SimulatorSystem.cs 142 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. namespace Venus_Simulator.Instances
  17. {
  18. public class SimulatorSystem : Singleton<SimulatorSystem>
  19. {
  20. private PeriodicJob _thread;
  21. private Random _rd = new Random();
  22. ConfigType type;
  23. private RD_TRIG _trigATM = new RD_TRIG();
  24. private RD_TRIG _trigVAC = new RD_TRIG();
  25. private R_TRIG _trigLLExtend = new R_TRIG();
  26. private R_TRIG _trigLLRetract = new R_TRIG();
  27. private static int count = 0;
  28. private readonly float ATM_THRESHOLD = 750000;
  29. private readonly float ATM_PRESSURE = 760000;
  30. private readonly float ATM_LoadLock_PRESSURE = 760000;
  31. private readonly uint VAC_SW_PRESSURE = 9500;
  32. private readonly uint PROCESS_GAUGE = 10000;
  33. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  34. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  35. public SimulatorSystem()
  36. {
  37. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  38. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  40. // TODO
  41. type = (ConfigType)QueryDataClient.Instance.Service.GetData("System.ConfigType");
  42. //type = ConfigType.Kepler2200;
  43. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  44. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  45. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  46. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  47. }
  48. ~SimulatorSystem()
  49. {
  50. _thread?.Stop();
  51. }
  52. public void Initialize()
  53. {
  54. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  55. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  56. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  57. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  58. if (type == ConfigType.Kepler2200)
  59. {
  60. SetKepler2200TMDefaultValue();
  61. }
  62. else if (type == ConfigType.Kepler2300)
  63. {
  64. SetKepler2300TMDefaultValue();
  65. }
  66. else if (type == ConfigType.VenusSE)
  67. {
  68. SetSETMDefaultValue();
  69. SetDETMDefaultValue();
  70. }
  71. else if (type == ConfigType.VenusDE)
  72. {
  73. SetDETMDefaultValue();
  74. }
  75. Singleton<DataManager>.Instance.Initialize(false);
  76. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  77. }
  78. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  79. {
  80. switch (jetChamber)
  81. {
  82. case JetChamber.VenusSE:
  83. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  84. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  85. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  86. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  87. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  88. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  92. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  94. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  95. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  103. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  108. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  129. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  138. //// pressure
  139. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  140. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  141. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  142. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  144. //// Temperature
  145. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  146. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  147. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  148. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  151. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  152. // Datetime
  153. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  154. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  155. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  156. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  157. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  158. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  159. break;
  160. case JetChamber.VenusDE:
  161. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  162. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  163. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  165. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  168. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  169. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  170. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  171. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  172. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  175. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  192. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  206. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  212. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  215. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  216. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  225. //// pressure
  226. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  227. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  228. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  229. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  230. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  231. //// Temperature
  232. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  233. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  234. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  235. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  236. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  241. // Datetime
  242. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  243. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  244. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  245. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  246. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  247. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  248. break;
  249. case JetChamber.Kepler2300:
  250. // chamber
  251. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  252. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  254. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  259. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  260. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  261. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  262. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  276. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  287. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  293. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  296. //// pressure
  297. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  298. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  299. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  300. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  302. //// Temperature
  303. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  307. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  308. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  309. // Datetime
  310. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  311. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  312. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  313. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  314. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  315. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  316. break;
  317. case JetChamber.Kepler2200A:
  318. case JetChamber.Kepler2200B:
  319. if (jetChamber == JetChamber.Kepler2200B)
  320. {
  321. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  322. }
  323. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  325. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  326. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  327. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  328. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  332. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  333. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  350. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  351. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  352. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  353. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  354. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  355. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  356. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. //// pressure
  358. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  359. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  360. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  361. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  362. //// Temperature
  363. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  364. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  365. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  366. // Datetime
  367. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  368. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  369. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  370. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  371. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  372. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  373. break;
  374. }
  375. }
  376. private void SetKepler2200TMDefaultValue()
  377. {
  378. ModuleName mod = ModuleName.TM;
  379. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  381. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  388. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  389. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  390. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  395. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  396. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  397. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  406. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  408. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  409. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  410. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  411. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  412. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  415. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  417. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  418. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  423. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  424. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  425. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  426. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  427. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  428. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  429. // Datetime
  430. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  431. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  432. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  433. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  434. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  435. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  436. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  437. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  438. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  439. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  440. {
  441. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  442. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  443. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  444. }
  445. else
  446. {
  447. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  448. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  449. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  450. }
  451. }
  452. private void SetKepler2300TMDefaultValue()
  453. {
  454. ModuleName mod = ModuleName.TM;
  455. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  456. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  457. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  464. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  465. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  466. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  468. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  471. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  473. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  474. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  475. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  482. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  483. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  484. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  486. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  487. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  488. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  489. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  490. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  491. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  493. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  494. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  499. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  500. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  501. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  502. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  503. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  504. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  505. // Datetime
  506. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  507. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  508. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  509. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  510. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  511. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  512. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  513. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  514. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  515. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  516. {
  517. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  518. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  519. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  520. }
  521. else
  522. {
  523. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  524. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  525. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  526. }
  527. }
  528. private void SetSETMDefaultValue()
  529. {
  530. ModuleName mod = ModuleName.SETM;
  531. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  532. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  533. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  537. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  538. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  539. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  540. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  541. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  543. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  544. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  545. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  546. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  547. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  548. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  549. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  550. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  551. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  553. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  558. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  559. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  561. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  562. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  563. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  564. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  565. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  567. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  568. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  569. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  570. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  571. }
  572. private void SetDETMDefaultValue()
  573. {
  574. ModuleName mod = ModuleName.DETM;
  575. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  576. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  577. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  578. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  579. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  580. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  581. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  582. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  583. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  589. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  590. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  595. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  598. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  599. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  600. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  603. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  605. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  606. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  607. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  608. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  609. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  610. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  611. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  612. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  615. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  616. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  617. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  618. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  620. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  621. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  622. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  623. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  624. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  627. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  628. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  629. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  630. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  631. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  632. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  633. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  634. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  635. }
  636. private bool OnMonitor()
  637. {
  638. try
  639. {
  640. foreach (var item in jetChambers)
  641. {
  642. switch (item.Value)
  643. {
  644. case JetChamber.Kepler2300:
  645. MonitorSlitDoorInTM(item.Key);
  646. MonitorPin(item.Key);
  647. MonitorPressure_Kepler(item.Key);
  648. //MonitorTemperature(item.Key);
  649. MonitorGas(item.Key);
  650. this.SimulateHe(item.Key);
  651. //MonitorRF(item.Key);
  652. ChangeTime(item.Key);
  653. //MonitorIOPumpCtrl(item.Key);
  654. MonitorLid(item.Key);
  655. break;
  656. case JetChamber.Kepler2200A:
  657. case JetChamber.Kepler2200B:
  658. MonitorSlitDoorInTM(item.Key);
  659. MonitorPressure_Kepler2200(item.Key);
  660. //MonitorTemperature(item.Key);
  661. MonitorGas(item.Key);
  662. // MonitorRF(item.Key);
  663. ChangeTime(item.Key);
  664. //MonitorIOPumpCtrl(item.Key);
  665. MonitorLid(item.Key);
  666. MonitorIOHighTemperatureHeater(item.Key);
  667. MonitorKepler2200Heater(item.Key);
  668. break;
  669. case JetChamber.VenusSE:
  670. MonitorPin(item.Key);
  671. //MonitorVenuSESlitDoor(item.Key);
  672. MonitorSEPressure(item.Key);
  673. MonitorSEGas(item.Key);
  674. ChangeTime(item.Key);
  675. this.SimulateSEHe(item.Key);
  676. break;
  677. case JetChamber.VenusDE:
  678. MonitorPin(item.Key);
  679. MonitorDEGas(item.Key);
  680. //MonitorVenuDESlitDoor(item.Key);
  681. MonitorDEPressure(item.Key);
  682. ChangeTime(item.Key);
  683. MonitorLinerDoor(item.Key);
  684. this.SimulateDEHe(item.Key);
  685. break;
  686. }
  687. }
  688. ChangeTime(ModuleName.TM);
  689. if (type == ConfigType.Kepler2200)
  690. {
  691. MonitorMFSlitDoor();
  692. MonitorMFKepler2200Pressure();
  693. }
  694. else if (type == ConfigType.Kepler2300)
  695. {
  696. MonitorMFSlitDoor();
  697. MonitorMFKepler2300Pressure();
  698. }
  699. else if (type == ConfigType.VenusSE)
  700. {
  701. MonitorSEMFSlitDoor();
  702. MonitorSEMFPressure();
  703. MonitorDEMFSlitDoor();
  704. MonitorDEMFPressure();
  705. }
  706. else if (type == ConfigType.VenusDE)
  707. {
  708. MonitorDEMFSlitDoor();
  709. MonitorDEMFPressure();
  710. }
  711. }
  712. catch (Exception e)
  713. {
  714. LOG.WriteExeption(e);
  715. }
  716. return true;
  717. }
  718. private void ChangeTime(ModuleName mod)
  719. {
  720. // Heartbeat with PLC
  721. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  722. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  723. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  724. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  725. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  726. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  727. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  728. }
  729. //void MonitorVenuSESlitDoor(ModuleName mod)
  730. //{
  731. //}
  732. void MonitorSlitDoorInPM(ModuleName mod)
  733. {
  734. // slit door open
  735. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  736. {
  737. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  738. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  739. }
  740. // slit door close
  741. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  742. {
  743. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  744. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  745. }
  746. }
  747. void MonitorLinerDoor(ModuleName mod)
  748. {
  749. // slit door open
  750. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  751. {
  752. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  753. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  754. }
  755. // slit door close
  756. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  757. {
  758. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  759. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  760. }
  761. }
  762. void MonitorSlitDoorInTM(ModuleName mod)
  763. {
  764. // slit door open
  765. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  766. {
  767. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  768. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  769. }
  770. // slit door close
  771. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  772. {
  773. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  774. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  775. }
  776. }
  777. void MonitorMFSlitDoor()
  778. {
  779. ModuleName mod = ModuleName.TM;
  780. // LLA T door open
  781. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  782. {
  783. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  784. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  785. }
  786. // LLB T door open
  787. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  788. {
  789. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  790. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  791. }
  792. // LLA E door open
  793. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  794. {
  795. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  796. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  797. }
  798. // LLB E door open
  799. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  800. {
  801. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  802. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  803. }
  804. // LLA T door close
  805. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  806. {
  807. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  808. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  809. }
  810. // LLB T door close
  811. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  812. {
  813. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  814. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  815. }
  816. // LLA E door close
  817. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  818. {
  819. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  820. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  821. }
  822. // LLB E door close
  823. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  824. {
  825. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  826. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  827. }
  828. // PMA slitdoor door close/open
  829. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  830. {
  831. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  832. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  833. }
  834. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  835. {
  836. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  837. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  838. }
  839. // PMB slitdoor door close/open
  840. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  841. {
  842. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  843. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  844. }
  845. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  846. {
  847. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  848. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  849. }
  850. // PMC slitdoor door close/open
  851. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  852. {
  853. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  854. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  855. }
  856. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  857. {
  858. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  859. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  860. }
  861. // PMD slitdoor door close/open
  862. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  863. {
  864. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  865. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  866. }
  867. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  868. {
  869. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  870. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  871. }
  872. }
  873. void MonitorSEMFSlitDoor()
  874. {
  875. ModuleName mod = ModuleName.SETM;
  876. // VCE T door open
  877. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  878. {
  879. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  880. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  881. }
  882. // VCE T door Close
  883. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  884. {
  885. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  886. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  887. }
  888. //pma
  889. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  890. {
  891. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  892. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  893. }
  894. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  895. {
  896. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  897. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  898. }
  899. //pmb
  900. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  901. {
  902. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  903. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  904. }
  905. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  906. {
  907. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  908. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  909. }
  910. //pmc
  911. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  912. {
  913. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  914. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  915. }
  916. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  917. {
  918. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  919. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  920. }
  921. }
  922. void MonitorDEMFSlitDoor()
  923. {
  924. ModuleName mod = ModuleName.DETM;
  925. // VCE L door open
  926. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  927. {
  928. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  929. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  930. }
  931. // VCE R door open
  932. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  933. {
  934. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  935. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  936. }
  937. // VCE L door Close
  938. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  939. {
  940. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  941. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  942. }
  943. // VCE R door Close
  944. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  945. {
  946. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  947. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  948. }
  949. //pma
  950. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  951. {
  952. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  953. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  954. }
  955. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  956. {
  957. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  958. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  959. }
  960. //pmb
  961. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  962. {
  963. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  964. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  965. }
  966. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  967. {
  968. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  969. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  970. }
  971. //pmc
  972. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  973. {
  974. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  975. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  976. }
  977. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  978. {
  979. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  980. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  981. }
  982. }
  983. void MonitorPin(ModuleName mod)
  984. {
  985. // lift pin up
  986. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  987. {
  988. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  989. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  990. }
  991. }
  992. void MonitorLid(ModuleName mod)
  993. {
  994. // lift pin up
  995. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  996. {
  997. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  998. }
  999. }
  1000. void MonitorExtendAndRetract(ModuleName mod)
  1001. {
  1002. // Extend
  1003. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1004. if (_trigLLExtend.Q)
  1005. {
  1006. _trigLLRetract.RST = true;
  1007. Thread.Sleep(500);
  1008. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1009. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1010. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1011. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1012. }
  1013. // Retract
  1014. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1015. if (_trigLLRetract.Q)
  1016. {
  1017. count++;
  1018. _trigLLExtend.RST = true;
  1019. Thread.Sleep(500);
  1020. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1021. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1022. if (count == 1)
  1023. {
  1024. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1025. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1026. }
  1027. else if (count == 2)
  1028. {
  1029. count = 0;
  1030. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1031. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1032. }
  1033. }
  1034. }
  1035. void MonitorPressure(ModuleName mod)
  1036. {
  1037. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1038. // Loadlock pressure
  1039. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1040. // Foreline
  1041. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1042. {
  1043. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1044. }
  1045. else
  1046. {
  1047. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1048. }
  1049. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1050. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1051. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1052. //float chamber_pressure = GetMockChamberPressure(mod);
  1053. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1054. // soft pump & fast pump
  1055. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1056. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1057. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1058. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1059. {
  1060. //任意泵打开
  1061. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1062. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1063. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1064. {//开双泵
  1065. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1066. {
  1067. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1068. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1069. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1070. }
  1071. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1072. {
  1073. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1074. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1075. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1076. }
  1077. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1078. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1079. }
  1080. else if (fast_pump_vlv.Value)//开
  1081. {
  1082. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1083. {
  1084. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1085. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1086. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1087. }
  1088. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1089. {
  1090. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1091. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1092. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1093. }
  1094. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1095. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1096. }
  1097. else if (soft_pump_vlv.Value)
  1098. {
  1099. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1100. {
  1101. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1102. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1103. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1104. }
  1105. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1106. {
  1107. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1108. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1109. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1110. }
  1111. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1112. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1113. }
  1114. else if (turbo_pump_vlv.Value)
  1115. {
  1116. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1117. if ((getAiValue_ChamberPressure - 500) >= 0)
  1118. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1119. else
  1120. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1121. if ((getAiValue_ProcessPressure - 500) >= 0)
  1122. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1123. else
  1124. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1125. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1126. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1127. }
  1128. }
  1129. // fast vent & purge
  1130. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1131. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1132. //if (vent_vlv.Value || purge_vlv.Value)
  1133. //{
  1134. // if (vent_vlv.Value && purge_vlv.Value)
  1135. // {
  1136. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1137. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1138. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1139. // {
  1140. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1141. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1142. // }
  1143. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1144. // {
  1145. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1146. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1147. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1148. // }
  1149. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1150. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1151. // }
  1152. // else
  1153. //
  1154. if (vent_vlv.Value)
  1155. {
  1156. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1157. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1158. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1159. {
  1160. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1161. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1162. }
  1163. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1164. {
  1165. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1166. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1167. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1168. }
  1169. else
  1170. {
  1171. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1172. }
  1173. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1174. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1175. }
  1176. // Loadlock Pumping Valve
  1177. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1178. if (Loadlock_pump_vlv.Value)
  1179. {
  1180. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1181. }
  1182. // Loadlock vent
  1183. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1184. if (Loadlock_vent_vlv.Value)
  1185. {
  1186. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1187. }
  1188. // 压力值越界,复位
  1189. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1190. if (chamber_pressure1 > ATM_PRESSURE)
  1191. {
  1192. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1193. }
  1194. else if (chamber_pressure1 < 20)
  1195. {
  1196. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1197. }
  1198. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1199. if (process_pressure1 > PROCESS_GAUGE)
  1200. {
  1201. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1202. }
  1203. else if (process_pressure1 < 20)
  1204. {
  1205. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1206. }
  1207. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1208. if (foreline_pressure > 10000)
  1209. {
  1210. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1211. }
  1212. else if (foreline_pressure < 150)
  1213. {
  1214. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1215. }
  1216. // 模拟压力计漂移
  1217. //int p1 = (int)GetMockChamberPressure(mod);
  1218. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1219. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1220. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1221. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1222. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1223. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1224. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1225. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1226. // 根据当前压力值设定信号
  1227. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1228. // ATM switch
  1229. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1230. // VAC switch
  1231. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1232. // Throttle valve
  1233. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1234. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1235. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1236. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1237. // 压力值
  1238. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1239. //{
  1240. // short increase = (short)_rd.Next(20, 30);
  1241. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1242. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1243. // {
  1244. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1245. // }
  1246. //}
  1247. //else
  1248. //{
  1249. // short increase = (short)_rd.Next(20, 30);
  1250. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1251. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1252. // {
  1253. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1254. // }
  1255. //}
  1256. //// 位置值
  1257. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1258. //{
  1259. // short increase = (short)_rd.Next(20, 30);
  1260. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1261. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1262. // {
  1263. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1264. // }
  1265. //}
  1266. //else
  1267. //{
  1268. // short increase = (short)_rd.Next(20, 30);
  1269. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1270. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1271. // {
  1272. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1273. // }
  1274. //}
  1275. }
  1276. void MonitorSEPressure(ModuleName mod)
  1277. {
  1278. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1279. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1280. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1281. // Foreline
  1282. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1283. {
  1284. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1285. }
  1286. else
  1287. {
  1288. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1289. }
  1290. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1291. // soft pump & fast pump
  1292. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1293. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1294. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1295. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1296. {
  1297. //任意泵打开
  1298. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1299. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1300. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1301. {//开双泵
  1302. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1303. {
  1304. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1305. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1306. }
  1307. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1308. {
  1309. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1310. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1311. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1312. }
  1313. }
  1314. else if (fast_pump_vlv.Value)//开
  1315. {
  1316. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1317. {
  1318. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1319. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1320. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1321. }
  1322. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1323. {
  1324. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1325. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1326. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1327. }
  1328. }
  1329. else if (soft_pump_vlv.Value)
  1330. {
  1331. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1332. {
  1333. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1334. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1335. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1336. }
  1337. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1338. {
  1339. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1340. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1341. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1342. }
  1343. }
  1344. else if (turbo_pump_vlv.Value)
  1345. {
  1346. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1347. if ((getAiValue_ChamberPressure - 500) >= 0)
  1348. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1349. else
  1350. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1351. if ((getAiValue_ProcessPressure - 500) >= 0)
  1352. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1353. else
  1354. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1355. }
  1356. }
  1357. // fast vent & purge
  1358. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1359. if (vent_vlv.Value)
  1360. {
  1361. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1362. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1363. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1364. {
  1365. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1366. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1367. }
  1368. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1369. {
  1370. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1371. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1372. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1373. }
  1374. else
  1375. {
  1376. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1377. }
  1378. }
  1379. // Loadlock Pumping Valve
  1380. // 压力值越界,复位
  1381. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1382. if (chamber_pressure1 > ATM_PRESSURE)
  1383. {
  1384. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1385. }
  1386. else if (chamber_pressure1 < 20)
  1387. {
  1388. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1389. }
  1390. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1391. if (process_pressure1 > PROCESS_GAUGE)
  1392. {
  1393. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1394. }
  1395. else if (process_pressure1 < 20)
  1396. {
  1397. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1398. }
  1399. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1400. if (foreline_pressure > 1999)
  1401. {
  1402. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1403. }
  1404. else if (foreline_pressure < 150)
  1405. {
  1406. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1407. }
  1408. // ATM switch
  1409. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1410. // VAC switch
  1411. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1412. }
  1413. void MonitorDEPressure(ModuleName mod)
  1414. {
  1415. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1416. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1417. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1418. // Foreline
  1419. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1420. {
  1421. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1422. }
  1423. else
  1424. {
  1425. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1426. }
  1427. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1428. // soft pump & fast pump
  1429. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1430. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1431. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1432. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1433. {
  1434. //任意泵打开
  1435. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1436. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1437. if (fast_pump_vlv.Value)
  1438. {//开双泵
  1439. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1440. {
  1441. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1442. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1443. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1444. }
  1445. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1446. {
  1447. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1448. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1449. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1450. }
  1451. }
  1452. else if (turbo_pump_vlv.Value)
  1453. {
  1454. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1455. if ((getAiValue_ChamberPressure - 500) >= 0)
  1456. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1457. else
  1458. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1459. if ((getAiValue_ProcessPressure - 500) >= 0)
  1460. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1461. else
  1462. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1463. }
  1464. }
  1465. // fast vent & purge
  1466. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1467. if (vent_vlv.Value)
  1468. {
  1469. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1470. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1471. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1472. {
  1473. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1474. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1475. }
  1476. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1477. {
  1478. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1479. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1480. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1481. }
  1482. else
  1483. {
  1484. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1485. }
  1486. }
  1487. // Loadlock Pumping Valve
  1488. // 压力值越界,复位
  1489. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1490. if (chamber_pressure1 > ATM_PRESSURE)
  1491. {
  1492. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1493. }
  1494. else if (chamber_pressure1 < 20)
  1495. {
  1496. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1497. }
  1498. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1499. if (process_pressure1 > PROCESS_GAUGE)
  1500. {
  1501. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1502. }
  1503. else if (process_pressure1 < 20)
  1504. {
  1505. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1506. }
  1507. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1508. if (foreline_pressure > 10000)
  1509. {
  1510. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1511. }
  1512. else if (foreline_pressure < 150)
  1513. {
  1514. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1515. }
  1516. // ATM switch
  1517. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1518. // VAC switch
  1519. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1520. }
  1521. void MonitorPressure_Kepler(ModuleName mod)
  1522. {
  1523. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1524. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1525. {
  1526. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1527. }
  1528. else
  1529. {
  1530. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1531. }
  1532. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1533. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1534. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1535. //float chamber_pressure = GetMockChamberPressure(mod);
  1536. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1537. // soft pump & fast pump
  1538. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1539. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1540. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1541. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1542. {
  1543. //任意泵打开
  1544. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1545. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1546. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1547. {//开双泵
  1548. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1549. {
  1550. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1551. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1552. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1553. }
  1554. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1555. {
  1556. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1557. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1558. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1559. }
  1560. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1561. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1562. }
  1563. else if (fast_pump_vlv.Value)//开
  1564. {
  1565. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1566. {
  1567. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1568. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1569. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1570. }
  1571. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1572. {
  1573. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1574. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1575. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1576. }
  1577. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1578. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1579. }
  1580. else if (soft_pump_vlv.Value)
  1581. {
  1582. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1583. {
  1584. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1585. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1586. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1587. }
  1588. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1589. {
  1590. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1591. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1592. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1593. }
  1594. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1595. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1596. }
  1597. else if (turbo_pump_vlv.Value)
  1598. {
  1599. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1600. if ((getAiValue_ChamberPressure - 500) >= 0)
  1601. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1602. else
  1603. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1604. if ((getAiValue_ProcessPressure - 500) >= 0)
  1605. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1606. else
  1607. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1608. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1609. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1610. }
  1611. }
  1612. // fast vent & purge
  1613. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1614. if (vent_vlv.Value)
  1615. {
  1616. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1617. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1618. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1619. {
  1620. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1621. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1622. }
  1623. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1624. {
  1625. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1626. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1627. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1628. }
  1629. else
  1630. {
  1631. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1632. }
  1633. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1634. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1635. }
  1636. // Loadlock Pumping Valve
  1637. // 压力值越界,复位
  1638. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1639. if (chamber_pressure1 > ATM_PRESSURE)
  1640. {
  1641. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1642. }
  1643. else if (chamber_pressure1 < 20)
  1644. {
  1645. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1646. }
  1647. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1648. if (process_pressure1 > PROCESS_GAUGE)
  1649. {
  1650. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1651. }
  1652. else if (process_pressure1 < 20)
  1653. {
  1654. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1655. }
  1656. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1657. if (foreline_pressure > 10000)
  1658. {
  1659. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1660. }
  1661. else if (foreline_pressure < 150)
  1662. {
  1663. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1664. }
  1665. // ATM switch
  1666. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1667. // VAC switch
  1668. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1669. }
  1670. void MonitorPressure_Kepler2200(ModuleName mod)
  1671. {
  1672. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1673. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1674. {
  1675. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1676. }
  1677. else
  1678. {
  1679. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1680. }
  1681. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1682. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1683. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1684. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1685. //float chamber_pressure = GetMockChamberPressure(mod);
  1686. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1687. // soft pump & fast pump
  1688. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1689. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1690. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1691. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1692. {
  1693. //任意泵打开
  1694. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1695. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1696. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1697. {
  1698. //开双泵
  1699. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1700. {
  1701. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1702. }
  1703. else
  1704. {
  1705. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1706. }
  1707. //if (getAiValue_ChamberPressure > 1000)
  1708. //{
  1709. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1710. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1711. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1712. //}
  1713. //else if ( getAiValue_ChamberPressure <= 1000)
  1714. //{
  1715. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1716. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1717. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1718. //}
  1719. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1720. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1721. }
  1722. else if (fast_pump_vlv.Value)//开
  1723. {
  1724. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1725. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1726. else
  1727. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1728. }
  1729. else if (soft_pump_vlv.Value)
  1730. {
  1731. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1732. {
  1733. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1734. }
  1735. else
  1736. {
  1737. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1738. }
  1739. //if (getAiValue_ChamberPressure > 5000)
  1740. //{
  1741. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1742. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1743. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1744. //}
  1745. //else if (getAiValue_ChamberPressure <= 1000)
  1746. //{
  1747. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1748. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1749. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1750. //}
  1751. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1752. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1753. }
  1754. else if (turbo_pump_vlv.Value)
  1755. {
  1756. if ((getAiValue_ChamberPressure - 50) >= 0)
  1757. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1758. else
  1759. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1760. }
  1761. }
  1762. // fast vent & purge
  1763. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1764. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1765. if (vent_vlv.Value && gas_final_vlv.Value)
  1766. {
  1767. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1768. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1769. if (getAiValue_ChamberPressure > 1000)
  1770. {
  1771. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1772. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1773. }
  1774. else if (getAiValue_ChamberPressure <= 1000)
  1775. {
  1776. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1777. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1778. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1779. }
  1780. else
  1781. {
  1782. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1783. }
  1784. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1785. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1786. }
  1787. // Loadlock Pumping Valve
  1788. // 压力值越界,复位
  1789. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1790. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1791. {
  1792. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1793. }
  1794. else if (chamber_pressure1 < 20)
  1795. {
  1796. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1797. }
  1798. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1799. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1800. //{
  1801. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1802. //}
  1803. //else if (process_pressure1 < 20)
  1804. //{
  1805. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1806. //}
  1807. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1808. if (foreline_pressure > 1000)
  1809. {
  1810. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1811. }
  1812. else if (foreline_pressure < 15)
  1813. {
  1814. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1815. }
  1816. // ATM switch
  1817. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1818. // VAC switch
  1819. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1820. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1821. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1822. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1823. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1824. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1825. }
  1826. void MonitorSEMFPressure()
  1827. {
  1828. ModuleName mod = ModuleName.SETM;
  1829. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1830. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1831. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1832. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1833. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1834. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1835. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1836. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1837. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1838. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1839. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1840. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1841. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1842. {
  1843. if (getAiValue_TM_ChamberPressure > 10000)
  1844. {
  1845. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1846. }
  1847. else if (getAiValue_TM_ChamberPressure <= 10000)
  1848. {
  1849. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1850. }
  1851. }
  1852. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1853. {
  1854. if (getAiValue_TM_ChamberPressure > 10000)
  1855. {
  1856. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1857. }
  1858. else if (getAiValue_TM_ChamberPressure <= 10000)
  1859. {
  1860. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1861. }
  1862. }
  1863. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1864. {
  1865. if (getAiValue_VCE_ChamberPressure > 10000)
  1866. {
  1867. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1868. }
  1869. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1870. {
  1871. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1872. }
  1873. }
  1874. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1875. {
  1876. if (getAiValue_VCE_ChamberPressure > 10000)
  1877. {
  1878. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1879. }
  1880. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1881. {
  1882. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1883. }
  1884. }
  1885. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1886. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1887. {
  1888. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1889. }
  1890. else if (getAiValue_VCE_ChamberPressure < 20)
  1891. {
  1892. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1893. }
  1894. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1895. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1896. {
  1897. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1898. }
  1899. else if (getAiValue_TM_ChamberPressure < 20)
  1900. {
  1901. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1902. }
  1903. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1904. // VAC switch
  1905. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1906. }
  1907. void MonitorDEMFPressure()
  1908. {
  1909. ModuleName mod = ModuleName.DETM;
  1910. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1911. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1912. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1913. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1914. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1915. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1916. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1917. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1918. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1919. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1920. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1921. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1922. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1923. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1924. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1925. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1926. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1927. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1928. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1929. {
  1930. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1931. {
  1932. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1933. }
  1934. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1935. {
  1936. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1937. }
  1938. }
  1939. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1940. {
  1941. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1942. {
  1943. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1944. }
  1945. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1946. {
  1947. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1948. }
  1949. }
  1950. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1951. {
  1952. if (getAiValue_TM_ChamberPressure > 10000)
  1953. {
  1954. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1955. }
  1956. else if (getAiValue_TM_ChamberPressure <= 10000)
  1957. {
  1958. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1959. }
  1960. }
  1961. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1962. {
  1963. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1964. {
  1965. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1966. }
  1967. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1968. {
  1969. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1970. }
  1971. }
  1972. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1973. {
  1974. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1975. {
  1976. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1977. }
  1978. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1979. {
  1980. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1981. }
  1982. }
  1983. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1984. {
  1985. if (getAiValue_TM_ChamberPressure > 10000)
  1986. {
  1987. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1988. }
  1989. else if (getAiValue_TM_ChamberPressure <= 10000)
  1990. {
  1991. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1992. }
  1993. }
  1994. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1995. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1996. {
  1997. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1998. }
  1999. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2000. {
  2001. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2002. }
  2003. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2004. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2005. {
  2006. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2007. }
  2008. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2009. {
  2010. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2011. }
  2012. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2013. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2014. {
  2015. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2016. }
  2017. else if (getAiValue_TM_ChamberPressure < 20)
  2018. {
  2019. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2020. }
  2021. // ATM switch
  2022. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2023. // VAC switch
  2024. // ATM switch
  2025. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2026. // ATM switch
  2027. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2028. }
  2029. void MonitorMFKepler2200Pressure()
  2030. {
  2031. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2032. //{
  2033. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2034. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2035. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2036. ModuleName mod = ModuleName.TM;
  2037. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2038. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2039. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2040. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2041. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2042. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2043. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2044. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2045. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2046. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2047. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2048. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2049. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2050. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2051. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2052. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2053. {
  2054. if (getAiValue_LLA_ChamberPressure > 10000)
  2055. {
  2056. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2057. }
  2058. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2059. {
  2060. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2061. }
  2062. }
  2063. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2064. {
  2065. if (getAiValue_LLB_ChamberPressure > 10000)
  2066. {
  2067. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2068. }
  2069. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2070. {
  2071. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2072. }
  2073. }
  2074. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2075. {
  2076. if (getAiValue_TM_ChamberPressure > 10000)
  2077. {
  2078. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2079. }
  2080. else if (getAiValue_TM_ChamberPressure <= 10000)
  2081. {
  2082. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2083. }
  2084. }
  2085. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2086. {
  2087. if (getAiValue_LLA_ChamberPressure > 10000)
  2088. {
  2089. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2090. }
  2091. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2092. {
  2093. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2094. }
  2095. }
  2096. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2097. {
  2098. if (getAiValue_LLB_ChamberPressure > 10000)
  2099. {
  2100. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2101. }
  2102. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2103. {
  2104. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2105. }
  2106. }
  2107. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2108. {
  2109. if (getAiValue_TM_ChamberPressure > 10000)
  2110. {
  2111. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2112. }
  2113. else if (getAiValue_TM_ChamberPressure <= 10000)
  2114. {
  2115. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2116. }
  2117. }
  2118. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2119. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2120. {
  2121. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2122. }
  2123. else if (getAiValue_LLA_ChamberPressure < 3)
  2124. {
  2125. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 3);
  2126. }
  2127. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2128. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2129. {
  2130. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2131. }
  2132. else if (getAiValue_LLB_ChamberPressure < 3)
  2133. {
  2134. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2135. }
  2136. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2137. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2138. {
  2139. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2140. }
  2141. else if (getAiValue_TM_ChamberPressure < 3)
  2142. {
  2143. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2144. }
  2145. // ATM switch
  2146. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2147. // VAC switch
  2148. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2149. // ATM switch
  2150. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2151. // VAC switch
  2152. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2153. // ATM switch
  2154. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2155. // VAC switch
  2156. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2157. }
  2158. void MonitorMFKepler2300Pressure()
  2159. {
  2160. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2161. //{
  2162. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2163. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2164. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2165. ModuleName mod = ModuleName.TM;
  2166. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2167. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2168. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2169. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2170. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2171. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2172. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2173. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2174. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2175. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2176. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2177. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2178. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2179. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2180. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2181. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2182. {
  2183. if (getAiValue_LLA_ChamberPressure > 10000)
  2184. {
  2185. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2186. }
  2187. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2188. {
  2189. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2190. }
  2191. }
  2192. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2193. {
  2194. if (getAiValue_LLB_ChamberPressure > 10000)
  2195. {
  2196. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2197. }
  2198. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2199. {
  2200. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2201. }
  2202. }
  2203. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2204. {
  2205. if (getAiValue_TM_ChamberPressure > 10000)
  2206. {
  2207. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2208. }
  2209. else if (getAiValue_TM_ChamberPressure <= 10000)
  2210. {
  2211. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2212. }
  2213. }
  2214. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2215. {
  2216. if (getAiValue_LLA_ChamberPressure > 10000)
  2217. {
  2218. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2219. }
  2220. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2221. {
  2222. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2223. }
  2224. }
  2225. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2226. {
  2227. if (getAiValue_LLB_ChamberPressure > 10000)
  2228. {
  2229. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2230. }
  2231. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2232. {
  2233. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2234. }
  2235. }
  2236. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2237. {
  2238. if (getAiValue_TM_ChamberPressure > 10000)
  2239. {
  2240. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2241. }
  2242. else if (getAiValue_TM_ChamberPressure <= 10000)
  2243. {
  2244. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2245. }
  2246. }
  2247. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2248. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2249. {
  2250. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2251. }
  2252. else if (getAiValue_LLA_ChamberPressure < 20)
  2253. {
  2254. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2255. }
  2256. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2257. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2258. {
  2259. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2260. }
  2261. else if (getAiValue_LLB_ChamberPressure < 20)
  2262. {
  2263. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2264. }
  2265. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2266. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2267. {
  2268. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2269. }
  2270. else if (getAiValue_TM_ChamberPressure < 20)
  2271. {
  2272. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2273. }
  2274. // ATM switch
  2275. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2276. // VAC switch
  2277. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2278. // ATM switch
  2279. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2280. // VAC switch
  2281. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2282. // ATM switch
  2283. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2284. // VAC switch
  2285. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2286. // }
  2287. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2288. //{
  2289. // ModuleName mod = ModuleName.TM;
  2290. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2291. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2292. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2293. //}
  2294. }
  2295. void SetAiValue(string name, float value)
  2296. {
  2297. byte[] flow = BitConverter.GetBytes(value);
  2298. short high1 = BitConverter.ToInt16(flow, 0);
  2299. short low1 = BitConverter.ToInt16(flow, 2);
  2300. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2301. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2302. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2303. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2304. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2305. }
  2306. float GetAiValue(string name)
  2307. {
  2308. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2309. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2310. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2311. return flow;
  2312. }
  2313. float GetAoValue(string name)
  2314. {
  2315. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2316. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2317. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2318. return flow;
  2319. }
  2320. void MonitorTemperature(ModuleName mod)
  2321. {
  2322. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2323. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2324. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2325. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2326. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2327. // 底座
  2328. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2329. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2330. //{
  2331. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2332. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2333. //}
  2334. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2335. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2336. //{
  2337. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2338. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2339. //}
  2340. // Foreline
  2341. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2342. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2343. {
  2344. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2345. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2346. }
  2347. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2348. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2349. {
  2350. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2351. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2352. }
  2353. // Wall
  2354. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2355. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2356. {
  2357. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2358. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2359. }
  2360. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2361. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2362. {
  2363. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2364. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2365. }
  2366. }
  2367. void MonitorGas(ModuleName mod)
  2368. {
  2369. // gas
  2370. this.SimulateMFC(mod, 1);
  2371. this.SimulateMFC(mod, 2);
  2372. this.SimulateMFC(mod, 3);
  2373. this.SimulateMFC(mod, 4);
  2374. this.SimulateMFC(mod, 5);
  2375. this.SimulateMFC(mod, 6);
  2376. this.SimulateMFC(mod, 7);
  2377. this.SimulateMFC(mod, 8);
  2378. this.SimulateN2(mod);
  2379. }
  2380. void MonitorSEGas(ModuleName mod)
  2381. {
  2382. SimulateMFC(mod, 1);
  2383. SimulateMFC(mod, 2);
  2384. SimulateMFC(mod, 3);
  2385. SimulateMFC(mod, 4);
  2386. SimulateMFC(mod, 5);
  2387. SimulateMFC(mod, 6);
  2388. SimulateMFC(mod, 7);
  2389. SimulateMFC(mod, 8);
  2390. SimulateMFC(mod, 9);
  2391. SimulateMFC(mod, 10);
  2392. SimulateMFC(mod, 11);
  2393. SimulateMFC(mod, 12);
  2394. }
  2395. void MonitorDEGas(ModuleName mod)
  2396. {
  2397. SimulateMFC(mod, 1);
  2398. SimulateMFC(mod, 2);
  2399. SimulateMFC(mod, 3);
  2400. SimulateMFC(mod, 4);
  2401. SimulateMFC(mod, 5);
  2402. SimulateMFC(mod, 6);
  2403. SimulateMFC(mod, 7);
  2404. SimulateMFC(mod, 8);
  2405. SimulateMFC(mod, 9);
  2406. SimulateMFC(mod, 10);
  2407. SimulateMFC(mod, 11);
  2408. SimulateMFC(mod, 12);
  2409. }
  2410. private void SimulateMFC(ModuleName mod, byte gasNum)
  2411. {
  2412. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2413. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2414. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2415. }
  2416. private void SimulateN2(ModuleName mod)
  2417. {
  2418. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2419. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2420. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2421. }
  2422. private void SimulateSEHe(ModuleName mod)
  2423. {
  2424. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2425. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2426. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2427. }
  2428. private void SimulateDEHe(ModuleName mod)
  2429. {
  2430. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2431. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2432. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2433. }
  2434. private void SimulateHe(ModuleName mod)
  2435. {
  2436. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2437. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2438. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2439. }
  2440. void MonitorRF(ModuleName mod)
  2441. {
  2442. // RF generator
  2443. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2444. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2445. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2446. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2447. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2448. }
  2449. void MonitorIOPumpCtrl(ModuleName mod)
  2450. {
  2451. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2452. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2453. }
  2454. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2455. {
  2456. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2457. {
  2458. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2459. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2460. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2461. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2462. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2463. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2464. }
  2465. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2466. {
  2467. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2468. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2469. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2470. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2471. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2472. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2473. }
  2474. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2475. {
  2476. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2477. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2478. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2479. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2480. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2481. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2482. }
  2483. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2484. {
  2485. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2486. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2487. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2488. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2489. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2490. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2491. }
  2492. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2493. {
  2494. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2495. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2496. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2497. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2498. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2499. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2500. }
  2501. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2502. {
  2503. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2504. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2505. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2506. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2507. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2508. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2509. }
  2510. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2511. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2512. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2513. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2514. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2515. }
  2516. void MonitorKepler2200Heater(ModuleName mod)
  2517. {
  2518. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2519. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2520. }
  2521. public void Terminate()
  2522. {
  2523. _thread.Stop();
  2524. }
  2525. public void SetCoolantOutletTemp(string module, int Temp)
  2526. {
  2527. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2528. //{
  2529. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2530. //}
  2531. }
  2532. }
  2533. }