OverKepler2300ViewModel.cs 68 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class OverKepler2300ViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_CurrentModuleRecipes = new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. private bool m_PVHe1ValveIsOpen;
  52. private bool m_PVHe2ValveIsOpen;
  53. private bool m_TurboPumpPumpingValveIsOpen;
  54. private bool m_TurboPumpPurgeValveIsOpen;
  55. private bool m_GuageValveIsOpen;
  56. private bool m_PendulumValveIsOpen;
  57. //private bool m_BRFIsOn;
  58. //private bool m_SRFIsOn;
  59. private double m_HeGasSetpoint;
  60. private int m_HePressureSetpoint;
  61. private float m_SRFFwdPowerSetpoint;
  62. private float m_BRFFwdPowerSetpoint;
  63. private float m_SRFMatchC1;
  64. private float m_SRFMatchC2;
  65. private float m_BRFMatchC1;
  66. private float m_BRFMatchC2;
  67. private double m_MFC1SetPoint;
  68. private double m_MFC2SetPoint;
  69. private double m_MFC3SetPoint;
  70. private double m_MFC4SetPoint;
  71. private double m_MFC5SetPoint;
  72. private double m_MFC6SetPoint;
  73. private double m_MFC7SetPoint;
  74. private double m_MFC8SetPoint;
  75. private double m_N2SetPoint;
  76. private AITMfcData m_MFC1Data;
  77. private AITMfcData m_MFC2Data;
  78. private AITMfcData m_MFC3Data;
  79. private AITMfcData m_MFC4Data;
  80. private AITMfcData m_MFC5Data;
  81. private AITMfcData m_MFC6Data;
  82. private AITMfcData m_MFC7Data;
  83. private AITMfcData m_MFC8Data;
  84. private AITMfcData m_MFCHeData;
  85. private AITMfcData m_MFCN2Data;
  86. private AITHeaterData m_ValveHeaterData;
  87. private AITHeaterData m_ForelineHeaterData;
  88. private AITHeaterData m_WallHeaterData;
  89. private AITHeaterData m_PendulumHeaterData;
  90. private AITRfData m_SRFData;
  91. private AITRfData m_BRFData;
  92. private AITPendulumValveData m_PendulumValveData;
  93. //private AITHVData m_ESCHVData;
  94. private PMState m_PMCurrentState;
  95. private bool m_SourceRFFanInterlock;
  96. private bool m_IsWLK;
  97. private bool m_IsWaterFlowOk;
  98. private bool m_IsTurboPumpInterlock;
  99. private bool m_IsCDAOK;
  100. private bool m_SensorGasBoxDoor;
  101. private bool m_SensorGasBoxPressure;
  102. private bool m_PumpIsOpen;
  103. private bool m_TurboIsOpen;
  104. private bool m_IsATM;
  105. private bool m_IsVAC;
  106. private List<string> m_RtDataKeys;
  107. private Dictionary<string, object> m_RtDataValues;
  108. private int m_PositionValue;
  109. private bool m_IsPositionMode;
  110. private int m_ESCVoltage;
  111. private bool m_GasIsFlowing;
  112. private bool m_IsProcessing;
  113. private bool m_IsAutoMode;
  114. private string m_SelectedRecipe;
  115. private float m_ChillerTempSetpoint;
  116. private float m_InnerChillerTempSetpoint;
  117. private float m_OuterChillerTempSetpoint;
  118. private float m_TopChillerTempSetpoint;
  119. private float m_WallTempSetpoint;
  120. private bool m_HeIsPressureMode = true;
  121. private bool m_ChillerIsOn;
  122. private bool m_InnerChillerIsOn;
  123. private bool m_OuterChillerIsOn;
  124. private bool m_TopChillerIsOn;
  125. private float m_ProcessHighPressure;
  126. private float m_ProcessLowPressure;
  127. private float m_ForelinePressurePressure;
  128. private float m_ESCHePressure;
  129. ButterflyValveView butterflyValveMessageBox;
  130. HeaterView heaterView;
  131. private int m_TurboPumpRotationalSpeed;
  132. private bool m_LiftPinIsUp;
  133. private bool m_IsSlitDoorClosed;
  134. private bool m_IsLidClosed;
  135. private float m_ChillerTemperature;
  136. private float m_InnerTemperature;
  137. private float m_OuterTemperature;
  138. private float m_TopTemperature;
  139. //private float m_HVTemperature;
  140. private int m_ESCHVOutputVoltage;
  141. //private float m_SRfReflectPower;
  142. //private float m_SRfForwardPowerFeedBack;
  143. //private float m_BRfReflectPower;
  144. //private float m_BRfForwardPowerFeedBack;
  145. //private int m_MatchWorkMode;
  146. //private int m_BiasMatchWorkMode;
  147. private float m_MatchC1;
  148. private float m_MatchC2;
  149. private float m_BiasMatchC1;
  150. private float m_BiasMatchC2;
  151. private float m_PendulumValvePosition;
  152. private bool m_IsTurboPumpAtSpeed;
  153. private bool m_TurboPumpWaterFlowSwitch;
  154. private bool m_IsHasWafer;
  155. private Recipe m_CurrentRecipe = new Recipe();
  156. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  157. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  158. private double m_ChamberPressureFeedBack;
  159. private double m_TurboN2FlowSetPoint;
  160. #endregion
  161. #region 属性
  162. public List<string> CurrentModuleRecipes
  163. {
  164. get { return m_CurrentModuleRecipes; }
  165. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  166. }
  167. public Recipe CurrentRecipe
  168. {
  169. get { return m_CurrentRecipe; }
  170. set { SetProperty(ref m_CurrentRecipe, value); }
  171. }
  172. public RecipeResult CurrentRecipeResult
  173. {
  174. get { return m_CurrentRecipeResult; }
  175. set { SetProperty(ref m_CurrentRecipeResult, value); }
  176. }
  177. public RecipeStep CurrentRecipeStep
  178. {
  179. get { return m_CurrentRecipeStep; }
  180. set { SetProperty(ref m_CurrentRecipeStep, value); }
  181. }
  182. public bool IsHasWafer
  183. {
  184. get { return m_IsHasWafer; }
  185. set { SetProperty(ref m_IsHasWafer, value); }
  186. }
  187. public bool IsTurboPumpAtSpeed
  188. {
  189. get { return m_IsTurboPumpAtSpeed; }
  190. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  191. }
  192. public bool TurboPumpWaterFlowSwitch
  193. {
  194. get { return m_TurboPumpWaterFlowSwitch; }
  195. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  196. }
  197. public float PendulumValvePosition
  198. {
  199. get { return m_PendulumValvePosition; }
  200. set { SetProperty(ref m_PendulumValvePosition, value); }
  201. }
  202. public float BiasMatchC1
  203. {
  204. get { return m_BiasMatchC1; }
  205. set
  206. {
  207. SetProperty(ref m_BiasMatchC1, value);
  208. }
  209. }
  210. public float BiasMatchC2
  211. {
  212. get { return m_BiasMatchC2; }
  213. set
  214. {
  215. SetProperty(ref m_BiasMatchC2, value);
  216. }
  217. }
  218. public float MatchC1
  219. {
  220. get { return m_MatchC1; }
  221. set
  222. {
  223. SetProperty(ref m_MatchC1, value);
  224. }
  225. }
  226. public float MatchC2
  227. {
  228. get { return m_MatchC2; }
  229. set
  230. {
  231. SetProperty(ref m_MatchC2, value);
  232. }
  233. }
  234. public AITPendulumValveData PendulumValveData
  235. {
  236. get { return m_PendulumValveData; }
  237. set
  238. {
  239. SetProperty(ref m_PendulumValveData, value);
  240. }
  241. }
  242. //public AITHVData ESCHVData
  243. //{
  244. // get { return m_ESCHVData; }
  245. // set
  246. // {
  247. // SetProperty(ref m_ESCHVData, value);
  248. // }
  249. //}
  250. public int ESCHVOutputVoltage
  251. {
  252. get { return m_ESCHVOutputVoltage; }
  253. set
  254. {
  255. SetProperty(ref m_ESCHVOutputVoltage, value);
  256. }
  257. }
  258. public float ChillerTemperature
  259. {
  260. get { return m_ChillerTemperature; }
  261. set
  262. {
  263. SetProperty(ref m_ChillerTemperature, value);
  264. }
  265. }
  266. public float InnerTemperature
  267. {
  268. get { return m_InnerTemperature; }
  269. set
  270. {
  271. SetProperty(ref m_InnerTemperature, value);
  272. }
  273. }
  274. public float OuterTemperature
  275. {
  276. get { return m_OuterTemperature; }
  277. set
  278. {
  279. SetProperty(ref m_OuterTemperature, value);
  280. }
  281. }
  282. public float TopTemperature
  283. {
  284. get { return m_TopTemperature; }
  285. set
  286. {
  287. SetProperty(ref m_TopTemperature, value);
  288. }
  289. }
  290. //public float HVTemperature
  291. //{
  292. // get { return m_HVTemperature; }
  293. // set
  294. // {
  295. // SetProperty(ref m_HVTemperature, value);
  296. // }
  297. //}
  298. public bool IsLidClosed
  299. {
  300. get { return m_IsLidClosed; }
  301. set
  302. {
  303. SetProperty(ref m_IsLidClosed, value);
  304. }
  305. }
  306. public bool IsSlitDoorClosed
  307. {
  308. get { return m_IsSlitDoorClosed; }
  309. set
  310. {
  311. SetProperty(ref m_IsSlitDoorClosed, value);
  312. }
  313. }
  314. public bool LiftPinIsUp
  315. {
  316. get { return m_LiftPinIsUp; }
  317. set
  318. {
  319. SetProperty(ref m_LiftPinIsUp, value);
  320. }
  321. }
  322. public int TurboPumpRotationalSpeed
  323. {
  324. get { return m_TurboPumpRotationalSpeed; }
  325. set
  326. {
  327. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  328. }
  329. }
  330. public float ESCHePressure
  331. {
  332. get { return m_ESCHePressure; }
  333. set
  334. {
  335. SetProperty(ref m_ESCHePressure, value);
  336. }
  337. }
  338. public float ProcessHighPressure
  339. {
  340. get { return m_ProcessHighPressure; }
  341. set
  342. {
  343. SetProperty(ref m_ProcessHighPressure, value);
  344. }
  345. }
  346. public float ProcessLowPressure
  347. {
  348. get { return m_ProcessLowPressure; }
  349. set
  350. {
  351. SetProperty(ref m_ProcessLowPressure, value);
  352. }
  353. }
  354. public float ForelinePressure
  355. {
  356. get { return m_ForelinePressurePressure; }
  357. set
  358. {
  359. SetProperty(ref m_ForelinePressurePressure, value);
  360. }
  361. }
  362. public bool SourceRFFanInterlock
  363. {
  364. get { return m_SourceRFFanInterlock; }
  365. set
  366. {
  367. SetProperty(ref m_SourceRFFanInterlock, value);
  368. }
  369. }
  370. public bool IsWLK
  371. {
  372. get { return m_IsWLK; }
  373. set
  374. {
  375. SetProperty(ref m_IsWLK, value);
  376. }
  377. }
  378. public bool IsWaterFlowOk
  379. {
  380. get { return m_IsWaterFlowOk; }
  381. set
  382. {
  383. SetProperty(ref m_IsWaterFlowOk, value);
  384. }
  385. }
  386. public bool IsCDAOK
  387. {
  388. get { return m_IsCDAOK; }
  389. set
  390. {
  391. SetProperty(ref m_IsCDAOK, value);
  392. }
  393. }
  394. public bool SensorGasBoxDoor
  395. {
  396. get { return m_SensorGasBoxDoor; }
  397. set
  398. {
  399. SetProperty(ref m_SensorGasBoxDoor, value);
  400. }
  401. }
  402. public bool SensorGasBoxPressure
  403. {
  404. get { return m_SensorGasBoxPressure; }
  405. set
  406. {
  407. SetProperty(ref m_SensorGasBoxPressure, value);
  408. }
  409. }
  410. public bool IsTurboPumpInterlock
  411. {
  412. get { return m_IsTurboPumpInterlock; }
  413. set
  414. {
  415. SetProperty(ref m_IsTurboPumpInterlock, value);
  416. }
  417. }
  418. public string ModuleName { get; set; }
  419. public double MFC1SetPoint
  420. {
  421. get { return m_MFC1SetPoint; }
  422. set { SetProperty(ref m_MFC1SetPoint, value); }
  423. }
  424. public double MFC2SetPoint
  425. {
  426. get { return m_MFC2SetPoint; }
  427. set { SetProperty(ref m_MFC2SetPoint, value); }
  428. }
  429. public double MFC3SetPoint
  430. {
  431. get { return m_MFC3SetPoint; }
  432. set { SetProperty(ref m_MFC3SetPoint, value); }
  433. }
  434. public double MFC4SetPoint
  435. {
  436. get { return m_MFC4SetPoint; }
  437. set { SetProperty(ref m_MFC4SetPoint, value); }
  438. }
  439. public double MFC5SetPoint
  440. {
  441. get { return m_MFC5SetPoint; }
  442. set { SetProperty(ref m_MFC5SetPoint, value); }
  443. }
  444. public double MFC6SetPoint
  445. {
  446. get { return m_MFC6SetPoint; }
  447. set { SetProperty(ref m_MFC6SetPoint, value); }
  448. }
  449. public double MFC7SetPoint
  450. {
  451. get { return m_MFC7SetPoint; }
  452. set { SetProperty(ref m_MFC7SetPoint, value); }
  453. }
  454. public double MFC8SetPoint
  455. {
  456. get { return m_MFC8SetPoint; }
  457. set { SetProperty(ref m_MFC8SetPoint, value); }
  458. }
  459. public double N2SetPoint
  460. {
  461. get { return m_N2SetPoint; }
  462. set { SetProperty(ref m_N2SetPoint, value); }
  463. }
  464. public double TurboN2FlowSetPoint
  465. {
  466. get { return m_TurboN2FlowSetPoint; }
  467. set
  468. {
  469. if (value != m_TurboN2FlowSetPoint)
  470. {
  471. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  472. }
  473. SetProperty(ref m_TurboN2FlowSetPoint, value);
  474. }
  475. }
  476. public AITMfcData MFC1Data
  477. {
  478. get { return m_MFC1Data; }
  479. set { SetProperty(ref m_MFC1Data, value); }
  480. }
  481. public AITMfcData MFC2Data
  482. {
  483. get { return m_MFC2Data; }
  484. set { SetProperty(ref m_MFC2Data, value); }
  485. }
  486. public AITMfcData MFC3Data
  487. {
  488. get { return m_MFC3Data; }
  489. set { SetProperty(ref m_MFC3Data, value); }
  490. }
  491. public AITMfcData MFC4Data
  492. {
  493. get { return m_MFC4Data; }
  494. set { SetProperty(ref m_MFC4Data, value); }
  495. }
  496. public AITMfcData MFC5Data
  497. {
  498. get { return m_MFC5Data; }
  499. set { SetProperty(ref m_MFC5Data, value); }
  500. }
  501. public AITMfcData MFC6Data
  502. {
  503. get { return m_MFC6Data; }
  504. set { SetProperty(ref m_MFC6Data, value); }
  505. }
  506. public AITMfcData MFC7Data
  507. {
  508. get { return m_MFC7Data; }
  509. set { SetProperty(ref m_MFC7Data, value); }
  510. }
  511. public AITMfcData MFC8Data
  512. {
  513. get { return m_MFC8Data; }
  514. set { SetProperty(ref m_MFC8Data, value); }
  515. }
  516. public AITMfcData MFCHeData
  517. {
  518. get { return m_MFCHeData; }
  519. set { SetProperty(ref m_MFCHeData, value); }
  520. }
  521. public AITMfcData MFCN2Data
  522. {
  523. get { return m_MFCN2Data; }
  524. set { SetProperty(ref m_MFCN2Data, value); }
  525. }
  526. public AITHeaterData ValveHeaterData
  527. {
  528. get { return m_ValveHeaterData; }
  529. set { SetProperty(ref m_ValveHeaterData, value); }
  530. }
  531. public AITHeaterData ForelineHeaterData
  532. {
  533. get { return m_ForelineHeaterData; }
  534. set { SetProperty(ref m_ForelineHeaterData, value); }
  535. }
  536. public AITHeaterData WallHeaterData
  537. {
  538. get { return m_WallHeaterData; }
  539. set { SetProperty(ref m_WallHeaterData, value); }
  540. }
  541. public AITHeaterData PendulumHeaterData
  542. {
  543. get { return m_PendulumHeaterData; }
  544. set { SetProperty(ref m_PendulumHeaterData, value); }
  545. }
  546. public AITRfData SRFData
  547. {
  548. get { return m_SRFData; }
  549. set { SetProperty(ref m_SRFData, value); }
  550. }
  551. public AITRfData BRFData
  552. {
  553. get { return m_BRFData; }
  554. set { SetProperty(ref m_BRFData, value); }
  555. }
  556. public PMState PMCurrentState
  557. {
  558. get { return m_PMCurrentState; }
  559. set { SetProperty(ref m_PMCurrentState, value); }
  560. }
  561. #region 阀
  562. public bool GasFinalValveIsOpen
  563. {
  564. get { return m_GasFinalValveIsOpen; }
  565. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  566. }
  567. public bool PVN21ValveIsOpen
  568. {
  569. get { return m_PVN21ValveIsOpen; }
  570. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  571. }
  572. public bool PVN22ValveIsOpen
  573. {
  574. get { return m_PVN22ValveIsOpen; }
  575. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  576. }
  577. public bool N2ValveIsOpen
  578. {
  579. get { return m_N2ValveIsOpen; }
  580. set { SetProperty(ref m_N2ValveIsOpen, value); }
  581. }
  582. public bool PV11ValveIsOpen
  583. {
  584. get { return m_PV11ValveIsOpen; }
  585. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  586. }
  587. public bool PV12ValveIsOpen
  588. {
  589. get { return m_PV12ValveIsOpen; }
  590. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  591. }
  592. public bool MFC1ValveIsOpen
  593. {
  594. get { return m_MFC1ValveIsOpen; }
  595. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  596. }
  597. public bool PV21ValveIsOpen
  598. {
  599. get { return m_PV21ValveIsOpen; }
  600. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  601. }
  602. public bool PV22ValveIsOpen
  603. {
  604. get { return m_PV22ValveIsOpen; }
  605. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  606. }
  607. public bool MFC2ValveIsOpen
  608. {
  609. get { return m_MFC2ValveIsOpen; }
  610. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  611. }
  612. public bool PV31ValveIsOpen
  613. {
  614. get { return m_PV31ValveIsOpen; }
  615. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  616. }
  617. public bool PV32ValveIsOpen
  618. {
  619. get { return m_PV32ValveIsOpen; }
  620. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  621. }
  622. public bool MFC3ValveIsOpen
  623. {
  624. get { return m_MFC3ValveIsOpen; }
  625. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  626. }
  627. public bool PV41ValveIsOpen
  628. {
  629. get { return m_PV41ValveIsOpen; }
  630. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  631. }
  632. public bool PV42ValveIsOpen
  633. {
  634. get { return m_PV42ValveIsOpen; }
  635. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  636. }
  637. public bool MFC4ValveIsOpen
  638. {
  639. get { return m_MFC4ValveIsOpen; }
  640. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  641. }
  642. public bool MFC5ValveIsOpen
  643. {
  644. get { return m_MFC5ValveIsOpen; }
  645. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  646. }
  647. public bool MFC6ValveIsOpen
  648. {
  649. get { return m_MFC6ValveIsOpen; }
  650. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  651. }
  652. public bool MFC7ValveIsOpen
  653. {
  654. get { return m_MFC7ValveIsOpen; }
  655. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  656. }
  657. public bool MFC8ValveIsOpen
  658. {
  659. get { return m_MFC8ValveIsOpen; }
  660. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  661. }
  662. public bool PVHe1ValveIsOpen
  663. {
  664. get { return m_PVHe1ValveIsOpen; }
  665. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  666. }
  667. public bool PVHe2ValveIsOpen
  668. {
  669. get { return m_PVHe2ValveIsOpen; }
  670. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  671. }
  672. public bool TurboPumpPumpingValveIsOpen
  673. {
  674. get { return m_TurboPumpPumpingValveIsOpen; }
  675. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  676. }
  677. public bool TurboPumpPurgeValveIsOpen
  678. {
  679. get { return m_TurboPumpPurgeValveIsOpen; }
  680. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  681. }
  682. public bool SoftPumpValveIsOpen
  683. {
  684. get { return m_SoftPumpValveIsOpen; }
  685. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  686. }
  687. public bool FastPumpValveIsOpen
  688. {
  689. get { return m_FastPumpValveIsOpen; }
  690. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  691. }
  692. public bool GuageValveIsOpen
  693. {
  694. get { return m_GuageValveIsOpen; }
  695. set { SetProperty(ref m_GuageValveIsOpen, value); }
  696. }
  697. #endregion
  698. public Dictionary<string, object> RtDataValues
  699. {
  700. get { return m_RtDataValues; }
  701. set { SetProperty(ref m_RtDataValues, value); }
  702. }
  703. public bool PumpIsOpen
  704. {
  705. get { return m_PumpIsOpen; }
  706. set { SetProperty(ref m_PumpIsOpen, value); }
  707. }
  708. public bool PendulumValveIsOpen
  709. {
  710. get { return m_PendulumValveIsOpen; }
  711. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  712. }
  713. public bool TurboIsOpen
  714. {
  715. get { return m_TurboIsOpen; }
  716. set { SetProperty(ref m_TurboIsOpen, value); }
  717. }
  718. public bool IsATM
  719. {
  720. get { return m_IsATM; }
  721. set { SetProperty(ref m_IsATM, value); }
  722. }
  723. public bool IsVAC
  724. {
  725. get { return m_IsVAC; }
  726. set { SetProperty(ref m_IsVAC, value); }
  727. }
  728. //public bool BRFIsOn
  729. //{
  730. // get { return m_BRFIsOn; }
  731. // set { SetProperty(ref m_BRFIsOn, value); }
  732. //}
  733. //public bool SRFIsOn
  734. //{
  735. // get { return m_SRFIsOn; }
  736. // set { SetProperty(ref m_SRFIsOn, value); }
  737. //}
  738. public int PositionValue
  739. {
  740. get { return m_PositionValue; }
  741. set { SetProperty(ref m_PositionValue, value); }
  742. }
  743. public bool IsPositionMode
  744. {
  745. get { return m_IsPositionMode; }
  746. set { SetProperty(ref m_IsPositionMode, value); }
  747. }
  748. public double HeGasSetpoint
  749. {
  750. get { return m_HeGasSetpoint; }
  751. set
  752. {
  753. SetProperty(ref m_HeGasSetpoint, value);
  754. }
  755. }
  756. public int HePressureSetpoint
  757. {
  758. get { return m_HePressureSetpoint; }
  759. set
  760. {
  761. SetProperty(ref m_HePressureSetpoint, value);
  762. }
  763. }
  764. public float SRFFwdPowerSetpoint
  765. {
  766. get { return m_SRFFwdPowerSetpoint; }
  767. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  768. }
  769. public float BRFFwdPowerSetpoint
  770. {
  771. get { return m_BRFFwdPowerSetpoint; }
  772. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  773. }
  774. public int ESCVoltage
  775. {
  776. get { return m_ESCVoltage; }
  777. set { SetProperty(ref m_ESCVoltage, value); }
  778. }
  779. public float SRFMatchC1
  780. {
  781. get { return m_SRFMatchC1; }
  782. set { SetProperty(ref m_SRFMatchC1, value); }
  783. }
  784. public float SRFMatchC2
  785. {
  786. get { return m_SRFMatchC2; }
  787. set { SetProperty(ref m_SRFMatchC2, value); }
  788. }
  789. public float BRFMatchC1
  790. {
  791. get { return m_BRFMatchC1; }
  792. set { SetProperty(ref m_BRFMatchC1, value); }
  793. }
  794. public float BRFMatchC2
  795. {
  796. get { return m_BRFMatchC2; }
  797. set { SetProperty(ref m_BRFMatchC2, value); }
  798. }
  799. public bool GasIsFlowing
  800. {
  801. get { return m_GasIsFlowing; }
  802. set { SetProperty(ref m_GasIsFlowing, value); }
  803. }
  804. public bool IsProcessing
  805. {
  806. get { return m_IsProcessing; }
  807. set { SetProperty(ref m_IsProcessing, value); }
  808. }
  809. public bool IsAutoMode
  810. {
  811. get { return m_IsAutoMode; }
  812. set { SetProperty(ref m_IsAutoMode, value); }
  813. }
  814. public string SelectedRecipe
  815. {
  816. get { return m_SelectedRecipe; }
  817. set { SetProperty(ref m_SelectedRecipe, value); }
  818. }
  819. public float ChillerTempSetpoint
  820. {
  821. get { return m_ChillerTempSetpoint; }
  822. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  823. }
  824. public float InnerChillerTempSetpoint
  825. {
  826. get { return m_InnerChillerTempSetpoint; }
  827. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  828. }
  829. public float OuterChillerTempSetpoint
  830. {
  831. get { return m_OuterChillerTempSetpoint; }
  832. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  833. }
  834. public float TopChillerTempSetpoint
  835. {
  836. get { return m_TopChillerTempSetpoint; }
  837. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  838. }
  839. public float WallTempSetpoint
  840. {
  841. get { return m_WallTempSetpoint; }
  842. set { SetProperty(ref m_WallTempSetpoint, value); }
  843. }
  844. public bool HeIsPressureMode
  845. {
  846. get { return m_HeIsPressureMode; }
  847. set { SetProperty(ref m_HeIsPressureMode, value); }
  848. }
  849. public bool ChillerIsOn
  850. {
  851. get { return m_ChillerIsOn; }
  852. set { SetProperty(ref m_ChillerIsOn, value); }
  853. }
  854. public bool InnerChillerIsOn
  855. {
  856. get { return m_InnerChillerIsOn; }
  857. set { SetProperty(ref m_InnerChillerIsOn, value); }
  858. }
  859. public bool OuterChillerIsOn
  860. {
  861. get { return m_OuterChillerIsOn; }
  862. set { SetProperty(ref m_OuterChillerIsOn, value); }
  863. }
  864. public bool TopChillerIsOn
  865. {
  866. get { return m_TopChillerIsOn; }
  867. set { SetProperty(ref m_TopChillerIsOn, value); }
  868. }
  869. public double ChamberPressureFeedBack
  870. {
  871. get { return m_ChamberPressureFeedBack; }
  872. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  873. }
  874. #endregion
  875. #region 命令
  876. private DelegateCommand _PMInitCommnad;
  877. public DelegateCommand PMInitCommnad =>
  878. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  879. private DelegateCommand _PMAbortCommnad;
  880. public DelegateCommand PMAbortCommnad =>
  881. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  882. private DelegateCommand _GasCommand;
  883. public DelegateCommand GasCommand =>
  884. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  885. private DelegateCommand _HeCommand;
  886. public DelegateCommand HeCommand =>
  887. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  888. private DelegateCommand _RfCommand;
  889. public DelegateCommand RfCommand =>
  890. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  891. private DelegateCommand _PurgeCommand;
  892. public DelegateCommand PurgeCommand =>
  893. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  894. private DelegateCommand _VentCommand;
  895. public DelegateCommand VentCommand =>
  896. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  897. private DelegateCommand _PumpCommand;
  898. public DelegateCommand PumpCommand =>
  899. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  900. private DelegateCommand _OpenPumpCommand;
  901. public DelegateCommand OpenPumpCommand =>
  902. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  903. private DelegateCommand _ClosePumpCommand;
  904. public DelegateCommand ClosePumpCommand =>
  905. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  906. private DelegateCommand _OpenTurboPumpCommand;
  907. public DelegateCommand OpenTurboPumpCommand =>
  908. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  909. private DelegateCommand _CloseTurboPumpCommand;
  910. public DelegateCommand CloseTurboPumpCommand =>
  911. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  912. private DelegateCommand _OpenPendulumValveCommand;
  913. public DelegateCommand OpenPendulumValveCommand =>
  914. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  915. private DelegateCommand _ClosePendulumValveCommand;
  916. public DelegateCommand ClosePendulumValveCommand =>
  917. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  918. private DelegateCommand<object> _PinUpDownCommand;
  919. public DelegateCommand<object> PinUpDownCommand =>
  920. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  921. private DelegateCommand<object> _LidUpDownCommand;
  922. public DelegateCommand<object> LidUpDownCommand =>
  923. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  924. private DelegateCommand _SetSRfCommand;
  925. public DelegateCommand SetSRfCommand =>
  926. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  927. private DelegateCommand _SetBRfCommand;
  928. public DelegateCommand SetBRfCommand =>
  929. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  930. private DelegateCommand _OpenButterflyValveViewCommand;
  931. public DelegateCommand OpenButterflyValveViewCommand =>
  932. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  933. //private DelegateCommand _HVCommand;
  934. //public DelegateCommand HVCommand =>
  935. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  936. private DelegateCommand _HVSetCommand;
  937. public DelegateCommand HVSetCommand =>
  938. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  939. private DelegateCommand _LoadRecipeCommand;
  940. public DelegateCommand LoadRecipeCommand =>
  941. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  942. private DelegateCommand<object> _ControlValveCommand;
  943. public DelegateCommand<object> ControlValveCommand =>
  944. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  945. private DelegateCommand<object> _RunRecipeCommand;
  946. public DelegateCommand<object> RunRecipeCommand =>
  947. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  948. private DelegateCommand<object> _SetChillerTempCommand;
  949. public DelegateCommand<object> SetChillerTempCommand =>
  950. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  951. private DelegateCommand<object> _OnOffChillerCommand;
  952. public DelegateCommand<object> OnOffChillerCommand =>
  953. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  954. private DelegateCommand<object> _HeaterCommand;
  955. public DelegateCommand<object> HeaterCommand =>
  956. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  957. private DelegateCommand _EndStepCommand;
  958. public DelegateCommand EndStepCommand =>
  959. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  960. private DelegateCommand _OnlineCommand;
  961. public DelegateCommand OnlineCommand =>
  962. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  963. private DelegateCommand _OfflineCommand;
  964. public DelegateCommand OfflineCommand =>
  965. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  966. #endregion
  967. #region 构造函数
  968. public OverKepler2300ViewModel()
  969. {
  970. m_RtDataKeys = new List<string>();
  971. m_IsATM = true;
  972. ModuleName = "PMA";
  973. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  974. DispatcherTimer timer = new DispatcherTimer();
  975. timer.Interval = TimeSpan.FromSeconds(0.5);
  976. timer.Tick += timer_Tick;
  977. timer.Start();
  978. }
  979. #endregion
  980. #region 命令方法
  981. private void OnControlValve(object obj)
  982. {
  983. CommonValveControl commonValveControl = (CommonValveControl)obj;
  984. if (commonValveControl.IsCanEdit == true)
  985. {
  986. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  987. }
  988. }
  989. private void OnPMInit()
  990. {
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  992. }
  993. private async void OnGas()
  994. {
  995. await Task.Run(async () =>
  996. {
  997. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  998. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1000. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1001. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1002. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1003. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1005. await Task.Delay(1000);
  1006. object[] mfc = new object[8];
  1007. string[] mfcSetPoint = new string[8];
  1008. mfc[0] = MFC1Data.SetPoint;
  1009. mfc[1] = MFC2Data.SetPoint;
  1010. mfc[2] = MFC3Data.SetPoint;
  1011. mfc[3] = MFC4Data.SetPoint;
  1012. mfc[4] = MFC5Data.SetPoint;
  1013. mfc[5] = MFC6Data.SetPoint;
  1014. mfc[6] = MFC7Data.SetPoint;
  1015. mfc[7] = MFC8Data.SetPoint;
  1016. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1017. });
  1018. }
  1019. private void OnHe()
  1020. {
  1021. if (PVHe1ValveIsOpen == true)
  1022. {
  1023. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1024. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1025. }
  1026. else
  1027. {
  1028. if (HeIsPressureMode)
  1029. {
  1030. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1031. }
  1032. else
  1033. {
  1034. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1035. }
  1036. }
  1037. }
  1038. private void OnRf()
  1039. {
  1040. if (PMCurrentState == PMState.RfPowering)
  1041. {
  1042. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1043. }
  1044. else
  1045. {
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1047. }
  1048. }
  1049. private void OnPurge()
  1050. {
  1051. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1052. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1053. //{
  1054. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1055. // await Task.Delay(1000);
  1056. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1057. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1058. //}
  1059. //else
  1060. //{
  1061. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1062. // await Task.Delay(1000);
  1063. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1064. //}
  1065. if (PMCurrentState == PMState.Purging)
  1066. {
  1067. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1068. //await Task.Delay(1000);
  1069. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1070. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1071. }
  1072. else
  1073. {
  1074. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1075. //await Task.Delay(1000);
  1076. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1077. }
  1078. }
  1079. private void OnVent()
  1080. {
  1081. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1082. if (PMCurrentState == PMState.Venting)
  1083. {
  1084. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1085. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1086. }
  1087. else
  1088. {
  1089. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1090. }
  1091. }
  1092. private void OnPump()
  1093. {
  1094. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1095. if (PMCurrentState == PMState.Pumping)
  1096. {
  1097. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1098. return;
  1099. }
  1100. //if (PMCurrentState == PMState.pum)
  1101. //{
  1102. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1103. // return;
  1104. //}
  1105. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1106. //{
  1107. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1108. //}
  1109. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1110. //{
  1111. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1112. //}
  1113. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1114. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1115. // 设置底压
  1116. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1117. if (basePressure <= 0.01 || basePressure >= 1000)
  1118. {
  1119. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1120. return;
  1121. }
  1122. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1123. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1124. {
  1125. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1126. return;
  1127. }
  1128. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1129. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1130. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1131. }
  1132. private void OnOpenPump()
  1133. {
  1134. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1135. if (PMCurrentState == PMState.LaunchingPump)
  1136. {
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1138. return;
  1139. }
  1140. //if (PumpIsOpen == true)
  1141. //{
  1142. // return;
  1143. //}
  1144. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1145. }
  1146. private void OnClosePump()
  1147. {
  1148. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1149. }
  1150. private void OnOpenTurboPump()
  1151. {
  1152. //TurboIsOpen = true;
  1153. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1154. if (PMCurrentState == PMState.LaunchingTurboPump)
  1155. {
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1157. return;
  1158. }
  1159. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1160. }
  1161. private void OnCloseTurboPump()
  1162. {
  1163. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1164. }
  1165. private void OnOpenPendulumValve()
  1166. {
  1167. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1168. }
  1169. private void OnClosePendulumValve()
  1170. {
  1171. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1172. }
  1173. private void OnPinUpDown(object upDown)
  1174. {
  1175. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1176. }
  1177. private void OnLidUpDown(object upDown)
  1178. {
  1179. //var value = (bool)upDown;
  1180. if (upDown.ToString() == "Up")
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1183. }
  1184. else
  1185. {
  1186. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1187. }
  1188. }
  1189. private async void OnSetSRf()
  1190. {
  1191. if (SRFData.IsRfOn == true)
  1192. {
  1193. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1194. }
  1195. else
  1196. {
  1197. if (GasIsFlowing == true)
  1198. {
  1199. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1200. await Task.Delay(100);
  1201. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1202. }
  1203. }
  1204. }
  1205. private async void OnSetBRf()
  1206. {
  1207. if (BRFData.IsRfOn == true)
  1208. {
  1209. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1210. }
  1211. else
  1212. {
  1213. if (GasIsFlowing == true)
  1214. {
  1215. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1216. await Task.Delay(100);
  1217. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1218. }
  1219. }
  1220. }
  1221. private void OnPMAbort()
  1222. {
  1223. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1224. }
  1225. private void OnOpenButterflyValveView()
  1226. {
  1227. //if (butterflyValveMessageBox == null)
  1228. //{
  1229. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1230. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1231. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1232. butterflyValveMessageBox.Left = 700;
  1233. butterflyValveMessageBox.Top = 600;
  1234. butterflyValveMessageBox.Show();
  1235. butterflyValveMessageBox.Owner = _mainWindow;
  1236. //}
  1237. }
  1238. private void OnLoadRecipe()
  1239. {
  1240. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1241. }
  1242. //private async void OnHV()
  1243. //{
  1244. // if (ESCHVData.IsOn == true)
  1245. // {
  1246. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1247. // }
  1248. // else
  1249. // {
  1250. // await Task.Run(async () =>
  1251. // {
  1252. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1253. // await Task.Delay(1000);
  1254. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1255. // });
  1256. // }
  1257. //}
  1258. private void OnHVSet()
  1259. {
  1260. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1261. }
  1262. private void OnRunRecipe(object obj)
  1263. {
  1264. string recipeName = SelectedRecipe;
  1265. if (recipeName == null)
  1266. {
  1267. return;
  1268. }
  1269. ClearData();
  1270. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1271. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1272. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName);
  1273. }
  1274. private void OnSetChillerTemp(object obj)
  1275. {
  1276. float offset;
  1277. float setPoint;
  1278. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1279. switch (chillerType)
  1280. {
  1281. case ChillerType.Chiller:
  1282. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1283. float.TryParse(value, out offset);
  1284. setPoint = ChillerTempSetpoint;
  1285. break;
  1286. case ChillerType.InnerChiller:
  1287. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1288. float.TryParse(Innervalue, out offset);
  1289. setPoint = InnerChillerTempSetpoint;
  1290. break;
  1291. case ChillerType.OuterChiller:
  1292. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1293. float.TryParse(Outervalue, out offset);
  1294. setPoint = OuterChillerTempSetpoint;
  1295. break;
  1296. case ChillerType.TopChiller:
  1297. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1298. float.TryParse(Topvalue, out offset);
  1299. setPoint = TopChillerTempSetpoint;
  1300. break;
  1301. default:
  1302. return;
  1303. }
  1304. //var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1305. //float x;
  1306. //float.TryParse(value, out x);
  1307. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1308. }
  1309. private void OnOffChiller(object obj)
  1310. {
  1311. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1312. switch (chillerType)
  1313. {
  1314. case ChillerType.Chiller:
  1315. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1316. break;
  1317. case ChillerType.InnerChiller:
  1318. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1319. break;
  1320. case ChillerType.OuterChiller:
  1321. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1322. break;
  1323. case ChillerType.TopChiller:
  1324. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1325. break;
  1326. default:
  1327. return;
  1328. }
  1329. }
  1330. private void OnHeater(object obj)
  1331. {
  1332. AITHeaterData heaterData = obj as AITHeaterData;
  1333. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1334. heaterView = new HeaterView(heaterData, ModuleName);
  1335. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1336. heaterView.Owner = _mainWindow;
  1337. heaterView.Show();
  1338. }
  1339. private void OnEndStep()
  1340. {
  1341. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1342. {
  1343. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1344. }
  1345. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1346. {
  1347. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1348. }
  1349. }
  1350. private void OnOnline()
  1351. {
  1352. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1353. }
  1354. private void OnOffline()
  1355. {
  1356. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1357. }
  1358. #endregion
  1359. #region 私有方法
  1360. private void ClearData()
  1361. {
  1362. ESCVoltage = 0;
  1363. SRFFwdPowerSetpoint = 0;
  1364. SRFMatchC1 = 0;
  1365. SRFMatchC2 = 0;
  1366. BRFFwdPowerSetpoint = 0;
  1367. BRFMatchC1 = 0;
  1368. BRFMatchC2 = 0;
  1369. HeGasSetpoint = 0;
  1370. MFC1SetPoint = 0;
  1371. MFC2SetPoint = 0;
  1372. MFC3SetPoint = 0;
  1373. MFC4SetPoint = 0;
  1374. MFC5SetPoint = 0;
  1375. MFC6SetPoint = 0;
  1376. MFC7SetPoint = 0;
  1377. MFC8SetPoint = 0;
  1378. }
  1379. private IEnumerable<string> GetFilesNames(string path)
  1380. {
  1381. return Directory.GetFiles(path, "*.rcp")
  1382. .Select(Path.GetFileNameWithoutExtension);
  1383. }
  1384. void timer_Tick(object sender, EventArgs e)
  1385. {
  1386. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1387. if (RtDataValues == null)
  1388. {
  1389. return;
  1390. }
  1391. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1392. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1393. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1394. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1395. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1396. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1397. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1398. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1399. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1400. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1401. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1402. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1403. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1404. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1405. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1406. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1407. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1408. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1409. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1410. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1411. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1412. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1413. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1414. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1415. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1416. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1417. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1418. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1419. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1420. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1421. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1422. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1423. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1424. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1425. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1426. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1427. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1428. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1429. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1430. IsProcessing = PMCurrentState == PMState.Processing;
  1431. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1432. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1433. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1434. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1435. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1436. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1437. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1438. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1439. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1440. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1441. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1442. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1443. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1444. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1445. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1446. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1447. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1448. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1449. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1450. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1451. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1452. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1453. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1454. InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp");
  1455. OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp");
  1456. TopTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
  1457. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1458. //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1459. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1460. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1461. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1462. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1463. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1464. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1465. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1466. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1467. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1468. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1469. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1470. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1471. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1472. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1473. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1474. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1475. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1476. if (PMCurrentState == PMState.Processing)
  1477. {
  1478. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1479. if (CurrentRecipeResult.RecipeStepNumber != null)
  1480. {
  1481. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1482. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1483. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1484. }
  1485. }
  1486. else
  1487. {
  1488. CurrentRecipeResult = null;
  1489. CurrentRecipeStep = null;
  1490. }
  1491. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1492. {
  1493. ChamberPressureFeedBack = ProcessLowPressure;
  1494. }
  1495. else
  1496. {
  1497. ChamberPressureFeedBack = ProcessHighPressure;
  1498. }
  1499. IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1500. }
  1501. public void addDataKeys()
  1502. {
  1503. m_RtDataKeys.Clear();
  1504. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1505. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1506. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1507. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1508. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1509. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1510. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1511. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1512. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1513. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1514. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1515. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1516. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1517. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1518. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1519. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1520. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1521. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1522. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1531. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1537. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1538. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1539. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1540. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1541. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1542. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1543. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1544. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1545. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1546. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1547. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1548. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1549. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1550. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1551. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1552. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1553. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1554. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1555. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1556. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1557. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1558. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1559. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1560. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1561. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1562. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1563. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1564. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1565. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1566. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1567. //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1568. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1569. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1570. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1571. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1572. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1573. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1574. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1575. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1576. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1577. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1578. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1579. //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1580. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1581. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1582. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1583. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1584. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1585. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1586. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1587. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1588. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1589. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1590. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1591. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1592. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1593. }
  1594. #endregion
  1595. }
  1596. }