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							- using Aitex.Core.Common.DeviceData;
 
- using MECF.Framework.Common.DataCenter;
 
- using MECF.Framework.Common.OperationCenter;
 
- using Prism.Commands;
 
- using Prism.Mvvm;
 
- using System;
 
- using System.Collections.Generic;
 
- using System.Windows;
 
- using System.Windows.Threading;
 
- using Venus_Core;
 
- using Venus_MainPages.Views;
 
- using System.Linq;
 
- using System.Threading.Tasks;
 
- using System.IO;
 
- using Venus_Themes.CustomControls;
 
- using Venus_MainPages.Unity;
 
- using MECF.Framework.Common.CommonData.DeviceData;
 
- using Path = System.IO.Path;
 
- using Aitex.Core.RT.Log;
 
- namespace Venus_MainPages.ViewModels
 
- {
 
-     internal class OverKepler2300ViewModel : BindableBase
 
-     {
 
-         #region 私有字段
 
-         private List<string> m_CurrentModuleRecipes = new List<string>();
 
-         private bool m_PVN21ValveIsOpen;
 
-         private bool m_PVN22ValveIsOpen;
 
-         private bool m_N2ValveIsOpen;
 
-         private bool m_PV11ValveIsOpen;
 
-         private bool m_PV12ValveIsOpen;
 
-         private bool m_PV21ValveIsOpen;
 
-         private bool m_PV22ValveIsOpen;
 
-         private bool m_PV31ValveIsOpen;
 
-         private bool m_PV32ValveIsOpen;
 
-         private bool m_PV41ValveIsOpen;
 
-         private bool m_PV42ValveIsOpen;
 
-         private bool m_MFC1ValveIsOpen;
 
-         private bool m_MFC2ValveIsOpen;
 
-         private bool m_MFC3ValveIsOpen;
 
-         private bool m_MFC4ValveIsOpen;
 
-         private bool m_MFC5ValveIsOpen;
 
-         private bool m_MFC6ValveIsOpen;
 
-         private bool m_MFC7ValveIsOpen;
 
-         private bool m_MFC8ValveIsOpen;
 
-         private bool m_GasFinalValveIsOpen;
 
-         private bool m_SoftPumpValveIsOpen;
 
-         private bool m_FastPumpValveIsOpen;
 
-         private bool m_PVHe1ValveIsOpen;
 
-         private bool m_PVHe2ValveIsOpen;
 
-         private bool m_TurboPumpPumpingValveIsOpen;
 
-         private bool m_TurboPumpPurgeValveIsOpen;
 
-         private bool m_GuageValveIsOpen;
 
-         private bool m_PendulumValveIsOpen;
 
-         private double m_HeGasSetpoint;
 
-         private int m_HePressureSetpoint;
 
-         private float m_SRFFwdPowerSetpoint;
 
-         private float m_BRFFwdPowerSetpoint;
 
-         private float m_SRFMatchC1;
 
-         private float m_SRFMatchC2;
 
-         private float m_BRFMatchC1;
 
-         private float m_BRFMatchC2;
 
-         private double m_MFC1SetPoint;
 
-         private double m_MFC2SetPoint;
 
-         private double m_MFC3SetPoint;
 
-         private double m_MFC4SetPoint;
 
-         private double m_MFC5SetPoint;
 
-         private double m_MFC6SetPoint;
 
-         private double m_MFC7SetPoint;
 
-         private double m_MFC8SetPoint;
 
-         private double m_N2SetPoint;
 
-         private AITMfcData m_MFC1Data;
 
-         private AITMfcData m_MFC2Data;
 
-         private AITMfcData m_MFC3Data;
 
-         private AITMfcData m_MFC4Data;
 
-         private AITMfcData m_MFC5Data;
 
-         private AITMfcData m_MFC6Data;
 
-         private AITMfcData m_MFC7Data;
 
-         private AITMfcData m_MFC8Data;
 
-         private AITMfcData m_MFCHeData;
 
-         private AITMfcData m_MFCN2Data;
 
-         private AITHeaterData m_ValveHeaterData;
 
-         private AITHeaterData m_ForelineHeaterData;
 
-         private AITHeaterData m_WallHeaterData;
 
-         private AITHeaterData m_PendulumHeaterData;
 
-         private AITRfData m_SRFData;
 
-         private AITRfData m_BRFData;
 
-         private AITPendulumValveData m_PendulumValveData;
 
-         private PMState m_PMCurrentState;
 
-         private bool m_SourceRFFanInterlock;
 
-         private bool m_IsWLK;
 
-         private bool m_IsWaterFlowOk;
 
-         private bool m_IsTurboPumpInterlock;
 
-         private bool m_IsCDAOK;
 
-         private bool m_SensorGasBoxDoor;
 
-         private bool m_SensorGasBoxPressure;
 
-         private bool m_PumpIsOpen;
 
-         private bool m_TurboIsOpen;
 
-         private bool m_IsATM;
 
-         private bool m_IsVAC;
 
-         private List<string> m_RtDataKeys;
 
-         private Dictionary<string, object> m_RtDataValues;
 
-         private int m_PositionValue;
 
-         private bool m_IsPositionMode;
 
-         private int m_ESCVoltage;
 
-         private bool m_GasIsFlowing;
 
-         private bool m_IsProcessing;
 
-         private bool m_IsAutoMode;
 
-         private string m_SelectedRecipe;
 
-         private float m_ChillerTempSetpoint;
 
-         private float m_InnerChillerTempSetpoint;
 
-         private float m_OuterChillerTempSetpoint;
 
-         private float m_TopChillerTempSetpoint;
 
-         private float m_WallTempSetpoint;
 
-         private bool m_HeIsPressureMode = true;
 
-         private bool m_ChillerIsOn;
 
-         private bool m_InnerChillerIsOn;
 
-         private bool m_OuterChillerIsOn;
 
-         private bool m_TopChillerIsOn;
 
-         private float m_ChamberPressure;
 
-         private float m_ProcessPressure;
 
-         private float m_ForelinePressurePressure;
 
-         private float m_ESCHePressure;
 
-         ButterflyValveView butterflyValveMessageBox;
 
-         HeaterView heaterView;
 
-         private int m_TurboPumpRotationalSpeed;
 
-         private bool m_LiftPinIsUp;
 
-         private bool m_IsSlitDoorClosed;
 
-         private bool m_IsLidClosed;
 
-         private float m_ChillerTemperature;
 
-         private float m_InnerTemperature;
 
-         private float m_OuterTemperature;
 
-         private float m_TopTemperature;
 
-         private int m_ESCHVOutputVoltage;
 
-         private float m_MatchC1;
 
-         private float m_MatchC2;
 
-         private float m_BiasMatchC1;
 
-         private float m_BiasMatchC2;
 
-         private float m_PendulumValvePosition;
 
-         private bool m_IsTurboPumpAtSpeed;
 
-         private bool m_TurboPumpWaterFlowSwitch;
 
-         private bool m_IsHasWafer;
 
-         private Recipe m_CurrentRecipe = new Recipe();
 
-         private RecipeResult m_CurrentRecipeResult = new RecipeResult();
 
-         private RecipeStep m_CurrentRecipeStep = new RecipeStep();
 
-         private double m_ChamberPressureFeedBack;
 
-         private double m_TurboN2FlowSetPoint;
 
-         private string m_ModuleName;
 
-         private string m_WaferID;
 
-         private int? currentRecipeNumber;
 
-         private bool m_IsInclude;
 
-         #endregion
 
-         #region  属性
 
-         public bool IsInclude
 
-         {
 
-             get { return m_IsInclude; }
 
-             set { SetProperty(ref m_IsInclude, value); }
 
-         }
 
-         public List<string> CurrentModuleRecipes
 
-         {
 
-             get { return m_CurrentModuleRecipes; }
 
-             set { SetProperty(ref m_CurrentModuleRecipes, value); }
 
-         }
 
-         public Recipe CurrentRecipe
 
-         {
 
-             get { return m_CurrentRecipe; }
 
-             set { SetProperty(ref m_CurrentRecipe, value); }
 
-         }
 
-         public RecipeResult CurrentRecipeResult
 
-         {
 
-             get { return m_CurrentRecipeResult; }
 
-             set { SetProperty(ref m_CurrentRecipeResult, value); }
 
-         }
 
-         public RecipeStep CurrentRecipeStep
 
-         {
 
-             get { return m_CurrentRecipeStep; }
 
-             set { SetProperty(ref m_CurrentRecipeStep, value); }
 
-         }
 
-         public bool IsHasWafer
 
-         {
 
-             get { return m_IsHasWafer; }
 
-             set { SetProperty(ref m_IsHasWafer, value); }
 
-         }
 
-         public bool IsTurboPumpAtSpeed
 
-         {
 
-             get { return m_IsTurboPumpAtSpeed; }
 
-             set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
 
-         }
 
-         public bool TurboPumpWaterFlowSwitch
 
-         {
 
-             get { return m_TurboPumpWaterFlowSwitch; }
 
-             set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
 
-         }
 
-         public float PendulumValvePosition
 
-         {
 
-             get { return m_PendulumValvePosition; }
 
-             set { SetProperty(ref m_PendulumValvePosition, value); }
 
-         }
 
-         public float BiasMatchC1
 
-         {
 
-             get { return m_BiasMatchC1; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_BiasMatchC1, value);
 
-             }
 
-         }
 
-         public float BiasMatchC2
 
-         {
 
-             get { return m_BiasMatchC2; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_BiasMatchC2, value);
 
-             }
 
-         }
 
-         public float MatchC1
 
-         {
 
-             get { return m_MatchC1; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_MatchC1, value);
 
-             }
 
-         }
 
-         public float MatchC2
 
-         {
 
-             get { return m_MatchC2; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_MatchC2, value);
 
-             }
 
-         }
 
-         public AITPendulumValveData PendulumValveData
 
-         {
 
-             get { return m_PendulumValveData; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_PendulumValveData, value);
 
-             }
 
-         }
 
-         //public AITHVData ESCHVData
 
-         //{
 
-         //    get { return m_ESCHVData; }
 
-         //    set
 
-         //    {
 
-         //        SetProperty(ref m_ESCHVData, value);
 
-         //    }
 
-         //}
 
-         public int ESCHVOutputVoltage
 
-         {
 
-             get { return m_ESCHVOutputVoltage; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ESCHVOutputVoltage, value);
 
-             }
 
-         }
 
-         public float ChillerTemperature
 
-         {
 
-             get { return m_ChillerTemperature; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ChillerTemperature, value);
 
-             }
 
-         }
 
-         public float InnerTemperature
 
-         {
 
-             get { return m_InnerTemperature; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_InnerTemperature, value);
 
-             }
 
-         }
 
-         public float OuterTemperature
 
-         {
 
-             get { return m_OuterTemperature; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_OuterTemperature, value);
 
-             }
 
-         }
 
-         public float TopTemperature
 
-         {
 
-             get { return m_TopTemperature; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_TopTemperature, value);
 
-             }
 
-         }
 
-         //public float HVTemperature
 
-         //{
 
-         //    get { return m_HVTemperature; }
 
-         //    set
 
-         //    {
 
-         //        SetProperty(ref m_HVTemperature, value);
 
-         //    }
 
-         //}
 
-         public bool IsLidClosed
 
-         {
 
-             get { return m_IsLidClosed; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsLidClosed, value);
 
-             }
 
-         }
 
-         public bool IsSlitDoorClosed
 
-         {
 
-             get { return m_IsSlitDoorClosed; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsSlitDoorClosed, value);
 
-             }
 
-         }
 
-         public bool LiftPinIsUp
 
-         {
 
-             get { return m_LiftPinIsUp; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_LiftPinIsUp, value);
 
-             }
 
-         }
 
-         public int TurboPumpRotationalSpeed
 
-         {
 
-             get { return m_TurboPumpRotationalSpeed; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_TurboPumpRotationalSpeed, value);
 
-             }
 
-         }
 
-         public float ESCHePressure
 
-         {
 
-             get { return m_ESCHePressure; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ESCHePressure, value);
 
-             }
 
-         }
 
-         public float ChamberPressure
 
-         {
 
-             get { return m_ChamberPressure; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ChamberPressure, value);
 
-             }
 
-         }
 
-         public float ProcessPressure
 
-         {
 
-             get { return m_ProcessPressure; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ProcessPressure, value);
 
-             }
 
-         }
 
-         public float ForelinePressure
 
-         {
 
-             get { return m_ForelinePressurePressure; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ForelinePressurePressure, value);
 
-             }
 
-         }
 
-         public bool SourceRFFanInterlock
 
-         {
 
-             get { return m_SourceRFFanInterlock; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_SourceRFFanInterlock, value);
 
-             }
 
-         }
 
-         public bool IsWLK
 
-         {
 
-             get { return m_IsWLK; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsWLK, value);
 
-             }
 
-         }
 
-         public bool IsWaterFlowOk
 
-         {
 
-             get { return m_IsWaterFlowOk; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsWaterFlowOk, value);
 
-             }
 
-         }
 
-         public bool IsCDAOK
 
-         {
 
-             get { return m_IsCDAOK; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsCDAOK, value);
 
-             }
 
-         }
 
-         public bool SensorGasBoxDoor
 
-         {
 
-             get { return m_SensorGasBoxDoor; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_SensorGasBoxDoor, value);
 
-             }
 
-         }
 
-         public bool SensorGasBoxPressure
 
-         {
 
-             get { return m_SensorGasBoxPressure; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_SensorGasBoxPressure, value);
 
-             }
 
-         }
 
-         public bool IsTurboPumpInterlock
 
-         {
 
-             get { return m_IsTurboPumpInterlock; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_IsTurboPumpInterlock, value);
 
-             }
 
-         }
 
-         public string ModuleName
 
-         {
 
-             get { return m_ModuleName; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_ModuleName, value);
 
-             }
 
-         }
 
-         public double MFC1SetPoint
 
-         {
 
-             get { return m_MFC1SetPoint; }
 
-             set { SetProperty(ref m_MFC1SetPoint, value); }
 
-         }
 
-         public double MFC2SetPoint
 
-         {
 
-             get { return m_MFC2SetPoint; }
 
-             set { SetProperty(ref m_MFC2SetPoint, value); }
 
-         }
 
-         public double MFC3SetPoint
 
-         {
 
-             get { return m_MFC3SetPoint; }
 
-             set { SetProperty(ref m_MFC3SetPoint, value); }
 
-         }
 
-         public double MFC4SetPoint
 
-         {
 
-             get { return m_MFC4SetPoint; }
 
-             set { SetProperty(ref m_MFC4SetPoint, value); }
 
-         }
 
-         public double MFC5SetPoint
 
-         {
 
-             get { return m_MFC5SetPoint; }
 
-             set { SetProperty(ref m_MFC5SetPoint, value); }
 
-         }
 
-         public double MFC6SetPoint
 
-         {
 
-             get { return m_MFC6SetPoint; }
 
-             set { SetProperty(ref m_MFC6SetPoint, value); }
 
-         }
 
-         public double MFC7SetPoint
 
-         {
 
-             get { return m_MFC7SetPoint; }
 
-             set { SetProperty(ref m_MFC7SetPoint, value); }
 
-         }
 
-         public double MFC8SetPoint
 
-         {
 
-             get { return m_MFC8SetPoint; }
 
-             set { SetProperty(ref m_MFC8SetPoint, value); }
 
-         }
 
-         public double N2SetPoint
 
-         {
 
-             get { return m_N2SetPoint; }
 
-             set { SetProperty(ref m_N2SetPoint, value); }
 
-         }
 
-         public double TurboN2FlowSetPoint
 
-         {
 
-             get { return m_TurboN2FlowSetPoint; }
 
-             set
 
-             {
 
-                 if (value != m_TurboN2FlowSetPoint)
 
-                 {
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
 
-                 }
 
-                 SetProperty(ref m_TurboN2FlowSetPoint, value);
 
-             }
 
-         }
 
-         public AITMfcData MFC1Data
 
-         {
 
-             get { return m_MFC1Data; }
 
-             set { SetProperty(ref m_MFC1Data, value); }
 
-         }
 
-         public AITMfcData MFC2Data
 
-         {
 
-             get { return m_MFC2Data; }
 
-             set { SetProperty(ref m_MFC2Data, value); }
 
-         }
 
-         public AITMfcData MFC3Data
 
-         {
 
-             get { return m_MFC3Data; }
 
-             set { SetProperty(ref m_MFC3Data, value); }
 
-         }
 
-         public AITMfcData MFC4Data
 
-         {
 
-             get { return m_MFC4Data; }
 
-             set { SetProperty(ref m_MFC4Data, value); }
 
-         }
 
-         public AITMfcData MFC5Data
 
-         {
 
-             get { return m_MFC5Data; }
 
-             set { SetProperty(ref m_MFC5Data, value); }
 
-         }
 
-         public AITMfcData MFC6Data
 
-         {
 
-             get { return m_MFC6Data; }
 
-             set { SetProperty(ref m_MFC6Data, value); }
 
-         }
 
-         public AITMfcData MFC7Data
 
-         {
 
-             get { return m_MFC7Data; }
 
-             set { SetProperty(ref m_MFC7Data, value); }
 
-         }
 
-         public AITMfcData MFC8Data
 
-         {
 
-             get { return m_MFC8Data; }
 
-             set { SetProperty(ref m_MFC8Data, value); }
 
-         }
 
-         public AITMfcData MFCHeData
 
-         {
 
-             get { return m_MFCHeData; }
 
-             set { SetProperty(ref m_MFCHeData, value); }
 
-         }
 
-         public AITMfcData MFCN2Data
 
-         {
 
-             get { return m_MFCN2Data; }
 
-             set { SetProperty(ref m_MFCN2Data, value); }
 
-         }
 
-         public AITHeaterData ValveHeaterData
 
-         {
 
-             get { return m_ValveHeaterData; }
 
-             set { SetProperty(ref m_ValveHeaterData, value); }
 
-         }
 
-         public AITHeaterData ForelineHeaterData
 
-         {
 
-             get { return m_ForelineHeaterData; }
 
-             set { SetProperty(ref m_ForelineHeaterData, value); }
 
-         }
 
-         public AITHeaterData WallHeaterData
 
-         {
 
-             get { return m_WallHeaterData; }
 
-             set { SetProperty(ref m_WallHeaterData, value); }
 
-         }
 
-         public AITHeaterData PendulumHeaterData
 
-         {
 
-             get { return m_PendulumHeaterData; }
 
-             set { SetProperty(ref m_PendulumHeaterData, value); }
 
-         }
 
-         public AITRfData SRFData
 
-         {
 
-             get { return m_SRFData; }
 
-             set { SetProperty(ref m_SRFData, value); }
 
-         }
 
-         public AITRfData BRFData
 
-         {
 
-             get { return m_BRFData; }
 
-             set { SetProperty(ref m_BRFData, value); }
 
-         }
 
-         public PMState PMCurrentState
 
-         {
 
-             get { return m_PMCurrentState; }
 
-             set { SetProperty(ref m_PMCurrentState, value); }
 
-         }
 
-         #region 阀
 
-         public bool GasFinalValveIsOpen
 
-         {
 
-             get { return m_GasFinalValveIsOpen; }
 
-             set { SetProperty(ref m_GasFinalValveIsOpen, value); }
 
-         }
 
-         public bool PVN21ValveIsOpen
 
-         {
 
-             get { return m_PVN21ValveIsOpen; }
 
-             set { SetProperty(ref m_PVN21ValveIsOpen, value); }
 
-         }
 
-         public bool PVN22ValveIsOpen
 
-         {
 
-             get { return m_PVN22ValveIsOpen; }
 
-             set { SetProperty(ref m_PVN22ValveIsOpen, value); }
 
-         }
 
-         public bool N2ValveIsOpen
 
-         {
 
-             get { return m_N2ValveIsOpen; }
 
-             set { SetProperty(ref m_N2ValveIsOpen, value); }
 
-         }
 
-         public bool PV11ValveIsOpen
 
-         {
 
-             get { return m_PV11ValveIsOpen; }
 
-             set { SetProperty(ref m_PV11ValveIsOpen, value); }
 
-         }
 
-         public bool PV12ValveIsOpen
 
-         {
 
-             get { return m_PV12ValveIsOpen; }
 
-             set { SetProperty(ref m_PV12ValveIsOpen, value); }
 
-         }
 
-         public bool MFC1ValveIsOpen
 
-         {
 
-             get { return m_MFC1ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC1ValveIsOpen, value); }
 
-         }
 
-         public bool PV21ValveIsOpen
 
-         {
 
-             get { return m_PV21ValveIsOpen; }
 
-             set { SetProperty(ref m_PV21ValveIsOpen, value); }
 
-         }
 
-         public bool PV22ValveIsOpen
 
-         {
 
-             get { return m_PV22ValveIsOpen; }
 
-             set { SetProperty(ref m_PV22ValveIsOpen, value); }
 
-         }
 
-         public bool MFC2ValveIsOpen
 
-         {
 
-             get { return m_MFC2ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC2ValveIsOpen, value); }
 
-         }
 
-         public bool PV31ValveIsOpen
 
-         {
 
-             get { return m_PV31ValveIsOpen; }
 
-             set { SetProperty(ref m_PV31ValveIsOpen, value); }
 
-         }
 
-         public bool PV32ValveIsOpen
 
-         {
 
-             get { return m_PV32ValveIsOpen; }
 
-             set { SetProperty(ref m_PV32ValveIsOpen, value); }
 
-         }
 
-         public bool MFC3ValveIsOpen
 
-         {
 
-             get { return m_MFC3ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC3ValveIsOpen, value); }
 
-         }
 
-         public bool PV41ValveIsOpen
 
-         {
 
-             get { return m_PV41ValveIsOpen; }
 
-             set { SetProperty(ref m_PV41ValveIsOpen, value); }
 
-         }
 
-         public bool PV42ValveIsOpen
 
-         {
 
-             get { return m_PV42ValveIsOpen; }
 
-             set { SetProperty(ref m_PV42ValveIsOpen, value); }
 
-         }
 
-         public bool MFC4ValveIsOpen
 
-         {
 
-             get { return m_MFC4ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC4ValveIsOpen, value); }
 
-         }
 
-         public bool MFC5ValveIsOpen
 
-         {
 
-             get { return m_MFC5ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC5ValveIsOpen, value); }
 
-         }
 
-         public bool MFC6ValveIsOpen
 
-         {
 
-             get { return m_MFC6ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC6ValveIsOpen, value); }
 
-         }
 
-         public bool MFC7ValveIsOpen
 
-         {
 
-             get { return m_MFC7ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC7ValveIsOpen, value); }
 
-         }
 
-         public bool MFC8ValveIsOpen
 
-         {
 
-             get { return m_MFC8ValveIsOpen; }
 
-             set { SetProperty(ref m_MFC8ValveIsOpen, value); }
 
-         }
 
-         public bool PVHe1ValveIsOpen
 
-         {
 
-             get { return m_PVHe1ValveIsOpen; }
 
-             set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
 
-         }
 
-         public bool PVHe2ValveIsOpen
 
-         {
 
-             get { return m_PVHe2ValveIsOpen; }
 
-             set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
 
-         }
 
-         public bool TurboPumpPumpingValveIsOpen
 
-         {
 
-             get { return m_TurboPumpPumpingValveIsOpen; }
 
-             set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
 
-         }
 
-         public bool TurboPumpPurgeValveIsOpen
 
-         {
 
-             get { return m_TurboPumpPurgeValveIsOpen; }
 
-             set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
 
-         }
 
-         public bool SoftPumpValveIsOpen
 
-         {
 
-             get { return m_SoftPumpValveIsOpen; }
 
-             set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
 
-         }
 
-         public bool FastPumpValveIsOpen
 
-         {
 
-             get { return m_FastPumpValveIsOpen; }
 
-             set { SetProperty(ref m_FastPumpValveIsOpen, value); }
 
-         }
 
-         public bool GuageValveIsOpen
 
-         {
 
-             get { return m_GuageValveIsOpen; }
 
-             set { SetProperty(ref m_GuageValveIsOpen, value); }
 
-         }
 
-         #endregion
 
-         public Dictionary<string, object> RtDataValues
 
-         {
 
-             get { return m_RtDataValues; }
 
-             set { SetProperty(ref m_RtDataValues, value); }
 
-         }
 
-         public bool PumpIsOpen
 
-         {
 
-             get { return m_PumpIsOpen; }
 
-             set { SetProperty(ref m_PumpIsOpen, value); }
 
-         }
 
-         public bool PendulumValveIsOpen
 
-         {
 
-             get { return m_PendulumValveIsOpen; }
 
-             set { SetProperty(ref m_PendulumValveIsOpen, value); }
 
-         }
 
-         public bool TurboIsOpen
 
-         {
 
-             get { return m_TurboIsOpen; }
 
-             set { SetProperty(ref m_TurboIsOpen, value); }
 
-         }
 
-         public bool IsATM
 
-         {
 
-             get { return m_IsATM; }
 
-             set { SetProperty(ref m_IsATM, value); }
 
-         }
 
-         public bool IsVAC
 
-         {
 
-             get { return m_IsVAC; }
 
-             set { SetProperty(ref m_IsVAC, value); }
 
-         }
 
-         //public bool BRFIsOn
 
-         //{
 
-         //    get { return m_BRFIsOn; }
 
-         //    set { SetProperty(ref m_BRFIsOn, value); }
 
-         //}
 
-         //public bool SRFIsOn
 
-         //{
 
-         //    get { return m_SRFIsOn; }
 
-         //    set { SetProperty(ref m_SRFIsOn, value); }
 
-         //}
 
-         public int PositionValue
 
-         {
 
-             get { return m_PositionValue; }
 
-             set { SetProperty(ref m_PositionValue, value); }
 
-         }
 
-         public bool IsPositionMode
 
-         {
 
-             get { return m_IsPositionMode; }
 
-             set { SetProperty(ref m_IsPositionMode, value); }
 
-         }
 
-         public double HeGasSetpoint
 
-         {
 
-             get { return m_HeGasSetpoint; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_HeGasSetpoint, value);
 
-             }
 
-         }
 
-         public int HePressureSetpoint
 
-         {
 
-             get { return m_HePressureSetpoint; }
 
-             set
 
-             {
 
-                 SetProperty(ref m_HePressureSetpoint, value);
 
-             }
 
-         }
 
-         public float SRFFwdPowerSetpoint
 
-         {
 
-             get { return m_SRFFwdPowerSetpoint; }
 
-             set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
 
-         }
 
-         public float BRFFwdPowerSetpoint
 
-         {
 
-             get { return m_BRFFwdPowerSetpoint; }
 
-             set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
 
-         }
 
-         public int ESCVoltage
 
-         {
 
-             get { return m_ESCVoltage; }
 
-             set { SetProperty(ref m_ESCVoltage, value); }
 
-         }
 
-         public float SRFMatchC1
 
-         {
 
-             get { return m_SRFMatchC1; }
 
-             set { SetProperty(ref m_SRFMatchC1, value); }
 
-         }
 
-         public float SRFMatchC2
 
-         {
 
-             get { return m_SRFMatchC2; }
 
-             set { SetProperty(ref m_SRFMatchC2, value); }
 
-         }
 
-         public float BRFMatchC1
 
-         {
 
-             get { return m_BRFMatchC1; }
 
-             set { SetProperty(ref m_BRFMatchC1, value); }
 
-         }
 
-         public float BRFMatchC2
 
-         {
 
-             get { return m_BRFMatchC2; }
 
-             set { SetProperty(ref m_BRFMatchC2, value); }
 
-         }
 
-         public bool GasIsFlowing
 
-         {
 
-             get { return m_GasIsFlowing; }
 
-             set { SetProperty(ref m_GasIsFlowing, value); }
 
-         }
 
-         public bool IsProcessing
 
-         {
 
-             get { return m_IsProcessing; }
 
-             set { SetProperty(ref m_IsProcessing, value); }
 
-         }
 
-         public bool IsAutoMode
 
-         {
 
-             get { return m_IsAutoMode; }
 
-             set { SetProperty(ref m_IsAutoMode, value); }
 
-         }
 
-         public string SelectedRecipe
 
-         {
 
-             get { return m_SelectedRecipe; }
 
-             set { SetProperty(ref m_SelectedRecipe, value); }
 
-         }
 
-         public float ChillerTempSetpoint
 
-         {
 
-             get { return m_ChillerTempSetpoint; }
 
-             set { SetProperty(ref m_ChillerTempSetpoint, value); }
 
-         }
 
-         public float InnerChillerTempSetpoint
 
-         {
 
-             get { return m_InnerChillerTempSetpoint; }
 
-             set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
 
-         }
 
-         public float OuterChillerTempSetpoint
 
-         {
 
-             get { return m_OuterChillerTempSetpoint; }
 
-             set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
 
-         }
 
-         public float TopChillerTempSetpoint
 
-         {
 
-             get { return m_TopChillerTempSetpoint; }
 
-             set { SetProperty(ref m_TopChillerTempSetpoint, value); }
 
-         }
 
-         public float WallTempSetpoint
 
-         {
 
-             get { return m_WallTempSetpoint; }
 
-             set { SetProperty(ref m_WallTempSetpoint, value); }
 
-         }
 
-         public bool HeIsPressureMode
 
-         {
 
-             get { return m_HeIsPressureMode; }
 
-             set { SetProperty(ref m_HeIsPressureMode, value); }
 
-         }
 
-         public bool ChillerIsOn
 
-         {
 
-             get { return m_ChillerIsOn; }
 
-             set { SetProperty(ref m_ChillerIsOn, value); }
 
-         }
 
-         public bool InnerChillerIsOn
 
-         {
 
-             get { return m_InnerChillerIsOn; }
 
-             set { SetProperty(ref m_InnerChillerIsOn, value); }
 
-         }
 
-         public bool OuterChillerIsOn
 
-         {
 
-             get { return m_OuterChillerIsOn; }
 
-             set { SetProperty(ref m_OuterChillerIsOn, value); }
 
-         }
 
-         public bool TopChillerIsOn
 
-         {
 
-             get { return m_TopChillerIsOn; }
 
-             set { SetProperty(ref m_TopChillerIsOn, value); }
 
-         }
 
-         public double ChamberPressureFeedBack
 
-         {
 
-             get { return m_ChamberPressureFeedBack; }
 
-             set { SetProperty(ref m_ChamberPressureFeedBack, value); }
 
-         }
 
-         public string WaferID
 
-         {
 
-             get { return m_WaferID; }
 
-             set { SetProperty(ref m_WaferID, value); }
 
-         }
 
-         #endregion
 
-         #region 命令
 
-         private DelegateCommand _PMInitCommnad;
 
-         public DelegateCommand PMInitCommnad =>
 
-             _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
 
-         private DelegateCommand _PMAbortCommnad;
 
-         public DelegateCommand PMAbortCommnad =>
 
-             _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
 
-         private DelegateCommand _GasCommand;
 
-         public DelegateCommand GasCommand =>
 
-             _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
 
-         private DelegateCommand _HeCommand;
 
-         public DelegateCommand HeCommand =>
 
-             _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
 
-         private DelegateCommand _RfCommand;
 
-         public DelegateCommand RfCommand =>
 
-             _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
 
-         private DelegateCommand _PurgeCommand;
 
-         public DelegateCommand PurgeCommand =>
 
-             _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
 
-         private DelegateCommand _VentCommand;
 
-         public DelegateCommand VentCommand =>
 
-             _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
 
-         private DelegateCommand _PumpCommand;
 
-         public DelegateCommand PumpCommand =>
 
-             _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
 
-         private DelegateCommand _OpenPumpCommand;
 
-         public DelegateCommand OpenPumpCommand =>
 
-             _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
 
-         private DelegateCommand _ClosePumpCommand;
 
-         public DelegateCommand ClosePumpCommand =>
 
-             _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
 
-         private DelegateCommand _OpenTurboPumpCommand;
 
-         public DelegateCommand OpenTurboPumpCommand =>
 
-             _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
 
-         private DelegateCommand _CloseTurboPumpCommand;
 
-         public DelegateCommand CloseTurboPumpCommand =>
 
-             _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
 
-         private DelegateCommand _OpenPendulumValveCommand;
 
-         public DelegateCommand OpenPendulumValveCommand =>
 
-             _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
 
-         private DelegateCommand _ClosePendulumValveCommand;
 
-         public DelegateCommand ClosePendulumValveCommand =>
 
-             _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
 
-         private DelegateCommand<object> _PinUpDownCommand;
 
-         public DelegateCommand<object> PinUpDownCommand =>
 
-             _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
 
-         private DelegateCommand<object> _LidUpDownCommand;
 
-         public DelegateCommand<object> LidUpDownCommand =>
 
-             _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
 
-         private DelegateCommand _SetSRfCommand;
 
-         public DelegateCommand SetSRfCommand =>
 
-             _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
 
-         private DelegateCommand _SetBRfCommand;
 
-         public DelegateCommand SetBRfCommand =>
 
-             _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
 
-         private DelegateCommand _OpenButterflyValveViewCommand;
 
-         public DelegateCommand OpenButterflyValveViewCommand =>
 
-             _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
 
-         //private DelegateCommand _HVCommand;
 
-         //public DelegateCommand HVCommand =>
 
-         //    _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
 
-         private DelegateCommand _HVSetCommand;
 
-         public DelegateCommand HVSetCommand =>
 
-             _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
 
-         private DelegateCommand _LoadRecipeCommand;
 
-         public DelegateCommand LoadRecipeCommand =>
 
-             _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
 
-         private DelegateCommand<object> _ControlValveCommand;
 
-         public DelegateCommand<object> ControlValveCommand =>
 
-             _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
 
-         private DelegateCommand<object> _RunRecipeCommand;
 
-         public DelegateCommand<object> RunRecipeCommand =>
 
-             _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
 
-         private DelegateCommand<object> _SetChillerTempCommand;
 
-         public DelegateCommand<object> SetChillerTempCommand =>
 
-             _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
 
-         private DelegateCommand<object> _OnOffChillerCommand;
 
-         public DelegateCommand<object> OnOffChillerCommand =>
 
-             _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
 
-         private DelegateCommand<object> _HeaterCommand;
 
-         public DelegateCommand<object> HeaterCommand =>
 
-             _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
 
-         private DelegateCommand _EndStepCommand;
 
-         public DelegateCommand EndStepCommand =>
 
-             _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
 
-         private DelegateCommand _OnlineCommand;
 
-         public DelegateCommand OnlineCommand =>
 
-             _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
 
-         private DelegateCommand _OfflineCommand;
 
-         public DelegateCommand OfflineCommand =>
 
-             _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
 
-         private DelegateCommand<object> _AbortRecipeCommnad;
 
-         public DelegateCommand<object> AbortRecipeCommnad =>
 
-             _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
 
-         private DelegateCommand _IncludeCommand;
 
-         public DelegateCommand IncludeCommand =>
 
-             _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
 
-         #endregion
 
-         #region 构造函数
 
-         public OverKepler2300ViewModel()
 
-         {
 
-             m_RtDataKeys = new List<string>();
 
-             m_IsATM = true;
 
-             ModuleName = "PMA";
 
-             //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
 
-             DispatcherTimer timer = new DispatcherTimer();
 
-             timer.Interval = TimeSpan.FromSeconds(0.5);
 
-             timer.Tick += timer_Tick;
 
-             timer.Start();
 
-         }
 
-         #endregion
 
-         #region 命令方法
 
-         private void OnControlValve(object obj)
 
-         {
 
-             CommonValveControl commonValveControl = (CommonValveControl)obj;
 
-             if (commonValveControl.IsCanEdit == true)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
 
-                 string operation = commonValveControl.Status ? "关闭" : "打开";
 
-                 LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
 
-             }
 
-         }
 
-         private void OnPMInit()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
 
-         }
 
-         private async void OnGas()
 
-         {
 
-             await Task.Run(async () =>
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
 
-                 await Task.Delay(1000);
 
-                 object[] mfc = new object[8];
 
-                 string[] mfcSetPoint = new string[8];
 
-                 mfc[0] = MFC1Data.SetPoint;
 
-                 mfc[1] = MFC2Data.SetPoint;
 
-                 mfc[2] = MFC3Data.SetPoint;
 
-                 mfc[3] = MFC4Data.SetPoint;
 
-                 mfc[4] = MFC5Data.SetPoint;
 
-                 mfc[5] = MFC6Data.SetPoint;
 
-                 mfc[6] = MFC7Data.SetPoint;
 
-                 mfc[7] = MFC8Data.SetPoint;
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
 
-                 string operation = GasIsFlowing ? "关闭" : "打开";
 
-                 LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
 
-             });
 
-         }
 
-         private void OnHe()
 
-         {
 
-             if (PVHe1ValveIsOpen == true)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
 
-             }
 
-             else
 
-             {
 
-                 if (HeIsPressureMode)
 
-                 {
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
 
-                 }
 
-                 else
 
-                 {
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
 
-                 }
 
-             }
 
-         }
 
-         private void OnRf()
 
-         {
 
-             if (PMCurrentState == PMState.RfPowering)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-             }
 
-             else
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
 
-             }
 
-         }
 
-         private void OnPurge()
 
-         {
 
-             if (PMCurrentState == PMState.Purging)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-             }
 
-             else
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
 
-             }
 
-         }
 
-         private void OnVent()
 
-         {
 
-             if (PMCurrentState == PMState.Venting)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-             }
 
-             else
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
 
-             }
 
-         }
 
-         private void OnPump()
 
-         {
 
-             if (PMCurrentState == PMState.Pumping)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-                 return;
 
-             }
 
-             string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
 
-             string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
 
-             // 设置底压
 
-             double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
 
-             if (basePressure <= 0.01 || basePressure >= 1000)
 
-             {
 
-                 MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
 
-                 return;
 
-             }
 
-             double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
 
-             if (pumpLimit <= 0.01 || pumpLimit >= 1200)
 
-             {
 
-                 MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
 
-                 return;
 
-             }
 
-             InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
 
-             InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
 
-         }
 
-         private void OnOpenPump()
 
-         {
 
-             if (PMCurrentState == PMState.LaunchingPump)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-                 return;
 
-             }
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
 
-         }
 
-         private void OnClosePump()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
 
-         }
 
-         private void OnOpenTurboPump()
 
-         {
 
-             if (PMCurrentState == PMState.LaunchingTurboPump)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
 
-                 return;
 
-             }
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
 
-         }
 
-         private void OnCloseTurboPump()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
 
-         }
 
-         private void OnOpenPendulumValve()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
 
-         }
 
-         private void OnClosePendulumValve()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
 
-         }
 
-         private void OnPinUpDown(object upDown)
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
 
-         }
 
-         private void OnLidUpDown(object upDown)
 
-         {
 
-             //var value = (bool)upDown;
 
-             if (upDown.ToString() == "Up")
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
 
-             }
 
-             else
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
 
-             }
 
-         }
 
-         private  void OnSetSRf()
 
-         {
 
-             if (SRFData.IsRfOn == true)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
 
-             }
 
-             else
 
-             {
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");            
 
-             }
 
-         }
 
-         private  void OnSetBRf()
 
-         {
 
-             if (BRFData.IsRfOn == true)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
 
-             }
 
-             else
 
-             {
 
-                 if (GasIsFlowing == true)
 
-                 {
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
 
-                 }
 
-             }
 
-         }
 
-         private void OnPMAbort()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
 
-         }
 
-         private void OnOpenButterflyValveView()
 
-         {
 
-             var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
 
-             if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
 
-             {
 
-                 butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
 
-                 butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
 
-                 butterflyValveMessageBox.Left = 700;
 
-                 butterflyValveMessageBox.Top = 600;
 
-                 butterflyValveMessageBox.Show();
 
-                 butterflyValveMessageBox.Owner = _mainWindow;
 
-             }
 
-         }
 
-         private void OnLoadRecipe()
 
-         {
 
-             CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
 
-         }
 
-         private void OnHVSet()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
 
-         }
 
-         private void OnRunRecipe(object obj)
 
-         {
 
-             string recipeName = SelectedRecipe;
 
-             if (recipeName == null)
 
-             {
 
-                 return;
 
-             }
 
-             ClearData();
 
-             var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
 
-             CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
 
-         }
 
-         private void OnSetChillerTemp(object obj)
 
-         {
 
-             float offset;
 
-             float setPoint;
 
-             var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
 
-             switch (chillerType)
 
-             {
 
-                 case ChillerType.Chiller:
 
-                     var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
 
-                     float.TryParse(value, out offset);
 
-                     setPoint = ChillerTempSetpoint;
 
-                     break;
 
-                 case ChillerType.InnerChiller:
 
-                     var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
 
-                     float.TryParse(Innervalue, out offset);
 
-                     setPoint = InnerChillerTempSetpoint;
 
-                     break;
 
-                 case ChillerType.OuterChiller:
 
-                     var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
 
-                     float.TryParse(Outervalue, out offset);
 
-                     setPoint = OuterChillerTempSetpoint;
 
-                     break;
 
-                 case ChillerType.TopChiller:
 
-                     var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
 
-                     float.TryParse(Topvalue, out offset);
 
-                     setPoint = TopChillerTempSetpoint;
 
-                     break;
 
-                 default:
 
-                     return;
 
-             }
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
 
-         }
 
-         private void OnOffChiller(object obj)
 
-         {
 
-             var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
 
-             switch (chillerType)
 
-             {
 
-                 case ChillerType.Chiller:
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
 
-                     break;
 
-                 case ChillerType.InnerChiller:
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
 
-                     break;
 
-                 case ChillerType.OuterChiller:
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
 
-                     break;
 
-                 case ChillerType.TopChiller:
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
 
-                     break;
 
-                 default:
 
-                     return;
 
-             }
 
-         }
 
-         private void OnHeater(object obj)
 
-         {
 
-             if (IsAutoMode == true)
 
-             {
 
-                 return;
 
-             }
 
-             AITHeaterData heaterData = obj as AITHeaterData;
 
-             var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
 
-             if (heaterView == null || heaterView.IsVisible == false)
 
-             {
 
-                 heaterView = new HeaterView(heaterData, ModuleName);
 
-                 heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
 
-                 heaterView.Owner = _mainWindow;
 
-                 heaterView.Show();
 
-             }
 
-         }
 
-         private void OnEndStep()
 
-         {
 
-             if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
 
-             }
 
-             else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
 
-             }
 
-         }
 
-         private void OnOnline()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
 
-         }
 
-         private void OnOffline()
 
-         {
 
-             InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
 
-         }
 
-         private async void OnAbortRecipe(object obj)
 
-         {
 
-             if (PMCurrentState != PMState.Processing)
 
-             {
 
-                 return;
 
-             }
 
-             switch (obj.ToString())
 
-             {
 
-                 case "0":
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
 
-                     break;
 
-                 case "1":
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
 
-                     //if (ESCHVData.IsOn == true)
 
-                     //{
 
-                     //    await Task.Delay(3000);
 
-                     //    InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
 
-                     //}
 
-                     break;
 
-                 case "2":
 
-                     InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");                 
 
-                     await Task.Delay(3000);                 
 
-                     InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
 
-                     break;
 
-             }
 
-         }
 
-         private void OnInclude()
 
-         {
 
-             if (IsInclude)
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
 
-             }
 
-             else
 
-             {
 
-                 InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
 
-             }
 
-         }
 
-         #endregion
 
-         #region 私有方法
 
-         private void ClearData()
 
-         {
 
-             ESCVoltage = 0;
 
-             SRFFwdPowerSetpoint = 0;
 
-             SRFMatchC1 = 0;
 
-             SRFMatchC2 = 0;
 
-             BRFFwdPowerSetpoint = 0;
 
-             BRFMatchC1 = 0;
 
-             BRFMatchC2 = 0;
 
-             HeGasSetpoint = 0;
 
-             MFC1SetPoint = 0;
 
-             MFC2SetPoint = 0;
 
-             MFC3SetPoint = 0;
 
-             MFC4SetPoint = 0;
 
-             MFC5SetPoint = 0;
 
-             MFC6SetPoint = 0;
 
-             MFC7SetPoint = 0;
 
-             MFC8SetPoint = 0;
 
-         }
 
-         private IEnumerable<string> GetFilesNames(string path)
 
-         {
 
-             if (Directory.Exists(path))
 
-             {
 
-                 return Directory.GetFiles(path, "*.rcp")?
 
-           .Select(Path.GetFileNameWithoutExtension);
 
-             }
 
-             else
 
-             {
 
-                 return new List<string>();
 
-             }
 
-         }
 
-         void timer_Tick(object sender, EventArgs e)
 
-         {
 
-             RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
 
-             if (RtDataValues == null)
 
-             {
 
-                 return;
 
-             }
 
-             TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
 
-             PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
 
-             GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
 
-             PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
 
-             PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
 
-             PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
 
-             PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
 
-             PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
 
-             PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
 
-             PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
 
-             PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
 
-             MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
 
-             MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
 
-             MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
 
-             MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
 
-             MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
 
-             MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
 
-             MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
 
-             MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
 
-             N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
 
-             SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
 
-             FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
 
-             GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
 
-             PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
 
-             PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
 
-             PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
 
-             PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
 
-             TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
 
-             TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
 
-             WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
 
-             PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
 
-             TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
 
-             LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
 
-             IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
 
-             IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
 
-             PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
 
-             TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
 
-             PositionValue = -((int)((PendulumValvePosition) * 0.09));
 
-             PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
 
-             GasIsFlowing = PMCurrentState == PMState.GasFlowing;
 
-             IsProcessing = PMCurrentState == PMState.Processing;
 
-             MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
 
-             MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
 
-             MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
 
-             MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
 
-             MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
 
-             MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
 
-             MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
 
-             MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
 
-             MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
 
-             MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
 
-             SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
 
-             BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
 
-             PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
 
-             //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
 
-             ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
 
-             ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
 
-             WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
 
-             PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
 
-             ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
 
-             ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
 
-             ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
 
-             ESCHePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ESCHePressure");
 
-             //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
 
-             InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp"); 
 
-             OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp"); 
 
-             TopTemperature   = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
 
-             InnerChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.InnerChiller.IsOn");
 
-             OuterChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.OuterChiller.IsOn");
 
-             TopChillerIsOn   = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TopChiller.IsOn");
 
-             SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
 
-             IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
 
-             IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
 
-             IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
 
-             IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
 
-             SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
 
-             SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
 
-             IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
 
-             IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
 
-             ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
 
-             MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
 
-             MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
 
-             BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
 
-             BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
 
-             TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
 
-             IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
 
-             IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
 
-             if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
 
-             {
 
-                 CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
 
-                 if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
 
-                 {
 
-                     var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
 
-                     CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
 
-                     CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
 
-                 }
 
-                 currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
 
-             }
 
-             else
 
-             {
 
-                 CurrentRecipeResult = null;
 
-                 CurrentRecipeStep = null;
 
-             }
 
-             if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100)
 
-             {
 
-                 ChamberPressureFeedBack = ProcessPressure;
 
-             }
 
-             else
 
-             {
 
-                 ChamberPressureFeedBack = ChamberPressure;
 
-             }
 
-             IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
 
-             IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
 
-         }
 
-         public void addDataKeys()
 
-         {
 
-             m_RtDataKeys.Clear();
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcHe");
 
-             m_RtDataKeys.Add($"{ModuleName}.MfcN2");
 
-             m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
 
-             m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
 
-             m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
 
-             m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
 
-             m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsATM");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsVAC");
 
-             m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
 
-             m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
 
-             m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
 
-             m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
 
-             // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
 
-             m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
 
-             //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
 
-             m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsWLK");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
 
-             m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
 
-             m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
 
-             m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
 
-             m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn");
 
-             m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn");
 
-             m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn");
 
-             m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
 
-             m_RtDataKeys.Add($"{ModuleName}.FsmState");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
 
-             m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
 
-             m_RtDataKeys.Add($"{ModuleName}.HasWafer");
 
-             m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
 
-             m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
 
-             m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
 
-             m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsOnline");
 
-             m_RtDataKeys.Add($"{ModuleName}.IsInclude");
 
-         }
 
-         #endregion
 
-     }
 
- }
 
 
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