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HongHuTM.cs
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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il y a 1 an |
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HongHuVR.cs
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5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
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il y a 1 an |
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ITransferRobot.cs
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ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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il y a 1 an |
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JetTM.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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il y a 1 an |
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SIASUNRobot.cs
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cfed419b0a
解决ValueTuple版本冲突
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il y a 1 an |
zhouhr
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.