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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using Aitex.Core.Common;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Venus_RT.Modules.PMs;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- namespace Venus_RT.Modules.TM
- {
- class MFPMSwapRoutine : ModuleRoutineBase, IRoutine
- {
- private enum SwapStep
- {
- WaitPMReady,
- PreRotation,
- OpenSlitDoor,
- PickPrepare,
- PickExtend,
- DropDownWafer,
- PickDelay,
- PickRetract,
- PlacePrepare,
- PlaceExtend,
- LiftUpWafer,
- PlaceDelay,
- PlaceRetract,
- CloseSlitDoor,
- NotifyDone,
- }
- private enum SwapWithHeaterStep
- {
- WaitPMReady,
- PreRotation,
- OpenSlitDoor,
- PickPrepare,
- Picking,
- PlacePrepare,
- Placing,
- CloseSlitDoor,
- NotifyDone,
- }
- private readonly JetTM _JetTM;
- private readonly ITransferRobot _robot;
- private int _swapingTimeout = 120 * 1000;
- private int _placeDelayTime = 0;
- private int _pickDelayTime = 0;
- private ModuleName _targetModule;
- private PMEntity _pmModule;
- private int _targetSlot;
- private Hand _pickHand;
- private Hand _placeHand;
- public MFPMSwapRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)
- {
- _JetTM = tm;
- _robot = robot;
- Name = "Swap with PM";
- }
- public RState Start(params object[] objs)
- {
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- var swapItem = (Queue<MoveItem>)objs[0];
- if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(swapItem))
- return RState.Failed;
- _targetModule = swapItem.Peek().SourceModule;
- _targetSlot = swapItem.Peek().SourceSlot;
- _pickHand = swapItem.Peek().RobotHand;
- _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;
- if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");
- return RState.Failed;
- }
- var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
- if (wafer.ChuckState == EnumWaferChuckStatus.Chucked)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick the wafer in {_targetModule} as the wafer is chucked");
- return RState.Failed;
- }
- Reset();
- _swapingTimeout = SC.GetValue<int>($"TM.SwapTimeout") * 1000;
- _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
- _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
- return Runner.Start(Module, $"Swap with {_targetModule}");
- }
- public RState Monitor()
- {
- //Runner.Wait(SwapStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- // .RunIf(SwapStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
- // .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
- // .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
- // .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
- // .Delay(SwapStep.PickDelay, _pickDelayTime)
- // .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
- // .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
- // .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
- // .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
- // .Delay(SwapStep.PlaceDelay, _placeDelayTime)
- // .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
- // .End(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms);
- switch (_pmModule.ChamberType)
- {
- //case JetChamber.Venus:
- case JetChamber.Kepler2300:
- Runner.Wait(SwapStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .RunIf(SwapStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
- .Run(SwapStep.OpenSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
- .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
- .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
- .Delay(SwapStep.PickDelay, _pickDelayTime)
- .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
- .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
- .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
- .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
- .Delay(SwapStep.PlaceDelay, _placeDelayTime)
- .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
- .Run(SwapStep.CloseSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms);
- break;
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- Runner.Wait(SwapWithHeaterStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .RunIf(SwapWithHeaterStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
- .Run(SwapWithHeaterStep.OpenSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(SwapWithHeaterStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
- .Run(SwapWithHeaterStep.Picking, Picking, WaitPickDone)
- .Run(SwapWithHeaterStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
- .Run(SwapWithHeaterStep.Placing, Placing, WaitPlaceDone)
- .Run(SwapWithHeaterStep.CloseSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms);
- break;
- }
- return Runner.Status;
- }
- private bool PickPrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePick);
- return true;
- }
- private bool OpenPMSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
- }
- private bool OpenPMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorOpened(_targetModule);
- }
- private bool ClosePMSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
- }
- private bool ClosePMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorClosed(_targetModule);
- }
- private bool IsModuleReadyForPick()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
- //return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick;
- }
- private bool PickExtend()
- {
- return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);
- }
- private bool PickRetract()
- {
- return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);
- }
- private bool PlacePrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
- return true;
- }
- private bool IsModuleReadyForPlace()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;
- //return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place;
- }
- private bool PlaceExtend()
- {
- return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);
- }
- private bool PlaceRetract()
- {
- return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);
- }
- private bool WaitRobotExtendDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
- return true;
- }
- }
- private bool Picking()
- {
- return _robot.Pick(_targetModule, _targetSlot, _pickHand);
- }
- private bool WaitPickDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
-
-
- //WaferManager.Instance.WaferMoved(ModuleName.TM, (int)_hand, _targetModule, _targetSlot);
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
- return true;
- }
- }
- private bool Placing()
- {
- return _robot.Place(_targetModule, _targetSlot, _placeHand);
- }
- private bool WaitPlaceDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place failed, {_robot.Status}");
- return true;
- }
- }
- private bool RotateArm()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement
- return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);
- }
- private bool WaitRotateDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyPMPickWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
- return true;
- }
- private bool WaitPMWaferDropDown()
- {
- if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
- return true;
- }
- return false;
- }
- private bool WaitRobotRetractDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyLiftUpWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
- return true;
- }
- private bool WaitPMWaferLiftUp()
- {
- if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
- return true;
- }
- return false;
- }
- private bool NotifyPMDone()
- {
- _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
- return true;
- }
- public void Abort()
- {
- _robot.Halt();
- }
- }
- }
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