Kepler2200AInterlock.xml 16 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  3. <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN="" tip.en-US="DO-00" >
  4. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  5. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  6. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  7. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  8. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  9. </Action>
  10. <Action do="DO_PVN22" value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-01" >
  11. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  12. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  13. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  14. </Action>
  15. <Action do="DO_PVN22" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-02" >
  16. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  17. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  18. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  19. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  20. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  21. </Action>
  22. <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-03" >
  23. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  24. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  25. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  26. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  27. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  28. </Action>
  29. <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-04" >
  30. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  31. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  32. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  33. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  34. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  35. </Action>
  36. <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-05" >
  37. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  38. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  39. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  40. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  41. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  42. </Action>
  43. <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-06" >
  44. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  45. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  46. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  47. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  48. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  49. </Action>
  50. <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-07" >
  51. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  52. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  53. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  54. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  55. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  56. </Action>
  57. <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-08" >
  58. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  59. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  60. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  61. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  62. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  63. </Action>
  64. <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-09" >
  65. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  66. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  67. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  68. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  69. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  70. </Action>
  71. <Action do="DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
  72. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  73. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  74. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  75. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  76. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  77. <Limit do="DO_Soft_Pumping_Valve" value="false" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" />
  78. <Limit do="DO_Fast_Pumping_Valve" value="false" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" />
  79. </Action>
  80. <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
  81. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  82. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  83. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  84. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  85. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  86. </Action>
  87. <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
  88. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  89. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  90. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  91. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  92. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  93. </Action>
  94. <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
  95. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  96. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  97. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  98. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  99. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  100. </Action>
  101. <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
  102. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  103. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  104. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  105. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  106. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  107. </Action>
  108. <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
  109. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  110. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  111. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  112. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  113. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  114. </Action>
  115. <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
  116. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  117. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  118. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  119. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  120. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  121. </Action>
  122. <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
  123. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  124. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  125. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  126. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  127. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  128. </Action>
  129. <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
  130. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  131. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  132. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  133. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  134. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  135. </Action>
  136. <Action do="DO_Gas_Final_Valve" value="true" tip="Gas final valve" tip.zh-CN="" tip.en-US="DO-21" >
  137. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0"/>
  138. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  139. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  140. </Action>
  141. <Action do="DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22">
  142. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0"/>
  143. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  144. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  145. <Limit do="DO_N2_Valve" value="false" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" />
  146. </Action>
  147. <Action do="DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
  148. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0"/>
  149. <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  150. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  151. <Limit do="DO_N2_Valve" value="false" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" />
  152. </Action>
  153. <Action do="DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
  154. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0"/>
  155. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  156. <Limit di="DI_Arm_Not_Extend_to_PM" value="true" tip="Arm Not Extend to PM" tip.zh-CN="" tip.en-US="DI-76" />
  157. </Action>
  158. <Action do="DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
  159. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0"/>
  160. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12"/>
  161. <Limit di="DI_Arm_Not_Extend_to_PM" value="true" tip="Arm Not Extend to PM" tip.zh-CN="" tip.en-US="DI-76" />
  162. </Action>
  163. <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
  164. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12"/>
  165. </Action>
  166. <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
  167. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12"/>
  168. </Action>
  169. <Action do="DO_S_Valve_Heater_On" value="true" tip="S-Valve Heater On" tip.zh-CN="" tip.en-US="DO-33" >
  170. <Limit di="DI_S_Valve_OT_Switch_Alarm" value="false" tip="S_Valve OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-66"/>
  171. </Action>
  172. <Action do="DO_Lid_Up" value="true" tip="Lid UP" tip.zh-CN="" tip.en-US="DO-50">
  173. <Limit di="DI_Lid_Up_Limit_Pos_SW" value="false" tip="Lid Up Limit Pos SW" tip.zh-CN="" tip.en-US="DI-74"/>
  174. </Action>
  175. <Action do="DO_Lid_Down" value="true" tip="Lid Down" tip.zh-CN="" tip.en-US="DO-51">
  176. <Limit di="DI_Lid_Down_Limit_Pos_SW" value="false" tip="Lid Down Limit Pos SW" tip.zh-CN="" tip.en-US="DI-75"/>
  177. </Action>
  178. </Interlock>