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EquipmentVariables - 复制.xml

EquipmentVariables - 复制.xml 85 KB
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  1. <?xml version="1.0"?>
    2. 

  2. <EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 	<SpoolingStreamFunctions />
    4. 

  4. 

  5. 	<StatusVariables>
    6. 

  6. 		
    7. 

  7. 		<StatusVariable id="620101001" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    8. 

  8. 		<StatusVariable id="620101002" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    9. 

  9. 		<StatusVariable id="620101003" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    10. 

  10. 		<StatusVariable id="620101004" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    11. 

  11. 		<StatusVariable id="620101005" valueType="F4" logicalName="PMA.ChamberPressure" eventTrigger="" units="" />
    12. 

  12. 		<StatusVariable id="620101006" valueType="Boolean" logicalName="PMA.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    13. 

  13. 		<StatusVariable id="620101007" valueType="F8" logicalName="PMA.Chiller.Temp" eventTrigger="" units="" />
    14. 

  14. 		<StatusVariable id="620101008" valueType="F4" logicalName="PMA.ChillerInnerTemp" eventTrigger="" units="" />
    15. 

  15. 		<StatusVariable id="620101009" valueType="F4" logicalName="PMA.ChillerOuterTemp" eventTrigger="" units="" />
    16. 

  16. 		<StatusVariable id="620101010" valueType="F4" logicalName="PMA.ChillerTopTemp" eventTrigger="" units="" />
    17. 

  17. 		<StatusVariable id="620101011" valueType="F8" logicalName="PMA.ESCHePressure" eventTrigger="" units="" />
    18. 

  18. 		<StatusVariable id="620101012" valueType="F8" logicalName="PMA.ESCHV.Temp" eventTrigger="" units="" />
    19. 

  19. 		<StatusVariable id="620101013" valueType="F8" logicalName="PMA.ForelinePressure" eventTrigger="" units="" />
    20. 

  20. 		<StatusVariable id="620101014" valueType="Boolean" logicalName="PMA.GasBoxDoorSW.Value" eventTrigger="" units="" />
    21. 

  21. 		<StatusVariable id="620101015" valueType="Boolean" logicalName="PMA.GasBoxPressureSW.Value" eventTrigger="" units="" />
    22. 

  22. 		<StatusVariable id="620101016" valueType="Boolean" logicalName="PMA.GeneratorInterlock.Value" eventTrigger="" units="" />
    23. 

  23. 		<StatusVariable id="620101017" valueType="F8" logicalName="PMA.GetPVPosition" eventTrigger="" units="" />
    24. 

  24. 		<StatusVariable id="620101018" valueType="F8" logicalName="PMA.HighTemperatureHeater.Position" eventTrigger="" units="" />
    25. 

  25. 		<StatusVariable id="620101019" valueType="F8" logicalName="PMA.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    26. 

  26. 		<StatusVariable id="620101020" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    27. 

  27. 		<StatusVariable id="620101021" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    28. 

  28. 		<StatusVariable id="620101022" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    29. 

  29. 		<StatusVariable id="620101023" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    30. 

  30. 		<StatusVariable id="620101024" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    31. 

  31. 		<StatusVariable id="620101025" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    32. 

  32. 		<StatusVariable id="620101026" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    33. 

  33. 		<StatusVariable id="620101027" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    34. 

  34. 		<StatusVariable id="620101028" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    35. 

  35. 		<StatusVariable id="620101029" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    36. 

  36. 		<StatusVariable id="620101030" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    37. 

  37. 		<StatusVariable id="620101031" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    38. 

  38. 		<StatusVariable id="620101032" valueType="Boolean" logicalName="PMA.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    39. 

  39. 		<StatusVariable id="620101033" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    40. 

  40. 		<StatusVariable id="620101034" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    41. 

  41. 		<StatusVariable id="620101035" valueType="Boolean" logicalName="PMA.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    42. 

  42. 		<StatusVariable id="620101036" valueType="Boolean" logicalName="PMA.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    43. 

  43. 		<StatusVariable id="620101037" valueType="Boolean" logicalName="PMA.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    44. 

  44. 		<StatusVariable id="620101038" valueType="Boolean" logicalName="PMA.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    45. 

  45. 		<StatusVariable id="620101039" valueType="Boolean" logicalName="PMA.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    46. 

  46. 		<StatusVariable id="620101040" valueType="Boolean" logicalName="PMA.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    47. 

  47. 		<StatusVariable id="620101041" valueType="Boolean" logicalName="PMA.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    48. 

  48. 		<StatusVariable id="620101042" valueType="Boolean" logicalName="PMA.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    49. 

  49. 		<StatusVariable id="620101043" valueType="Boolean" logicalName="PMA.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    50. 

  50. 		<StatusVariable id="620101044" valueType="Boolean" logicalName="PMA.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    51. 

  51. 		<StatusVariable id="620101045" valueType="Boolean" logicalName="PMA.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    52. 

  52. 		<StatusVariable id="620101046" valueType="Boolean" logicalName="PMA.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    53. 

  53. 		<StatusVariable id="620101047" valueType="Boolean" logicalName="PMA.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    54. 

  54. 		<StatusVariable id="620101048" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    55. 

  55. 		<StatusVariable id="620101049" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    56. 

  56. 		<StatusVariable id="620101050" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    57. 

  57. 		<StatusVariable id="620101051" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    58. 

  58. 		<StatusVariable id="620101052" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    59. 

  59. 		<StatusVariable id="620101053" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    60. 

  60. 		<StatusVariable id="620101054" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    61. 

  61. 		<StatusVariable id="620101055" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    62. 

  62. 		<StatusVariable id="620101056" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    63. 

  63. 		<StatusVariable id="620101057" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    64. 

  64. 		<StatusVariable id="620101058" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    65. 

  65. 		<StatusVariable id="620101059" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    66. 

  66. 		<StatusVariable id="620101060" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    67. 

  67. 		<StatusVariable id="620101061" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    68. 

  68. 		<StatusVariable id="620101062" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    69. 

  69. 		<StatusVariable id="620101063" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    70. 

  70. 		<StatusVariable id="620101064" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    71. 

  71. 		<StatusVariable id="620101065" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    72. 

  72. 		<StatusVariable id="620101066" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    73. 

  73. 		<StatusVariable id="620101067" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    74. 

  74. 		<StatusVariable id="620101068" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    75. 

  75. 		<StatusVariable id="620101069" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    76. 

  76. 		<StatusVariable id="620101070" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    77. 

  77. 		<StatusVariable id="620101071" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.Status" eventTrigger="" units="" />
    78. 

  78. 		<StatusVariable id="620101072" valueType="Boolean" logicalName="PMA.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    79. 

  79. 		<StatusVariable id="620101073" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    80. 

  80. 		<StatusVariable id="620101074" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    81. 

  81. 		<StatusVariable id="620101075" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    82. 

  82. 		<StatusVariable id="620101076" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    83. 

  83. 		<StatusVariable id="620101077" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    84. 

  84. 		<StatusVariable id="620101078" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    85. 

  85. 		<StatusVariable id="620101079" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    86. 

  86. 		<StatusVariable id="620101080" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    87. 

  87. 		<StatusVariable id="620101081" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    88. 

  88. 		<StatusVariable id="620101082" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    89. 

  89. 		<StatusVariable id="620101083" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    90. 

  90. 		<StatusVariable id="620101084" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    91. 

  91. 		<StatusVariable id="620101085" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    92. 

  92. 		<StatusVariable id="620101086" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    93. 

  93. 		<StatusVariable id="620101087" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    94. 

  94. 		<StatusVariable id="620101088" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    95. 

  95. 		<StatusVariable id="620101089" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    96. 

  96. 		<StatusVariable id="620101090" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    97. 

  97. 		<StatusVariable id="620101091" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    98. 

  98. 		<StatusVariable id="620101092" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    99. 

  99. 		<StatusVariable id="620101093" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    100. 

  100. 		<StatusVariable id="620101094" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    101. 

  101. 		<StatusVariable id="620101095" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    102. 

  102. 		<StatusVariable id="620101096" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    103. 

  103. 		<StatusVariable id="620101097" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    104. 

  104. 		<StatusVariable id="620101098" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    105. 

  105. 		<StatusVariable id="620101099" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    106. 

  106. 		<StatusVariable id="620101100" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    107. 

  107. 		<StatusVariable id="620101101" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    108. 

  108. 		<StatusVariable id="620101102" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    109. 

  109. 		<StatusVariable id="620101103" valueType="Boolean" logicalName="PMA.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    110. 

  110. 		<StatusVariable id="620101104" valueType="Boolean" logicalName="PMA.Lid.IsClosed" eventTrigger="" units="" />
    111. 

  111. 		<StatusVariable id="620101105" valueType="F8" logicalName="PMA.LoadlockPressure" eventTrigger="" units="" />
    112. 

  112. 		<StatusVariable id="620101106" valueType="Boolean" logicalName="PMA.MainPump.IsError" eventTrigger="" units="" />
    113. 

  113. 		<StatusVariable id="620101107" valueType="Boolean" logicalName="PMA.MainPump.IsOn" eventTrigger="" units="" />
    114. 

  114. 		<StatusVariable id="620101108" valueType="Boolean" logicalName="PMA.MainPump.IsRunning" eventTrigger="" units="" />
    115. 

  115. 		<StatusVariable id="620101109" valueType="F8" logicalName="PMA.MainPump.Speed" eventTrigger="" units="" />
    116. 

  116. 		<StatusVariable id="620101110" valueType="F8" logicalName="PMA.MainPump.Temperature" eventTrigger="" units="" />
    117. 

  117. 		<StatusVariable id="620101111" valueType="F8" logicalName="PMA.Match.C1" eventTrigger="" units="" />
    118. 

  118. 		<StatusVariable id="620101112" valueType="F8" logicalName="PMA.Match.C2" eventTrigger="" units="" />
    119. 

  119. 		<StatusVariable id="620101113" valueType="F8" logicalName="PMA.MfcGas1.FeedBack" eventTrigger="" units="" />
    120. 

  120. 		<StatusVariable id="620101114" valueType="F8" logicalName="PMA.MfcGas1.SetPoint" eventTrigger="" units="" />
    121. 

  121. 		<StatusVariable id="620101115" valueType="F8" logicalName="PMA.MfcGas2.FeedBack" eventTrigger="" units="" />
    122. 

  122. 		<StatusVariable id="620101116" valueType="F8" logicalName="PMA.MfcGas2.SetPoint" eventTrigger="" units="" />
    123. 

  123. 		<StatusVariable id="620101117" valueType="F8" logicalName="PMA.MfcGas3.FeedBack" eventTrigger="" units="" />
    124. 

  124. 		<StatusVariable id="620101118" valueType="F8" logicalName="PMA.MfcGas3.SetPoint" eventTrigger="" units="" />
    125. 

  125. 		<StatusVariable id="620101119" valueType="F8" logicalName="PMA.MfcGas4.FeedBack" eventTrigger="" units="" />
    126. 

  126. 		<StatusVariable id="620101120" valueType="F8" logicalName="PMA.MfcGas4.SetPoint" eventTrigger="" units="" />
    127. 

  127. 		<StatusVariable id="620101121" valueType="F8" logicalName="PMA.MfcGas5.FeedBack" eventTrigger="" units="" />
    128. 

  128. 		<StatusVariable id="620101122" valueType="F8" logicalName="PMA.MfcGas5.SetPoint" eventTrigger="" units="" />
    129. 

  129. 		<StatusVariable id="620101123" valueType="F8" logicalName="PMA.MfcGas6.FeedBack" eventTrigger="" units="" />
    130. 

  130. 		<StatusVariable id="620101124" valueType="F8" logicalName="PMA.MfcGas6.SetPoint" eventTrigger="" units="" />
    131. 

  131. 		<StatusVariable id="620101125" valueType="F8" logicalName="PMA.MfcGas7.FeedBack" eventTrigger="" units="" />
    132. 

  132. 		<StatusVariable id="620101126" valueType="F8" logicalName="PMA.MfcGas7.SetPoint" eventTrigger="" units="" />
    133. 

  133. 		<StatusVariable id="620101127" valueType="F8" logicalName="PMA.MfcGas8.FeedBack" eventTrigger="" units="" />
    134. 

  134. 		<StatusVariable id="620101128" valueType="F8" logicalName="PMA.MfcGas8.SetPoint" eventTrigger="" units="" />
    135. 

  135. 		<StatusVariable id="620101129" valueType="F8" logicalName="PMA.MfcHe.FeedBack" eventTrigger="" units="" />
    136. 

  136. 		<StatusVariable id="620101130" valueType="F8" logicalName="PMA.MfcHe.SetPoint" eventTrigger="" units="" />
    137. 

  137. 		<StatusVariable id="620101131" valueType="F8" logicalName="PMA.MfcN2.FeedBack" eventTrigger="" units="" />
    138. 

  138. 		<StatusVariable id="620101132" valueType="F8" logicalName="PMA.MfcN2.SetPoint" eventTrigger="" units="" />
    139. 

  139. 		<StatusVariable id="620101133" valueType="Boolean" logicalName="PMA.N2PressureOk.Value" eventTrigger="" units="" />
    140. 

  140. 		<StatusVariable id="620101134" valueType="F8" logicalName="PMA.ProcessPressure" eventTrigger="" units="" />
    141. 

  141. 		<StatusVariable id="620101135" valueType="F8" logicalName="PMA.Rf.ForwardPower" eventTrigger="" units="" />
    142. 

  142. 		<StatusVariable id="620101136" valueType="F8" logicalName="PMA.Rf.Frequency" eventTrigger="" units="" />
    143. 

  143. 		<StatusVariable id="620101137" valueType="F8" logicalName="PMA.Rf.PowerSetPoint" eventTrigger="" units="" />
    144. 

  144. 		<StatusVariable id="620101138" valueType="F8" logicalName="PMA.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    145. 

  145. 		<StatusVariable id="620101139" valueType="F8" logicalName="PMA.Rf.PulsingFrequency" eventTrigger="" units="" />
    146. 

  146. 		<StatusVariable id="620101140" valueType="F8" logicalName="PMA.Rf.ReflectPower" eventTrigger="" units="" />
    147. 

  147. 		<StatusVariable id="620101141" valueType="Boolean" logicalName="PMA.RFMatchInterlock.Value" eventTrigger="" units="" />
    148. 

  148. 		<StatusVariable id="620101142" valueType="F8" logicalName="PMA.SCR1" eventTrigger="" units="" />
    149. 

  149. 		<StatusVariable id="620101143" valueType="F8" logicalName="PMA.SCR2" eventTrigger="" units="" />
    150. 

  150. 		<StatusVariable id="620101144" valueType="Boolean" logicalName="PMA.SensorATMSwitch.Value" eventTrigger="" units="" />
    151. 

  151. 		<StatusVariable id="620101145" valueType="Boolean" logicalName="PMA.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    152. 

  152. 		<StatusVariable id="620101146" valueType="Boolean" logicalName="PMA.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    153. 

  153. 		<StatusVariable id="620101147" valueType="Boolean" logicalName="PMA.SensorPMLidClosed.Value" eventTrigger="" units="" />
    154. 

  154. 		<StatusVariable id="620101148" valueType="Boolean" logicalName="PMA.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    155. 

  155. 		<StatusVariable id="620101149" valueType="Boolean" logicalName="PMA.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    156. 

  156. 		<StatusVariable id="620101150" valueType="Boolean" logicalName="PMA.SensorSourceRFFan.Value" eventTrigger="" units="" />
    157. 

  157. 		<StatusVariable id="620101151" valueType="Boolean" logicalName="PMA.SensorVacSwitch.Value" eventTrigger="" units="" />
    158. 

  158. 		<StatusVariable id="620101152" valueType="Boolean" logicalName="PMA.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    159. 

  159. 		<StatusVariable id="620101153" valueType="Boolean" logicalName="PMA.SlitDoor.IsClosed" eventTrigger="" units="" />
    160. 

  160. 		<StatusVariable id="620101154" valueType="Boolean" logicalName="PMA.TurboPumpInterlock.Value" eventTrigger="" units="" />
    161. 

  161. 		<StatusVariable id="620101155" valueType="F8" logicalName="PMA.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    162. 

  162. 		<StatusVariable id="620101156" valueType="Boolean" logicalName="PMA.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    163. 

  163. 		<StatusVariable id="620101157" valueType="F8" logicalName="PMA.BiasRf.ForwardPower" eventTrigger="" units="" />
    164. 

  164. 		<StatusVariable id="620101158" valueType="F8" logicalName="PMA.BiasRf.Frequency" eventTrigger="" units="" />
    165. 

  165. 		<StatusVariable id="620101159" valueType="F8" logicalName="PMA.BiasRf.IsPowerOn" eventTrigger="" units="" />
    166. 

  166. 		<StatusVariable id="620101160" valueType="F8" logicalName="PMA.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    167. 

  167. 		<StatusVariable id="620101161" valueType="F8" logicalName="PMA.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    168. 

  168. 		<StatusVariable id="620101162" valueType="F8" logicalName="PMA.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    169. 

  169. 		<StatusVariable id="620101163" valueType="F8" logicalName="PMA.BiasRf.ReflectPower" eventTrigger="" units="" />
    170. 

  170. 		<StatusVariable id="620101164" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    171. 

  171. 		<StatusVariable id="620101165" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    172. 

  172. 		<StatusVariable id="620101166" valueType="F8" logicalName="IO.PMA.AI_Day" eventTrigger="" units="" />
    173. 

  173. 		<StatusVariable id="620101167" valueType="F8" logicalName="IO.PMA.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    174. 

  174. 		<StatusVariable id="620101168" valueType="F8" logicalName="IO.PMA.AI_Heartbeat_FB" eventTrigger="" units="" />
    175. 

  175. 		<StatusVariable id="620101169" valueType="F8" logicalName="IO.PMA.AI_MFC1_Flow" eventTrigger="" units="" />
    176. 

  176. 		<StatusVariable id="620101170" valueType="F8" logicalName="IO.PMA.AI_MFC2_Flow" eventTrigger="" units="" />
    177. 

  177. 		<StatusVariable id="620101171" valueType="F8" logicalName="IO.PMA.AI_MFC3_Flow" eventTrigger="" units="" />
    178. 

  178. 		<StatusVariable id="620101172" valueType="F8" logicalName="IO.PMA.AI_MFC4_Flow" eventTrigger="" units="" />
    179. 

  179. 		<StatusVariable id="620101173" valueType="F8" logicalName="IO.PMA.AI_MFC5_Flow" eventTrigger="" units="" />
    180. 

  180. 		<StatusVariable id="620101174" valueType="F8" logicalName="IO.PMA.AI_MFC6_Flow" eventTrigger="" units="" />
    181. 

  181. 		<StatusVariable id="620101175" valueType="F8" logicalName="IO.PMA.AI_Minute" eventTrigger="" units="" />
    182. 

  182. 		<StatusVariable id="620101176" valueType="F8" logicalName="IO.PMA.AI_Month" eventTrigger="" units="" />
    183. 

  183. 		<StatusVariable id="620101177" valueType="F8" logicalName="IO.PMA.AI_Process_Pressure_2t" eventTrigger="" units="" />
    184. 

  184. 		<StatusVariable id="620101178" valueType="F8" logicalName="IO.PMA.AI_Second" eventTrigger="" units="" />
    185. 

  185. 		<StatusVariable id="620101179" valueType="F8" logicalName="IO.PMA.AI_Time" eventTrigger="" units="" />
    186. 

  186. 		<StatusVariable id="620101180" valueType="F8" logicalName="IO.PMA.AI_Year" eventTrigger="" units="" />
    187. 

  187. 		<StatusVariable id="620101181" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    188. 

  188. 		<StatusVariable id="620101182" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    189. 

  189. 		<StatusVariable id="620101183" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" eventTrigger="" units="" />
    190. 

  190. 		<StatusVariable id="620101184" valueType="F8" logicalName="IO.PMA.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    191. 

  191. 		<StatusVariable id="620101185" valueType="F8" logicalName="IO.PMA.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    192. 

  192. 		<StatusVariable id="620101186" valueType="F8" logicalName="IO.PMA.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    193. 

  193. 		<StatusVariable id="620101187" valueType="F8" logicalName="IO.PMA.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    194. 

  194. 		<StatusVariable id="620101188" valueType="F8" logicalName="IO.PMA.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    195. 

  195. 		<StatusVariable id="620101189" valueType="F8" logicalName="IO.PMA.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    196. 

  196. 		<StatusVariable id="620101190" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    197. 

  197. 		<StatusVariable id="620101191" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    198. 

  198. 		<StatusVariable id="620101192" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" eventTrigger="" units="" />
    199. 

  199. 		<StatusVariable id="620101193" valueType="Boolean" logicalName="IO.PMA.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    200. 

  200. 		<StatusVariable id="620101194" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    201. 

  201. 		<StatusVariable id="620101195" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    202. 

  202. 		<StatusVariable id="620101196" valueType="Boolean" logicalName="IO.PMA.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    203. 

  203. 		<StatusVariable id="620101197" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    204. 

  204. 		<StatusVariable id="620101198" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    205. 

  205. 		<StatusVariable id="620101199" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    206. 

  206. 		<StatusVariable id="620101200" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    207. 

  207. 		<StatusVariable id="620101201" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    208. 

  208. 		<StatusVariable id="620101202" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    209. 

  209. 		<StatusVariable id="620101203" valueType="Boolean" logicalName="IO.PMA.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    210. 

  210. 		<StatusVariable id="620101204" valueType="Boolean" logicalName="IO.PMA.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    211. 

  211. 		<StatusVariable id="620101205" valueType="Boolean" logicalName="IO.PMA.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    212. 

  212. 		<StatusVariable id="620101206" valueType="Boolean" logicalName="IO.PMA.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    213. 

  213. 		<StatusVariable id="620101207" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" eventTrigger="" units="" />
    214. 

  214. 		<StatusVariable id="620101208" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" eventTrigger="" units="" />
    215. 

  215. 		<StatusVariable id="620101209" valueType="Boolean" logicalName="IO.PMA.DO_Purge_Valve" eventTrigger="" units="" />
    216. 

  216. 		<StatusVariable id="620101210" valueType="Boolean" logicalName="IO.PMA.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    217. 

  217. 		<StatusVariable id="620101211" valueType="Boolean" logicalName="IO.PMA.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    218. 

  218. 		<StatusVariable id="620101212" valueType="Boolean" logicalName="IO.PMA.DO_MFC1_Valve" eventTrigger="" units="" />
    219. 

  219. 		<StatusVariable id="620101213" valueType="Boolean" logicalName="IO.PMA.DO_MFC2_Valve" eventTrigger="" units="" />
    220. 

  220. 		<StatusVariable id="620101214" valueType="Boolean" logicalName="IO.PMA.DO_MFC3_Valve" eventTrigger="" units="" />
    221. 

  221. 		<StatusVariable id="620101215" valueType="Boolean" logicalName="IO.PMA.DO_MFC4_Valve" eventTrigger="" units="" />
    222. 

  222. 		<StatusVariable id="620101216" valueType="Boolean" logicalName="IO.PMA.DO_MFC5_Valve" eventTrigger="" units="" />
    223. 

  223. 		<StatusVariable id="620101217" valueType="Boolean" logicalName="IO.PMA.DO_MFC6_Valve" eventTrigger="" units="" />
    224. 

  224. 		<StatusVariable id="620101218" valueType="Boolean" logicalName="IO.PMA.DO_N2_Valve" eventTrigger="" units="" />
    225. 

  225. 		<StatusVariable id="620101219" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Final_Valve" eventTrigger="" units="" />
    226. 

  226. 		<StatusVariable id="620101220" valueType="Boolean" logicalName="IO.PMA.DO_Reset_Signal" eventTrigger="" units="" />
    227. 

  227. 		<StatusVariable id="620101221" valueType="Boolean" logicalName="IO.PMA.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    228. 

  228. 		<StatusVariable id="620101222" valueType="Boolean" logicalName="IO.PMA.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    229. 

  229. 		<StatusVariable id="620101223" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    230. 

  230. 		<StatusVariable id="620101224" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    231. 

  231. 		<StatusVariable id="620101225" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    232. 

  232. 		<StatusVariable id="620101226" valueType="Boolean" logicalName="IO.PMA.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    233. 

  233. 		<StatusVariable id="620101227" valueType="Boolean" logicalName="IO.PMA.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    234. 

  234. 		<StatusVariable id="620101228" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    235. 

  235. 		<StatusVariable id="620101229" valueType="Boolean" logicalName="IO.PMA.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    236. 

  236. 		<StatusVariable id="620101230" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    237. 

  237. 		<StatusVariable id="620101231" valueType="Boolean" logicalName="IO.PMA.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    238. 

  238. 		<StatusVariable id="620101232" valueType="F8" logicalName="IO.PMA.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    239. 

  239. 		<StatusVariable id="620101233" valueType="F8" logicalName="IO.PMA.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    240. 

  240. 		<StatusVariable id="620101234" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    241. 

  241. 		<StatusVariable id="620101235" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    242. 

  242. 		<StatusVariable id="620101236" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    243. 

  243. 		<StatusVariable id="620101237" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    244. 

  244. 		<StatusVariable id="620101238" valueType="Boolean" logicalName="IO.PMA.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    245. 

  245. 		<StatusVariable id="620101239" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    246. 

  246. 		<StatusVariable id="620101240" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    247. 

  247. 		<StatusVariable id="620101241" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    248. 

  248. 		<StatusVariable id="620101242" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    249. 

  249. 		<StatusVariable id="620101243" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    250. 

  250. 		<StatusVariable id="620101244" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    251. 

  251. 		<StatusVariable id="620101245" valueType="Boolean" logicalName="IO.PMA.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    252. 

  252. 		<StatusVariable id="620101246" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    253. 

  253. 		<StatusVariable id="620101247" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    254. 

  254. 		<StatusVariable id="620101248" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    255. 

  255. 		<StatusVariable id="620101249" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Button" eventTrigger="" units="" />
    256. 

  256. 		<StatusVariable id="620101250" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Button" eventTrigger="" units="" />
    257. 

  257. 		<StatusVariable id="620101251" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    258. 

  258. 		<StatusVariable id="620101252" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    259. 

  259. 		<StatusVariable id="620101253" valueType="Boolean" logicalName="IO.PMA.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    260. 

  260. 		<StatusVariable id="620101254" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    261. 

  261. 		<StatusVariable id="620101255" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    262. 

  262. 		<StatusVariable id="620101256" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    263. 

  263. 		<StatusVariable id="620101257" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    264. 

  264. 		<StatusVariable id="620101258" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    265. 

  265. 		<StatusVariable id="620101259" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    266. 

  266. 		<StatusVariable id="620101260" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    267. 

  267. 		<StatusVariable id="620101261" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    268. 

  268. 		<StatusVariable id="620101262" valueType="Boolean" logicalName="IO.PMA.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    269. 

  269. 		<StatusVariable id="620101263" valueType="Boolean" logicalName="IO.PMA.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    270. 

  270. 		<StatusVariable id="620101264" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    271. 

  271. 		<StatusVariable id="620101265" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    272. 

  272. 		<StatusVariable id="620101266" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    273. 

  273. 		<StatusVariable id="620101267" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    274. 

  274. 		<StatusVariable id="620101268" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    275. 

  275. 		<StatusVariable id="620101269" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    276. 

  276. 		<StatusVariable id="620101270" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    277. 

  277. 		<StatusVariable id="620101271" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    278. 

  278. 		<StatusVariable id="620101272" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    279. 

  279. 		<StatusVariable id="620101273" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    280. 

  280. 		<StatusVariable id="620101274" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    281. 

  281. 		<StatusVariable id="620101275" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    282. 

  282. 		<StatusVariable id="620101276" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    283. 

  283. 		<StatusVariable id="620101277" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    284. 

  284. 		<StatusVariable id="620101278" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    285. 

  285. 		<StatusVariable id="620101279" valueType="Boolean" logicalName="IO.PMA.DO_PVN21" eventTrigger="" units="" />
    286. 

  286. 		<StatusVariable id="620101280" valueType="Boolean" logicalName="IO.PMA.DO_PVN22" eventTrigger="" units="" />
    287. 

  287. 		<StatusVariable id="620101281" valueType="Boolean" logicalName="IO.PMA.DO_PV11" eventTrigger="" units="" />
    288. 

  288. 		<StatusVariable id="620101282" valueType="Boolean" logicalName="IO.PMA.DO_PV12" eventTrigger="" units="" />
    289. 

  289. 		<StatusVariable id="620101283" valueType="Boolean" logicalName="IO.PMA.DO_PV21" eventTrigger="" units="" />
    290. 

  290. 		<StatusVariable id="620101284" valueType="Boolean" logicalName="IO.PMA.DO_PV22" eventTrigger="" units="" />
    291. 

  291. 		<StatusVariable id="620101285" valueType="Boolean" logicalName="IO.PMA.DO_PV31" eventTrigger="" units="" />
    292. 

  292. 		<StatusVariable id="620101286" valueType="Boolean" logicalName="IO.PMA.DO_PV32" eventTrigger="" units="" />
    293. 

  293. 		<StatusVariable id="620101287" valueType="Boolean" logicalName="IO.PMA.DO_PV41" eventTrigger="" units="" />
    294. 

  294. 		<StatusVariable id="620101288" valueType="Boolean" logicalName="IO.PMA.DO_PV42" eventTrigger="" units="" />
    295. 

  295. 		<StatusVariable id="620101289" valueType="Boolean" logicalName="IO.PMA.DO_MFC7_Valve" eventTrigger="" units="" />
    296. 

  296. 		<StatusVariable id="620101290" valueType="Boolean" logicalName="IO.PMA.DO_MFC8_Valve" eventTrigger="" units="" />
    297. 

  297. 		<StatusVariable id="620101291" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    298. 

  298. 		<StatusVariable id="620101292" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    299. 

  299. 		<StatusVariable id="620101293" valueType="Boolean" logicalName="IO.PMA.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    300. 

  300. 		<StatusVariable id="620101294" valueType="Boolean" logicalName="IO.PMA.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    301. 

  301. 		<StatusVariable id="620101295" valueType="Boolean" logicalName="IO.PMA.DO_Gauge_Valve" eventTrigger="" units="" />
    302. 

  302. 		<StatusVariable id="620101296" valueType="Boolean" logicalName="IO.PMA.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    303. 

  303. 		<StatusVariable id="620101297" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    304. 

  304. 		<StatusVariable id="620101298" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Up" eventTrigger="" units="" />
    305. 

  305. 		<StatusVariable id="620101299" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Down" eventTrigger="" units="" />
    306. 

  306. 		<StatusVariable id="620101300" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    307. 

  307. 		<StatusVariable id="620101301" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    308. 

  308. 		<StatusVariable id="620101302" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    309. 

  309. 		<StatusVariable id="620101303" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    310. 

  310. 		<StatusVariable id="620101304" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    311. 

  311. 		<StatusVariable id="620101305" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    312. 

  312. 		<StatusVariable id="620101306" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    313. 

  313. 		<StatusVariable id="620101307" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    314. 

  314. 		<StatusVariable id="620101308" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    315. 

  315. 		<StatusVariable id="620101309" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    316. 

  316. 		<StatusVariable id="620101310" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    317. 

  317. 		<StatusVariable id="620101311" valueType="F8" logicalName="IO.PMA.AI_MFC7_Flow" eventTrigger="" units="" />
    318. 

  318. 		<StatusVariable id="620101312" valueType="F8" logicalName="IO.PMA.AI_MFC8_Flow" eventTrigger="" units="" />
    319. 

  319. 		<StatusVariable id="620101313" valueType="F8" logicalName="IO.PMA.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    320. 

  320. 		<StatusVariable id="620101314" valueType="F8" logicalName="IO.PMA.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    321. 

  321. 		<StatusVariable id="620101315" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    322. 

  322. 		<StatusVariable id="620101316" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    323. 

  323. 		<StatusVariable id="620101317" valueType="F8" logicalName="IO.PMA.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    324. 

  324. 		<StatusVariable id="620101318" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    325. 

  325. 		<StatusVariable id="620101319" valueType="F8" logicalName="IO.PMA.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    326. 

  326. 		<StatusVariable id="620101320" valueType="F8" logicalName="IO.PMA.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    327. 

  327. 		<StatusVariable id="620101321" valueType="F8" logicalName="IO.PMA.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    328. 

  328. 		<StatusVariable id="620101322" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    329. 

  329. 		<StatusVariable id="620101323" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    330. 

  330. 		<StatusVariable id="620101324" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    331. 

  331. 		<StatusVariable id="620101325" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    332. 

  332. 		<StatusVariable id="620101326" valueType="F8" logicalName="IO.PMA.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    333. 

  333. 		<StatusVariable id="620101327" valueType="F8" logicalName="IO.PMA.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    334. 

  334. 		<StatusVariable id="620101328" valueType="F8" logicalName="IO.PMA.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    335. 

  335. 		<StatusVariable id="620101329" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    336. 

  336. 		<StatusVariable id="620101330" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    337. 

  337. 		<StatusVariable id="620101331" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    338. 

  338. 		<StatusVariable id="620101332" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
    339. 

  339. 		<StatusVariable id="620101333" valueType="F8" logicalName="IO.PMA.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
    340. 

  340. 		<StatusVariable id="620101334" valueType="Ascii" logicalName="PMA.RecipeStartTime" eventTrigger="" units="" />
    341. 

  341. 		<StatusVariable id="620101335" valueType="Ascii" logicalName="PMA.RecipeEndTime" eventTrigger="" units="" />
    342. 

  342. 		<StatusVariable id="620101336" valueType="F8" logicalName="PMA.RecipeStepTime" eventTrigger="" units="" />
    343. 

  343. 		<StatusVariable id="620101337" valueType="F8" logicalName="PMA.RecipeRfOntime" eventTrigger="" units="" />
    344. 

  344. 

  345. 		<StatusVariable id="620101338" valueType="F8" logicalName="PMB.RecipeStartTime" eventTrigger="" units="" />
    346. 

  346. 		<StatusVariable id="620101339" valueType="F8" logicalName="PMB.RecipeEndTime" eventTrigger="" units="" />
    347. 

  347. 		<StatusVariable id="620101340" valueType="F8" logicalName="PMB.RecipeStepTime" eventTrigger="" units="" />
    348. 

  348. 		<StatusVariable id="620101341" valueType="F8" logicalName="PMB.RecipeRfOntime" eventTrigger="" units="" />
    349. 

  349. 

  350. 	
    351. 

  351. 

  352. 

  353. 		<StatusVariable id="620101350" valueType="U4" logicalName="PMA.WaferCounter" eventTrigger="" units="" />
    354. 

  354. 		<StatusVariable id="620101351" valueType="F8" logicalName="PMA.RfOnTime" eventTrigger="" units="" />
    355. 

  355. 		<StatusVariable id="620101352" valueType="F8" logicalName="PMA.PumpOnTime" eventTrigger="" units="" />
    356. 

  356. 

  357. 		<StatusVariable id="620101353" valueType="U4" logicalName="PMB.WaferCounter" eventTrigger="" units="" />
    358. 

  358. 		<StatusVariable id="620101354" valueType="F8" logicalName="PMB.RfOnTime" eventTrigger="" units="" />
    359. 

  359. 		<StatusVariable id="620101355" valueType="F8" logicalName="PMB.PumpOnTime" eventTrigger="" units="" />
    360. 

  360. 

  361. 		
    362. 

  362. 

  363. 		<StatusVariable id="620101362" valueType="U4" logicalName="PMA.StepNo" eventTrigger="" units="" />
    364. 

  364. 		<StatusVariable id="620101363" valueType="U4" logicalName="PMB.StepNo" eventTrigger="" units="" />
    365. 

  365. 		<StatusVariable id="620101364" valueType="U4" logicalName="PMC.StepNo" eventTrigger="" units="" />
    366. 

  366. 		<StatusVariable id="620101365" valueType="U4" logicalName="PMD.StepNo" eventTrigger="" units="" />
    367. 

  367. 

  368. 		<StatusVariable id="620101366" valueType="F8" logicalName="PMA.Match.C1SetPoint" eventTrigger="" units="" />
    369. 

  369. 		<StatusVariable id="620101367" valueType="F8" logicalName="PMA.Match.C2SetPoint" eventTrigger="" units="" />
    370. 

  370. 		<StatusVariable id="620101368" valueType="F8" logicalName="PMB.Match.C1SetPoint" eventTrigger="" units="" />
    371. 

  371. 		<StatusVariable id="620101369" valueType="F8" logicalName="PMB.Match.C2SetPoint" eventTrigger="" units="" />
    372. 

  372. 	
    373. 

  373. 		
    374. 

  374. 		<StatusVariable id="620101374" valueType="F8" logicalName="PMA.HighTemperatureHeater.InnerPower" eventTrigger="" units="" />
    375. 

  375. 		<StatusVariable id="620101375" valueType="F8" logicalName="PMA.HighTemperatureHeater.OuterPower" eventTrigger="" units="" />
    376. 

  376. 		<StatusVariable id="620101376" valueType="F8" logicalName="PMA.Match.Vpp" eventTrigger="" units="" />
    377. 

  377. 		<StatusVariable id="620101377" valueType="F8" logicalName="PMA.RFBox.C1"         eventTrigger="" units="" />
    378. 

  378. 		<StatusVariable id="620101378" valueType="F8" logicalName="PMA.RFBox.C1SetPoint" eventTrigger="" units="" />
    379. 

  379. 		<StatusVariable id="620101379" valueType="F8" logicalName="PMA.RFBox.Vpp" eventTrigger="" units="" />
    380. 

  380. 

  381. 		<StatusVariable id="620101380" valueType="F8" logicalName="PMB.HighTemperatureHeater.InnerPower" eventTrigger="" units="" />
    382. 

  382. 		<StatusVariable id="620101381" valueType="F8" logicalName="PMB.HighTemperatureHeater.OuterPower" eventTrigger="" units="" />
    383. 

  383. 		<StatusVariable id="620101382" valueType="F8" logicalName="PMB.Match.Vpp" eventTrigger="" units="" />
    384. 

  384. 		<StatusVariable id="620101383" valueType="F8" logicalName="PMB.RFBox.C1"         eventTrigger="" units="" />
    385. 

  385. 		<StatusVariable id="620101384" valueType="F8" logicalName="PMB.RFBox.C1SetPoint" eventTrigger="" units="" />
    386. 

  386. 		<StatusVariable id="620101385" valueType="F8" logicalName="PMB.RFBox.Vpp" eventTrigger="" units="" />
    387. 

  387. 		
    388. 

  388. 	
    389. 

  389. 

  390. 		<StatusVariable id="620101398" valueType="F8" logicalName="PMA.TurboPump.Temperature" eventTrigger="" units="" />
    391. 

  391. 		<StatusVariable id="620101399" valueType="F8" logicalName="PMB.TurboPump.Temperature" eventTrigger="" units="" />
    392. 

  392. 		<StatusVariable id="620101400" valueType="F8" logicalName="PMC.TurboPump.Temperature" eventTrigger="" units="" />
    393. 

  393. 		<StatusVariable id="620101401" valueType="F8" logicalName="PMD.TurboPump.Temperature" eventTrigger="" units="" />
    394. 

  394. 

  395. 		<StatusVariable id="620101402" valueType="F8" logicalName="PMA.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
    396. 

  396. 		<StatusVariable id="620101403" valueType="F8" logicalName="PMB.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
    397. 

  397. 		<StatusVariable id="620101404" valueType="F8" logicalName="PMC.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
    398. 

  398. 		<StatusVariable id="620101405" valueType="F8" logicalName="PMD.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
    399. 

  399. 

  400. 		<StatusVariable id="630101001" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    401. 

  401. 		<StatusVariable id="630101002" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    402. 

  402. 		<StatusVariable id="630101003" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    403. 

  403. 		<StatusVariable id="630101004" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    404. 

  404. 		<StatusVariable id="630101005" valueType="F4" logicalName="PMB.ChamberPressure" eventTrigger="" units="" />
    405. 

  405. 		<StatusVariable id="630101006" valueType="Boolean" logicalName="PMB.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    406. 

  406. 		<StatusVariable id="630101007" valueType="F8" logicalName="PMB.Chiller.Temp" eventTrigger="" units="" />
    407. 

  407. 		<StatusVariable id="630101008" valueType="F4" logicalName="PMB.ChillerInnerTemp" eventTrigger="" units="" />
    408. 

  408. 		<StatusVariable id="630101009" valueType="F4" logicalName="PMB.ChillerOuterTemp" eventTrigger="" units="" />
    409. 

  409. 		<StatusVariable id="630101010" valueType="F4" logicalName="PMB.ChillerTopTemp" eventTrigger="" units="" />
    410. 

  410. 		<StatusVariable id="630101011" valueType="F8" logicalName="PMB.ESCHePressure" eventTrigger="" units="" />
    411. 

  411. 		<StatusVariable id="630101012" valueType="F8" logicalName="PMB.ESCHV.Temp" eventTrigger="" units="" />
    412. 

  412. 		<StatusVariable id="630101013" valueType="F8" logicalName="PMB.ForelinePressure" eventTrigger="" units="" />
    413. 

  413. 		<StatusVariable id="630101014" valueType="Boolean" logicalName="PMB.GasBoxDoorSW.Value" eventTrigger="" units="" />
    414. 

  414. 		<StatusVariable id="630101015" valueType="Boolean" logicalName="PMB.GasBoxPressureSW.Value" eventTrigger="" units="" />
    415. 

  415. 		<StatusVariable id="630101016" valueType="Boolean" logicalName="PMB.GeneratorInterlock.Value" eventTrigger="" units="" />
    416. 

  416. 		<StatusVariable id="630101017" valueType="F8" logicalName="PMB.GetPVPosition" eventTrigger="" units="" />
    417. 

  417. 		<StatusVariable id="630101018" valueType="F8" logicalName="PMB.HighTemperatureHeater.Position" eventTrigger="" units="" />
    418. 

  418. 		<StatusVariable id="630101019" valueType="F8" logicalName="PMB.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    419. 

  419. 		<StatusVariable id="630101020" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    420. 

  420. 		<StatusVariable id="630101021" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    421. 

  421. 		<StatusVariable id="630101022" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    422. 

  422. 		<StatusVariable id="630101023" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    423. 

  423. 		<StatusVariable id="630101024" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    424. 

  424. 		<StatusVariable id="630101025" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    425. 

  425. 		<StatusVariable id="630101026" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    426. 

  426. 		<StatusVariable id="630101027" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    427. 

  427. 		<StatusVariable id="630101028" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    428. 

  428. 		<StatusVariable id="630101029" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    429. 

  429. 		<StatusVariable id="630101030" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    430. 

  430. 		<StatusVariable id="630101031" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    431. 

  431. 		<StatusVariable id="630101032" valueType="Boolean" logicalName="PMB.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    432. 

  432. 		<StatusVariable id="630101033" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    433. 

  433. 		<StatusVariable id="630101034" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    434. 

  434. 		<StatusVariable id="630101035" valueType="Boolean" logicalName="PMB.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    435. 

  435. 		<StatusVariable id="630101036" valueType="Boolean" logicalName="PMB.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    436. 

  436. 		<StatusVariable id="630101037" valueType="Boolean" logicalName="PMB.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    437. 

  437. 		<StatusVariable id="630101038" valueType="Boolean" logicalName="PMB.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    438. 

  438. 		<StatusVariable id="630101039" valueType="Boolean" logicalName="PMB.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    439. 

  439. 		<StatusVariable id="630101040" valueType="Boolean" logicalName="PMB.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    440. 

  440. 		<StatusVariable id="630101041" valueType="Boolean" logicalName="PMB.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    441. 

  441. 		<StatusVariable id="630101042" valueType="Boolean" logicalName="PMB.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    442. 

  442. 		<StatusVariable id="630101043" valueType="Boolean" logicalName="PMB.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    443. 

  443. 		<StatusVariable id="630101044" valueType="Boolean" logicalName="PMB.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    444. 

  444. 		<StatusVariable id="630101045" valueType="Boolean" logicalName="PMB.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    445. 

  445. 		<StatusVariable id="630101046" valueType="Boolean" logicalName="PMB.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    446. 

  446. 		<StatusVariable id="630101047" valueType="Boolean" logicalName="PMB.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    447. 

  447. 		<StatusVariable id="630101048" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    448. 

  448. 		<StatusVariable id="630101049" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    449. 

  449. 		<StatusVariable id="630101050" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    450. 

  450. 		<StatusVariable id="630101051" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    451. 

  451. 		<StatusVariable id="630101052" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    452. 

  452. 		<StatusVariable id="630101053" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    453. 

  453. 		<StatusVariable id="630101054" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    454. 

  454. 		<StatusVariable id="630101055" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    455. 

  455. 		<StatusVariable id="630101056" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    456. 

  456. 		<StatusVariable id="630101057" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    457. 

  457. 		<StatusVariable id="630101058" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    458. 

  458. 		<StatusVariable id="630101059" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    459. 

  459. 		<StatusVariable id="630101060" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    460. 

  460. 		<StatusVariable id="630101061" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    461. 

  461. 		<StatusVariable id="630101062" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    462. 

  462. 		<StatusVariable id="630101063" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    463. 

  463. 		<StatusVariable id="630101064" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    464. 

  464. 		<StatusVariable id="630101065" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    465. 

  465. 		<StatusVariable id="630101066" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    466. 

  466. 		<StatusVariable id="630101067" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    467. 

  467. 		<StatusVariable id="630101068" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    468. 

  468. 		<StatusVariable id="630101069" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    469. 

  469. 		<StatusVariable id="630101070" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    470. 

  470. 		<StatusVariable id="630101071" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.Status" eventTrigger="" units="" />
    471. 

  471. 		<StatusVariable id="630101072" valueType="Boolean" logicalName="PMB.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    472. 

  472. 		<StatusVariable id="630101073" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    473. 

  473. 		<StatusVariable id="630101074" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    474. 

  474. 		<StatusVariable id="630101075" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    475. 

  475. 		<StatusVariable id="630101076" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    476. 

  476. 		<StatusVariable id="630101077" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    477. 

  477. 		<StatusVariable id="630101078" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    478. 

  478. 		<StatusVariable id="630101079" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    479. 

  479. 		<StatusVariable id="630101080" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    480. 

  480. 		<StatusVariable id="630101081" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    481. 

  481. 		<StatusVariable id="630101082" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    482. 

  482. 		<StatusVariable id="630101083" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    483. 

  483. 		<StatusVariable id="630101084" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    484. 

  484. 		<StatusVariable id="630101085" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    485. 

  485. 		<StatusVariable id="630101086" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    486. 

  486. 		<StatusVariable id="630101087" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    487. 

  487. 		<StatusVariable id="630101088" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    488. 

  488. 		<StatusVariable id="630101089" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    489. 

  489. 		<StatusVariable id="630101090" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    490. 

  490. 		<StatusVariable id="630101091" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    491. 

  491. 		<StatusVariable id="630101092" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    492. 

  492. 		<StatusVariable id="630101093" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    493. 

  493. 		<StatusVariable id="630101094" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    494. 

  494. 		<StatusVariable id="630101095" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    495. 

  495. 		<StatusVariable id="630101096" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    496. 

  496. 		<StatusVariable id="630101097" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    497. 

  497. 		<StatusVariable id="630101098" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    498. 

  498. 		<StatusVariable id="630101099" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    499. 

  499. 		<StatusVariable id="630101100" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    500. 

  500. 		<StatusVariable id="630101101" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    501. 

  501. 		<StatusVariable id="630101102" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    502. 

  502. 		<StatusVariable id="630101103" valueType="Boolean" logicalName="PMB.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    503. 

  503. 		<StatusVariable id="630101104" valueType="Boolean" logicalName="PMB.Lid.IsClosed" eventTrigger="" units="" />
    504. 

  504. 		<StatusVariable id="630101105" valueType="F8" logicalName="PMB.LoadlockPressure" eventTrigger="" units="" />
    505. 

  505. 		<StatusVariable id="630101106" valueType="Boolean" logicalName="PMB.MainPump.IsError" eventTrigger="" units="" />
    506. 

  506. 		<StatusVariable id="630101107" valueType="Boolean" logicalName="PMB.MainPump.IsOn" eventTrigger="" units="" />
    507. 

  507. 		<StatusVariable id="630101108" valueType="Boolean" logicalName="PMB.MainPump.IsRunning" eventTrigger="" units="" />
    508. 

  508. 		<StatusVariable id="630101109" valueType="F8" logicalName="PMB.MainPump.Speed" eventTrigger="" units="" />
    509. 

  509. 		<StatusVariable id="630101110" valueType="F8" logicalName="PMB.MainPump.Temperature" eventTrigger="" units="" />
    510. 

  510. 		<StatusVariable id="630101111" valueType="F8" logicalName="PMB.Match.C1" eventTrigger="" units="" />
    511. 

  511. 		<StatusVariable id="630101112" valueType="F8" logicalName="PMB.Match.C2" eventTrigger="" units="" />
    512. 

  512. 		<StatusVariable id="630101113" valueType="F8" logicalName="PMB.MfcGas1.FeedBack" eventTrigger="" units="" />
    513. 

  513. 		<StatusVariable id="630101114" valueType="F8" logicalName="PMB.MfcGas1.SetPoint" eventTrigger="" units="" />
    514. 

  514. 		<StatusVariable id="630101115" valueType="F8" logicalName="PMB.MfcGas2.FeedBack" eventTrigger="" units="" />
    515. 

  515. 		<StatusVariable id="630101116" valueType="F8" logicalName="PMB.MfcGas2.SetPoint" eventTrigger="" units="" />
    516. 

  516. 		<StatusVariable id="630101117" valueType="F8" logicalName="PMB.MfcGas3.FeedBack" eventTrigger="" units="" />
    517. 

  517. 		<StatusVariable id="630101118" valueType="F8" logicalName="PMB.MfcGas3.SetPoint" eventTrigger="" units="" />
    518. 

  518. 		<StatusVariable id="630101119" valueType="F8" logicalName="PMB.MfcGas4.FeedBack" eventTrigger="" units="" />
    519. 

  519. 		<StatusVariable id="630101120" valueType="F8" logicalName="PMB.MfcGas4.SetPoint" eventTrigger="" units="" />
    520. 

  520. 		<StatusVariable id="630101121" valueType="F8" logicalName="PMB.MfcGas5.FeedBack" eventTrigger="" units="" />
    521. 

  521. 		<StatusVariable id="630101122" valueType="F8" logicalName="PMB.MfcGas5.SetPoint" eventTrigger="" units="" />
    522. 

  522. 		<StatusVariable id="630101123" valueType="F8" logicalName="PMB.MfcGas6.FeedBack" eventTrigger="" units="" />
    523. 

  523. 		<StatusVariable id="630101124" valueType="F8" logicalName="PMB.MfcGas6.SetPoint" eventTrigger="" units="" />
    524. 

  524. 		<StatusVariable id="630101125" valueType="F8" logicalName="PMB.MfcGas7.FeedBack" eventTrigger="" units="" />
    525. 

  525. 		<StatusVariable id="630101126" valueType="F8" logicalName="PMB.MfcGas7.SetPoint" eventTrigger="" units="" />
    526. 

  526. 		<StatusVariable id="630101127" valueType="F8" logicalName="PMB.MfcGas8.FeedBack" eventTrigger="" units="" />
    527. 

  527. 		<StatusVariable id="630101128" valueType="F8" logicalName="PMB.MfcGas8.SetPoint" eventTrigger="" units="" />
    528. 

  528. 		<StatusVariable id="630101129" valueType="F8" logicalName="PMB.MfcHe.FeedBack" eventTrigger="" units="" />
    529. 

  529. 		<StatusVariable id="630101130" valueType="F8" logicalName="PMB.MfcHe.SetPoint" eventTrigger="" units="" />
    530. 

  530. 		<StatusVariable id="630101131" valueType="F8" logicalName="PMB.MfcN2.FeedBack" eventTrigger="" units="" />
    531. 

  531. 		<StatusVariable id="630101132" valueType="F8" logicalName="PMB.MfcN2.SetPoint" eventTrigger="" units="" />
    532. 

  532. 		<StatusVariable id="630101133" valueType="Boolean" logicalName="PMB.N2PressureOk.Value" eventTrigger="" units="" />
    533. 

  533. 		<StatusVariable id="630101134" valueType="F8" logicalName="PMB.ProcessPressure" eventTrigger="" units="" />
    534. 

  534. 		<StatusVariable id="630101135" valueType="F8" logicalName="PMB.Rf.ForwardPower" eventTrigger="" units="" />
    535. 

  535. 		<StatusVariable id="630101136" valueType="F8" logicalName="PMB.Rf.Frequency" eventTrigger="" units="" />
    536. 

  536. 		<StatusVariable id="630101137" valueType="F8" logicalName="PMB.Rf.PowerSetPoint" eventTrigger="" units="" />
    537. 

  537. 		<StatusVariable id="630101138" valueType="F8" logicalName="PMB.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    538. 

  538. 		<StatusVariable id="630101139" valueType="F8" logicalName="PMB.Rf.PulsingFrequency" eventTrigger="" units="" />
    539. 

  539. 		<StatusVariable id="630101140" valueType="F8" logicalName="PMB.Rf.ReflectPower" eventTrigger="" units="" />
    540. 

  540. 		<StatusVariable id="630101141" valueType="Boolean" logicalName="PMB.RFMatchInterlock.Value" eventTrigger="" units="" />
    541. 

  541. 		<StatusVariable id="630101142" valueType="F8" logicalName="PMB.SCR1" eventTrigger="" units="" />
    542. 

  542. 		<StatusVariable id="630101143" valueType="F8" logicalName="PMB.SCR2" eventTrigger="" units="" />
    543. 

  543. 		<StatusVariable id="630101144" valueType="Boolean" logicalName="PMB.SensorATMSwitch.Value" eventTrigger="" units="" />
    544. 

  544. 		<StatusVariable id="630101145" valueType="Boolean" logicalName="PMB.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    545. 

  545. 		<StatusVariable id="630101146" valueType="Boolean" logicalName="PMB.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    546. 

  546. 		<StatusVariable id="630101147" valueType="Boolean" logicalName="PMB.SensorPMLidClosed.Value" eventTrigger="" units="" />
    547. 

  547. 		<StatusVariable id="630101148" valueType="Boolean" logicalName="PMB.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    548. 

  548. 		<StatusVariable id="630101149" valueType="Boolean" logicalName="PMB.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    549. 

  549. 		<StatusVariable id="630101150" valueType="Boolean" logicalName="PMB.SensorSourceRFFan.Value" eventTrigger="" units="" />
    550. 

  550. 		<StatusVariable id="630101151" valueType="Boolean" logicalName="PMB.SensorVacSwitch.Value" eventTrigger="" units="" />
    551. 

  551. 		<StatusVariable id="630101152" valueType="Boolean" logicalName="PMB.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    552. 

  552. 		<StatusVariable id="630101153" valueType="Boolean" logicalName="PMB.SlitDoor.IsClosed" eventTrigger="" units="" />
    553. 

  553. 		<StatusVariable id="630101154" valueType="Boolean" logicalName="PMB.TurboPumpInterlock.Value" eventTrigger="" units="" />
    554. 

  554. 		<StatusVariable id="630101155" valueType="F8" logicalName="PMB.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    555. 

  555. 		<StatusVariable id="630101156" valueType="Boolean" logicalName="PMB.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    556. 

  556. 		<StatusVariable id="630101157" valueType="F8" logicalName="PMB.BiasRf.ForwardPower" eventTrigger="" units="" />
    557. 

  557. 		<StatusVariable id="630101158" valueType="F8" logicalName="PMB.BiasRf.Frequency" eventTrigger="" units="" />
    558. 

  558. 		<StatusVariable id="630101159" valueType="F8" logicalName="PMB.BiasRf.IsPowerOn" eventTrigger="" units="" />
    559. 

  559. 		<StatusVariable id="630101160" valueType="F8" logicalName="PMB.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    560. 

  560. 		<StatusVariable id="630101161" valueType="F8" logicalName="PMB.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    561. 

  561. 		<StatusVariable id="630101162" valueType="F8" logicalName="PMB.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    562. 

  562. 		<StatusVariable id="630101163" valueType="F8" logicalName="PMB.BiasRf.ReflectPower" eventTrigger="" units="" />
    563. 

  563. 		<StatusVariable id="630101164" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    564. 

  564. 		<StatusVariable id="630101165" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    565. 

  565. 		<StatusVariable id="630101166" valueType="F8" logicalName="IO.PMB.AI_Day" eventTrigger="" units="" />
    566. 

  566. 		<StatusVariable id="630101167" valueType="F8" logicalName="IO.PMB.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    567. 

  567. 		<StatusVariable id="630101168" valueType="F8" logicalName="IO.PMB.AI_Heartbeat_FB" eventTrigger="" units="" />
    568. 

  568. 		<StatusVariable id="630101169" valueType="F8" logicalName="IO.PMB.AI_MFC1_Flow" eventTrigger="" units="" />
    569. 

  569. 		<StatusVariable id="630101170" valueType="F8" logicalName="IO.PMB.AI_MFC2_Flow" eventTrigger="" units="" />
    570. 

  570. 		<StatusVariable id="630101171" valueType="F8" logicalName="IO.PMB.AI_MFC3_Flow" eventTrigger="" units="" />
    571. 

  571. 		<StatusVariable id="630101172" valueType="F8" logicalName="IO.PMB.AI_MFC4_Flow" eventTrigger="" units="" />
    572. 

  572. 		<StatusVariable id="630101173" valueType="F8" logicalName="IO.PMB.AI_MFC5_Flow" eventTrigger="" units="" />
    573. 

  573. 		<StatusVariable id="630101174" valueType="F8" logicalName="IO.PMB.AI_MFC6_Flow" eventTrigger="" units="" />
    574. 

  574. 		<StatusVariable id="630101175" valueType="F8" logicalName="IO.PMB.AI_Minute" eventTrigger="" units="" />
    575. 

  575. 		<StatusVariable id="630101176" valueType="F8" logicalName="IO.PMB.AI_Month" eventTrigger="" units="" />
    576. 

  576. 		<StatusVariable id="630101177" valueType="F8" logicalName="IO.PMB.AI_Process_Pressure_2t" eventTrigger="" units="" />
    577. 

  577. 		<StatusVariable id="630101178" valueType="F8" logicalName="IO.PMB.AI_Second" eventTrigger="" units="" />
    578. 

  578. 		<StatusVariable id="630101179" valueType="F8" logicalName="IO.PMB.AI_Time" eventTrigger="" units="" />
    579. 

  579. 		<StatusVariable id="630101180" valueType="F8" logicalName="IO.PMB.AI_Year" eventTrigger="" units="" />
    580. 

  580. 		<StatusVariable id="630101181" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    581. 

  581. 		<StatusVariable id="630101182" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    582. 

  582. 		<StatusVariable id="630101183" valueType="F8" logicalName="IO.PMB.AO_Heartbeat" eventTrigger="" units="" />
    583. 

  583. 		<StatusVariable id="630101184" valueType="F8" logicalName="IO.PMB.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    584. 

  584. 		<StatusVariable id="630101185" valueType="F8" logicalName="IO.PMB.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    585. 

  585. 		<StatusVariable id="630101186" valueType="F8" logicalName="IO.PMB.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    586. 

  586. 		<StatusVariable id="630101187" valueType="F8" logicalName="IO.PMB.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    587. 

  587. 		<StatusVariable id="630101188" valueType="F8" logicalName="IO.PMB.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    588. 

  588. 		<StatusVariable id="630101189" valueType="F8" logicalName="IO.PMB.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    589. 

  589. 		<StatusVariable id="630101190" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    590. 

  590. 		<StatusVariable id="630101191" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    591. 

  591. 		<StatusVariable id="630101192" valueType="Boolean" logicalName="IO.PMB.DI_ATMSW" eventTrigger="" units="" />
    592. 

  592. 		<StatusVariable id="630101193" valueType="Boolean" logicalName="IO.PMB.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    593. 

  593. 		<StatusVariable id="630101194" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    594. 

  594. 		<StatusVariable id="630101195" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    595. 

  595. 		<StatusVariable id="630101196" valueType="Boolean" logicalName="IO.PMB.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    596. 

  596. 		<StatusVariable id="630101197" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    597. 

  597. 		<StatusVariable id="630101198" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    598. 

  598. 		<StatusVariable id="630101199" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    599. 

  599. 		<StatusVariable id="630101200" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    600. 

  600. 		<StatusVariable id="630101201" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    601. 

  601. 		<StatusVariable id="630101202" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    602. 

  602. 		<StatusVariable id="630101203" valueType="Boolean" logicalName="IO.PMB.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    603. 

  603. 		<StatusVariable id="630101204" valueType="Boolean" logicalName="IO.PMB.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    604. 

  604. 		<StatusVariable id="630101205" valueType="Boolean" logicalName="IO.PMB.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    605. 

  605. 		<StatusVariable id="630101206" valueType="Boolean" logicalName="IO.PMB.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    606. 

  606. 		<StatusVariable id="630101207" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" eventTrigger="" units="" />
    607. 

  607. 		<StatusVariable id="630101208" valueType="Boolean" logicalName="IO.PMB.DI_WaterLeak" eventTrigger="" units="" />
    608. 

  608. 		<StatusVariable id="630101209" valueType="Boolean" logicalName="IO.PMB.DO_Purge_Valve" eventTrigger="" units="" />
    609. 

  609. 		<StatusVariable id="630101210" valueType="Boolean" logicalName="IO.PMB.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    610. 

  610. 		<StatusVariable id="630101211" valueType="Boolean" logicalName="IO.PMB.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    611. 

  611. 		<StatusVariable id="630101212" valueType="Boolean" logicalName="IO.PMB.DO_MFC1_Valve" eventTrigger="" units="" />
    612. 

  612. 		<StatusVariable id="630101213" valueType="Boolean" logicalName="IO.PMB.DO_MFC2_Valve" eventTrigger="" units="" />
    613. 

  613. 		<StatusVariable id="630101214" valueType="Boolean" logicalName="IO.PMB.DO_MFC3_Valve" eventTrigger="" units="" />
    614. 

  614. 		<StatusVariable id="630101215" valueType="Boolean" logicalName="IO.PMB.DO_MFC4_Valve" eventTrigger="" units="" />
    615. 

  615. 		<StatusVariable id="630101216" valueType="Boolean" logicalName="IO.PMB.DO_MFC5_Valve" eventTrigger="" units="" />
    616. 

  616. 		<StatusVariable id="630101217" valueType="Boolean" logicalName="IO.PMB.DO_MFC6_Valve" eventTrigger="" units="" />
    617. 

  617. 		<StatusVariable id="630101218" valueType="Boolean" logicalName="IO.PMB.DO_N2_Valve" eventTrigger="" units="" />
    618. 

  618. 		<StatusVariable id="630101219" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Final_Valve" eventTrigger="" units="" />
    619. 

  619. 		<StatusVariable id="630101220" valueType="Boolean" logicalName="IO.PMB.DO_Reset_Signal" eventTrigger="" units="" />
    620. 

  620. 		<StatusVariable id="630101221" valueType="Boolean" logicalName="IO.PMB.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    621. 

  621. 		<StatusVariable id="630101222" valueType="Boolean" logicalName="IO.PMB.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    622. 

  622. 		<StatusVariable id="630101223" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    623. 

  623. 		<StatusVariable id="630101224" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    624. 

  624. 		<StatusVariable id="630101225" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    625. 

  625. 		<StatusVariable id="630101226" valueType="Boolean" logicalName="IO.PMB.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    626. 

  626. 		<StatusVariable id="630101227" valueType="Boolean" logicalName="IO.PMB.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    627. 

  627. 		<StatusVariable id="630101228" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    628. 

  628. 		<StatusVariable id="630101229" valueType="Boolean" logicalName="IO.PMB.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    629. 

  629. 		<StatusVariable id="630101230" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    630. 

  630. 		<StatusVariable id="630101231" valueType="Boolean" logicalName="IO.PMB.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    631. 

  631. 		<StatusVariable id="630101232" valueType="F8" logicalName="IO.PMB.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    632. 

  632. 		<StatusVariable id="630101233" valueType="F8" logicalName="IO.PMB.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    633. 

  633. 		<StatusVariable id="630101234" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    634. 

  634. 		<StatusVariable id="630101235" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    635. 

  635. 		<StatusVariable id="630101236" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    636. 

  636. 		<StatusVariable id="630101237" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    637. 

  637. 		<StatusVariable id="630101238" valueType="Boolean" logicalName="IO.PMB.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    638. 

  638. 		<StatusVariable id="630101239" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    639. 

  639. 		<StatusVariable id="630101240" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    640. 

  640. 		<StatusVariable id="630101241" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    641. 

  641. 		<StatusVariable id="630101242" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    642. 

  642. 		<StatusVariable id="630101243" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    643. 

  643. 		<StatusVariable id="630101244" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    644. 

  644. 		<StatusVariable id="630101245" valueType="Boolean" logicalName="IO.PMB.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    645. 

  645. 		<StatusVariable id="630101246" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    646. 

  646. 		<StatusVariable id="630101247" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    647. 

  647. 		<StatusVariable id="630101248" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    648. 

  648. 		<StatusVariable id="630101249" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Button" eventTrigger="" units="" />
    649. 

  649. 		<StatusVariable id="630101250" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Button" eventTrigger="" units="" />
    650. 

  650. 		<StatusVariable id="630101251" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    651. 

  651. 		<StatusVariable id="630101252" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    652. 

  652. 		<StatusVariable id="630101253" valueType="Boolean" logicalName="IO.PMB.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    653. 

  653. 		<StatusVariable id="630101254" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    654. 

  654. 		<StatusVariable id="630101255" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    655. 

  655. 		<StatusVariable id="630101256" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    656. 

  656. 		<StatusVariable id="630101257" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    657. 

  657. 		<StatusVariable id="630101258" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    658. 

  658. 		<StatusVariable id="630101259" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    659. 

  659. 		<StatusVariable id="630101260" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    660. 

  660. 		<StatusVariable id="630101261" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    661. 

  661. 		<StatusVariable id="630101262" valueType="Boolean" logicalName="IO.PMB.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    662. 

  662. 		<StatusVariable id="630101263" valueType="Boolean" logicalName="IO.PMB.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    663. 

  663. 		<StatusVariable id="630101264" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    664. 

  664. 		<StatusVariable id="630101265" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    665. 

  665. 		<StatusVariable id="630101266" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    666. 

  666. 		<StatusVariable id="630101267" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    667. 

  667. 		<StatusVariable id="630101268" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    668. 

  668. 		<StatusVariable id="630101269" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    669. 

  669. 		<StatusVariable id="630101270" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    670. 

  670. 		<StatusVariable id="630101271" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    671. 

  671. 		<StatusVariable id="630101272" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    672. 

  672. 		<StatusVariable id="630101273" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    673. 

  673. 		<StatusVariable id="630101274" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    674. 

  674. 		<StatusVariable id="630101275" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    675. 

  675. 		<StatusVariable id="630101276" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    676. 

  676. 		<StatusVariable id="630101277" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    677. 

  677. 		<StatusVariable id="630101278" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    678. 

  678. 		<StatusVariable id="630101279" valueType="Boolean" logicalName="IO.PMB.DO_PVN21" eventTrigger="" units="" />
    679. 

  679. 		<StatusVariable id="630101280" valueType="Boolean" logicalName="IO.PMB.DO_PVN22" eventTrigger="" units="" />
    680. 

  680. 		<StatusVariable id="630101281" valueType="Boolean" logicalName="IO.PMB.DO_PV11" eventTrigger="" units="" />
    681. 

  681. 		<StatusVariable id="630101282" valueType="Boolean" logicalName="IO.PMB.DO_PV12" eventTrigger="" units="" />
    682. 

  682. 		<StatusVariable id="630101283" valueType="Boolean" logicalName="IO.PMB.DO_PV21" eventTrigger="" units="" />
    683. 

  683. 		<StatusVariable id="630101284" valueType="Boolean" logicalName="IO.PMB.DO_PV22" eventTrigger="" units="" />
    684. 

  684. 		<StatusVariable id="630101285" valueType="Boolean" logicalName="IO.PMB.DO_PV31" eventTrigger="" units="" />
    685. 

  685. 		<StatusVariable id="630101286" valueType="Boolean" logicalName="IO.PMB.DO_PV32" eventTrigger="" units="" />
    686. 

  686. 		<StatusVariable id="630101287" valueType="Boolean" logicalName="IO.PMB.DO_PV41" eventTrigger="" units="" />
    687. 

  687. 		<StatusVariable id="630101288" valueType="Boolean" logicalName="IO.PMB.DO_PV42" eventTrigger="" units="" />
    688. 

  688. 		<StatusVariable id="630101289" valueType="Boolean" logicalName="IO.PMB.DO_MFC7_Valve" eventTrigger="" units="" />
    689. 

  689. 		<StatusVariable id="630101290" valueType="Boolean" logicalName="IO.PMB.DO_MFC8_Valve" eventTrigger="" units="" />
    690. 

  690. 		<StatusVariable id="630101291" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    691. 

  691. 		<StatusVariable id="630101292" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    692. 

  692. 		<StatusVariable id="630101293" valueType="Boolean" logicalName="IO.PMB.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    693. 

  693. 		<StatusVariable id="630101294" valueType="Boolean" logicalName="IO.PMB.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    694. 

  694. 		<StatusVariable id="630101295" valueType="Boolean" logicalName="IO.PMB.DO_Gauge_Valve" eventTrigger="" units="" />
    695. 

  695. 		<StatusVariable id="630101296" valueType="Boolean" logicalName="IO.PMB.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    696. 

  696. 		<StatusVariable id="630101297" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    697. 

  697. 		<StatusVariable id="630101298" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Up" eventTrigger="" units="" />
    698. 

  698. 		<StatusVariable id="630101299" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Down" eventTrigger="" units="" />
    699. 

  699. 		<StatusVariable id="630101300" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    700. 

  700. 		<StatusVariable id="630101301" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    701. 

  701. 		<StatusVariable id="630101302" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    702. 

  702. 		<StatusVariable id="630101303" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    703. 

  703. 		<StatusVariable id="630101304" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    704. 

  704. 		<StatusVariable id="630101305" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    705. 

  705. 		<StatusVariable id="630101306" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    706. 

  706. 		<StatusVariable id="630101307" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    707. 

  707. 		<StatusVariable id="630101308" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    708. 

  708. 		<StatusVariable id="630101309" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    709. 

  709. 		<StatusVariable id="630101310" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    710. 

  710. 		<StatusVariable id="630101311" valueType="F8" logicalName="IO.PMB.AI_MFC7_Flow" eventTrigger="" units="" />
    711. 

  711. 		<StatusVariable id="630101312" valueType="F8" logicalName="IO.PMB.AI_MFC8_Flow" eventTrigger="" units="" />
    712. 

  712. 		<StatusVariable id="630101313" valueType="F8" logicalName="IO.PMB.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    713. 

  713. 		<StatusVariable id="630101314" valueType="F8" logicalName="IO.PMB.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    714. 

  714. 		<StatusVariable id="630101315" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    715. 

  715. 		<StatusVariable id="630101316" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    716. 

  716. 		<StatusVariable id="630101317" valueType="F8" logicalName="IO.PMB.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    717. 

  717. 		<StatusVariable id="630101318" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    718. 

  718. 		<StatusVariable id="630101319" valueType="F8" logicalName="IO.PMB.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    719. 

  719. 		<StatusVariable id="630101320" valueType="F8" logicalName="IO.PMB.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    720. 

  720. 		<StatusVariable id="630101321" valueType="F8" logicalName="IO.PMB.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    721. 

  721. 		<StatusVariable id="630101322" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    722. 

  722. 		<StatusVariable id="630101323" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    723. 

  723. 		<StatusVariable id="630101324" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    724. 

  724. 		<StatusVariable id="630101325" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    725. 

  725. 		<StatusVariable id="630101326" valueType="F8" logicalName="IO.PMB.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    726. 

  726. 		<StatusVariable id="630101327" valueType="F8" logicalName="IO.PMB.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    727. 

  727. 		<StatusVariable id="630101328" valueType="F8" logicalName="IO.PMB.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    728. 

  728. 		<StatusVariable id="630101329" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    729. 

  729. 		<StatusVariable id="630101330" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    730. 

  730. 		<StatusVariable id="630101331" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    731. 

  731. 		<StatusVariable id="630101332" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
    732. 

  732. 		<StatusVariable id="630101333" valueType="F8" logicalName="IO.PMB.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
    733. 

  733. 		<StatusVariable id="640101001" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    734. 

  734. 		<StatusVariable id="640101002" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    735. 

  735. 		<StatusVariable id="640101003" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    736. 

  736. 		<StatusVariable id="640101004" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    737. 

  737. 		<StatusVariable id="640101005" valueType="F4" logicalName="PMC.ChamberPressure" eventTrigger="" units="" />
    738. 

  738. 		<StatusVariable id="640101006" valueType="Boolean" logicalName="PMC.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    739. 

  739. 		 
    740. 

  740. 		
    741. 

  741. 	</StatusVariables>
    742. 

  742. 

  743. </EquipmentVariables>
    744.