LLEntity.cs 23 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.RT.Event;
  15. namespace Venus_RT.Modules
  16. {
  17. class LLEntity : Entity, IEntity, IModuleEntity
  18. {
  19. public enum LLStatus
  20. {
  21. Not_Ready,
  22. Ready_For_TM,
  23. Ready_For_EFEM,
  24. }
  25. public enum STATE
  26. {
  27. Unknown,
  28. Init,
  29. Initializing,
  30. Idle,
  31. Error,
  32. Pumping,
  33. Venting,
  34. Purging,
  35. LeakCheck,
  36. Prepare_For_TM,
  37. Prepare_For_EFEM,
  38. Ready_For_TM,
  39. Ready_For_EFEM,
  40. }
  41. public enum MSG
  42. {
  43. Home,
  44. Online,
  45. Offline,
  46. Pump,
  47. Vent,
  48. AutoPump,
  49. AutoVent,
  50. Purge,
  51. CyclePurge,
  52. LeakCheck,
  53. Prepare_TM,
  54. Prepare_EFEM,
  55. TM_Exchange_Ready,
  56. EFEM_Exchange_Ready,
  57. Error,
  58. Abort,
  59. }
  60. public ModuleName Module { get; private set; }
  61. public LLStatus Status { get; private set; }
  62. public bool Check(int msg, out string reason, params object[] args)
  63. {
  64. throw new NotImplementedException();
  65. }
  66. public bool IsIdle
  67. {
  68. get { return fsm.State == (int)STATE.Idle; }
  69. }
  70. public bool IsError
  71. {
  72. get { return fsm.State == (int)STATE.Error; }
  73. }
  74. public bool IsInit
  75. {
  76. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  77. }
  78. public bool IsBusy
  79. {
  80. get { return !IsInit && !IsError && !IsIdle; }
  81. }
  82. public bool IsOnline { get; internal set; }
  83. public bool IsInclude
  84. {
  85. get;
  86. private set;
  87. } = true;
  88. public bool IsVac { get { return _JetTM.IsModuleVaccum(Module); } }
  89. public bool IsATM { get { return _JetTM.IsModuleATM(Module); } }
  90. public override int TimeToReady
  91. {
  92. get
  93. {
  94. switch ((STATE)fsm.State)
  95. {
  96. case STATE.Pumping:
  97. case STATE.Venting:
  98. return base.TimeToReady;
  99. }
  100. return int.MaxValue;
  101. }
  102. }
  103. private readonly JetTM _JetTM;
  104. private readonly MFPumpRoutine _pumpingRoutine;
  105. private readonly MFVentRoutine _ventingRoutine;
  106. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  107. private readonly MFPurgeRoutine _purgeRoutine;
  108. private readonly int _slotNumber = 4;
  109. private bool startControlPressureFlag = true;
  110. private int _controlPressureCheckPoint = 100;
  111. private int _controlPressureSetPoint = 90;
  112. private int _controlFlowSetPoint = 90;
  113. public LLEntity(ModuleName module)
  114. {
  115. Module = module;
  116. _JetTM = DEVICE.GetDevice<JetTM>("TM");
  117. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  118. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  119. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  120. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  121. _slotNumber = SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  122. WaferManager.Instance.SubscribeLocation(Module, _slotNumber);
  123. InitFsmMap();
  124. }
  125. protected override bool Init()
  126. {
  127. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  128. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  129. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  130. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  131. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  132. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  133. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  134. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  135. OP.Subscribe($"{Module}.{RtOperation.Include}", (cmd, args) => FnSetInclude());
  136. OP.Subscribe($"{Module}.{RtOperation.Exclude}", (cmd, args) => FnSetExclude());
  137. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  138. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  139. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  140. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  141. DATA.Subscribe($"{Module}.IsInclude", () => IsInclude, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  142. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  143. return true;
  144. }
  145. private void InitFsmMap()
  146. {
  147. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  148. fsm.EnableRepeatedMsg(true);
  149. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  150. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  151. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  152. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  153. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  154. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  155. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  156. // Home
  157. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  158. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  159. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  160. //vent sequence
  161. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  162. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  163. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  164. //Pump sequence
  165. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  166. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  167. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  168. // Purge sequence
  169. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  170. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  171. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  172. // Leak check sequence
  173. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  174. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  175. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  176. // Prepare TM Transfer
  177. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  178. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  179. Transition(STATE.Prepare_For_TM, MSG.Prepare_TM, null, STATE.Prepare_For_TM);
  180. Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
  181. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  182. Transition(STATE.Ready_For_TM, MSG.Prepare_TM, null, STATE.Ready_For_TM);
  183. Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
  184. Transition(STATE.Ready_For_TM, MSG.AutoVent, FnTryAutoVent, STATE.Venting);
  185. // Prepare EFEM Transfer
  186. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  187. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  188. Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
  189. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  190. Transition(STATE.Ready_For_EFEM, MSG.Prepare_EFEM, null, STATE.Ready_For_EFEM);
  191. Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
  192. Transition(STATE.Ready_For_EFEM, MSG.AutoPump, FnTryAutoPump, STATE.Pumping);
  193. //AnyStateTransition(FSM_MSG.TIMER, LLControlPressureTimer_Elapsed, FSM_STATE.SAME);
  194. Running = true;
  195. }
  196. public int Invoke(string function, params object[] args)
  197. {
  198. switch (function)
  199. {
  200. case "Home":
  201. case "Vent":
  202. case "Pump":
  203. if(Enum.TryParse(function, out MSG message))
  204. {
  205. if (CheckToPostMessage((int)message))
  206. return (int)message;
  207. }
  208. break;
  209. }
  210. return (int)FSM_MSG.NONE;
  211. }
  212. public bool CheckAcked(int msg)
  213. {
  214. return fsm.CheckExecuted(msg);
  215. }
  216. public bool CheckToPostMessage(int msg, params object[] args)
  217. {
  218. if (!fsm.FindTransition(fsm.State, msg))
  219. {
  220. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  221. return false;
  222. }
  223. Running = true;
  224. fsm.PostMsg(msg, args);
  225. return true;
  226. }
  227. public (int processed, int unprocessed) GetWaferProcessStatus()
  228. {
  229. int processedCount = 0;
  230. int unprocessCount = 0;
  231. for (int i = 0; i < _slotNumber; i++)
  232. {
  233. var wafer = WaferManager.Instance.GetWafer(Module, i);
  234. if (!wafer.IsEmpty)
  235. {
  236. if (wafer.ProcessState == Aitex.Core.Common.EnumWaferProcessStatus.Completed)
  237. {
  238. processedCount++;
  239. }
  240. else
  241. {
  242. unprocessCount++;
  243. }
  244. }
  245. }
  246. return (processedCount, unprocessCount);
  247. }
  248. private bool fnEnterTMReady(object[] param)
  249. {
  250. if (RouteManager.IsATMMode)
  251. {
  252. Status = LLStatus.Ready_For_TM;
  253. return true;
  254. }
  255. startControlPressureFlag = false;
  256. _controlPressureCheckPoint = SC.GetValue<int>($"{Module}.ControlPressureCheckPoint");
  257. _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  258. _controlFlowSetPoint = SC.GetValue<int>($"{Module}.{Module}_MFC1.DefaultSetPoint");
  259. _JetTM.TurnFastPumpValve(Module, true);
  260. _JetTM.TurnPurgeValve(Module, true);
  261. if (Module == ModuleName.LLA)
  262. {
  263. _JetTM.SwitchLLAPressureMode(true);
  264. _JetTM.SetLLAPressure(_controlPressureSetPoint);
  265. }
  266. else if (Module == ModuleName.LLB)
  267. {
  268. _JetTM.SwitchLLBPressureMode(true);
  269. _JetTM.SetLLBPressure(_controlPressureSetPoint);
  270. }
  271. Status = LLStatus.Ready_For_TM;
  272. return true;
  273. }
  274. private bool fnExitTMReady(object[] param)
  275. {
  276. if (RouteManager.IsATMMode)
  277. {
  278. Status = LLStatus.Not_Ready;
  279. return true;
  280. }
  281. _JetTM.TurnFastPumpValve(Module, false);
  282. _JetTM.TurnPurgeValve(Module, false);
  283. if (Module == ModuleName.LLA)
  284. {
  285. _JetTM.SwitchLLAPressureMode(false);
  286. _JetTM.SetLLAPressure(0);
  287. }
  288. else if (Module == ModuleName.LLB)
  289. {
  290. _JetTM.SwitchLLBPressureMode(false);
  291. _JetTM.SetLLBPressure(0);
  292. }
  293. Status = LLStatus.Not_Ready;
  294. return true;
  295. }
  296. private bool fnEnterEFEMReady(object[] param)
  297. {
  298. Status = LLStatus.Ready_For_EFEM;
  299. return true;
  300. }
  301. private bool fnExitEFEMReady(object[] param)
  302. {
  303. Status = LLStatus.Not_Ready;
  304. return true;
  305. }
  306. private bool fnMonitor(object[] param)
  307. {
  308. _debugRoutine();
  309. return true;
  310. }
  311. private bool fnError(object[] param)
  312. {
  313. IsOnline = false;
  314. return true;
  315. }
  316. private bool fnOnline(object[] param)
  317. {
  318. if (!IsInclude)
  319. {
  320. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is excluded,can not be put online");
  321. return false;
  322. }
  323. IsOnline = true;
  324. return true;
  325. }
  326. private bool fnOffline(object[] param)
  327. {
  328. IsOnline = false;
  329. return true;
  330. }
  331. private bool FnSetInclude()
  332. {
  333. if (IsOnline == true)
  334. {
  335. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Include");
  336. return false;
  337. }
  338. IsInclude = true;
  339. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Include Success");
  340. return true;
  341. }
  342. private bool FnSetExclude()
  343. {
  344. if (IsOnline == true)
  345. {
  346. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Exclude");
  347. return false;
  348. }
  349. IsInclude = false;
  350. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Exclude Success");
  351. return true;
  352. }
  353. private bool fnAbort(object[] param)
  354. {
  355. return true;
  356. }
  357. private bool fnHome(object[] param)
  358. {
  359. IsOnline = true;
  360. return true;
  361. }
  362. private bool fnHoming(object[] param)
  363. {
  364. return true;
  365. }
  366. private bool FnStartVent(object[] param)
  367. {
  368. return _ventingRoutine.Start() == RState.Running;
  369. }
  370. private bool FnTryAutoVent(object[] param)
  371. {
  372. if (RouteManager.IsATMMode)
  373. {
  374. PostMsg(MSG.TM_Exchange_Ready);
  375. return false;
  376. }
  377. return _ventingRoutine.Start() == RState.Running;
  378. }
  379. private bool FnVentTimeout(object[] param)
  380. {
  381. RState ret = _ventingRoutine.Monitor();
  382. if (ret == RState.Failed || ret == RState.Timeout)
  383. {
  384. PostMsg(MSG.Error);
  385. return false;
  386. }
  387. if(ret == RState.End)
  388. {
  389. MarkStateTime();
  390. return true;
  391. }
  392. return false;
  393. }
  394. private bool FnAbortVent(object[] param)
  395. {
  396. _ventingRoutine.Abort();
  397. return true;
  398. }
  399. private bool FnStartPump(object[] param)
  400. {
  401. return _pumpingRoutine.Start() == RState.Running;
  402. }
  403. private bool FnPumpTimeout(object[] param)
  404. {
  405. RState ret = _pumpingRoutine.Monitor();
  406. if (ret == RState.Failed || ret == RState.Timeout)
  407. {
  408. PostMsg(MSG.Error);
  409. return false;
  410. }
  411. if (ret == RState.End)
  412. {
  413. MarkStateTime();
  414. return true;
  415. }
  416. return false;
  417. }
  418. private bool FnAbortPump(object[] param)
  419. {
  420. _pumpingRoutine.Abort();
  421. return true;
  422. }
  423. private bool FnTryAutoPump(object[] param)
  424. {
  425. if (_JetTM.LLPumpStatus != JetTM.LLPumpState.Idle || RouteManager.IsATMMode)
  426. {
  427. PostMsg(MSG.EFEM_Exchange_Ready);
  428. return false;
  429. }
  430. return _pumpingRoutine.Start() == RState.Running;
  431. }
  432. private bool FnStartPurge(object[] param)
  433. {
  434. return _purgeRoutine.Start() == RState.Running;
  435. }
  436. private bool FnPurgeTimeout(object[] param)
  437. {
  438. RState ret = _purgeRoutine.Monitor();
  439. if (ret == RState.Failed || ret == RState.Timeout)
  440. {
  441. PostMsg(MSG.Error);
  442. return false;
  443. }
  444. return ret == RState.End;
  445. }
  446. private bool FnAbortPurge(object[] param)
  447. {
  448. _purgeRoutine.Abort();
  449. return true;
  450. }
  451. private bool FnStartLeakCheck(object[] param)
  452. {
  453. return _leakCheckRoutine.Start() == RState.Running;
  454. }
  455. private bool FnLeakCheckTimeout(object[] param)
  456. {
  457. RState ret = _leakCheckRoutine.Monitor();
  458. if (ret == RState.Failed || ret == RState.Timeout)
  459. {
  460. PostMsg(MSG.Error);
  461. return false;
  462. }
  463. return ret == RState.End;
  464. }
  465. private bool FnAbortLeakCheck(object[] param)
  466. {
  467. _leakCheckRoutine.Abort();
  468. return true;
  469. }
  470. private bool FnStartPrepareTM(object[] param)
  471. {
  472. if (RouteManager.IsATMMode)
  473. return true;
  474. return _pumpingRoutine.Start() == RState.Running;
  475. }
  476. private bool FnPreparaTMTimeout(object[] param)
  477. {
  478. if (RouteManager.IsATMMode)
  479. {
  480. if (fsm.ElapsedTime > 10000)
  481. {
  482. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  483. PostMsg(MSG.Error);
  484. return true;
  485. }
  486. return _JetTM.IsModuleATM(Module);
  487. }
  488. RState ret = _pumpingRoutine.Monitor();
  489. if (ret == RState.Failed || ret == RState.Timeout)
  490. {
  491. PostMsg(MSG.Error);
  492. return false;
  493. }
  494. return ret == RState.End;
  495. }
  496. private bool FnAbortPreparaTM(object[] param)
  497. {
  498. _pumpingRoutine.Abort();
  499. return true;
  500. }
  501. private bool FnStartPrepareEFEM(object[] param)
  502. {
  503. if (RouteManager.IsATMMode)
  504. return true;
  505. return _ventingRoutine.Start() == RState.Running;
  506. }
  507. private bool FnPrepareEFEMTimeout(object[] param)
  508. {
  509. if (RouteManager.IsATMMode)
  510. {
  511. if (fsm.ElapsedTime > 10000)
  512. {
  513. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  514. PostMsg(MSG.Error);
  515. return true;
  516. }
  517. return _JetTM.IsModuleATM(Module);
  518. }
  519. RState ret = _ventingRoutine.Monitor();
  520. if (ret == RState.Failed || ret == RState.Timeout)
  521. {
  522. PostMsg(MSG.Error);
  523. return false;
  524. }
  525. return ret == RState.End;
  526. }
  527. private bool FnAbortPrepareEFEM(object[] param)
  528. {
  529. _ventingRoutine.Abort();
  530. return true;
  531. }
  532. private void _debugRoutine()
  533. {
  534. int flag = 0;
  535. // Test Home routine
  536. if (flag == 1)
  537. {
  538. PostMsg(MSG.Home);
  539. }
  540. else if (flag == 2)
  541. {
  542. PostMsg(MSG.Vent);
  543. }
  544. else if (flag == 3)
  545. {
  546. PostMsg(MSG.Pump);
  547. }
  548. //else if (flag == 4)
  549. //{
  550. // PostMsg(MSG.PumpLoadLock);
  551. //}
  552. //else if (flag == 5)
  553. //{
  554. // PostMsg(MSG.VentLoadLock);
  555. //}
  556. //else if (flag == 6)
  557. //{
  558. // PostMsg(MSG.PurgeLoadLock);
  559. //}
  560. //else if (flag == 7)
  561. //{
  562. // PostMsg(MSG.LaunchPump);
  563. //}
  564. //else if (flag == 8)
  565. //{
  566. // PostMsg(MSG.LaunchTurboPump);
  567. //}
  568. //else if (flag == 9)
  569. //{
  570. // PostMsg(MSG.LoadLockLeakCheck);
  571. //}
  572. else if (flag == 10)
  573. {
  574. PostMsg(MSG.CyclePurge);
  575. }
  576. //else if (flag == 11)
  577. //{
  578. // PostMsg(MSG.GasLinePurge);
  579. //}
  580. //else if (flag == 12)
  581. //{
  582. // PostMsg(MSG.LeakCheck);
  583. //}
  584. //else if (flag == 13)
  585. //{
  586. // PostMsg(MSG.GasLeakCheck);
  587. //}
  588. //else if (flag == 14)
  589. //{
  590. // PostMsg(MSG.LLPlace);
  591. //}
  592. //else if (flag == 15)
  593. //{
  594. // PostMsg(MSG.LLPick);
  595. //}
  596. //else if (flag == 16)
  597. //{
  598. // PostMsg(MSG.RunRecipe, "7777");
  599. //}
  600. //else if (flag == 17)
  601. //{
  602. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  603. //}
  604. }
  605. }
  606. }