123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176 |
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using Venus_RT.Devices.EFEM;
- namespace Venus_RT.Modules.EFEM
- {
- class EfemPickRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PickStep
- {
- WaitModuleReady,
- Picking1,
- Picking2,
- End,
- }
- private int _moveTimeout = 20 * 1000;
- private ModuleName _targetModule = ModuleName.System;
- int _targetSlot;
- int _targetSlot2;
- Hand _hand;
- Hand _hand2;
- EfemBase _efem;
- bool _bDoublePick = false;
- public EfemPickRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
- {
- _efem = efem;
- }
- public RState Start(params object[] objs)
- {
- if (!_efem.IsHomed)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");
- return RState.Failed;
- }
- _bDoublePick = false;
- var pickItem = (Queue<MoveItem>)objs[0];
- if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(pickItem))
- return RState.Failed;
- _targetModule = pickItem.Peek().SourceModule;
- _targetSlot = pickItem.Peek().SourceSlot;
- _hand = pickItem.Peek().RobotHand;
- if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the pick action");
- return RState.Failed;
- }
- if(WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target slot: {_targetModule}{_targetSlot} has no wafer, cannot do the pick action");
- return RState.Failed;
- }
- if(pickItem.Count >= 2)
- {
- if(!ModuleHelper.IsLoadPort(_targetModule))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Wrong double pick command, target is not loadport");
- return RState.Failed;
- }
- _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand2))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand2} already has a wafer, cannot do the double pick action");
- return RState.Failed;
- }
- _targetSlot2 = pickItem.ToArray()[1].SourceSlot;
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot2))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target slot: {_targetModule}{_targetSlot2} has no wafer, cannot do the double pick action");
- return RState.Failed;
- }
- _bDoublePick = true;
- }
- _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;
- return Runner.Start(Module, $"Pick from {_targetModule}");
- }
- public RState Monitor()
- {
- if(_bDoublePick)
- {
- Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
- .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
- .Run(PickStep.Picking2, Pick2, Pick2Done, _moveTimeout)
- .End(PickStep.End, ActionDone);
- }
- else
- {
- Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
- .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
- .End(PickStep.End, ActionDone);
- }
- return Runner.Status;
- }
- public void Abort()
- {
- _efem.Halt();
- }
- private bool WaitModuleReady()
- {
- return true;
- }
- private bool Pick1()
- {
- return _efem.Pick(_targetModule, _targetSlot, _hand);
- }
- private bool Pick1Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.EfemRobot, (int)_hand);
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot picking failed: {_efem.Status}");
- return true;
- }
- return false;
- }
- private bool Pick2()
- {
- return _efem.Pick(_targetModule, _targetSlot2, _hand2);
- }
- private bool Pick2Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot2, ModuleName.EfemRobot, (int)_hand2);
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot picking failed: {_efem.Status}");
- return true;
- }
- return false;
- }
- private bool ActionDone()
- {
- return true;
- }
- }
- }
|