EfemHomeRoutine.cs 8.6 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using Venus_RT.Devices.EFEM;
  15. namespace Venus_RT.Modules.EFEM
  16. {
  17. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  18. {
  19. private enum HomeStep
  20. {
  21. ClearError,
  22. InitRobot,
  23. HomeAllAxes,
  24. CheckWaferPresence,
  25. End,
  26. }
  27. private enum HomeModuleStep
  28. {
  29. Home,
  30. HomeAxes,
  31. End,
  32. }
  33. private int _homeTimeout = 30 * 1000;
  34. ModuleName _targetModule;
  35. EfemBase _efem;
  36. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  37. {
  38. _efem = efem;
  39. }
  40. public RState Start(params object[] objs)
  41. {
  42. _targetModule = (ModuleName)objs[0];
  43. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  44. return Runner.Start(Module, $"Home {_targetModule}");
  45. }
  46. public RState Monitor()
  47. {
  48. if(_targetModule == ModuleName.EFEM)
  49. {
  50. Runner.Run(HomeStep.ClearError, ClearError, IsStepComplete, _homeTimeout)
  51. .Run(HomeStep.InitRobot, HomeAll, IsStepComplete, _homeTimeout)
  52. .Run(HomeStep.HomeAllAxes, HomeAllAxes, IsStepComplete, _homeTimeout)
  53. .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _homeTimeout)
  54. .End(HomeStep.End, NullFun, _delay_50ms);
  55. }
  56. else
  57. {
  58. Runner.Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  59. .Run(HomeModuleStep.HomeAxes, HomeModuleAxes, IsStepComplete, _homeTimeout)
  60. .End(HomeModuleStep.End, NullFun, _delay_50ms);
  61. }
  62. return Runner.Status;
  63. }
  64. public void Abort()
  65. {
  66. }
  67. private bool IsStepComplete()
  68. {
  69. if (_efem.Status == RState.End)
  70. {
  71. return true;
  72. }
  73. else if (_efem.Status == RState.Failed || _efem.Status == RState.Timeout)
  74. {
  75. Runner.Stop($"Efem home failed: {_efem.Status}");
  76. //LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem home failed: {_efem.Status}");
  77. return true;
  78. }
  79. else
  80. return false;
  81. }
  82. private bool ClearError()
  83. {
  84. return _efem.ClearError();
  85. }
  86. private bool HomeAll()
  87. {
  88. return _efem.HomeAll();
  89. }
  90. private bool HomeModule()
  91. {
  92. return _efem.Home(_targetModule);
  93. }
  94. private bool HomeAllAxes()
  95. {
  96. return _efem.OriginalSearch(ModuleName.EFEM);
  97. }
  98. private bool HomeModuleAxes()
  99. {
  100. return _efem.OriginalSearch(_targetModule);
  101. }
  102. private bool CheckWaferPresence()
  103. {
  104. return _efem.CheckWaferPresence();
  105. }
  106. private bool VerifyWaferPresence()
  107. {
  108. if (_efem.Status == RState.End)
  109. {
  110. var waferPresence = _efem.GetWaferPresence();
  111. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
  112. if (waferPresence.Length != 3)
  113. {
  114. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
  115. return false;
  116. }
  117. //upper arm
  118. if (waferPresence[0] == '1')
  119. {
  120. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  121. {
  122. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  123. }
  124. }
  125. else
  126. {
  127. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  128. {
  129. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  130. }
  131. }
  132. //lower arm
  133. if (waferPresence[1] == '1')
  134. {
  135. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  136. {
  137. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  138. }
  139. }
  140. else
  141. {
  142. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  143. {
  144. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  145. }
  146. }
  147. //aligner1
  148. if (waferPresence[2] == '1')
  149. {
  150. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  151. {
  152. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  153. }
  154. }
  155. else
  156. {
  157. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  158. {
  159. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  160. }
  161. }
  162. //aligner2
  163. //if (waferPresence[3] == '1')
  164. //{
  165. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  166. // {
  167. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  168. // }
  169. //}
  170. //else
  171. //{
  172. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  173. // {
  174. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  175. // }
  176. //}
  177. //cooling1
  178. //if (waferPresence[4] == '1')
  179. //{
  180. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  181. // {
  182. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  183. // }
  184. //}
  185. //else
  186. //{
  187. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  188. // {
  189. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  190. // }
  191. //}
  192. //cooling2
  193. //if (waferPresence[5] == '1')
  194. //{
  195. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  196. // {
  197. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  198. // }
  199. //}
  200. //else
  201. //{
  202. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  203. // {
  204. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  205. // }
  206. //}
  207. return true;
  208. }
  209. else if (_efem.Status != RState.Running)
  210. {
  211. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  212. return true;
  213. }
  214. else
  215. return false;
  216. }
  217. }
  218. }