OverKepler2300ViewModel.cs 68 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659166016611662166316641665166616671668166916701671167216731674167516761677167816791680168116821683168416851686168716881689169016911692169316941695169616971698169917001701170217031704170517061707170817091710171117121713171417151716171717181719172017211722172317241725172617271728172917301731173217331734173517361737173817391740174117421743174417451746174717481749175017511752175317541755175617571758175917601761176217631764176517661767176817691770177117721773177417751776177717781779178017811782178317841785178617871788178917901791179217931794179517961797179817991800180118021803180418051806180718081809181018111812181318141815181618171818181918201821182218231824182518261827182818291830
  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using Aitex.Core.RT.Log;
  20. namespace Venus_MainPages.ViewModels
  21. {
  22. internal class OverKepler2300ViewModel : BindableBase
  23. {
  24. #region 私有字段
  25. private List<string> m_CurrentModuleRecipes = new List<string>();
  26. private bool m_PVN21ValveIsOpen;
  27. private bool m_PVN22ValveIsOpen;
  28. private bool m_N2ValveIsOpen;
  29. private bool m_PV11ValveIsOpen;
  30. private bool m_PV12ValveIsOpen;
  31. private bool m_PV21ValveIsOpen;
  32. private bool m_PV22ValveIsOpen;
  33. private bool m_PV31ValveIsOpen;
  34. private bool m_PV32ValveIsOpen;
  35. private bool m_PV41ValveIsOpen;
  36. private bool m_PV42ValveIsOpen;
  37. private bool m_MFC1ValveIsOpen;
  38. private bool m_MFC2ValveIsOpen;
  39. private bool m_MFC3ValveIsOpen;
  40. private bool m_MFC4ValveIsOpen;
  41. private bool m_MFC5ValveIsOpen;
  42. private bool m_MFC6ValveIsOpen;
  43. private bool m_MFC7ValveIsOpen;
  44. private bool m_MFC8ValveIsOpen;
  45. private bool m_GasFinalValveIsOpen;
  46. private bool m_SoftPumpValveIsOpen;
  47. private bool m_FastPumpValveIsOpen;
  48. private bool m_PVHe1ValveIsOpen;
  49. private bool m_PVHe2ValveIsOpen;
  50. private bool m_TurboPumpPumpingValveIsOpen;
  51. private bool m_TurboPumpPurgeValveIsOpen;
  52. private bool m_GuageValveIsOpen;
  53. private bool m_PendulumValveIsOpen;
  54. private double m_HeGasSetpoint;
  55. private int m_HePressureSetpoint;
  56. private float m_SRFFwdPowerSetpoint;
  57. private float m_BRFFwdPowerSetpoint;
  58. private float m_SRFMatchC1;
  59. private float m_SRFMatchC2;
  60. private float m_BRFMatchC1;
  61. private float m_BRFMatchC2;
  62. private double m_MFC1SetPoint;
  63. private double m_MFC2SetPoint;
  64. private double m_MFC3SetPoint;
  65. private double m_MFC4SetPoint;
  66. private double m_MFC5SetPoint;
  67. private double m_MFC6SetPoint;
  68. private double m_MFC7SetPoint;
  69. private double m_MFC8SetPoint;
  70. private double m_N2SetPoint;
  71. private AITMfcData m_MFC1Data;
  72. private AITMfcData m_MFC2Data;
  73. private AITMfcData m_MFC3Data;
  74. private AITMfcData m_MFC4Data;
  75. private AITMfcData m_MFC5Data;
  76. private AITMfcData m_MFC6Data;
  77. private AITMfcData m_MFC7Data;
  78. private AITMfcData m_MFC8Data;
  79. private AITMfcData m_MFCHeData;
  80. private AITMfcData m_MFCN2Data;
  81. private AITHeaterData m_ValveHeaterData;
  82. private AITHeaterData m_ForelineHeaterData;
  83. private AITHeaterData m_WallHeaterData;
  84. private AITHeaterData m_PendulumHeaterData;
  85. private AITRfData m_SRFData;
  86. private AITRfData m_BRFData;
  87. private AITPendulumValveData m_PendulumValveData;
  88. private PMState m_PMCurrentState;
  89. private bool m_SourceRFFanInterlock;
  90. private bool m_IsWLK;
  91. private bool m_IsWaterFlowOk;
  92. private bool m_IsTurboPumpInterlock;
  93. private bool m_IsCDAOK;
  94. private bool m_SensorGasBoxDoor;
  95. private bool m_SensorGasBoxPressure;
  96. private bool m_PumpIsOpen;
  97. private bool m_TurboIsOpen;
  98. private bool m_IsATM;
  99. private bool m_IsVAC;
  100. private List<string> m_RtDataKeys;
  101. private Dictionary<string, object> m_RtDataValues;
  102. private int m_PositionValue;
  103. private bool m_IsPositionMode;
  104. private int m_ESCVoltage;
  105. private bool m_GasIsFlowing;
  106. private bool m_IsProcessing;
  107. private bool m_IsAutoMode;
  108. private string m_SelectedRecipe;
  109. private float m_ChillerTempSetpoint;
  110. private float m_InnerChillerTempSetpoint;
  111. private float m_OuterChillerTempSetpoint;
  112. private float m_TopChillerTempSetpoint;
  113. private float m_WallTempSetpoint;
  114. private bool m_HeIsPressureMode = true;
  115. private bool m_ChillerIsOn;
  116. private bool m_InnerChillerIsOn;
  117. private bool m_OuterChillerIsOn;
  118. private bool m_TopChillerIsOn;
  119. private float m_ChamberPressure;
  120. private float m_ProcessPressure;
  121. private float m_ForelinePressurePressure;
  122. private float m_ESCHePressure;
  123. ButterflyValveView butterflyValveMessageBox;
  124. HeaterView heaterView;
  125. private int m_TurboPumpRotationalSpeed;
  126. private bool m_LiftPinIsUp;
  127. private bool m_IsSlitDoorClosed;
  128. private bool m_IsLidClosed;
  129. private float m_ChillerTemperature;
  130. private float m_InnerTemperature;
  131. private float m_OuterTemperature;
  132. private float m_TopTemperature;
  133. private int m_ESCHVOutputVoltage;
  134. private float m_MatchC1;
  135. private float m_MatchC2;
  136. private float m_BiasMatchC1;
  137. private float m_BiasMatchC2;
  138. private float m_PendulumValvePosition;
  139. private bool m_IsTurboPumpAtSpeed;
  140. private bool m_TurboPumpWaterFlowSwitch;
  141. private bool m_IsHasWafer;
  142. private Recipe m_CurrentRecipe = new Recipe();
  143. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  144. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  145. private double m_ChamberPressureFeedBack;
  146. private double m_TurboN2FlowSetPoint;
  147. private string m_ModuleName;
  148. private string m_WaferID;
  149. private int? currentRecipeNumber;
  150. private bool m_IsInclude;
  151. #endregion
  152. #region 属性
  153. public bool IsInclude
  154. {
  155. get { return m_IsInclude; }
  156. set { SetProperty(ref m_IsInclude, value); }
  157. }
  158. public List<string> CurrentModuleRecipes
  159. {
  160. get { return m_CurrentModuleRecipes; }
  161. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  162. }
  163. public Recipe CurrentRecipe
  164. {
  165. get { return m_CurrentRecipe; }
  166. set { SetProperty(ref m_CurrentRecipe, value); }
  167. }
  168. public RecipeResult CurrentRecipeResult
  169. {
  170. get { return m_CurrentRecipeResult; }
  171. set { SetProperty(ref m_CurrentRecipeResult, value); }
  172. }
  173. public RecipeStep CurrentRecipeStep
  174. {
  175. get { return m_CurrentRecipeStep; }
  176. set { SetProperty(ref m_CurrentRecipeStep, value); }
  177. }
  178. public bool IsHasWafer
  179. {
  180. get { return m_IsHasWafer; }
  181. set { SetProperty(ref m_IsHasWafer, value); }
  182. }
  183. public bool IsTurboPumpAtSpeed
  184. {
  185. get { return m_IsTurboPumpAtSpeed; }
  186. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  187. }
  188. public bool TurboPumpWaterFlowSwitch
  189. {
  190. get { return m_TurboPumpWaterFlowSwitch; }
  191. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  192. }
  193. public float PendulumValvePosition
  194. {
  195. get { return m_PendulumValvePosition; }
  196. set { SetProperty(ref m_PendulumValvePosition, value); }
  197. }
  198. public float BiasMatchC1
  199. {
  200. get { return m_BiasMatchC1; }
  201. set
  202. {
  203. SetProperty(ref m_BiasMatchC1, value);
  204. }
  205. }
  206. public float BiasMatchC2
  207. {
  208. get { return m_BiasMatchC2; }
  209. set
  210. {
  211. SetProperty(ref m_BiasMatchC2, value);
  212. }
  213. }
  214. public float MatchC1
  215. {
  216. get { return m_MatchC1; }
  217. set
  218. {
  219. SetProperty(ref m_MatchC1, value);
  220. }
  221. }
  222. public float MatchC2
  223. {
  224. get { return m_MatchC2; }
  225. set
  226. {
  227. SetProperty(ref m_MatchC2, value);
  228. }
  229. }
  230. public AITPendulumValveData PendulumValveData
  231. {
  232. get { return m_PendulumValveData; }
  233. set
  234. {
  235. SetProperty(ref m_PendulumValveData, value);
  236. }
  237. }
  238. //public AITHVData ESCHVData
  239. //{
  240. // get { return m_ESCHVData; }
  241. // set
  242. // {
  243. // SetProperty(ref m_ESCHVData, value);
  244. // }
  245. //}
  246. public int ESCHVOutputVoltage
  247. {
  248. get { return m_ESCHVOutputVoltage; }
  249. set
  250. {
  251. SetProperty(ref m_ESCHVOutputVoltage, value);
  252. }
  253. }
  254. public float ChillerTemperature
  255. {
  256. get { return m_ChillerTemperature; }
  257. set
  258. {
  259. SetProperty(ref m_ChillerTemperature, value);
  260. }
  261. }
  262. public float InnerTemperature
  263. {
  264. get { return m_InnerTemperature; }
  265. set
  266. {
  267. SetProperty(ref m_InnerTemperature, value);
  268. }
  269. }
  270. public float OuterTemperature
  271. {
  272. get { return m_OuterTemperature; }
  273. set
  274. {
  275. SetProperty(ref m_OuterTemperature, value);
  276. }
  277. }
  278. public float TopTemperature
  279. {
  280. get { return m_TopTemperature; }
  281. set
  282. {
  283. SetProperty(ref m_TopTemperature, value);
  284. }
  285. }
  286. //public float HVTemperature
  287. //{
  288. // get { return m_HVTemperature; }
  289. // set
  290. // {
  291. // SetProperty(ref m_HVTemperature, value);
  292. // }
  293. //}
  294. public bool IsLidClosed
  295. {
  296. get { return m_IsLidClosed; }
  297. set
  298. {
  299. SetProperty(ref m_IsLidClosed, value);
  300. }
  301. }
  302. public bool IsSlitDoorClosed
  303. {
  304. get { return m_IsSlitDoorClosed; }
  305. set
  306. {
  307. SetProperty(ref m_IsSlitDoorClosed, value);
  308. }
  309. }
  310. public bool LiftPinIsUp
  311. {
  312. get { return m_LiftPinIsUp; }
  313. set
  314. {
  315. SetProperty(ref m_LiftPinIsUp, value);
  316. }
  317. }
  318. public int TurboPumpRotationalSpeed
  319. {
  320. get { return m_TurboPumpRotationalSpeed; }
  321. set
  322. {
  323. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  324. }
  325. }
  326. public float ESCHePressure
  327. {
  328. get { return m_ESCHePressure; }
  329. set
  330. {
  331. SetProperty(ref m_ESCHePressure, value);
  332. }
  333. }
  334. public float ChamberPressure
  335. {
  336. get { return m_ChamberPressure; }
  337. set
  338. {
  339. SetProperty(ref m_ChamberPressure, value);
  340. }
  341. }
  342. public float ProcessPressure
  343. {
  344. get { return m_ProcessPressure; }
  345. set
  346. {
  347. SetProperty(ref m_ProcessPressure, value);
  348. }
  349. }
  350. public float ForelinePressure
  351. {
  352. get { return m_ForelinePressurePressure; }
  353. set
  354. {
  355. SetProperty(ref m_ForelinePressurePressure, value);
  356. }
  357. }
  358. public bool SourceRFFanInterlock
  359. {
  360. get { return m_SourceRFFanInterlock; }
  361. set
  362. {
  363. SetProperty(ref m_SourceRFFanInterlock, value);
  364. }
  365. }
  366. public bool IsWLK
  367. {
  368. get { return m_IsWLK; }
  369. set
  370. {
  371. SetProperty(ref m_IsWLK, value);
  372. }
  373. }
  374. public bool IsWaterFlowOk
  375. {
  376. get { return m_IsWaterFlowOk; }
  377. set
  378. {
  379. SetProperty(ref m_IsWaterFlowOk, value);
  380. }
  381. }
  382. public bool IsCDAOK
  383. {
  384. get { return m_IsCDAOK; }
  385. set
  386. {
  387. SetProperty(ref m_IsCDAOK, value);
  388. }
  389. }
  390. public bool SensorGasBoxDoor
  391. {
  392. get { return m_SensorGasBoxDoor; }
  393. set
  394. {
  395. SetProperty(ref m_SensorGasBoxDoor, value);
  396. }
  397. }
  398. public bool SensorGasBoxPressure
  399. {
  400. get { return m_SensorGasBoxPressure; }
  401. set
  402. {
  403. SetProperty(ref m_SensorGasBoxPressure, value);
  404. }
  405. }
  406. public bool IsTurboPumpInterlock
  407. {
  408. get { return m_IsTurboPumpInterlock; }
  409. set
  410. {
  411. SetProperty(ref m_IsTurboPumpInterlock, value);
  412. }
  413. }
  414. public string ModuleName
  415. {
  416. get { return m_ModuleName; }
  417. set
  418. {
  419. SetProperty(ref m_ModuleName, value);
  420. }
  421. }
  422. public double MFC1SetPoint
  423. {
  424. get { return m_MFC1SetPoint; }
  425. set { SetProperty(ref m_MFC1SetPoint, value); }
  426. }
  427. public double MFC2SetPoint
  428. {
  429. get { return m_MFC2SetPoint; }
  430. set { SetProperty(ref m_MFC2SetPoint, value); }
  431. }
  432. public double MFC3SetPoint
  433. {
  434. get { return m_MFC3SetPoint; }
  435. set { SetProperty(ref m_MFC3SetPoint, value); }
  436. }
  437. public double MFC4SetPoint
  438. {
  439. get { return m_MFC4SetPoint; }
  440. set { SetProperty(ref m_MFC4SetPoint, value); }
  441. }
  442. public double MFC5SetPoint
  443. {
  444. get { return m_MFC5SetPoint; }
  445. set { SetProperty(ref m_MFC5SetPoint, value); }
  446. }
  447. public double MFC6SetPoint
  448. {
  449. get { return m_MFC6SetPoint; }
  450. set { SetProperty(ref m_MFC6SetPoint, value); }
  451. }
  452. public double MFC7SetPoint
  453. {
  454. get { return m_MFC7SetPoint; }
  455. set { SetProperty(ref m_MFC7SetPoint, value); }
  456. }
  457. public double MFC8SetPoint
  458. {
  459. get { return m_MFC8SetPoint; }
  460. set { SetProperty(ref m_MFC8SetPoint, value); }
  461. }
  462. public double N2SetPoint
  463. {
  464. get { return m_N2SetPoint; }
  465. set { SetProperty(ref m_N2SetPoint, value); }
  466. }
  467. public double TurboN2FlowSetPoint
  468. {
  469. get { return m_TurboN2FlowSetPoint; }
  470. set
  471. {
  472. if (value != m_TurboN2FlowSetPoint)
  473. {
  474. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  475. }
  476. SetProperty(ref m_TurboN2FlowSetPoint, value);
  477. }
  478. }
  479. public AITMfcData MFC1Data
  480. {
  481. get { return m_MFC1Data; }
  482. set { SetProperty(ref m_MFC1Data, value); }
  483. }
  484. public AITMfcData MFC2Data
  485. {
  486. get { return m_MFC2Data; }
  487. set { SetProperty(ref m_MFC2Data, value); }
  488. }
  489. public AITMfcData MFC3Data
  490. {
  491. get { return m_MFC3Data; }
  492. set { SetProperty(ref m_MFC3Data, value); }
  493. }
  494. public AITMfcData MFC4Data
  495. {
  496. get { return m_MFC4Data; }
  497. set { SetProperty(ref m_MFC4Data, value); }
  498. }
  499. public AITMfcData MFC5Data
  500. {
  501. get { return m_MFC5Data; }
  502. set { SetProperty(ref m_MFC5Data, value); }
  503. }
  504. public AITMfcData MFC6Data
  505. {
  506. get { return m_MFC6Data; }
  507. set { SetProperty(ref m_MFC6Data, value); }
  508. }
  509. public AITMfcData MFC7Data
  510. {
  511. get { return m_MFC7Data; }
  512. set { SetProperty(ref m_MFC7Data, value); }
  513. }
  514. public AITMfcData MFC8Data
  515. {
  516. get { return m_MFC8Data; }
  517. set { SetProperty(ref m_MFC8Data, value); }
  518. }
  519. public AITMfcData MFCHeData
  520. {
  521. get { return m_MFCHeData; }
  522. set { SetProperty(ref m_MFCHeData, value); }
  523. }
  524. public AITMfcData MFCN2Data
  525. {
  526. get { return m_MFCN2Data; }
  527. set { SetProperty(ref m_MFCN2Data, value); }
  528. }
  529. public AITHeaterData ValveHeaterData
  530. {
  531. get { return m_ValveHeaterData; }
  532. set { SetProperty(ref m_ValveHeaterData, value); }
  533. }
  534. public AITHeaterData ForelineHeaterData
  535. {
  536. get { return m_ForelineHeaterData; }
  537. set { SetProperty(ref m_ForelineHeaterData, value); }
  538. }
  539. public AITHeaterData WallHeaterData
  540. {
  541. get { return m_WallHeaterData; }
  542. set { SetProperty(ref m_WallHeaterData, value); }
  543. }
  544. public AITHeaterData PendulumHeaterData
  545. {
  546. get { return m_PendulumHeaterData; }
  547. set { SetProperty(ref m_PendulumHeaterData, value); }
  548. }
  549. public AITRfData SRFData
  550. {
  551. get { return m_SRFData; }
  552. set { SetProperty(ref m_SRFData, value); }
  553. }
  554. public AITRfData BRFData
  555. {
  556. get { return m_BRFData; }
  557. set { SetProperty(ref m_BRFData, value); }
  558. }
  559. public PMState PMCurrentState
  560. {
  561. get { return m_PMCurrentState; }
  562. set { SetProperty(ref m_PMCurrentState, value); }
  563. }
  564. #region 阀
  565. public bool GasFinalValveIsOpen
  566. {
  567. get { return m_GasFinalValveIsOpen; }
  568. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  569. }
  570. public bool PVN21ValveIsOpen
  571. {
  572. get { return m_PVN21ValveIsOpen; }
  573. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  574. }
  575. public bool PVN22ValveIsOpen
  576. {
  577. get { return m_PVN22ValveIsOpen; }
  578. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  579. }
  580. public bool N2ValveIsOpen
  581. {
  582. get { return m_N2ValveIsOpen; }
  583. set { SetProperty(ref m_N2ValveIsOpen, value); }
  584. }
  585. public bool PV11ValveIsOpen
  586. {
  587. get { return m_PV11ValveIsOpen; }
  588. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  589. }
  590. public bool PV12ValveIsOpen
  591. {
  592. get { return m_PV12ValveIsOpen; }
  593. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  594. }
  595. public bool MFC1ValveIsOpen
  596. {
  597. get { return m_MFC1ValveIsOpen; }
  598. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  599. }
  600. public bool PV21ValveIsOpen
  601. {
  602. get { return m_PV21ValveIsOpen; }
  603. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  604. }
  605. public bool PV22ValveIsOpen
  606. {
  607. get { return m_PV22ValveIsOpen; }
  608. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  609. }
  610. public bool MFC2ValveIsOpen
  611. {
  612. get { return m_MFC2ValveIsOpen; }
  613. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  614. }
  615. public bool PV31ValveIsOpen
  616. {
  617. get { return m_PV31ValveIsOpen; }
  618. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  619. }
  620. public bool PV32ValveIsOpen
  621. {
  622. get { return m_PV32ValveIsOpen; }
  623. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  624. }
  625. public bool MFC3ValveIsOpen
  626. {
  627. get { return m_MFC3ValveIsOpen; }
  628. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  629. }
  630. public bool PV41ValveIsOpen
  631. {
  632. get { return m_PV41ValveIsOpen; }
  633. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  634. }
  635. public bool PV42ValveIsOpen
  636. {
  637. get { return m_PV42ValveIsOpen; }
  638. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  639. }
  640. public bool MFC4ValveIsOpen
  641. {
  642. get { return m_MFC4ValveIsOpen; }
  643. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  644. }
  645. public bool MFC5ValveIsOpen
  646. {
  647. get { return m_MFC5ValveIsOpen; }
  648. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  649. }
  650. public bool MFC6ValveIsOpen
  651. {
  652. get { return m_MFC6ValveIsOpen; }
  653. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  654. }
  655. public bool MFC7ValveIsOpen
  656. {
  657. get { return m_MFC7ValveIsOpen; }
  658. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  659. }
  660. public bool MFC8ValveIsOpen
  661. {
  662. get { return m_MFC8ValveIsOpen; }
  663. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  664. }
  665. public bool PVHe1ValveIsOpen
  666. {
  667. get { return m_PVHe1ValveIsOpen; }
  668. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  669. }
  670. public bool PVHe2ValveIsOpen
  671. {
  672. get { return m_PVHe2ValveIsOpen; }
  673. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  674. }
  675. public bool TurboPumpPumpingValveIsOpen
  676. {
  677. get { return m_TurboPumpPumpingValveIsOpen; }
  678. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  679. }
  680. public bool TurboPumpPurgeValveIsOpen
  681. {
  682. get { return m_TurboPumpPurgeValveIsOpen; }
  683. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  684. }
  685. public bool SoftPumpValveIsOpen
  686. {
  687. get { return m_SoftPumpValveIsOpen; }
  688. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  689. }
  690. public bool FastPumpValveIsOpen
  691. {
  692. get { return m_FastPumpValveIsOpen; }
  693. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  694. }
  695. public bool GuageValveIsOpen
  696. {
  697. get { return m_GuageValveIsOpen; }
  698. set { SetProperty(ref m_GuageValveIsOpen, value); }
  699. }
  700. #endregion
  701. public Dictionary<string, object> RtDataValues
  702. {
  703. get { return m_RtDataValues; }
  704. set { SetProperty(ref m_RtDataValues, value); }
  705. }
  706. public bool PumpIsOpen
  707. {
  708. get { return m_PumpIsOpen; }
  709. set { SetProperty(ref m_PumpIsOpen, value); }
  710. }
  711. public bool PendulumValveIsOpen
  712. {
  713. get { return m_PendulumValveIsOpen; }
  714. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  715. }
  716. public bool TurboIsOpen
  717. {
  718. get { return m_TurboIsOpen; }
  719. set { SetProperty(ref m_TurboIsOpen, value); }
  720. }
  721. public bool IsATM
  722. {
  723. get { return m_IsATM; }
  724. set { SetProperty(ref m_IsATM, value); }
  725. }
  726. public bool IsVAC
  727. {
  728. get { return m_IsVAC; }
  729. set { SetProperty(ref m_IsVAC, value); }
  730. }
  731. //public bool BRFIsOn
  732. //{
  733. // get { return m_BRFIsOn; }
  734. // set { SetProperty(ref m_BRFIsOn, value); }
  735. //}
  736. //public bool SRFIsOn
  737. //{
  738. // get { return m_SRFIsOn; }
  739. // set { SetProperty(ref m_SRFIsOn, value); }
  740. //}
  741. public int PositionValue
  742. {
  743. get { return m_PositionValue; }
  744. set { SetProperty(ref m_PositionValue, value); }
  745. }
  746. public bool IsPositionMode
  747. {
  748. get { return m_IsPositionMode; }
  749. set { SetProperty(ref m_IsPositionMode, value); }
  750. }
  751. public double HeGasSetpoint
  752. {
  753. get { return m_HeGasSetpoint; }
  754. set
  755. {
  756. SetProperty(ref m_HeGasSetpoint, value);
  757. }
  758. }
  759. public int HePressureSetpoint
  760. {
  761. get { return m_HePressureSetpoint; }
  762. set
  763. {
  764. SetProperty(ref m_HePressureSetpoint, value);
  765. }
  766. }
  767. public float SRFFwdPowerSetpoint
  768. {
  769. get { return m_SRFFwdPowerSetpoint; }
  770. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  771. }
  772. public float BRFFwdPowerSetpoint
  773. {
  774. get { return m_BRFFwdPowerSetpoint; }
  775. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  776. }
  777. public int ESCVoltage
  778. {
  779. get { return m_ESCVoltage; }
  780. set { SetProperty(ref m_ESCVoltage, value); }
  781. }
  782. public float SRFMatchC1
  783. {
  784. get { return m_SRFMatchC1; }
  785. set { SetProperty(ref m_SRFMatchC1, value); }
  786. }
  787. public float SRFMatchC2
  788. {
  789. get { return m_SRFMatchC2; }
  790. set { SetProperty(ref m_SRFMatchC2, value); }
  791. }
  792. public float BRFMatchC1
  793. {
  794. get { return m_BRFMatchC1; }
  795. set { SetProperty(ref m_BRFMatchC1, value); }
  796. }
  797. public float BRFMatchC2
  798. {
  799. get { return m_BRFMatchC2; }
  800. set { SetProperty(ref m_BRFMatchC2, value); }
  801. }
  802. public bool GasIsFlowing
  803. {
  804. get { return m_GasIsFlowing; }
  805. set { SetProperty(ref m_GasIsFlowing, value); }
  806. }
  807. public bool IsProcessing
  808. {
  809. get { return m_IsProcessing; }
  810. set { SetProperty(ref m_IsProcessing, value); }
  811. }
  812. public bool IsAutoMode
  813. {
  814. get { return m_IsAutoMode; }
  815. set { SetProperty(ref m_IsAutoMode, value); }
  816. }
  817. public string SelectedRecipe
  818. {
  819. get { return m_SelectedRecipe; }
  820. set { SetProperty(ref m_SelectedRecipe, value); }
  821. }
  822. public float ChillerTempSetpoint
  823. {
  824. get { return m_ChillerTempSetpoint; }
  825. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  826. }
  827. public float InnerChillerTempSetpoint
  828. {
  829. get { return m_InnerChillerTempSetpoint; }
  830. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  831. }
  832. public float OuterChillerTempSetpoint
  833. {
  834. get { return m_OuterChillerTempSetpoint; }
  835. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  836. }
  837. public float TopChillerTempSetpoint
  838. {
  839. get { return m_TopChillerTempSetpoint; }
  840. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  841. }
  842. public float WallTempSetpoint
  843. {
  844. get { return m_WallTempSetpoint; }
  845. set { SetProperty(ref m_WallTempSetpoint, value); }
  846. }
  847. public bool HeIsPressureMode
  848. {
  849. get { return m_HeIsPressureMode; }
  850. set { SetProperty(ref m_HeIsPressureMode, value); }
  851. }
  852. public bool ChillerIsOn
  853. {
  854. get { return m_ChillerIsOn; }
  855. set { SetProperty(ref m_ChillerIsOn, value); }
  856. }
  857. public bool InnerChillerIsOn
  858. {
  859. get { return m_InnerChillerIsOn; }
  860. set { SetProperty(ref m_InnerChillerIsOn, value); }
  861. }
  862. public bool OuterChillerIsOn
  863. {
  864. get { return m_OuterChillerIsOn; }
  865. set { SetProperty(ref m_OuterChillerIsOn, value); }
  866. }
  867. public bool TopChillerIsOn
  868. {
  869. get { return m_TopChillerIsOn; }
  870. set { SetProperty(ref m_TopChillerIsOn, value); }
  871. }
  872. public double ChamberPressureFeedBack
  873. {
  874. get { return m_ChamberPressureFeedBack; }
  875. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  876. }
  877. public string WaferID
  878. {
  879. get { return m_WaferID; }
  880. set { SetProperty(ref m_WaferID, value); }
  881. }
  882. #endregion
  883. #region 命令
  884. private DelegateCommand _PMInitCommnad;
  885. public DelegateCommand PMInitCommnad =>
  886. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  887. private DelegateCommand _PMAbortCommnad;
  888. public DelegateCommand PMAbortCommnad =>
  889. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  890. private DelegateCommand _GasCommand;
  891. public DelegateCommand GasCommand =>
  892. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  893. private DelegateCommand _HeCommand;
  894. public DelegateCommand HeCommand =>
  895. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  896. private DelegateCommand _RfCommand;
  897. public DelegateCommand RfCommand =>
  898. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  899. private DelegateCommand _PurgeCommand;
  900. public DelegateCommand PurgeCommand =>
  901. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  902. private DelegateCommand _VentCommand;
  903. public DelegateCommand VentCommand =>
  904. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  905. private DelegateCommand _PumpCommand;
  906. public DelegateCommand PumpCommand =>
  907. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  908. private DelegateCommand _OpenPumpCommand;
  909. public DelegateCommand OpenPumpCommand =>
  910. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  911. private DelegateCommand _ClosePumpCommand;
  912. public DelegateCommand ClosePumpCommand =>
  913. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  914. private DelegateCommand _OpenTurboPumpCommand;
  915. public DelegateCommand OpenTurboPumpCommand =>
  916. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  917. private DelegateCommand _CloseTurboPumpCommand;
  918. public DelegateCommand CloseTurboPumpCommand =>
  919. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  920. private DelegateCommand _OpenPendulumValveCommand;
  921. public DelegateCommand OpenPendulumValveCommand =>
  922. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  923. private DelegateCommand _ClosePendulumValveCommand;
  924. public DelegateCommand ClosePendulumValveCommand =>
  925. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  926. private DelegateCommand<object> _PinUpDownCommand;
  927. public DelegateCommand<object> PinUpDownCommand =>
  928. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  929. private DelegateCommand<object> _LidUpDownCommand;
  930. public DelegateCommand<object> LidUpDownCommand =>
  931. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  932. private DelegateCommand _SetSRfCommand;
  933. public DelegateCommand SetSRfCommand =>
  934. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  935. private DelegateCommand _SetBRfCommand;
  936. public DelegateCommand SetBRfCommand =>
  937. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  938. private DelegateCommand _OpenButterflyValveViewCommand;
  939. public DelegateCommand OpenButterflyValveViewCommand =>
  940. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  941. //private DelegateCommand _HVCommand;
  942. //public DelegateCommand HVCommand =>
  943. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  944. private DelegateCommand _HVSetCommand;
  945. public DelegateCommand HVSetCommand =>
  946. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  947. private DelegateCommand _LoadRecipeCommand;
  948. public DelegateCommand LoadRecipeCommand =>
  949. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  950. private DelegateCommand<object> _ControlValveCommand;
  951. public DelegateCommand<object> ControlValveCommand =>
  952. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  953. private DelegateCommand<object> _RunRecipeCommand;
  954. public DelegateCommand<object> RunRecipeCommand =>
  955. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  956. private DelegateCommand<object> _SetChillerTempCommand;
  957. public DelegateCommand<object> SetChillerTempCommand =>
  958. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  959. private DelegateCommand<object> _OnOffChillerCommand;
  960. public DelegateCommand<object> OnOffChillerCommand =>
  961. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  962. private DelegateCommand<object> _HeaterCommand;
  963. public DelegateCommand<object> HeaterCommand =>
  964. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  965. private DelegateCommand _EndStepCommand;
  966. public DelegateCommand EndStepCommand =>
  967. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  968. private DelegateCommand _OnlineCommand;
  969. public DelegateCommand OnlineCommand =>
  970. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  971. private DelegateCommand _OfflineCommand;
  972. public DelegateCommand OfflineCommand =>
  973. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  974. private DelegateCommand<object> _AbortRecipeCommnad;
  975. public DelegateCommand<object> AbortRecipeCommnad =>
  976. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  977. private DelegateCommand _IncludeCommand;
  978. public DelegateCommand IncludeCommand =>
  979. _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
  980. #endregion
  981. #region 构造函数
  982. public OverKepler2300ViewModel()
  983. {
  984. m_RtDataKeys = new List<string>();
  985. m_IsATM = true;
  986. ModuleName = "PMA";
  987. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  988. DispatcherTimer timer = new DispatcherTimer();
  989. timer.Interval = TimeSpan.FromSeconds(0.5);
  990. timer.Tick += timer_Tick;
  991. timer.Start();
  992. }
  993. #endregion
  994. #region 命令方法
  995. private void OnControlValve(object obj)
  996. {
  997. CommonValveControl commonValveControl = (CommonValveControl)obj;
  998. if (commonValveControl.IsCanEdit == true)
  999. {
  1000. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  1001. string operation = commonValveControl.Status ? "关闭" : "打开";
  1002. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  1003. }
  1004. }
  1005. private void OnPMInit()
  1006. {
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  1008. }
  1009. private async void OnGas()
  1010. {
  1011. await Task.Run(async () =>
  1012. {
  1013. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1014. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1015. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1016. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1017. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1018. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1019. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1021. await Task.Delay(1000);
  1022. object[] mfc = new object[8];
  1023. string[] mfcSetPoint = new string[8];
  1024. mfc[0] = MFC1Data.SetPoint;
  1025. mfc[1] = MFC2Data.SetPoint;
  1026. mfc[2] = MFC3Data.SetPoint;
  1027. mfc[3] = MFC4Data.SetPoint;
  1028. mfc[4] = MFC5Data.SetPoint;
  1029. mfc[5] = MFC6Data.SetPoint;
  1030. mfc[6] = MFC7Data.SetPoint;
  1031. mfc[7] = MFC8Data.SetPoint;
  1032. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1033. string operation = GasIsFlowing ? "关闭" : "打开";
  1034. LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  1035. });
  1036. }
  1037. private void OnHe()
  1038. {
  1039. if (PVHe1ValveIsOpen == true)
  1040. {
  1041. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1042. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1043. }
  1044. else
  1045. {
  1046. if (HeIsPressureMode)
  1047. {
  1048. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1049. }
  1050. else
  1051. {
  1052. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1053. }
  1054. }
  1055. }
  1056. private void OnRf()
  1057. {
  1058. if (PMCurrentState == PMState.RfPowering)
  1059. {
  1060. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1061. }
  1062. else
  1063. {
  1064. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1065. }
  1066. }
  1067. private void OnPurge()
  1068. {
  1069. if (PMCurrentState == PMState.Purging)
  1070. {
  1071. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1072. }
  1073. else
  1074. {
  1075. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1076. }
  1077. }
  1078. private void OnVent()
  1079. {
  1080. if (PMCurrentState == PMState.Venting)
  1081. {
  1082. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1083. }
  1084. else
  1085. {
  1086. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1087. }
  1088. }
  1089. private void OnPump()
  1090. {
  1091. if (PMCurrentState == PMState.Pumping)
  1092. {
  1093. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1094. return;
  1095. }
  1096. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1097. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1098. // 设置底压
  1099. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1100. if (basePressure <= 0.01 || basePressure >= 1000)
  1101. {
  1102. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1103. return;
  1104. }
  1105. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1106. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1107. {
  1108. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1109. return;
  1110. }
  1111. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1112. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1113. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1114. }
  1115. private void OnOpenPump()
  1116. {
  1117. if (PMCurrentState == PMState.LaunchingPump)
  1118. {
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1120. return;
  1121. }
  1122. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1123. }
  1124. private void OnClosePump()
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1127. }
  1128. private void OnOpenTurboPump()
  1129. {
  1130. if (PMCurrentState == PMState.LaunchingTurboPump)
  1131. {
  1132. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1133. return;
  1134. }
  1135. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1136. }
  1137. private void OnCloseTurboPump()
  1138. {
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1140. }
  1141. private void OnOpenPendulumValve()
  1142. {
  1143. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1144. }
  1145. private void OnClosePendulumValve()
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1148. }
  1149. private void OnPinUpDown(object upDown)
  1150. {
  1151. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1152. }
  1153. private void OnLidUpDown(object upDown)
  1154. {
  1155. //var value = (bool)upDown;
  1156. if (upDown.ToString() == "Up")
  1157. {
  1158. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1159. }
  1160. else
  1161. {
  1162. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1163. }
  1164. }
  1165. private void OnSetSRf()
  1166. {
  1167. if (SRFData.IsRfOn == true)
  1168. {
  1169. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1170. }
  1171. else
  1172. {
  1173. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1174. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1175. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1176. }
  1177. }
  1178. private void OnSetBRf()
  1179. {
  1180. if (BRFData.IsRfOn == true)
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1183. }
  1184. else
  1185. {
  1186. if (GasIsFlowing == true)
  1187. {
  1188. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1189. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1190. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1191. }
  1192. }
  1193. }
  1194. private void OnPMAbort()
  1195. {
  1196. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1197. }
  1198. private void OnOpenButterflyValveView()
  1199. {
  1200. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1201. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1202. {
  1203. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1204. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1205. butterflyValveMessageBox.Left = 700;
  1206. butterflyValveMessageBox.Top = 600;
  1207. butterflyValveMessageBox.Show();
  1208. butterflyValveMessageBox.Owner = _mainWindow;
  1209. }
  1210. }
  1211. private void OnLoadRecipe()
  1212. {
  1213. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1214. }
  1215. private void OnHVSet()
  1216. {
  1217. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1218. }
  1219. private void OnRunRecipe(object obj)
  1220. {
  1221. string recipeName = SelectedRecipe;
  1222. if (recipeName == null)
  1223. {
  1224. return;
  1225. }
  1226. ClearData();
  1227. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1228. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1229. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1230. }
  1231. private void OnSetChillerTemp(object obj)
  1232. {
  1233. float offset;
  1234. float setPoint;
  1235. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1236. switch (chillerType)
  1237. {
  1238. case ChillerType.Chiller:
  1239. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1240. float.TryParse(value, out offset);
  1241. setPoint = ChillerTempSetpoint;
  1242. break;
  1243. case ChillerType.InnerChiller:
  1244. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1245. float.TryParse(Innervalue, out offset);
  1246. setPoint = InnerChillerTempSetpoint;
  1247. break;
  1248. case ChillerType.OuterChiller:
  1249. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1250. float.TryParse(Outervalue, out offset);
  1251. setPoint = OuterChillerTempSetpoint;
  1252. break;
  1253. case ChillerType.TopChiller:
  1254. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1255. float.TryParse(Topvalue, out offset);
  1256. setPoint = TopChillerTempSetpoint;
  1257. break;
  1258. default:
  1259. return;
  1260. }
  1261. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1262. }
  1263. private void OnOffChiller(object obj)
  1264. {
  1265. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1266. switch (chillerType)
  1267. {
  1268. case ChillerType.Chiller:
  1269. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1270. break;
  1271. case ChillerType.InnerChiller:
  1272. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1273. break;
  1274. case ChillerType.OuterChiller:
  1275. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1276. break;
  1277. case ChillerType.TopChiller:
  1278. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1279. break;
  1280. default:
  1281. return;
  1282. }
  1283. }
  1284. private void OnHeater(object obj)
  1285. {
  1286. if (IsAutoMode == true)
  1287. {
  1288. return;
  1289. }
  1290. AITHeaterData heaterData = obj as AITHeaterData;
  1291. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1292. if (heaterView == null || heaterView.IsVisible == false)
  1293. {
  1294. heaterView = new HeaterView(heaterData, ModuleName);
  1295. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1296. heaterView.Owner = _mainWindow;
  1297. heaterView.Show();
  1298. }
  1299. }
  1300. private void OnEndStep()
  1301. {
  1302. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1303. {
  1304. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1305. }
  1306. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1307. {
  1308. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1309. }
  1310. }
  1311. private void OnOnline()
  1312. {
  1313. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
  1314. }
  1315. private void OnOffline()
  1316. {
  1317. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
  1318. }
  1319. private async void OnAbortRecipe(object obj)
  1320. {
  1321. if (PMCurrentState != PMState.Processing)
  1322. {
  1323. return;
  1324. }
  1325. switch (obj.ToString())
  1326. {
  1327. case "0":
  1328. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1329. break;
  1330. case "1":
  1331. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1332. //if (ESCHVData.IsOn == true)
  1333. //{
  1334. // await Task.Delay(3000);
  1335. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1336. //}
  1337. break;
  1338. case "2":
  1339. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1340. await Task.Delay(3000);
  1341. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1342. break;
  1343. }
  1344. }
  1345. private void OnInclude()
  1346. {
  1347. if (IsInclude)
  1348. {
  1349. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
  1350. }
  1351. else
  1352. {
  1353. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
  1354. }
  1355. }
  1356. #endregion
  1357. #region 私有方法
  1358. private void ClearData()
  1359. {
  1360. ESCVoltage = 0;
  1361. SRFFwdPowerSetpoint = 0;
  1362. SRFMatchC1 = 0;
  1363. SRFMatchC2 = 0;
  1364. BRFFwdPowerSetpoint = 0;
  1365. BRFMatchC1 = 0;
  1366. BRFMatchC2 = 0;
  1367. HeGasSetpoint = 0;
  1368. MFC1SetPoint = 0;
  1369. MFC2SetPoint = 0;
  1370. MFC3SetPoint = 0;
  1371. MFC4SetPoint = 0;
  1372. MFC5SetPoint = 0;
  1373. MFC6SetPoint = 0;
  1374. MFC7SetPoint = 0;
  1375. MFC8SetPoint = 0;
  1376. }
  1377. private IEnumerable<string> GetFilesNames(string path)
  1378. {
  1379. if (Directory.Exists(path))
  1380. {
  1381. return Directory.GetFiles(path, "*.rcp")?
  1382. .Select(Path.GetFileNameWithoutExtension);
  1383. }
  1384. else
  1385. {
  1386. return new List<string>();
  1387. }
  1388. }
  1389. void timer_Tick(object sender, EventArgs e)
  1390. {
  1391. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1392. if (RtDataValues == null)
  1393. {
  1394. return;
  1395. }
  1396. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1397. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1398. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1399. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1400. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1401. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1402. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1403. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1404. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1405. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1406. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1407. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1408. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1409. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1410. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1411. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1412. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1413. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1414. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1415. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1416. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1417. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1418. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1419. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1420. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1421. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1422. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1423. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1424. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1425. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1426. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1427. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1428. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1429. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1430. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1431. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1432. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1433. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1434. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1435. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1436. IsProcessing = PMCurrentState == PMState.Processing;
  1437. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1438. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1439. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1440. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1441. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1442. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1443. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1444. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1445. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1446. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1447. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1448. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1449. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1450. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1451. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1452. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1453. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1454. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1455. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1456. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1457. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1458. ESCHePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ESCHePressure");
  1459. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1460. InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp");
  1461. OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp");
  1462. TopTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
  1463. InnerChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.InnerChiller.IsOn");
  1464. OuterChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.OuterChiller.IsOn");
  1465. TopChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TopChiller.IsOn");
  1466. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1467. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1468. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1469. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1470. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1471. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1472. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1473. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1474. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1475. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1476. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1477. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1478. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1479. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1480. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1481. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1482. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1483. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1484. {
  1485. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1486. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1487. {
  1488. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1489. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1490. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1491. }
  1492. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1493. }
  1494. else
  1495. {
  1496. CurrentRecipeResult = null;
  1497. CurrentRecipeStep = null;
  1498. }
  1499. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100)
  1500. {
  1501. ChamberPressureFeedBack = ProcessPressure;
  1502. }
  1503. else
  1504. {
  1505. ChamberPressureFeedBack = ChamberPressure;
  1506. }
  1507. IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1508. IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
  1509. }
  1510. public void addDataKeys()
  1511. {
  1512. m_RtDataKeys.Clear();
  1513. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1514. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1515. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1516. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1517. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1518. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1519. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1520. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1521. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1522. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1523. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1524. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1525. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1526. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1527. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1528. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1529. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1530. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1531. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1537. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1538. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1539. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1540. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1541. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1542. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1543. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1544. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1545. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1546. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1547. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1548. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1549. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1550. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1551. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1552. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1553. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1554. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1555. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1556. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1557. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1558. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1559. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1560. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1561. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1562. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1563. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1564. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1565. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1566. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1567. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1568. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1569. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1570. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1571. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1572. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1573. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1574. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1575. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1576. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1577. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1578. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1579. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1580. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1581. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1582. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1583. m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn");
  1584. m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn");
  1585. m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn");
  1586. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1587. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1588. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1589. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1590. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1591. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1592. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1593. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1594. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1595. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1596. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1597. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1598. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1599. m_RtDataKeys.Add($"{ModuleName}.IsInclude");
  1600. }
  1601. #endregion
  1602. }
  1603. }