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Account
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53e362a33e
update
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%!s(int64=3) %!d(string=hai) anos |
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PM
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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hai 1 ano |
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TM
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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hai 1 ano |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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%!s(int64=2) %!d(string=hai) anos |
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DBModel.sql
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ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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%!s(int64=2) %!d(string=hai) anos |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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%!s(int64=2) %!d(string=hai) anos |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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%!s(int64=3) %!d(string=hai) anos |
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IoProviderConfig.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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hai 1 ano |
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LogDefine.json
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ec2f97e62d
enhance log.
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hai 1 ano |
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RecipeFormat.xml
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9760d40cf7
port simulator
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%!s(int64=3) %!d(string=hai) anos |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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hai 1 ano |
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SequenceFormat.xml
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7d93bf0076
Job Clean function, not finished.
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%!s(int64=2) %!d(string=hai) anos |
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SignalTower.xml
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3a078d515d
1.修复ui灯闪烁错误bug
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%!s(int64=2) %!d(string=hai) anos |
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System.sccfg
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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hai 1 ano |
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VenusPreProcess.py
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64c7ef574e
log
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%!s(int64=3) %!d(string=hai) anos |
zhouhr
49815fb19f
add VCE Module in UI && fix bug in SE Cycle