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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Jobs;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using Venus_RT.Devices.EFEM;
- namespace Venus_RT.Modules.EFEM
- {
- class EfemSwapRoutine : ModuleRoutineBase, IRoutine
- {
- private enum SwapStep
- {
- WaitModuleReady,
- ModulePrepare,
- OpenSlitDoor,
- MoveWafer,
- WaitMaferMoved,
- CloseSlitDoor,
- NotifyDone,
- }
- private readonly EfemBase _efem;
- private int _moveTimeout = 20 * 1000;
- private ModuleName _targetModule;
- private LLEntity _llModule;
- private TMEntity _tmModule;
- Queue<MoveItem> _actionList = new Queue<MoveItem>();
- MoveItem _currentAction;
- private int _actionCount = 0;
- private int _autoPumpOptInWafer = 4;
- private int _autoPumpOptOutWafer = 0;
- private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut;
- private bool _bAutoMode = true;
- public EfemSwapRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
- {
- _efem = efem;
- Name = "Swap";
- }
- public RState Start(params object[] objs)
- {
- if (!_efem.IsHomed)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");
- return RState.Failed;
- }
- _actionList.Clear();
- foreach (var item in (Queue<MoveItem>)objs[0])
- {
- _actionList.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, item.DestinationModule, item.DestinationSlot, item.RobotHand));
- }
- if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(_actionList))
- return RState.Failed;
- var firtItem = _actionList.Peek();
- if (ModuleHelper.IsLoadLock(firtItem.SourceModule))
- _targetModule = firtItem.SourceModule;
- else if (ModuleHelper.IsLoadLock(firtItem.DestinationModule))
- _targetModule = firtItem.DestinationModule;
- else
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Invalid move parameter: {firtItem.SourceModule},{firtItem.SourceSlot + 1} => {firtItem.DestinationModule},{firtItem.DestinationSlot + 1} ");
- return RState.Failed;
- }
- _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);
- if (_llModule == null)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Invalid Loadlock: {_targetModule}, maybe not installed");
- return RState.Failed;
- }
- _tmModule = Singleton<RouteManager>.Instance.GetTM();
- if(_tmModule == null)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Get TM Entity failed.");
- return RState.Failed;
- }
-
- _moveTimeout = SC.GetValue<int>("EFEM.MotionTimeout") * 1000;
- _autoPumpOptInWafer = SC.GetValue<int>("EFEM.LLAutoPumpInWaferOpt");
- _autoPumpOptOutWafer = SC.GetValue<int>("EFEM.LLAutoPumpOutWaferOpt");
- _sequencePattern = Singleton<RouteManager>.Instance.LLInOutPath;
- _bAutoMode = Singleton<RouteManager>.Instance.IsAutoMode;
- _actionCount = _actionList.Count;
- return Runner.Start(Module, $"EFEM Swap with {_targetModule}");
- }
- public RState Monitor()
- {
- Runner.Wait(SwapStep.WaitModuleReady, () => _llModule.IsIdle, _delay_60s)
- .Run(SwapStep.ModulePrepare, ModulePrepare, IsModulePrepareReady)
- .Run(SwapStep.OpenSlitDoor, OpenSlitDoor, IsSlitDoorOpen)
- .LoopStart(SwapStep.MoveWafer, loopName(), _actionCount, MoveWafer)
- .LoopEnd(SwapStep.WaitMaferMoved, NullFun, WaitWaferMoved, _moveTimeout)
- .Run(SwapStep.CloseSlitDoor, CloseSlitDoor, IsSlitDoorClosed)
- .End(SwapStep.NotifyDone, NotifyLLDone, _delay_50ms);
- return Runner.Status;
- }
- private bool ModulePrepare()
- {
- _llModule.PostMsg(LLEntity.MSG.Prepare_EFEM);
- return true;
- }
- private string loopName()
- {
- return "EFEM Swap";
- }
- private bool IsModulePrepareReady()
- {
- return _llModule.Status == LLEntity.LLStatus.Ready_For_EFEM;
- }
- private bool OpenSlitDoor()
- {
- return _tmModule.TurnEFEMSlitDoor(_targetModule, true, out _);
- }
- private bool CloseSlitDoor()
- {
- return _tmModule.TurnEFEMSlitDoor(_targetModule, false, out _);
- }
- private bool IsSlitDoorOpen()
- {
- return _tmModule.IsLLSlitDoorOpen(_targetModule);
- }
- private bool IsSlitDoorClosed()
- {
- return _tmModule.IsLLSlitDoorClosed(_targetModule);
- }
- private bool VerifyWaferExistence(MoveItem item)
- {
- if (WaferManager.Instance.CheckHasWafer(item.DestinationModule, item.DestinationSlot))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Cannot move wafer as desitination {item.DestinationModule},{item.DestinationSlot} already a wafer: ");
- return false;
- }
- if (WaferManager.Instance.CheckNoWafer(item.SourceModule, item.SourceSlot))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Cannot move wafer as source {item.SourceModule}, {item.SourceSlot} has no wafer");
- return false;
- }
- return true;
- }
- private bool MoveWafer()
- {
- if(_actionList.Count <= 0)
- {
- Runner.Stop("no action");
- return true;
- }
- _currentAction = _actionList.Dequeue();
- if (!VerifyWaferExistence(_currentAction))
- return false;
- var wafer = WaferManager.Instance.GetWafer(_currentAction.SourceModule, _currentAction.SourceSlot);
- LOG.Write(eEvent.EV_EFEM_ROBOT, ModuleName.EfemRobot, $"{wafer.WaferOrigin} will be move from {_currentAction.SourceModule} {_currentAction.SourceSlot + 1} to {_currentAction.DestinationModule} {_currentAction.DestinationSlot + 1}");
- if (ModuleHelper.IsLoadLock(_currentAction.SourceModule) && ModuleHelper.IsEFEMRobot(_currentAction.DestinationModule))
- {
- return _efem.Pick(_currentAction.SourceModule, _currentAction.SourceSlot, (Hand)_currentAction.DestinationSlot);
- }
- else if (ModuleHelper.IsEFEMRobot(_currentAction.SourceModule) && ModuleHelper.IsLoadLock(_currentAction.DestinationModule))
- {
- return _efem.Place(_currentAction.DestinationModule, _currentAction.DestinationSlot, (Hand)_currentAction.SourceSlot);
- }
- else
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, ModuleName.EfemRobot, $"Invalid move parameter, source:{_currentAction.SourceModule},{_currentAction.SourceSlot}, destination: {_currentAction.DestinationModule}, {_currentAction.DestinationSlot}");
- return false;
- }
- }
- private bool WaitWaferMoved()
- {
- if (_efem.Status == RState.Running)
- {
- return false;
- }
- else if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);
- return true;
- }
- else
- {
- Runner.Stop($"EFEM Robot moving wafer failed, {_efem.Status}");
- return true;
- }
- }
- private bool NotifyLLDone()
- {
- var waferStatus = _llModule.GetWaferProcessStatus();
- bool bAutoPump = false;
- if (_bAutoMode)
- {
- if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLA) ||
- (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLB)) &&
- waferStatus.unprocessed >= _autoPumpOptInWafer)
- {
- bAutoPump = true;
- }
- else if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLB) ||
- (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLA)) &&
- waferStatus.processed <= _autoPumpOptOutWafer)
- {
- bAutoPump = true;
- }
- else if (_sequencePattern == SequenceLLInOutPath.DInDOut &&
- waferStatus.processed <= _autoPumpOptOutWafer &&
- waferStatus.unprocessed >= _autoPumpOptInWafer)
- {
- bAutoPump = true;
- }
- }
- LOG.Write(eEvent.EV_EFEM_ROBOT, Module, $"NotifyLLDone() => {_targetModule}, Sequence Pattern{_sequencePattern}, unprocessed wafer:{waferStatus.unprocessed}, processed wafer: {waferStatus.processed},bAutoPump = {bAutoPump}, Config Option:{_autoPumpOptInWafer},{_autoPumpOptOutWafer}");
- _llModule.PostMsg(bAutoPump ? LLEntity.MSG.AutoPump : LLEntity.MSG.EFEM_Exchange_Ready);
-
- return true;
- }
- public void Abort()
- {
- _efem.Halt();
- }
- }
- }
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