Kepler2200BDeviceModel.xml 38 KB

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  1. <?xml version="1.0" encoding="utf-16"?>
  2. <DeviceModelDefine type="Kepler2200B" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  3. <IoValves>
  4. <IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
  15. isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
  17. isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
  18. <IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
  19. isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
  20. <IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
  21. isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
  23. isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
  24. <IoValve id="ValveN2" display="N2 valve" schematicId=""
  25. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
  26. <IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
  27. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
  28. diCloseSensor="" diOpenSensor="" />
  29. <IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
  30. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
  31. diCloseSensor="" diOpenSensor="" />
  32. <IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
  33. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
  34. <IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
  35. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
  36. diCloseSensor="" diOpenSensor="" />
  37. <IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
  38. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
  39. diCloseSensor="" diOpenSensor="" />
  40. <IoValve id="ValveGuage" display="Guage valve" schematicId=""
  41. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gauge_Valve"
  42. diCloseSensor="" diOpenSensor="" />
  43. <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
  44. isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
  45. <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
  46. isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
  47. <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
  48. isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
  49. <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
  50. isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
  51. <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
  52. isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
  53. <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
  54. isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
  55. <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
  56. isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
  57. <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
  58. isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
  59. <IoValve id="ValvePurge" display="Purge valve" schematicId="" unit="" isNc="true"
  60. isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve" diCloseSensor="" diOpenSensor="" />
  61. </IoValves>
  62. <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
  63. <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
  64. aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
  65. diPressureAlarm="DI_MFC1_Pressure_Switch"/>
  66. <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
  67. aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
  68. diPressureAlarm="DI_MFC2_Pressure_Switch"/>
  69. <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
  70. aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
  71. diPressureAlarm="DI_MFC3_Pressure_Switch"/>
  72. <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
  73. aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
  74. diPressureAlarm="DI_MFC4_Pressure_Switch"/>
  75. <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
  76. aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
  77. diPressureAlarm="DI_MFC5_Pressure_Switch"/>
  78. <IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
  79. aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
  80. diPressureAlarm="DI_MFC6_Pressure_Switch"/>
  81. <IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
  82. aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
  83. diPressureAlarm="DI_MFC7_Pressure_Switch"/>
  84. <IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
  85. aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
  86. diPressureAlarm="DI_MFC8_Pressure_Switch"/>
  87. <IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
  88. aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange=""
  89. diPressureAlarm="DI_PN2_Pressure_Switch"/>
  90. </IoMfcs>
  91. <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
  92. <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" upvalve="ValvePV11"/>
  93. <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" upvalve="ValvePV21"/>
  94. <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" upvalve="ValvePV31"/>
  95. <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" upvalve="ValvePV41"/>
  96. <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  97. <IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
  98. <IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
  99. <IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
  100. <IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
  101. </IoGasSticks>
  102. <IoSensors>
  103. <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  104. <IoSensor id="SensorPMLidClosed" display="PM Lid Closed" schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
  105. infoText="" warningText="" alarmText="" />
  106. <IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
  107. infoText="" warningText="" alarmText="" />
  108. <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
  109. infoText="" warningText="" alarmText="" />
  110. <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
  111. infoText="" warningText="Sensor water leak" alarmText="" />
  112. <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  113. infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
  114. <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  115. infoText="" warningText="N2 Pressure Alarm" alarmText="" />
  116. <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_Source_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false"
  117. infoText="Generator interlock" warningText="" alarmText="" />
  118. <IoSensor id="RFMatchInterlock" display="Source RF Match" schematicId="" unit="" di="DI_Source_RF_Match_Interlock" isLowAsNormal="" textOutTrigValue="false"
  119. infoText="" warningText="" alarmText="" />
  120. <IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed" schematicId="" unit="" di="DI_Slit_Door_Close_POS" isLowAsNormal="" textOutTrigValue="false"
  121. infoText="" warningText="" alarmText="" />
  122. <IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock" schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false"
  123. infoText="" warningText="" alarmText="" />
  124. <IoSensor id="GasBoxDoorSW" display="Gas Box Door SW" schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false"
  125. infoText="" warningText="" alarmText="Gas Box Door SW Alarm" />
  126. <IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW" schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  127. infoText="" warningText="" alarmText="Gas Box Pressure Alarm" />
  128. <IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm" schematicId="" unit="" di="DI_CHB_Wall_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true"
  129. infoText="" warningText="" alarmText="CHB Wall OT SW Alarm" />
  130. <IoSensor id="SensorSmallWaferInPos" display="Small Wafer in Pos" schematicId="" unit="" di="DI_Small_Wafer_In_POS" isLowAsNormal="" textOutTrigValue="true"
  131. infoText="" warningText="" alarmText="" />
  132. <IoSensor id="GasBoxN2FlowSwitch" display="Gas Box N2 Flow Switch" schematicId="" unit="" di="DI_GasBox_N2_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
  133. infoText="" warningText="" alarmText="" />
  134. </IoSensors>
  135. <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
  136. <IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
  137. aiValue="AI_Process_Pressure_2t" diGaugeFail="" scPrecision="" scOffset=""/>
  138. <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
  139. aiValue="AI_Chamber_Pressure_10t"
  140. diGaugeFail=""
  141. scPrecision="ChamberPressureGaugePrecision"
  142. scOffset=""/>
  143. <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
  144. aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_760t_Gauge_Alarm" scPrecision="" scOffset=""/>
  145. </IoPressureMeters>
  146. <IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
  147. <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
  148. diBreakerState=""
  149. diRunning="DI_Pump_Running"
  150. diStart=""
  151. diStop=""
  152. diAlarm="DI_Pump_Alarm"
  153. diWarning="DI_Pump_Warning"
  154. diPumpTempAlarm=""
  155. diN2Alarm="DI_Pump_N2_Purge_Alarm"
  156. diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
  157. diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
  158. doStart="DO_Pump_Start"
  159. doStop="DO_Pump_Stop"
  160. doWaterFlowAlarm=""
  161. doN2PressureAlarm=""
  162. aiWaterFlow=""
  163. aiN2Pressure=""
  164. aoN2PressureAlarmMaxValue=""
  165. aoN2PressureAlarmMinValue=""
  166. aoWaterFlowAlarmMaxValue=""
  167. aoWaterFlowAlarmMinValue=""
  168. scEnableDryPump="EnableDryPump"
  169. scEnableWaterFlow="PumpEnableWaterFlow"
  170. scWaterFlowMinValue="PumpWaterFlowMinValue"
  171. scWaterFlowMaxValue="PumpWaterFlowMaxValue"
  172. scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
  173. scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
  174. scEnableN2Pressure="PumpEnableN2Pressure"
  175. scN2PressureMinValue="PumpN2PressureMinValue"
  176. scN2PressureMaxValue="PumpN2PressureMaxValue"
  177. scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
  178. scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  179. </IoPumps>
  180. <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
  181. <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
  182. diLogicProcessGasFlowing=""
  183. scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
  184. scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
  185. scIsIndependentControl="IsIndependentControl"
  186. scIsBoostPumpInstalled="EnableBoosterPump"
  187. scTvInstalled="EnableThrottleValve"
  188. boost="" tv="ThrottleValve" drypump="MainPump"
  189. pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge"/>
  190. </IoPressureControls>
  191. <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
  192. <IoHeater id="PendulumHeater" display="Pendulum Heater" schematicId="" unit="℃"
  193. doPowerOn="DO_P_Valve_Heater_On"
  194. diDeviation="DI_P_Valve_TC_Deviation_out_of_range"
  195. diPowerOnFeedback="DI_P_Wall_Heater_On_FB"
  196. diControlTcBroken="DI_P_Valve_Control_TC_Broken_Alarm"
  197. diMonitorTcBroken="DI_P_Valve_Monitor_TC_Broken_Alarm"
  198. aoSetPoint="AO_P_Valve_Temperature_Setpoint"
  199. aoSetPointLimit="AO_P_Valve_Temp_Limit_Setpoint"
  200. aiFeedback="AI_P_Valve_Control_TC_Temp"
  201. aiMonitor=""
  202. scSetPointLimit="PendulumHeaterSetPointLimit"
  203. />
  204. </IoHeaters>
  205. <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
  206. <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  207. </IoHeartbeats>
  208. <IoResets>
  209. <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  210. </IoResets>
  211. <IoSetConfigs>
  212. <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  213. </IoSetConfigs>
  214. <IoStatisticss>
  215. <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
  216. diMonitorSignal="DI_Generator_Power_Status"
  217. scLastPMTime="RfOnTimeLastPMTime"
  218. scTimeFromLastPM="RfOnTimeFromLastPM"
  219. scTimeTotal="RfOnTimeTotal"
  220. scEnableAlarm="RfOnTimeEnableAlarm"
  221. scPMInterval="RfOnTimePMInterval" />
  222. <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
  223. diMonitorSignal="DI_Pump_Running"
  224. scLastPMTime="PumpOnTimeLastPMTime"
  225. scTimeFromLastPM="PumpOnTimeFromLastPM"
  226. scTimeTotal="PumpOnTimeTotal"
  227. scEnableAlarm="PumpOnTimeEnableAlarm"
  228. scPMInterval="PumpOnTimePMInterval" />
  229. </IoStatisticss>
  230. <IoPlcDateTimes>
  231. <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
  232. aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  233. </IoPlcDateTimes>
  234. <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
  235. <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
  236. doON="" doOFF="" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
  237. </IoCylinders>
  238. <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
  239. <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="DO_Lid_Up" doOFF="DO_Lid_Down" diON="" diOFF="DI_Lid_Closed" />
  240. </IoLids>
  241. <IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
  242. <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
  243. </IoMessages>
  244. <IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
  245. <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
  246. </IoPumpCtrls>
  247. <IoHighTemperatureHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHighTemperatureHeater">
  248. <IoHighTemperatureHeater id="HighTemperatureHeater" display="High Temperature Heater" schematicId="" unit="℃"
  249. doPowerOn ="DO_CHB_M-HT_Heater_On"
  250. diPowerOnFeedback ="DI_CHB_M-HT_Heater_On_FB"
  251. aiTemperatureFeedback ="AI_CHB_M-HT_Control_TC_Temp"
  252. aoTemperatureSetPoint ="AO_CHB_M-HT_Temperature_Setpoint"
  253. diGoPosition1Feedback ="DI_Lift_Servo_Go_Position1_Complete"
  254. doGoPosition1On ="DO_Lift_Servo_Go_Position1"
  255. diGoPosition2Feedback ="DI_Lift_Servo_Go_Position2_Complete"
  256. doGoPosition2On ="DO_Lift_Servo_Go_Position2"
  257. diGoPosition3Feedback ="DI_Lift_Servo_Go_Position3_Complete"
  258. doGoPosition3On ="DO_Lift_Servo_Go_Position3"
  259. diGoPosition4Feedback ="DI_Lift_Servo_Go_Position4_Complete"
  260. doGoPosition4On ="DO_Lift_Servo_Go_Position4"
  261. diGoPosition5Feedback ="DI_Lift_Servo_Go_Position5_Complete"
  262. doGoPosition5On ="DO_Lift_Servo_Go_Position5"
  263. diGoOriginFeedback ="DI_Lift_Servo_with_origin"
  264. doGoOriginOn ="DO_Lift_Servo_Origin"
  265. aoLiftServoPosition1 ="AO_Lift_Servo_Position1"
  266. aoLiftServoPosition2 ="AO_Lift_Servo_Position2"
  267. aoLiftServoPosition3 ="AO_Lift_Servo_Position3"
  268. aoLiftServoPosition4 ="AO_Lift_Servo_Position4"
  269. aoLiftServoPosition5 ="AO_Lift_Servo_Position5"
  270. aoOriginSearchHighSpeed ="AO_Origin_Search_High_Speed"
  271. aoOriginSearchLowSpeed ="AO_Origin_Search_Low_Speed"
  272. aoAbsMoveSpeed ="AO_Abs_Move_Speed"
  273. aoMaximusMoveSpeed ="AO_Max_Move_Speed"
  274. aoSoftDownLimit ="AO_Soft_Down_Limit"
  275. aoSoftUpLimit ="AO_Soft_Up_Limit"
  276. aoRatio ="AO_CHB_H-HT_Power_Distribute_Percent"
  277. />
  278. </IoHighTemperatureHeaters>
  279. </DeviceModelDefine>