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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Venus_RT.Modules.PMs;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using MECF.Framework.Common.DBCore;
- using System;
- namespace Venus_RT.Modules.TM
- {
- class MFPMPlaceRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PlaceStep
- {
- WaitPMReady,
- PreRotation,
- OpenPMSlitDoor,
- PMPrepare,
- ArmExtend,
- QueryAWC,
- LiftUpWafer,
- PlaceDelay,
- ArmRetract,
- SavePlaceData,
- ClosePMSlitDoor,
- NotifyDone,
- }
- private enum PlaceWithHeaterStep
- {
- WaitPMReady,
- PreRotation,
- OpenPMSlitDoor,
- PMPrepare,
- Placing,
- QueryAWC,
- SavePlaceData,
- ClosePMSlitDoor,
- NotifyDone,
- }
- private readonly JetTM _JetTM;
- private readonly ITransferRobot _robot;
- private int _placingTimeout = 120 * 1000;
- private int _placeDelayTime = 0;
- private ModuleName _targetModule;
- private PMEntity _pmModule;
- private int _targetSlot;
- private Hand _hand;
- private DateTime _starttime;
- private bool _queryAwc;
- public MFPMPlaceRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)
- {
- _JetTM = tm;
- _robot = robot;
- Name = "Place to PM";
- if (SC.GetValue<int>($"TM.QueryAWCOption") == 2 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)
- _queryAwc = true;
- else
- _queryAwc = false;
- }
- public RState Start(params object[] objs)
- {
- _starttime = DateTime.Now;
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- var placeItem = (Queue<MoveItem>)objs[0];
- if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(placeItem))
- return RState.Failed;
- _targetModule = placeItem.Peek().DestinationModule;
- _targetSlot = placeItem.Peek().DestinationSlot;
- _hand = placeItem.Peek().RobotHand;
- if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as TM Robot Arm: {_hand} has no wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as {_targetModule} Slot {_targetSlot + 1} already has a wafer");
- return RState.Failed;
- }
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)_hand);
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from TM Robot {_hand} to {_targetModule} {_targetSlot + 1}");
- Reset();
- _placingTimeout = SC.GetValue<int>("TM.PlaceTimeout") * 1000;
- _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
- return Runner.Start(Module, $"Place to {_targetModule}");
- }
- public RState Monitor()
- {
- switch (_pmModule.ChamberType)
- {
- //case JetChamber.Venus:
- case JetChamber.Kepler2300:
- Runner.Wait(PlaceStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .RunIf(PlaceStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
- .Run(PlaceStep.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(PlaceStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s)
- .Run(PlaceStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _placingTimeout)
- .Run(PlaceStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
- .Run(PlaceStep.LiftUpWafer, NotifyPMPlaceWafer, WaitPMWaferLiftUp, _delay_30s)
- .Delay(PlaceStep.PlaceDelay, _placeDelayTime)
- .Run(PlaceStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _delay_30s)
- .Run(PlaceStep.SavePlaceData, RecordAWCData, NullFun)
- .Run(PlaceStep.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(PlaceStep.NotifyDone, NotifyPMDone, _delay_50ms);
- break;
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- Runner.Wait(PlaceWithHeaterStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .RunIf(PlaceWithHeaterStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
- .Run(PlaceWithHeaterStep.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(PlaceWithHeaterStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s)
- .Run(PlaceWithHeaterStep.Placing, Placing, WaitPlaceDone)
- .Run(PlaceWithHeaterStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
- .Run(PlaceWithHeaterStep.SavePlaceData, RecordAWCData, NullFun)
- .Run(PlaceWithHeaterStep.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(PlaceWithHeaterStep.NotifyDone, NotifyPMDone, _delay_50ms);
- break;
- }
-
- return Runner.Status;
- }
- private bool OpenPMSlitDoor()
- {
- _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
- return true;
- }
- private bool OpenPMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorOpened(_targetModule);
- }
- private bool ClosePMSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
- }
- private bool ClosePMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorClosed(_targetModule);
- }
- private bool ModulePrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
- return true;
- }
- private bool IsModulePrepareReady()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place;
- }
- private bool RotateArm()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePlace); // Notify PM to Serv pressure in advance for throughput enhancement
- return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _hand);
- }
- private bool WaitRotateDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
- return true;
- }
- }
- private bool Placing()
- {
- return _robot.Place(_targetModule, _targetSlot, _hand);
- }
- private bool WaitPlaceDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place failed, {_robot.Status}");
- return true;
- }
- }
- private bool ArmExtend()
- {
- return _robot.PlaceExtend(_targetModule, _targetSlot, _hand);
- }
- private bool ArmRetract()
- {
- return _robot.PlaceRetract(_targetModule, _targetSlot, _hand);
- }
- private bool QueryAWC()
- {
- if (!_queryAwc)
- return true;
- else
- return _robot.QueryAwc();
- }
- private bool WaitRobotExtendDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
- return true;
- }
- }
- private bool RecordAWCData()
- {
- if(!_queryAwc)
- return true;
- //已经move后的数据
- string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}";
- int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot;
- //查询完毕 插入数据
- OffsetDataRecorder.RecordOffsetData(
- Guid.NewGuid().ToString(),
- ModuleName.TMRobot, 0,
- _targetModule, _targetSlot,
- _origin_module, _origin_slot,
- _hand, RobotArmPan.None,
- _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,
- _starttime, DateTime.Now);
- return true;
- }
- private bool WaitRobotQueryDone()
- {
- if (!_queryAwc)
- return true;
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyPMPlaceWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
- return true;
- }
- private bool WaitPMWaferLiftUp()
- {
- return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
- }
- private bool WaitRobotRetractDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place Retract failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyPMDone()
- {
- _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
- return true;
- }
- public void Abort()
- {
- _robot.Halt();
- }
- }
- }
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