EfemPickRoutine.cs 5.7 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using MECF.Framework.Common.Schedulers;
  12. using System.Collections.Generic;
  13. using Venus_RT.Devices.EFEM;
  14. namespace Venus_RT.Modules.EFEM
  15. {
  16. class EfemPickRoutine : ModuleRoutineBase, IRoutine
  17. {
  18. private enum PickStep
  19. {
  20. WaitModuleReady,
  21. Picking1,
  22. Picking2,
  23. End,
  24. }
  25. private int _moveTimeout = 20 * 1000;
  26. private ModuleName _targetModule = ModuleName.System;
  27. int _targetSlot;
  28. int _targetSlot2;
  29. Hand _hand;
  30. Hand _hand2;
  31. EfemBase _efem;
  32. bool _bDoublePick = false;
  33. public EfemPickRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  34. {
  35. _efem = efem;
  36. }
  37. public RState Start(params object[] objs)
  38. {
  39. if (!_efem.IsHomed)
  40. {
  41. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");
  42. return RState.Failed;
  43. }
  44. _bDoublePick = false;
  45. var pickItem = (Queue<MoveItem>)objs[0];
  46. if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(pickItem))
  47. return RState.Failed;
  48. _targetModule = pickItem.Peek().SourceModule;
  49. _targetSlot = pickItem.Peek().SourceSlot;
  50. _hand = pickItem.Peek().RobotHand;
  51. if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
  52. {
  53. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the pick action");
  54. return RState.Failed;
  55. }
  56. if(WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  57. {
  58. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target slot: {_targetModule}{_targetSlot} has no wafer, cannot do the pick action");
  59. return RState.Failed;
  60. }
  61. if(pickItem.Count >= 2)
  62. {
  63. if(!ModuleHelper.IsLoadPort(_targetModule))
  64. {
  65. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Wrong double pick command, target is not loadport");
  66. return RState.Failed;
  67. }
  68. _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;
  69. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand2))
  70. {
  71. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand2} already has a wafer, cannot do the double pick action");
  72. return RState.Failed;
  73. }
  74. _targetSlot2 = pickItem.ToArray()[1].SourceSlot;
  75. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot2))
  76. {
  77. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target slot: {_targetModule}{_targetSlot2} has no wafer, cannot do the double pick action");
  78. return RState.Failed;
  79. }
  80. _bDoublePick = true;
  81. }
  82. _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;
  83. return Runner.Start(Module, $"Pick from {_targetModule}");
  84. }
  85. public RState Monitor()
  86. {
  87. if(_bDoublePick)
  88. {
  89. Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
  90. .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
  91. .Run(PickStep.Picking2, Pick2, Pick2Done, _moveTimeout)
  92. .End(PickStep.End, ActionDone);
  93. }
  94. else
  95. {
  96. Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
  97. .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
  98. .End(PickStep.End, ActionDone);
  99. }
  100. return Runner.Status;
  101. }
  102. public void Abort()
  103. {
  104. _efem.Halt();
  105. }
  106. private bool WaitModuleReady()
  107. {
  108. return true;
  109. }
  110. private bool Pick1()
  111. {
  112. return _efem.Pick(_targetModule, _targetSlot, _hand);
  113. }
  114. private bool Pick1Done()
  115. {
  116. if (_efem.Status == RState.End)
  117. {
  118. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.EfemRobot, (int)_hand);
  119. return true;
  120. }
  121. else if (_efem.Status != RState.Running)
  122. {
  123. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot picking failed: {_efem.Status}");
  124. return true;
  125. }
  126. return false;
  127. }
  128. private bool Pick2()
  129. {
  130. return _efem.Pick(_targetModule, _targetSlot2, _hand2);
  131. }
  132. private bool Pick2Done()
  133. {
  134. if (_efem.Status == RState.End)
  135. {
  136. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot2, ModuleName.EfemRobot, (int)_hand2);
  137. return true;
  138. }
  139. else if (_efem.Status != RState.Running)
  140. {
  141. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot picking failed: {_efem.Status}");
  142. return true;
  143. }
  144. return false;
  145. }
  146. private bool ActionDone()
  147. {
  148. return true;
  149. }
  150. }
  151. }