SimulatorSystem.cs 55 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. namespace Venus_Simulator.Instances
  13. {
  14. public class SimulatorSystem : Singleton<SimulatorSystem>
  15. {
  16. private PeriodicJob _thread;
  17. private Random _rd = new Random();
  18. private RD_TRIG _trigATM = new RD_TRIG();
  19. private RD_TRIG _trigVAC = new RD_TRIG();
  20. private R_TRIG _trigLLExtend = new R_TRIG();
  21. private R_TRIG _trigLLRetract = new R_TRIG();
  22. private static int count = 0;
  23. private readonly float ATM_THRESHOLD = 750000;
  24. private readonly float ATM_PRESSURE = 760000;
  25. private readonly float ATM_LoadLock_PRESSURE = 760000;
  26. private readonly uint VAC_SW_PRESSURE = 9500;
  27. private readonly uint PROCESS_GAUGE = 10000;
  28. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  29. public SimulatorSystem()
  30. {
  31. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  32. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  33. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  34. // TODO
  35. }
  36. ~SimulatorSystem()
  37. {
  38. _thread?.Stop();
  39. }
  40. public void Initialize()
  41. {
  42. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. SetTMDefaultValue();
  45. Singleton<DataManager>.Instance.Initialize(false);
  46. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  47. }
  48. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  49. {
  50. if (jetChamber == JetChamber.Venus)
  51. {
  52. // chamber
  53. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  54. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  55. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  56. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  57. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  58. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  59. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  60. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  61. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  62. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  63. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  64. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  65. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  66. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  67. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  68. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  69. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  71. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  72. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  73. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  74. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  75. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  76. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  78. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  82. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  83. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  86. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  88. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  89. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  90. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  99. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  100. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  101. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  102. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  103. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  104. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  106. //// pressure
  107. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  108. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  109. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  110. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  111. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  112. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  113. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  114. //// Temperature
  115. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  116. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  117. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  118. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  119. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  120. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  121. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  122. //if (mod == ModuleName.PMA)
  123. //{
  124. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  125. //}
  126. //else if (mod == ModuleName.PMB)
  127. //{
  128. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  129. //}
  130. // Datetime
  131. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  132. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  133. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  134. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  135. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  136. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  137. }
  138. else
  139. {
  140. // chamber
  141. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  142. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  143. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  144. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  145. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  146. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  147. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  148. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  149. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  150. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  151. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  152. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  154. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  155. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  156. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  157. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  158. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  159. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  160. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  161. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  162. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  165. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  167. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  168. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  169. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  170. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  171. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  172. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  179. //// pressure
  180. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  181. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  182. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  183. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  184. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  185. //// Temperature
  186. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  187. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  188. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  189. // Datetime
  190. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  191. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  192. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  193. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  194. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  195. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  196. }
  197. }
  198. private void SetTMDefaultValue()
  199. {
  200. ModuleName mod = ModuleName.TM;
  201. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  202. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  203. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  204. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  205. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  206. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  207. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  208. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  209. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  210. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  211. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  212. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  214. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  215. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  216. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  217. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  218. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  219. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  220. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  221. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  222. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  223. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  224. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  225. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  226. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  227. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  231. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  232. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  233. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  234. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  235. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  236. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  237. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  239. // Datetime
  240. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  241. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  242. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  243. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  244. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  245. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  246. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  247. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  248. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  249. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  250. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  251. }
  252. private bool OnMonitor()
  253. {
  254. try
  255. {
  256. switch (SimulatorJetChamber.CurrentPMAChamber)
  257. {
  258. case JetChamber.Venus:
  259. // PMA
  260. MonitorSlitDoor(ModuleName.PMA);
  261. MonitorPin(ModuleName.PMA);
  262. MonitorPressure(ModuleName.PMA);
  263. MonitorExtendAndRetract(ModuleName.PMA);
  264. //MonitorTemperature(ModuleName.PMA);
  265. MonitorGas(ModuleName.PMA);
  266. //MonitorRF(ModuleName.PMA);
  267. ChangeTime(ModuleName.PMA);
  268. //MonitorIOPumpCtrl(ModuleName.PMA);
  269. break;
  270. case JetChamber.Kepler2300:
  271. case JetChamber.Kepler2200A:
  272. case JetChamber.Kepler2200B:
  273. // PMA
  274. MonitorSlitDoor(ModuleName.PMA);
  275. MonitorPin(ModuleName.PMA);
  276. MonitorPressure_Kepler(ModuleName.PMA);
  277. //MonitorTemperature(ModuleName.PMA);
  278. MonitorGas(ModuleName.PMA);
  279. //MonitorRF(ModuleName.PMA);
  280. ChangeTime(ModuleName.PMA);
  281. //MonitorIOPumpCtrl(ModuleName.PMA);
  282. MonitorLid(ModuleName.PMA);
  283. break;
  284. }
  285. switch (SimulatorJetChamber.CurrentPMBChamber)
  286. {
  287. case JetChamber.Venus:
  288. // PMB
  289. MonitorSlitDoor(ModuleName.PMB);
  290. MonitorPin(ModuleName.PMB);
  291. MonitorPressure(ModuleName.PMB);
  292. //MonitorTemperature(ModuleName.PMB);
  293. MonitorGas(ModuleName.PMB);
  294. // MonitorRF(ModuleName.PMB);
  295. ChangeTime(ModuleName.PMB);
  296. //MonitorIOPumpCtrl(ModuleName.PMB);
  297. break;
  298. case JetChamber.Kepler2300:
  299. case JetChamber.Kepler2200A:
  300. case JetChamber.Kepler2200B:
  301. // PMB
  302. MonitorSlitDoor(ModuleName.PMB);
  303. MonitorPin(ModuleName.PMB);
  304. MonitorPressure_Kepler(ModuleName.PMB);
  305. //MonitorTemperature(ModuleName.PMB);
  306. MonitorGas(ModuleName.PMB);
  307. // MonitorRF(ModuleName.PMB);
  308. ChangeTime(ModuleName.PMB);
  309. //MonitorIOPumpCtrl(ModuleName.PMB);
  310. MonitorLid(ModuleName.PMB);
  311. break;
  312. }
  313. ChangeTime(ModuleName.TM);
  314. MonitorMFSlitDoor();
  315. }
  316. catch (Exception e)
  317. {
  318. LOG.WriteExeption(e);
  319. }
  320. return true;
  321. }
  322. private void ChangeTime(ModuleName mod)
  323. {
  324. // Heartbeat with PLC
  325. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  326. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  327. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  328. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  329. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  330. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  331. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  332. }
  333. void MonitorSlitDoor(ModuleName mod)
  334. {
  335. // slit door open
  336. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  337. {
  338. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  339. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  340. }
  341. // slit door close
  342. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  343. {
  344. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  345. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  346. }
  347. }
  348. void MonitorMFSlitDoor()
  349. {
  350. ModuleName mod = ModuleName.TM;
  351. // LLA T door open
  352. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  353. {
  354. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  355. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  356. }
  357. // LLB T door open
  358. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  359. {
  360. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  361. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  362. }
  363. // LLA E door open
  364. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  365. {
  366. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  368. }
  369. // LLB E door open
  370. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  371. {
  372. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  373. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  374. }
  375. // LLA T door close
  376. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  377. {
  378. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  379. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  380. }
  381. // LLB T door close
  382. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  383. {
  384. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  385. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  386. }
  387. // LLA E door close
  388. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  389. {
  390. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  391. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  392. }
  393. // LLB E door close
  394. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  395. {
  396. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  397. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  398. }
  399. }
  400. void MonitorPin(ModuleName mod)
  401. {
  402. // lift pin up
  403. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  404. {
  405. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  406. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  407. }
  408. }
  409. void MonitorLid(ModuleName mod)
  410. {
  411. // lift pin up
  412. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  413. {
  414. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  415. }
  416. }
  417. void MonitorExtendAndRetract(ModuleName mod)
  418. {
  419. // Extend
  420. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  421. if (_trigLLExtend.Q)
  422. {
  423. _trigLLRetract.RST = true;
  424. Thread.Sleep(500);
  425. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  426. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  427. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  428. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  429. }
  430. // Retract
  431. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  432. if (_trigLLRetract.Q)
  433. {
  434. count++;
  435. _trigLLExtend.RST = true;
  436. Thread.Sleep(500);
  437. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  438. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  439. if (count == 1)
  440. {
  441. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  442. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  443. }
  444. else if (count == 2)
  445. {
  446. count = 0;
  447. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  448. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  449. }
  450. }
  451. }
  452. void MonitorPressure(ModuleName mod)
  453. {
  454. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  455. // Loadlock pressure
  456. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  457. // Foreline
  458. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  459. {
  460. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  461. }
  462. else
  463. {
  464. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  465. }
  466. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  467. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  468. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  469. //float chamber_pressure = GetMockChamberPressure(mod);
  470. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  471. // soft pump & fast pump
  472. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  473. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  474. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  475. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  476. {
  477. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  478. {
  479. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  480. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  481. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  482. {
  483. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  484. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  485. }
  486. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  487. {
  488. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  489. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  490. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  491. }
  492. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  493. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  494. }
  495. else if (fast_pump_vlv.Value)
  496. {
  497. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  498. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  499. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  500. {
  501. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  502. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  503. }
  504. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  505. {
  506. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  507. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  508. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  509. }
  510. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  511. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  512. }
  513. else if (soft_pump_vlv.Value)
  514. {
  515. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  516. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  517. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  518. {
  519. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  520. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  521. }
  522. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  523. {
  524. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  525. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  526. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  527. }
  528. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  529. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  530. }
  531. else if (turbo_pump_vlv.Value)
  532. {
  533. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  534. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  535. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  536. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  537. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  538. }
  539. }
  540. // fast vent & purge
  541. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  542. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  543. //if (vent_vlv.Value || purge_vlv.Value)
  544. //{
  545. // if (vent_vlv.Value && purge_vlv.Value)
  546. // {
  547. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  548. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  549. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  550. // {
  551. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  552. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  553. // }
  554. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  555. // {
  556. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  557. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  558. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  559. // }
  560. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  561. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  562. // }
  563. // else
  564. //
  565. if (vent_vlv.Value)
  566. {
  567. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  568. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  569. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  570. {
  571. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  572. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  573. }
  574. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  575. {
  576. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  577. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  578. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  579. }
  580. else
  581. {
  582. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  583. }
  584. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  585. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  586. }
  587. // Loadlock Pumping Valve
  588. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  589. if (Loadlock_pump_vlv.Value)
  590. {
  591. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  592. }
  593. // Loadlock vent
  594. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  595. if (Loadlock_vent_vlv.Value)
  596. {
  597. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  598. }
  599. // 压力值越界,复位
  600. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  601. if (chamber_pressure1 > ATM_PRESSURE)
  602. {
  603. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  604. }
  605. else if (chamber_pressure1 < 20)
  606. {
  607. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
  608. }
  609. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  610. if (process_pressure1 > PROCESS_GAUGE)
  611. {
  612. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  613. }
  614. else if (process_pressure1 < 20)
  615. {
  616. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  617. }
  618. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  619. if (foreline_pressure > 10000)
  620. {
  621. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  622. }
  623. else if (foreline_pressure < 150)
  624. {
  625. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  626. }
  627. // 模拟压力计漂移
  628. //int p1 = (int)GetMockChamberPressure(mod);
  629. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  630. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  631. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  632. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  633. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  634. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  635. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  636. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  637. // 根据当前压力值设定信号
  638. //float chamber_pressure2 = GetMockChamberPressure(mod);
  639. // ATM switch
  640. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  641. // VAC switch
  642. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  643. // Throttle valve
  644. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  645. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  646. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  647. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  648. // 压力值
  649. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  650. //{
  651. // short increase = (short)_rd.Next(20, 30);
  652. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  653. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  654. // {
  655. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  656. // }
  657. //}
  658. //else
  659. //{
  660. // short increase = (short)_rd.Next(20, 30);
  661. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  662. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  663. // {
  664. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  665. // }
  666. //}
  667. //// 位置值
  668. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  669. //{
  670. // short increase = (short)_rd.Next(20, 30);
  671. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  672. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  673. // {
  674. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  675. // }
  676. //}
  677. //else
  678. //{
  679. // short increase = (short)_rd.Next(20, 30);
  680. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  681. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  682. // {
  683. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  684. // }
  685. //}
  686. }
  687. void MonitorPressure_Kepler(ModuleName mod)
  688. {
  689. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  690. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  691. {
  692. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  693. }
  694. else
  695. {
  696. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  697. }
  698. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  699. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  700. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  701. //float chamber_pressure = GetMockChamberPressure(mod);
  702. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  703. // soft pump & fast pump
  704. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  705. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  706. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  707. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  708. {
  709. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  710. {
  711. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  712. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  713. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  714. {
  715. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  716. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  717. }
  718. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  719. {
  720. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  721. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  722. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  723. }
  724. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  725. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  726. }
  727. else if (fast_pump_vlv.Value)
  728. {
  729. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  730. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  731. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  732. {
  733. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  734. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  735. }
  736. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  737. {
  738. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  739. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  740. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  741. }
  742. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  743. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  744. }
  745. else if (soft_pump_vlv.Value)
  746. {
  747. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  748. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  749. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  750. {
  751. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  752. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  753. }
  754. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  755. {
  756. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  757. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  758. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  759. }
  760. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  761. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  762. }
  763. else if (turbo_pump_vlv.Value)
  764. {
  765. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  766. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  767. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  768. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  769. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  770. }
  771. }
  772. // fast vent & purge
  773. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  774. if (vent_vlv.Value)
  775. {
  776. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  777. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  778. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  779. {
  780. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  781. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  782. }
  783. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  784. {
  785. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  786. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  787. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  788. }
  789. else
  790. {
  791. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  792. }
  793. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  794. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  795. }
  796. // Loadlock Pumping Valve
  797. // 压力值越界,复位
  798. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  799. if (chamber_pressure1 > ATM_PRESSURE)
  800. {
  801. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  802. }
  803. else if (chamber_pressure1 < 20)
  804. {
  805. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  806. }
  807. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  808. if (process_pressure1 > PROCESS_GAUGE)
  809. {
  810. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  811. }
  812. else if (process_pressure1 < 20)
  813. {
  814. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  815. }
  816. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  817. if (foreline_pressure > 10000)
  818. {
  819. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  820. }
  821. else if (foreline_pressure < 150)
  822. {
  823. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  824. }
  825. // ATM switch
  826. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  827. // VAC switch
  828. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  829. }
  830. void SetAiValue(string name, float value)
  831. {
  832. byte[] flow = BitConverter.GetBytes(value);
  833. short high1 = BitConverter.ToInt16(flow, 0);
  834. short low1 = BitConverter.ToInt16(flow, 2);
  835. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  836. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  837. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  838. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  839. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  840. }
  841. float GetAiValue(string name)
  842. {
  843. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  844. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  845. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  846. return flow;
  847. }
  848. float GetAoValue(string name)
  849. {
  850. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  851. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  852. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  853. return flow;
  854. }
  855. void MonitorTemperature(ModuleName mod)
  856. {
  857. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  858. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  859. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  860. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  861. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  862. // 底座
  863. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  864. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  865. //{
  866. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  867. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  868. //}
  869. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  870. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  871. //{
  872. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  873. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  874. //}
  875. // Foreline
  876. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  877. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  878. {
  879. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  880. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  881. }
  882. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  883. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  884. {
  885. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  886. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  887. }
  888. // Wall
  889. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  890. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  891. {
  892. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  893. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  894. }
  895. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  896. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  897. {
  898. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  899. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  900. }
  901. }
  902. void MonitorGas(ModuleName mod)
  903. {
  904. // gas
  905. this.SimulateMFC(ModuleName.PMA, 1);
  906. this.SimulateMFC(ModuleName.PMA, 2);
  907. this.SimulateMFC(ModuleName.PMA, 3);
  908. this.SimulateMFC(ModuleName.PMA, 4);
  909. this.SimulateMFC(ModuleName.PMA, 5);
  910. this.SimulateMFC(ModuleName.PMA, 6);
  911. this.SimulateMFC(ModuleName.PMA, 7);
  912. this.SimulateMFC(ModuleName.PMA, 8);
  913. this.SimulateN2(ModuleName.PMA);
  914. this.SimulateHe(ModuleName.PMA);
  915. }
  916. private void SimulateMFC(ModuleName mod, byte gasNum)
  917. {
  918. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  919. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  920. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  921. }
  922. private void SimulateN2(ModuleName mod)
  923. {
  924. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  925. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  926. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  927. }
  928. private void SimulateHe(ModuleName mod)
  929. {
  930. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  931. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  932. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  933. }
  934. void MonitorRF(ModuleName mod)
  935. {
  936. // RF generator
  937. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  938. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  939. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  940. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  941. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  942. }
  943. void MonitorIOPumpCtrl(ModuleName mod)
  944. {
  945. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  946. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  947. }
  948. public void Terminate()
  949. {
  950. _thread.Stop();
  951. }
  952. public void SetCoolantOutletTemp(string module, int Temp)
  953. {
  954. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  955. //{
  956. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  957. //}
  958. }
  959. }
  960. }