPickRoutine(HongHuTM tm, ITransferRobot robot, IPreAlign vpa) : base(ModuleName.TM)
  45. {
  46. _tm = tm;
  47. _robot = robot;
  48. _vpa = vpa;
  49. }
  50. public RState Start(params object[] objs)
  51. {
  52. if (!_robot.IsHomed)
  53. {
  54. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  55. return RState.Failed;
  56. }
  57. //MoveItem pickItem = new MoveItem() { SourceModule = , };
  58. var pickItem = (Queue<MoveItem>)objs[0];
  59. _targetModule = pickItem.Peek().SourceModule;
  60. _targetSlot = pickItem.Peek().SourceSlot;
  61. _hand = pickItem.Peek().RobotHand;
  62. //如果目标是Vce 否则是vpa
  63. if (ModuleHelper.IsVCE(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  64. {
  65. _vceModule = Singleton<RouteManager>.Instance.GetVCE(_targetModule);
  66. //如果vce有错误 报错
  67. if (_vceModule.IsError)
  68. {
  69. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  70. return RState.Failed;
  71. }
  72. if (_targetSlot <= 0)
  73. {
  74. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  75. return RState.Failed;
  76. }
  77. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  78. //if (_tm.VCESlitDoorClosed)
  79. //{
  80. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  81. // return RState.Failed;
  82. //}
  83. }
  84. //如果目标又不是VPA 报错
  85. else if (!ModuleHelper.IsVPA(_targetModule))
  86. {
  87. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for pick action");
  88. return RState.Failed;
  89. }
  90. //检查目标手臂上没有wafer
  91. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  92. {
  93. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  94. return RState.Failed;
  95. }
  96. //检查目标槽位上有wafer
  97. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  98. {
  99. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  100. return RState.Failed;
  101. }
  102. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  103. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  104. //{
  105. // if (!_tm.IsVCEATM)
  106. // {
  107. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  108. // return RState.Failed;
  109. // }
  110. //
  111. // if (!_tm.IsTMATM)
  112. // {
  113. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  114. // return RState.Failed;
  115. // }
  116. //}
  117. //else
  118. //{
  119. // if (_tm.IsVCEATM)
  120. // {
  121. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  122. // return RState.Failed;
  123. // }
  124. //
  125. // if (_tm.IsTMATM)
  126. // {
  127. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  128. // return RState.Failed;
  129. // }
  130. //}
  131. Reset();
  132. _pickingTimeout = SC.GetValue<int>("TM.PickTimeout") * 1000;
  133. return Runner.Start(Module, $"Pick from {_targetModule}");
  134. }
  135. public RState Monitor()
  136. {
  137. Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  138. .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
  139. .Run (PickStep.sePicking, Picking, WaitPickDone, _pickingTimeout)
  140. .End (PickStep.seNotifyDone, NullFun, 500);
  141. return Runner.Status;
  142. }
  143. private bool PrepareModule()
  144. {
  145. switch (_targetModule)
  146. {
  147. case ModuleName.VCE1:
  148. _vceModule.PostMsg(VceMSG.Goto, _targetSlot);
  149. return true;//移动到目标槽位
  150. case ModuleName.VPA:
  151. return true;//10/17暂时为true 后可能要求旋转到0
  152. default:
  153. return false;
  154. }
  155. }
  156. private bool WaitPickDone()
  157. {
  158. if (_robot.Status == RState.Running)
  159. {
  160. return false;
  161. }
  162. else if (_robot.Status == RState.End)
  163. {
  164. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  165. return true;
  166. }
  167. else
  168. {
  169. Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
  170. return true;
  171. }
  172. }
  173. private bool Picking()
  174. {
  175. //到达目标点位 pick固定槽位点的wafer
  176. return _robot.Pick(_targetModule, 0, _hand);
  177. }
  178. private bool CheckModuleReady()
  179. {
  180. switch (_targetModule)
  181. {
  182. case ModuleName.VCE1:
  183. return _vceModule.IsIdle;
  184. case ModuleName.VPA:
  185. return _vpa.Status == RState.End;
  186. default:
  187. return false;
  188. }
  189. }
  190. public void Abort() { }
  191. }
  192. }