Kepler2300DeviceModel.xml 37 KB

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  1. <?xml version="1.0" encoding="utf-16"?>
  2. <DeviceModelDefine type="Kepler2300" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  3. <IoValves>
  4. <IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
  15. isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
  17. isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
  18. <IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
  19. isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
  20. <IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
  21. isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
  23. isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
  24. <IoValve id="ValveN2" display="N2 valve" schematicId="" unit="" isNc="true"
  25. isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
  26. <IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId="" unit="" isNc="true"
  27. isDefaultOpen="false" diOpen="" doOpen="DO_PVHe1" diCloseSensor="" diOpenSensor="" />
  28. <IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
  29. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe2"
  30. diCloseSensor="" diOpenSensor="" />
  31. <IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
  32. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
  33. diCloseSensor="" diOpenSensor="" />
  34. <IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
  35. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PV3_Soft_Pump"
  36. diCloseSensor="" diOpenSensor="" />
  37. <IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
  38. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PV4_Fast_Pump"
  39. diCloseSensor="" diOpenSensor="" />
  40. <IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
  41. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
  42. diCloseSensor="" diOpenSensor="" />
  43. <IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
  44. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
  45. diCloseSensor="" diOpenSensor="" />
  46. <IoValve id="ValveGuage" display="Guage valve" schematicId=""
  47. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
  48. diCloseSensor="" diOpenSensor="" />
  49. <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
  50. isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
  51. <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
  52. isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
  53. <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
  54. isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
  55. <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
  56. isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
  57. <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
  58. isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
  59. <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
  60. isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
  61. <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
  62. isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
  63. <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
  64. isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
  65. </IoValves>
  66. <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
  67. <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
  68. aiFlow="AI_MFC1_Flow_PV" aoFlow="AO_MFC1_Flow_SP" diOffline="" aoRange=""
  69. diPressureAlarm="DI_GB_MFC1_PRES_SW"/>
  70. <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
  71. aiFlow="AI_MFC2_Flow_PV" aoFlow="AO_MFC2_Flow_SP" diOffline="" aoRange=""
  72. diPressureAlarm="DI_GB_MFC2_PRES_SW"/>
  73. <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
  74. aiFlow="AI_MFC3_Flow_PV" aoFlow="AO_MFC3_Flow_SP" diOffline="" aoRange=""
  75. diPressureAlarm="DI_GB_MFC3_PRES_SW"/>
  76. <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
  77. aiFlow="AI_MFC4_Flow_PV" aoFlow="AO_MFC4_Flow_SP" diOffline="" aoRange=""
  78. diPressureAlarm="DI_GB_MFC4_PRES_SW"/>
  79. <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
  80. aiFlow="AI_MFC5_Flow_PV" aoFlow="AO_MFC5_Flow_SP" diOffline="" aoRange=""
  81. diPressureAlarm="DI_GB_MFC5_PRES_SW"/>
  82. <IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
  83. aiFlow="AI_MFC6_Flow_PV" aoFlow="AO_MFC6_Flow_SP" diOffline="" aoRange=""
  84. diPressureAlarm="DI_GB_MFC6_PRES_SW"/>
  85. <IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
  86. aiFlow="AI_MFC7_Flow_PV" aoFlow="AO_MFC7_Flow_SP" diOffline="" aoRange=""
  87. diPressureAlarm="DI_GB_MFC7_PRES_SW"/>
  88. <IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
  89. aiFlow="AI_MFC8_Flow_PV" aoFlow="AO_MFC8_Flow_SP" diOffline="" aoRange=""
  90. diPressureAlarm="DI_GB_MFC8_PRES_SW"/>
  91. <IoMfc id="MfcGas9" display="Gas9" schematicId="MFC9" unit="sccm"
  92. aiFlow="AI_MFC9_Flow_PV" aoFlow="AO_MFC9_Flow_SP" diOffline="" aoRange=""
  93. diPressureAlarm="DI_GB_MFC9_PRES_SW"/>
  94. <IoMfc id="MfcGas10" display="Gas10" schematicId="MFC10" unit="sccm"
  95. aiFlow="AI_MFC10_Flow_PV" aoFlow="AO_MFC10_Flow_SP" diOffline="" aoRange=""
  96. diPressureAlarm="DI_GB_MFC10_PRES_SW"/>
  97. <IoMfc id="MfcGas11" display="Gas11" schematicId="MFC11" unit="sccm"
  98. aiFlow="AI_MFC11_Flow_PV" aoFlow="AO_MFC11_Flow_SP" diOffline="" aoRange=""
  99. diPressureAlarm="DI_GB_MFC11_PRES_SW"/>
  100. <IoMfc id="MfcGas12" display="Gas12" schematicId="MFC12" unit="sccm"
  101. aiFlow="AI_MFC12_Flow_PV" aoFlow="AO_MFC12_Flow_SP" diOffline="" aoRange=""
  102. diPressureAlarm="DI_GB_MFC12_PRES_SW"/>
  103. <IoMfc id="MfcGas13" display="Gas13" schematicId="MFC13" unit="sccm"
  104. aiFlow="AI_MFC13_Flow_PV" aoFlow="AO_MFC13_Flow_SP" diOffline="" aoRange=""
  105. diPressureAlarm="DI_GB_MFC13_PRES_SW"/>
  106. <IoMfc id="MfcGas14" display="Gas14" schematicId="MFC14" unit="sccm"
  107. aiFlow="AI_MFC14_Flow_PV" aoFlow="AO_MFC14_Flow_SP" diOffline="" aoRange=""
  108. diPressureAlarm="DI_GB_MFC14_PRES_SW"/>
  109. <IoMfc id="MfcGas15" display="Gas15" schematicId="MFC15" unit="sccm"
  110. aiFlow="AI_MFC15_Flow_PV" aoFlow="AO_MFC15_Flow_SP" diOffline="" aoRange=""
  111. diPressureAlarm="DI_GB_MFC15_PRES_SW"/>
  112. <IoMfc id="MfcGas16" display="Gas16" schematicId="MFC16" unit="sccm"
  113. aiFlow="AI_MFC16_Flow_PV" aoFlow="AO_MFC16_Flow_SP" diOffline="" aoRange=""
  114. diPressureAlarm="DI_GB_MFC16_PRES_SW"/>
  115. </IoMfcs>
  116. <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
  117. <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  118. <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" upvalve="ValvePV21"/>
  119. <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" upvalve="ValvePV31"/>
  120. <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" upvalve="ValvePV41"/>
  121. <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  122. <IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
  123. <IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
  124. <IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
  125. <IoGasStick id="GasStick9" display="" mfc ="MfcGas9" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  126. <IoGasStick id="GasStick10" display="" mfc ="MfcGas10" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  127. <IoGasStick id="GasStick11" display="" mfc ="MfcGas11" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  128. <IoGasStick id="GasStick12" display="" mfc ="MfcGas12" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  129. <IoGasStick id="GasStick13" display="" mfc ="MfcGas13" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  130. <IoGasStick id="GasStick14" display="" mfc ="MfcGas14" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  131. <IoGasStick id="GasStick15" display="" mfc ="MfcGas15" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  132. <IoGasStick id="GasStick16" display="" mfc ="MfcGas16" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  133. </IoGasSticks>
  134. <IoBacksideHes assembly="Venus_RT" classType="Venus_RT.Devices.IoBacksideHe">
  135. <IoBacksideHe id="BacksideHelium" display="" mfc="" downvalve="ValvePVHe1" aoControlMode="AO_ESC_He_Control_Mode" aoPressureSP="AO_ESC_He_Pressure_Setpoint" />
  136. </IoBacksideHes>
  137. <IoSensors>
  138. <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  139. <IoSensor id="SensorPMLidClosed" display="PM Lid Closed" schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
  140. infoText="" warningText="" alarmText="" />
  141. <IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
  142. infoText="" warningText="" alarmText="" />
  143. <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
  144. infoText="" warningText="" alarmText="" />
  145. <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
  146. infoText="" warningText="Sensor water leak" alarmText="" />
  147. <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  148. infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
  149. <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  150. infoText="" warningText="N2 Pressure Alarm" alarmText="" />
  151. <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_Source_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
  152. <IoSensor id="SensorSourceRFFan" display="Source RF Fan" schematicId="" unit="" di="DI_Source_RF_Fan" isLowAsNormal="" textOutTrigValue="true" infoText="Source RF Fan" warningText="" alarmText="Source RF Fan Alarm" />
  153. <IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed" schematicId="" unit="" di="DI_Slit_Door_Close_POS" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
  154. <IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock" schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
  155. <IoSensor id="GasBoxDoorSW" display="Gas Box Door SW" schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Gas Box Door SW Alarm" />
  156. <IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW" schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Gas Box Pressure Alarm" />
  157. <IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm" schematicId="" unit="" di="DI_CHB_Wall_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="CHB Wall OT SW Alarm" />
  158. <IoSensor id="SensorSmallWaferInPos" display="Small Wafer in Pos" schematicId="" unit="" di="DI_Small_Wafer_In_POS" isLowAsNormal="" textOutTrigValue="true"
  159. infoText="" warningText="" alarmText="" />
  160. </IoSensors>
  161. <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
  162. <IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
  163. aiValue="AI_Process_Pressure_100mt" diGaugeFail="" scPrecision="" scOffset=""/>
  164. <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
  165. aiValue="AI_Chamber_Pressure_10t"
  166. diGaugeFail=""
  167. scPrecision="ChamberPressureGaugePrecision"
  168. scOffset=""/>
  169. <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
  170. aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_760t_Gauge_Alarm" scPrecision="" scOffset=""/>
  171. <IoPressureMeter id="ESCHeGauge" display="ESC He Pressure" schematicId="" unit="mTorr"
  172. aiValue="AI_ESC_He_Pressure_100t" diGaugeFail="DI_ESC_He_Pressure_100t_Gauge_Alarm" scPrecision="" scOffset=""/>
  173. </IoPressureMeters>
  174. <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
  175. <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
  176. diLogicProcessGasFlowing=""
  177. scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
  178. scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
  179. scIsIndependentControl="IsIndependentControl"
  180. scIsBoostPumpInstalled="EnableBoosterPump"
  181. scTvInstalled="EnableThrottleValve"
  182. boost="" tv="ThrottleValve" drypump="MainPump"
  183. pressureMeter ="PressureGauge"
  184. processMeter="ProcessGauge"
  185. forelineMeter="ForelineGauge"
  186. loadlockMeter="LoadlockGauge"
  187. escHeGauge="ESCHeGauge"
  188. tmPressureSetPoint="AO_TM_Chamber_Pressure"/>
  189. </IoPressureControls>
  190. <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
  191. <IoHeater id="ValveHeater" display="Valve Heater" schematicId="" unit="℃"
  192. doPowerOn="DO_S_Valve_Heater_On"
  193. diDeviation="DI_Valve_TC_Deviation_out_of_range"
  194. diPowerOnFeedback="DI_P_Valve_Heater_On_FB"
  195. diControlTcBroken="DI_S_Valve_Control_TC_Broken_Alarm"
  196. diMonitorTcBroken="DI_S_Valve_Monitor_TC_Broken_Alarm"
  197. aoSetPoint="AO_S_Valve_Temperature_Setpoint"
  198. aoSetPointLimit="AO_S_Valve_Temp_Limit_Setpoint"
  199. aiFeedback="AI_S_Valve_Control_TC_Temp"
  200. aiMonitor=""
  201. scSetPointLimit="ValveHeaterSetPointLimit" />
  202. <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
  203. doPowerOn="DO_Foreline_Heater_On"
  204. diDeviation="DI_Foreline_TC_Deviation_out_of_range"
  205. diPowerOnFeedback="DI_Foreline_Heater_On_FB"
  206. diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
  207. diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
  208. aoSetPoint="AO_Foreline_Temperature_Setpoint"
  209. aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
  210. aiFeedback="AI_Foreline_Control_TC_Temp"
  211. aiMonitor=""
  212. scSetPointLimit="ForeLineHeaterSetPointLimit" />
  213. <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
  214. doPowerOn="DO_CHB_Wall_Heater_On"
  215. diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
  216. diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
  217. diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
  218. diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
  219. aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
  220. aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
  221. aiFeedback="AI_CHB_Wall_Control_TC_Temp"
  222. aiMonitor=""
  223. scSetPointLimit="WallHeaterSetPointLimit" />
  224. <IoHeater id="PendulumHeater" display="Pendulum Heater" schematicId="" unit="℃"
  225. doPowerOn="DO_P_Valve_Heater_On"
  226. diDeviation="DI_P_Valve_TC_Deviation_out_of_range"
  227. diPowerOnFeedback="DI_P_Wall_Heater_On_FB"
  228. diControlTcBroken="DI_P_Valve_Control_TC_Broken_Alarm"
  229. diMonitorTcBroken="DI_P_Valve_Monitor_TC_Broken_Alarm"
  230. aoSetPoint="AO_P_Valve_Temperature_Setpoint"
  231. aoSetPointLimit="AO_P_Valve_Temp_Limit_Setpoint"
  232. aiFeedback="AI_P_Valve_Control_TC_Temp"
  233. aiMonitor=""
  234. scSetPointLimit="PendulumHeaterSetPointLimit"
  235. />
  236. </IoHeaters>
  237. <!--<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
  238. <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  239. </IoHeartbeats>-->
  240. <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
  241. <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
  242. doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up_Posi" diOFF="DI_Lift_Pin_Down_Posi" />
  243. <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
  244. doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
  245. </IoCylinders>
  246. <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
  247. <IoLid id="Lid" display="Lid" schematicId="" unit=""
  248. doMotorRelay="" doON="DO_Lid_SVO_Enable" doOFF="" diON="DI_Lid_Servo_Up_Button" diOFF="DI_Lid_Servo_Down_Button" />
  249. </IoLids>
  250. </DeviceModelDefine>